DISPLAY DEVICE, ELECTRONIC DEVICE, AND METHOD FOR MANUFACTURING A DISPLAY DEVICE
20260123150 ยท 2026-04-30
Inventors
- YOUNGMIN MOON (Yongin-si, KR)
- Arong Kim (Yongin-si, KR)
- Jonghee Park (Yongin-si, KR)
- Heemin Park (Yongin-si, KR)
- Sukyoung Yang (Yongin-si, KR)
- Heejun Yang (Yongin-si, KR)
- Samin Lee (Yongin-si, KR)
- WONJE CHO (Yongin-si, Gyeonggi-do, KR)
- Gwangmin Cha (Yongin-si, KR)
- Daewon Choi (Yongin-si, KR)
Cpc classification
H10H29/37
ELECTRICITY
H10H29/842
ELECTRICITY
International classification
Abstract
A display device includes a substrate, a circuit layer, a first electrode, a pixel defining layer, a first light-emitting layer, a protective layer, a capping layer, and a second electrode. The protective layer includes a first protective layer disposed on the first light-emitting layer and a second protective layer disposed on the first protective layer and having greater etch resistance than the capping layer. The capping layer covers one side of the first light-emitting layer. A portion of the capping layer is disposed beneath a protruded side of the first protective layer, and the portion of the capping layer is in direct contact with the first light-emitting layer. The lower surface of the second electrode is in direct contact with the first protective layer, the second protective layer, and the capping layer. The first protective layer includes an inorganic material, and the second protective layer includes a metal oxide.
Claims
1. A display device comprising: a substrate; a circuit layer disposed on the substrate; a first electrode disposed on the circuit layer; a pixel defining layer disposed on a portion of the circuit layer and the first electrode, wherein an opening is defined in the pixel defining layer; a first light-emitting layer disposed on the first electrode and a portion of the pixel defining layer, wherein at least a portion of the first light-emitting layer overlaps the opening in a plan view; a protective layer disposed on the first light-emitting layer and overlapping the pixel defining layer in the plan view; a capping layer covering a side portion of the first light-emitting layer; and a second electrode disposed on the first light-emitting layer and the capping layer, wherein the protective layer comprises: a first protective layer disposed on the first light-emitting layer; and a second protective layer disposed on the first protective layer and having greater etch resistance than the capping layer.
2. The display device of claim 1, wherein one side of the first protective layer, which is relatively distal from the opening, and one side of the second protective layer, which is relatively distal from the opening, protrude farther away from the opening than one side of the first light-emitting layer, which is relatively distal from the opening, does.
3. The display device of claim 2, wherein a portion of the capping layer is disposed beneath a protruded side portion of the first protective layer, and wherein the portion of the capping layer is in direct contact with the first light-emitting layer.
4. The display device of claim 1, wherein the second protective layer has a smaller width than the first protective layer.
5. The display device of claim 1, wherein the capping layer is in contact with an upper surface of the pixel defining layer and an upper surface of the second protective layer.
6. The display device of claim 1, wherein a lower surface of the second electrode is in direct contact with the first protective layer, the second protective layer, and the capping layer.
7. The display device of claim 1, further comprising a second light-emitting layer spaced apart from the first light-emitting layer and disposed on another portion of the pixel defining layer, wherein a side surface of the first light-emitting layer and a side surface of the second light-emitting layer overlap the pixel defining layer in the plan view, and wherein the capping layer covers the side surface of the first light-emitting layer and the side surface of the second light-emitting layer.
8. The display device of claim 1, further comprising a second light-emitting layer spaced apart from the first light-emitting layer and disposed on another portion of the pixel defining layer, wherein the protective layer comprises: a third protective layer disposed on the second light-emitting layer; and a fourth protective layer disposed on the third protective layer and having greater etch resistance than the capping layer, wherein a side surface of the first light-emitting layer, a side surface of the second light-emitting layer, a side surface of the first protective layer, a side surface of the second protective layer, a side surface of the third protective layer, and a side surface of the fourth protective layer overlap the pixel defining layer in the plan view, and wherein the capping layer covers the side surface of the first light-emitting layer, the side surface of the second light-emitting layer, the side surface of the first protective layer, the side surface of the second protective layer, the side surface of the third protective layer, and the side surface of the fourth protective layer.
9. The display device of claim 1, wherein the first protective layer comprises an inorganic material.
10. The display device of claim 9, wherein the inorganic material comprises at least one selected from silicon nitride (SiNx), silicon oxynitride (SiOxNy), and silicon oxide (SiOx).
11. The display device of claim 1, wherein the second protective layer comprises a metal oxide.
12. The display device of claim 11, wherein the metal oxide comprises at least one selected from indium tin oxide (ITO), indium zinc oxide (IZO), indium gallium zinc oxide (IGZO), indium zinc gallium oxide (ITGO), or indium tin gallium zinc oxide (ITGZO).
13. The display device of claim 1, wherein the capping layer is defined by a single inorganic layer.
14. The display device of claim 1, wherein the capping layer and the pixel defining layer each comprise an inorganic material, and wherein the capping layer and the pixel defining layer are in contact with each other.
15. The display device of claim 1, further comprising a second light-emitting layer spaced apart from the first light-emitting layer and disposed on another portion of the pixel defining layer, wherein the first light-emitting layer emits light in a first wavelength band and the second light-emitting layer emits light in a second wavelength band different from the first wavelength band, and wherein the first light-emitting layer and the second light-emitting layer do not overlap each other in the plan view.
16. A method for manufacturing a display device, the method comprising: preparing a display panel comprising a substrate, a circuit layer disposed on the substrate, and a first electrode disposed on the circuit layer, and forming a pixel defining layer on a portion of the circuit layer and the first electrode; forming a first preliminary light-emitting layer on the first electrode and the pixel defining layer; forming a first intermediate protective layer to cover a portion of the first preliminary light-emitting layer overlapping a first light-emitting region, wherein the first light-emitting region emits light in a first wavelength band; forming a second intermediate protective layer to overlap the first intermediate protective layer in a plan view, wherein the second intermediate protective layer has greater etch resistance than the first intermediate protective layer; and patterning the first preliminary light-emitting layer using the first intermediate protective layer and the second intermediate protective layer as masks to form a first light-emitting layer.
17. The method of claim 16, further comprising, after the forming the first light-emitting layer: forming a second preliminary light-emitting layer on the first electrode, the pixel defining layer, and the first light-emitting layer; forming a third intermediate protective layer to cover a portion of the second preliminary light-emitting layer overlapping a second light-emitting region, wherein the second light-emitting region emits light in a second wavelength band different from the first wavelength band and spaced apart from the first light-emitting region; forming a fourth intermediate protective layer to overlap the third intermediate protective layer in the plan view, wherein the fourth intermediate protective layer has greater etch resistance than the third intermediate protective layer; and patterning the second preliminary light-emitting layer using the third intermediate protective layer and the fourth intermediate protective layer as masks to form a second light-emitting layer.
18. The method of claim 17, further comprising, after the forming the second light-emitting layer: forming a preliminary capping layer on the first light-emitting layer, the pixel defining layer, the first intermediate protective layer, the second intermediate protective layer, the second light-emitting layer, the third intermediate protective layer, and the fourth intermediate protective layer, wherein the second intermediate protective layer and the fourth intermediate protective layer each has greater etch resistance than the preliminary capping layer; and patterning the preliminary capping layer to form a capping layer which overlaps a non-light-emitting region between the first light-emitting region and the second light-emitting region in the plan view and contacts the first light-emitting layer and the second light-emitting layer.
19. The method of claim 18, further comprising, after the patterning the preliminary capping layer to form a capping layer: removing the second intermediate protective layer and the fourth intermediate protective layer which do not overlap the capping layer in the plan view to form a second protective layer and a fourth protective layer; removing the first intermediate protective layer and the third intermediate protective layer which do not overlap the capping layer in the plan view to form a first protective layer and a third protective layer and to expose the first light-emitting region and the second light-emitting region; and forming a second electrode on the capping layer, the first protective layer, the second protective layer, the third protective layer, the fourth protective layer, the first light-emitting layer, and the second light-emitting layer.
20. An electronic device comprising: a substrate; a circuit layer disposed on the substrate; a first electrode disposed on the circuit layer; a pixel defining layer disposed on a portion of the circuit layer and the first electrode, wherein the pixel defining layer defines an opening; a first light-emitting layer disposed on the first electrode and the pixel defining layer, wherein a portion of the first light-emitting layer overlaps the opening in a plan view; a protective layer disposed on the first light-emitting layer and overlapping the pixel defining layer; a capping layer covering a side portion of the first light-emitting layer; and a second electrode disposed on the first light-emitting layer and the capping layer, wherein the protective layer comprises: a first protective layer disposed on the first light-emitting layer; and a second protective layer disposed on the first protective layer and having greater etch resistance than the capping layer.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0088] These and/or other features will become apparent and more readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings in which:
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DETAILED DESCRIPTION
[0102] The invention now will be described more fully hereinafter with reference to the accompanying drawings, in which various embodiments are shown. This invention may, however, be embodied in many different forms, and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
[0103] When an element (or region, layer, portion, etc.) is described to be disposed on, placed on, arranged on, connected to, or coupled to another element, it shall be construed as being disposed on, placed on, arranged on, connected to, or coupled to the other element directly but also as possibly having another element therebetween. On the other hand, if one element is described to be directly disposed on, directly placed on, directly arranged on, directly connected to, or directly coupled to another element, it shall be construed that there is no other element interposed therebetween.
[0104] Like or identical reference numerals refer to like or identical elements. Moreover, in the accompanying drawings, the thicknesses, ratios, and dimensions of the elements may not be to exact scale and may have been exaggerated for the benefit of effective explanation of the technical features associated with these elements. As such, the present disclosure shall not be restricted to the thicknesses, ratios, dimensions, etc. illustrated in the drawings.
[0105] It will be understood that, although the terms first, second, third etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings herein.
[0106] Furthermore, relative terms, such as lower or bottom and upper or top, may be used herein to describe one element's relationship to another element as illustrated in the Figures. It will be understood that relative terms are intended to encompass different orientations of the device in addition to the orientation depicted in the Figures. For example, if the device in one of the figures is turned over, elements described as being on the lower side of other elements would then be oriented on upper sides of the other elements. The term lower, can therefore, encompasses both an orientation of lower and upper, depending on the particular orientation of the figure. Similarly, if the device in one of the figures is turned over, elements described as below or beneath other elements would then be oriented above the other elements. The terms below or beneath can, therefore, encompass both an orientation of above and below.
[0107] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, a, an, the, and at least one do not denote a limitation of quantity, and are intended to include both the singular and plural, unless the context clearly indicates otherwise. Thus, reference to an element in a claim followed by reference to the element is inclusive of one element and a plurality of the elements. For example, an element has the same meaning as at least one element, unless the context clearly indicates otherwise. At least one is not to be construed as limiting a or an. Or means and/or. As used herein, the term and/or includes any and all combinations of one or more of the associated listed items. It will be further understood that the terms comprises and/or comprising, or includes and/or including when used in this specification, specify the presence of stated features, regions, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, regions, integers, steps, operations, elements, components, and/or groups thereof.
[0108] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and the present disclosure, and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
[0109] In the present specification, when a particular process sequence may be implemented differently, the described sequence of processes may be performed in a different order. For example, two sequentially described processes may be performed substantially simultaneously, or the order of description may be reversed.
[0110] Embodiments are described herein with reference to cross section illustrations that are schematic illustrations of idealized embodiments. As such, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, embodiments described herein should not be construed as limited to the particular shapes of regions as illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. For example, a region illustrated or described as flat may, typically, have rough and/or nonlinear features. Moreover, sharp angles that are illustrated may be rounded. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the precise shape of a region and are not intended to limit the scope of the present claims.
[0111] First through third directions DR1, DR2, DR3 may be defined. The first direction DR1 and the second direction DR2 may be directions defined in the plane of the display device DD shown in
[0112] The expression in a plan view in this specification may refer to a view along the third direction DR3, i.e., a direction viewing from the top of the structure toward the bottom. Additionally, in this specification, any description based on a particular direction may include not only the direction shown in the drawing but also the concept of an opposite direction to the depicted direction.
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[0114] In an embodiment of the present disclosure, as shown in
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[0116] The light-emitting regions PA1, PA2, PA3 may include, but not limited to, a first light-emitting region PA1, a second light-emitting region PA2, and a third light-emitting region PA3. Light emitted from the first light-emitting diode ED1 may be displayed in the first light-emitting region PA1, light emitted from the second light-emitting diode ED2 may be displayed in the second light-emitting region PA2, and light emitted from the third light-emitting diode ED3 may be displayed in the third light-emitting region PA3.
[0117] The light-emitting diodes ED1, ED2, ED3 may each emit a different color of light. In an embodiment, for example, but not limited to the example, the first light-emitting diode ED1 may emit green light, the second light-emitting diode ED2 may emit red light, and the third light-emitting diode ED3 may emit blue light.
[0118] Each of the first to third light-emitting regions PA1, PA2, PA3 may be provided in plurality and arranged in a predetermined pattern within the display region DA. In an embodiment, for example, but not limited to this particular example, the first to third light-emitting regions PA1, PA2, PA3 may have a PENTILE arrangement, a stripe arrangement, or a Diamond Pixel arrangement.
[0119] The first to third light-emitting regions PA1, PA2, PA3 may each have various shapes in a plan view. Although embodiments where the planar shapes of the first to third light-emitting regions PA1, PA2, PA3 are rectangles are illustrated as an example in the accompanying drawings, the planar shapes of the light-emitting regions PA1, PA2, PA3 illustrated in the drawings are merely examples and may be circular, elliptical, polygonal, or other shapes in another embodiment.
[0120] In an embodiment, the areas (or sizes) of the first to third light-emitting regions PA1, PA2, PA3 may be the same as each other as shown in the accompanying drawings, but this is illustrated as an example, and the areas may be different from each other in another embodiment.
[0121] Referring to
[0122] The circuit layer CL may be disposed on the substrate SS. The circuit layer CL may include transistors TFT, which apply electrical signals to the light-emitting diodes ED1, ED2, ED3 disposed in the display layer DL, a first insulating layer I1, and a second insulating layer I2.
[0123] The transistor TFT may include an active layer AL disposed on the substrate SS, a gate electrode GE disposed on at least a portion of the active layer AL, and a source electrode SE and a drain electrode DE disposed on the gate electrode GE and electrically connected to the active layer AL.
[0124] The first insulating layer I1 may be disposed between the active layer AL and the gate electrode GE, and the second insulating layer I2 may be disposed on the gate electrode GE.
[0125] In an embodiment, the circuit layer CL may further include a buffer layer BF. The buffer layer BF may be disposed between the substrate SS and the active layer AL. The buffer layer BF may provide a modified surface to have stronger adhesion to the transistor TFT. The buffer layer BF may be an inorganic material layer including at least one selected from silicon nitride, silicon oxide, and silicon oxynitride.
[0126] The display layer DL may include the pixel defining layer PDL, the light-emitting diodes ED1, ED2, ED3, a protective layer PL, and a capping layer CPL.
[0127] Each of the light-emitting diode ED1, ED2, ED3 may include a first electrode EL1, a light-emitting layer EML1, EML2, EML3, and a second electrode EL2. In some embodiments, a hole injection layer (not shown) may be disposed between the first electrode EL1 and the light-emitting layers EML1, EML2, EML3. In some embodiments, an electron injection layer (not shown) may be disposed between the light-emitting layers EML1, EML2, and the second electrode EL2. However, the locations of the hole injection layer and the electron injection layer are not limited to what is described herein and may be reversed depending on whether the first electrode EL1 and the second electrode EL2 each function as the anode or cathode.
[0128] The first electrode EL1 may be disposed on the circuit layer CL, may have electrical conductivity and may be electrically connected to the transistor TRF to receive an electrical signal through the transistor TFT.
[0129] The light-emitting layers EML1, EML2, EML3 may be disposed on the first electrode EL1. In an embodiment, for example, the first light-emitting layer EML1 that emits green light may be disposed on the first electrode EL1 of the first light-emitting diode ED1, the second light-emitting layer EML2 that emits red light may be disposed on the first electrode EL1 of the second light-emitting diode ED2, and the third light-emitting layer EML3 that emits blue light may be disposed on the first electrode EL1 of the third light-emitting diode ED3. However, the embodiments are not limited the arrangement described above.
[0130] The second electrode EL2 may be disposed on the light-emitting layers EML1, EML2, EML3. In an embodiment, the second electrode EL2 may be arranged on and shaped to cover the first light-emitting layer EML1 of the first light-emitting diode ED1, the second light-emitting layer EML2 of the second light-emitting diode ED2, and the third light-emitting layer EML3 of the third light-emitting diode ED3.
[0131] In an embodiment, the second electrode EL2 may have an integral shape or be integrally formed as a single unitary indivisible part.
[0132] Since the first, second, and third light-emitting diodes ED1, ED2, ED3 may have substantially the same or similar configurations as each other, the configuration of the first light-emitting diode ED1 will be mainly described hereinafter, and any repetitive detailed descriptions of the second and third light-emitting diodes ED2 and ED3 will be omitted.
[0133] The protective layer PL may include a first protective layer PL1 and a second protective layer PL2. The first protective layer PL1 may be disposed in the non-light-emitting region NPA and may be disposed on the light-emitting layers EML1, EML2, EML3. In an embodiment, the first protective layer PL1 may be disposed on (or to cover) edges of the light-emitting layers EML1, EML2, EML3 located in the non-light-emitting region NPA. In addition, a portion of the first protective layer PL1 may protrude away from (a center of) an opening OP on the edges of the light-emitting layers EML1, EML2, EML3. Accordingly, the area where the first protective layer PL1 and the pixel defining layer PDL overlap (i.e., an overlapping area of the first protective layer PL1 and the pixel defining layer PDL) may be greater than the area where each of the light-emitting layers EML1, EML2, EML3 and the pixel defining layer PDL overlap (or an overlapping area of each of the light-emitting layers EML1, EML2, EML3 and the pixel defining layer PDL). In a region where the first protective layer PL1 and the light-emitting layers EML1, EML2, EML3 do not overlap in a plan view, at least a portion of the capping layer CPL, which will be described below, may be disposed below the first protective layer PL1, and the side surfaces of the light-emitting layers EML1, EML2, EML3 may be covered or protected by the capping layer CPL. The first protective layer PL1 may be a part of a structure that functions as a mask in the process of patterning the light-emitting layers EML1, EML2, EML3 according to an embodiment of the method for manufacturing the display device DD described below.
[0134] The second protective layer PL2 may be disposed in the non-light-emitting region NPA and may be disposed on the first protective layer PL1. In an embodiment, the second protective layer PL2 may protrude, along with the first protective layer PL1, from the edges of the light-emitting layers EML1, EML2, EML3, away from (the center of) the opening OP. However, the embodiments are not limited to this configuration, and the second protective layer PL2 may have a smaller width than the first protective layer PL1 and may not protrude beyond the edges of the light-emitting layers EML1, EML2, EML3 in another embodiment. The second protective layer PL2 may also function as part of a structure that serves as a mask during the process of patterning the light-emitting layers EML1, EML2, EML3 according to the method for manufacturing the display device DD described below.
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[0136] Referring to
[0137] Referring to
[0138] Referring to
[0139] The shapes of the first protective layer PL1 and the second protective layer PL2, as described with reference to
[0140] In embodiments of the present disclosure, etch resistance may be defined as a measure of the degree to which a material is etched during the etching process. For example, a component having relatively high etch resistance may be etched significantly less than a component with relatively low etch resistance. In other words, if a particular component has relatively high etch resistance compared to another structure, the highly etch-resistant component may be etched to a much lesser degree during the etching process, thereby protecting the component disposed below it during the process.
[0141] In an embodiment, the second protective layer PL2 may have greater etch resistance than the first protective layer PL1. In addition, the second protective layer PL2 may have greater etch resistance than the capping layer CPL, which will be described later in greater detail.
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[0143] The first light-emitting layer EML1 may be disposed between the pixel defining layer PDL and the first protective layer PL1, and the second light-emitting layer EML2 may be disposed between the pixel defining layer PDL and the third protective layer PL3. Additionally, the one side E1-E of the first light-emitting layer EML1 and the one side E2-E of the second light-emitting layer EML2 may overlap the pixel defining layer PDL in a plan view, in which case, the capping layer CPL may cover the one side E1-E of the first light-emitting layer EML1 and the one side E2-E of the second light-emitting layer EML2, thereby protecting the first light-emitting layer EML1 and the second light-emitting layer EML2 from external exposure. Furthermore, the capping layer CPL may increase the distance between the first electrode EL1 and the second electrode EL2, thereby effectively preventing arc discharge or similar phenomena therebetween.
[0144] In an embodiment, the one side E1-E of the first light-emitting layer EML1, the one side P1-E of the first protective layer PL1 disposed on the first light-emitting layer EML1, the one side P2-E of the second protective layer PL2 disposed on the first protective layer PL1, the one side E2-E of the second light-emitting layer EML2, the one side P3-E of the third protective layer PL3 disposed on the second light-emitting layer EML2, and the one side P4-E of the fourth protective layer PL4 disposed on the third protective layer PL3 may all overlap the pixel defining layer PDL in a plan view. In such an embodiment, the capping layer CPL may cover the one side E1-E of the first light-emitting layer EML1, the one side P1-E of the first protective layer PL1, the one side P2-E of the second protective layer PL2, the one side E2-E of the second light-emitting layer EML2, the one side P3-E of the third protective layer PL3, and the one side P4-E of the fourth protective layer PL4.
[0145] In other words, the one side E1-E of the first light-emitting layer EML1 and the one side E2-E of the second light-emitting layer EML2 may be spaced apart from and face opposite to each other in the non-light-emitting region NPA in which they overlap the pixel defining layer PDL. The first protective layer PL1 and the second protective layer PL2 may be disposed on a portion of the first light-emitting layer EML1 extending from the one side E1-E. The third protective layer PL3 and the fourth protective layer PL4 may be disposed on a portion of the second light-emitting layer EML2 extending from the one side E2-E. The capping layer CPL may fill the space between the first light-emitting layer EML1, the second light-emitting layer EML2, the pixel defining layer PDL, and the first to fourth protective layers PL1, PL2, PL3, PL4.
[0146] In an embodiment, the capping layer CPL may be provided as a single inorganic layer, in which case, the first protective layer PL1, the second protective layer PL2, and the capping layer CPL may each be provided as an inorganic layer, a transparent electrode layer, and another inorganic layer that are successively laminated in cross-section, thereby forming a smooth shape that effectively prevents disconnection of the second electrode EL2.
[0147] In a comparative example, the capping layer included in the display device may be formed by atomic layer deposition (ALD) technique and may include organic materials and resins. A capping layer including organic materials and resins may have greater risks of moisture absorption and outgassing compared to a capping layer made of inorganic materials. Additionally, a heat treatment process may be performed afterward to prevent the formation of an undercut structure that causes disconnection of the second electrode. Such a heat treatment process may cause damage to the light-emitting layers.
[0148] The capping layer CPL included in the display device according to an embodiment of the present disclosure may be formed using a chemical vapor deposition (CVD) technique and may include an inorganic material, thereby effectively preventing the formation of an undercut structure without performing a subsequent heat treatment process.
[0149] In an embodiment, a lower surface EL2-LP of the second electrode EL2 may be in direct contact with the first protective layer PL1, the second protective layer PL2, the third protective layer PL3, the fourth protective layer PL4, and the capping layer CPL. The first to fourth protective layers PL1, PL2, PL3, PL4 and the capping layer CPL may provide a smooth shape that enables the second electrode EL2 to extend stably without being disconnected.
[0150] In an embodiment, the first protective layer PL1 and the capping layer CPL may be provided using substantially the same or similar material as each other. Accordingly, the first protective layer PL1 and the capping layer CPL may have substantially the same or similar etch resistance as each other. Additionally, the first protective layer PL1 may be provided using a material having properties for protecting the light-emitting layers EML1, EML2, EML3 during the process of patterning the first light-emitting layer EML1.
[0151] In an embodiment, the first protective layer PL1 may include an inorganic material. In an embodiment, the first protective layer PL1 may be provided as an inorganic material including at least one selected from silicon nitride (SiNx), silicon oxide (SiOx), or silicon oxynitride (SiOxNy).
[0152] The second protective layer PL2 may be provided as a material having relatively greater etch resistance than the capping layer CPL such that damage to the underlying structures may be effectively prevented during the etching step in the process of forming the capping layer CPL. Additionally, the second protective layer PL2 may have greater etch resistance than the first protective layer PL1.
[0153] In an embodiment, the second protective layer PL2 may include a metal oxide. In an embodiment, the second protective layer PL2 may include at least one selected from indium tin oxide (ITO), indium zinc oxide (IZO), indium gallium zinc oxide (IGZO), indium zinc gallium oxide (ITGO), or indium tin gallium zinc oxide (ITGZO).
[0154] The first protective layer PL1 according to an embodiment of the present disclosure may be disposed on the light-emitting layers EML1, EML2, EML3 and may protect the light-emitting layers EML1, EML2, EML3 during the manufacturing process of the display device DD. In an embodiment, the first protective layer PL1, which includes an inorganic material, may be disposed between the second protective layer PL2 and the light-emitting layers EML1, EML2, EML3 to effectively prevent damage to the light-emitting layers EML1, EML2, EML3 during the formation of the second protective layer PL2, which includes a metal oxide.
[0155] In an embodiment, the capping layer CPL and the pixel defining layer PDL may each be provided as an inorganic material or defined by an inorganic layer, and the capping layer CPL and the pixel defining layer PDL may be in contact with each other. Accordingly, the one side E1-E of the first light-emitting layer EML1 may be protected from external exposure by overlapping the capping layer CPL and the pixel defining layer PDL, each of which includes an inorganic material.
[0156] In an embodiment, the capping layer CPL may be provided as an inorganic material or defined by an inorganic layer including at least one selected from silicon nitride (SiNx), silicon oxide (SiOx), or silicon oxynitride (SiOxNy).
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[0159] In the display device DD1 according to an embodiment of the present disclosure, the first light-emitting layer EML1, the second light-emitting layer EML2, and the third light-emitting layer EML3 may not overlap each other in a plan view. In the manufacturing process of the display device DD, the light-emitting layers EML1, EML2, EML3 may be formed through blanket deposition and then patterned to form the first light-emitting layer EML1, the second light-emitting layer EML2, and the third light-emitting layer EML3 in a non-overlapping arrangement in a plan view.
[0160] In a comparative example, the display device may be manufactured by using a metal mask during the process and patterning each light-emitting layer corresponding to each light-emitting region through deposition. In this structure, the light-emitting layers emitting light in different wavelength bands may overlap each other in a plan view. The use of a metal mask for patterning the light-emitting layers during the manufacturing process may be disadvantageous or undesired for scaling up the display device.
[0161] The display device DD1 according to an embodiment of the present disclosure may form the light-emitting layers EML1, EML2, EML3 through a blanket deposition process and a photolithography process that are advantageous or desired for scalability. The display device DD formed through such processes may have a structure in which the light-emitting layers EML1, EML2, EML3 do not overlap each other in a plan view.
[0162]
[0163] Hereinafter, the method for manufacturing a display device according to an embodiment of the present disclosure will be described with reference to
[0164] Referring to
[0165] Referring to
[0166] Referring to
[0167] Referring to
[0168] In a comparative example, the display device may include a protective layer including a metal oxide directly disposed on the light-emitting layer. The deposition process for the metal oxide protective layer, which is formed using relatively higher energy compared to the deposition of inorganic materials, may cause damage to the light-emitting layer.
[0169] In an embodiment of the present disclosure, the first preliminary protective layer 101 may be disposed between the second preliminary protective layer 102 including a metal oxide and the first preliminary light-emitting layer PEML1, thereby effectively preventing damage to the first preliminary light-emitting layer PEML1 during the formation of the second preliminary protective layer 102.
[0170] Referring to
[0171] Referring to
[0172] However, the embodiments are not limited thereto. In another embodiment, the photoresist PR (see
[0173] Referring to
[0174] Referring to
[0175] In an embodiment of the present disclosure, the third preliminary protective layer 111 may be disposed between the fourth preliminary protective layer 112 including a metal oxide and the second preliminary light-emitting layer PEML2 to effectively prevent damage to the second preliminary light-emitting layer PEML2 during the formation of the fourth preliminary protective layer 112.
[0176] Referring to
[0177] Referring to
[0178] However, the embodiments are not limited thereto. In another embodiment, the photoresist PR (see
[0179] Referring to
[0180] Referring to
[0181] In an embodiment of the present disclosure, the fifth preliminary protective layer 121 may be disposed between the sixth preliminary protective layer 122 containing a metal oxide and the third preliminary light-emitting layer PEML3 to effectively prevent damage to the third preliminary light-emitting layer PEML3 during the formation of the sixth preliminary protective layer 122.
[0182] Referring to
[0183] Referring to
[0184] However, the embodiments are not limited thereto. In another embodiment, the photoresist PR (see
[0185] The process of patterning a light-emitting layer and an intermediate protective layer (S140), described with reference to
[0186] Referring to
[0187] Referring to
[0188] Referring to
[0189] Referring to
[0190] Referring to
[0191] Referring to
[0192] The method for manufacturing a display device according to an embodiment may further include forming a transparent electrode layer (not shown) on the second electrode EL2.
[0193] The method for manufacturing a display device according to an embodiment of the present disclosure may form the light-emitting layers EML1, EML2, EML3 through blanket deposition and photolithography processes without using an external mask, as the first to sixth intermediate protective layers PPL1-1, PPL2-1, PPL1-2, PPL2-2, PPL1-3, PPL2-3 function as masks. Such an embodiment provides an advantage for scaling up the display device. Additionally, the capping layer CPL may cover portions of the light-emitting layers EML1, EML2, EML3 to effectively prevent damage to the light-emitting layers EML1, EML2, EML3 and provide a smooth shape that effectively prevents disconnection of the second electrode EL2.
[0194]
[0195] A fifth electronic device ECD5 is a head-mounted display device that includes a fifth display device DDe. A sixth electronic device ECD6 is a digital watch that includes a sixth display device DDf. Referring to
[0196] The seventh display device DDg may be disposed in front of a steering wheel HN in the driver's line of sight and may be used to display instrument panel information, such as the vehicle's driving speed. The eighth display device DDh may be disposed separately on the dashboard and may be used to display information related to the vehicle's control interface, audio, temperature, road conditions, and videos. The ninth display device DDi may be disposed at the driver's side and passenger's side and may be used as digital side rear-view mirrors. The ninth display device DDi may display video footage captured outside the vehicle. The tenth display device DDj may be disposed behind the driver's and passenger's seats and may be used to display visual content, such as videos, to passengers in the rear seats.
[0197] In addition to the electronic devices illustrated in
[0198] The invention should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concept of the invention to those skilled in the art.
[0199] While the invention has been particularly shown and described with reference to embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit or scope of the invention as defined by the following claims.