ELECTRONIC DEVICE
20230146059 · 2023-05-11
Assignee
Inventors
Cpc classification
H01L31/022408
ELECTRICITY
International classification
Abstract
An electronic device includes a substrate; a first electrode layer disposed on the substrate; a first insulating layer disposed on the first electrode layer, having a first opening to expose a surface of the first electrode layer; a connecting layer, wherein at least a portion of the connecting layer is disposed in the first opening, a sidewall exposure of the first opening is exposed, and the connecting layer is electrically connected to the first electrode layer; a second insulating layer disposed on the first insulating layer, having a second opening to expose a surface of the connecting layer; and a second electrode layer disposed on the second insulating layer, wherein at least a portion of the second electrode layer is disposed in the second opening, and is electrically connected to the connecting layer.
Claims
1. An electronic device, comprising: a substrate; a first electrode layer disposed on the substrate; a first insulating layer disposed on the first electrode layer, having a first opening to expose a surface of the first electrode layer; a connecting layer, wherein at least a portion of the connecting layer is disposed in the first opening, a sidewall exposure of the first opening is exposed, and the connecting layer is electrically connected to the first electrode layer; a second insulating layer disposed on the first insulating layer, having a second opening to expose a surface of the connecting layer; and a second electrode layer disposed on the second insulating layer, wherein at least a portion of the second electrode layer is disposed in the second opening, and is electrically connected to the connecting layer.
2. The electronic device of claim 1, wherein at least a portion of the second insulating layer is disposed in the first opening.
3. The electronic device of claim 1, wherein at least a portion of the second insulating layer is disposed on the sidewall exposure.
4. The electronic device of claim 1, wherein the first opening does not overlap the second opening.
5. The electronic device of claim 1, wherein the first opening overlaps the second opening.
6. The electronic device of claim 1, wherein the second opening is greater than the first opening.
7. The electronic device of claim 1, wherein the second electrode layer extends from a surface of the second insulating layer to a surface of the first insulating layer.
8. The electronic device of claim 1, comprising: a third insulating layer disposed on the first insulating layer, having a third opening, wherein at least a portion of the third insulating layer is disposed in the first opening, and at least a portion of the connecting layer is disposed in the third opening.
9. The electronic device of claim 1, comprising: a fourth insulating layer disposed on the second insulating layer, having a fourth opening, wherein at least a portion of the second electrode layer is disposed in the fourth opening.
10. The electronic device of claim 1, comprising: a light sensing component disposed between the first insulating layer and the second insulating layer.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0007]
[0008]
[0009]
[0010]
[0011]
[0012]
[0013]
[0014]
DETAILED DESCRIPTION
[0015] The present disclosure may be understood by reference to the following detailed description, taken in conjunction with the drawings as described below. It is noted that, for purposes of illustrative clarity and being easily understood by the readers, various drawings of this disclosure show a portion of an electronic device in this disclosure, and certain elements in various drawings may not be drawn to scale. In addition, the number and dimension of each device shown in drawings are only illustrative and are not intended to limit the scope of the present disclosure.
[0016] Certain terms are used throughout the description and following claims to refer to particular components. As one skilled in the art will understand, electronic equipment manufacturers may refer to a component by different names. This document does not intend to distinguish between components that differ in name but not function.
[0017] In the following description and in the claims, the terms “include”, “comprise” and “have” are used in an open-ended fashion, and thus should be interpreted to mean “include, but not limited to . . . ”.
[0018] The directional terms used throughout the description and following claims, such as: “on”, “up”, “above”, “down”, “below”, “front”, “rear”, “back”, “left”, “right”, etc., are only directions referring to the drawings. Therefore, the directional terms are used for explaining and not used for limiting the present disclosure. Regarding the drawings, the drawings show the general characteristics of methods, structures, and/or materials used in specific embodiments. However, the drawings should not be construed as defining or limiting the scope or properties encompassed by these embodiments. For example, for clarity, the relative size, thickness, and position of each layer, each area, and/or each structure may be reduced or enlarged.
[0019] It will be understood that, when the corresponding component such as layer or area is referred to “on another component”, it may be directly on this another component, or other component(s) may exist between them (indirect case). On the other hand, when the component is referred to “directly on another component (or the variant thereof)”, any component does not exist between them. “electrically connected to” another element or layer can be directly electrically connected to the other element or layer, or intervening elements or layers may be presented. The terms of “jointed” and “connected” may also include cases where both structures are movable or both structures are fixed.
[0020] The terms “equal”, or “same” generally mean within 20% of a given value or range, or mean within 10%, 5%, 3%, 2%, 1%, or 0.5% of a given value or range.
[0021] The phrase “in a range from a first value to a second value” indicates the range includes the first value, the second value, and other values in between.
[0022] Although terms such as first, second, third, etc., may be used to describe diverse constituent elements, such constituent elements are not limited by the terms. These terms are used only to discriminate a constituent element from other constituent elements in the specification, and these terms have no relation to the manufacturing order of these constituent components. The claims may not use the same terms, but instead may use the terms first, second, third, etc. with respect to the order in which an element is claimed. Accordingly, in the following description, a first constituent element may be a second constituent element in a claim.
[0023] It is noted that the technical features in different embodiments described in the following can be replaced, recombined or mixed with one another to constitute another embodiment without departing from the spirit of the present disclosure.
[0024]
[0025] As shown in
[0026] According to some embodiments, the second electrode layer 1050 may be electrically connected to the first electrode layer 1010A in a driving component 100T via the connecting layer 1030 disposed in the first opening 1021. For example, according to some embodiments, the first electrode layer 1010A may be an electrode in the driving component 100T (e.g. a transistor). For example, the first electrode layer 1010A may be a drain in the driving element 100T. The second electrode layer 1050 may be a pixel electrode. Thus, the pixel electrode 1050 may be electrically connected to the first electrode layer 1010A in the driving component 100T via the connecting layer 1030 disposed in the first opening 1021. A detailed description follows. A semiconductor layer 210, a gate line 1110, an insulating layer 1100 and an insulating layer 1120 may be disposed on the substrate 1000. The insulating layer 1100 may have an insulating layer opening 1101. The insulating layer 1120 may have an insulating layer opening 1121. According to some embodiments, the insulating layer opening 1121 may include an opening 1121A and an opening 1121B. The insulating layer opening 1101 may include an opening 1101A and an opening 1101B. A conductive layer 1010 may be patterned to form the first electrode layer 1010A and a signal line 1010B. The signal line 1010B may be a data line. The first electrode layer 1010A (drain) may be disposed in the insulating layer opening 1101A and the insulating layer opening 1121A, to thereby be electrically connected to the semiconductor layer 210. The data line 1010B may be disposed in the insulating layer opening 1101B and the insulating layer opening 1121B, to thereby be electrically connected to the semiconductor layer 210. Thus, the semiconductor layer 210, the first electrode layer 1010A (drain), a portion of the data line 1010B and a portion of the gate line 1110 may constitute the driving component 100T.
[0027] In some embodiments, the substrate 1000, the first electrode layer 1010A, the first insulating layer 1020, the first opening 1021, the connecting layer 1030, the second insulating layer 1040, the second opening 1041 and the second electrode layer 1050 may be sequentially disposed in the electronic device 10. That is, the connecting layer 1030 is disposed before the second insulating layer 1040 is disposed. By disposing the connecting layer 1030 before disposing the second insulating layer 1040, the second electrode layer 1050 may be connected to (e.g. electrically connected to or contacting) the connecting layer 1030 via the second opening 1041, and the connecting layer 1030 may be connected to the first electrode layer 1010A via the first opening 1021.
[0028] As shown in
[0029] According to some embodiments, as shown in
[0030] According to some embodiments, the first insulating layer 1020 and the second insulating layer 1040 may include an organic material, an inorganic material or combination thereof, but is not limited thereto. According to some embodiments, the first insulating layer 1020 and the second insulating layer 1040 may include the organic material. The organic material may include epoxy resins, silicone, acrylic resins (e.g. polymethylmetacrylate (PMMA)), polyimide, perfluoroalkoxy alkane (PFA) or combination thereof, but is not limited thereto. Furthermore, the first insulating layer 1020 and the second insulating layer 1040 may serve as a planarization layer.
[0031] In some embodiments, the insulating layer 1100 may include a gate insulator (GI), but is not limited thereto. According to some embodiments, the insulating layer 1120 may include an interlayer dielectric (ILD), but is not limited thereto.
[0032] In some embodiments, the substrate 1000 may include a rigid substrate, a flexible substrate or combination thereof, but is not limited thereto. For example, the substrate 1000 may include a glass, a quartz, a sapphire, acrylic resins, polycarbonate (PC), polyimide (PI), polyethylene terephthalate (PET), other suitable transparent materials or any combination thereof, but is not limited thereto. In some embodiments, the semiconductor layer 210 may include polysilicon, amorphous silicon or metal oxide, but is not limited thereto.
[0033] The thickness in the present disclosure refers to a distance from the bottom to the top of a component or a layer along the Z axis. For example, a thickness PT1 of the first insulating layer 1020 is a distance from a side of the first insulating layer 1020 close to the substrate 1000 to a side of the first insulating layer 1020 close to the second insulating layer 1040 along the Z axis. In some embodiments, a thickness MDT of the connecting layer 1030 may be 9,000-30,000 Angstrom (Å), but is not limited thereto. In some embodiments, the thickness of the connecting layer 1030 may be greater than a thickness of the first electrode layer 1010A. The thickness of the connecting layer 1030 may be greater than a thickness of the second electrode layer 1050. In some embodiments, the connecting layer 1030 may include one or more thick film conductive layers, but is not limited thereto. In some embodiments, the thickness PT1 of the first insulating layer 1020 may be 10,000-31,000 Å, but is not limited thereto. In some embodiments, a thickness PT2 of the second insulating layer 1040 may be 10,000-31,000 Å, but is not limited thereto. In some embodiments, a thickness DDT of the first electrode layer 1010A may be 2,000-6,000 Å, but is not limited thereto. In some embodiments, a thickness DDT of the conductive layer 1010 may be 2,000-6,000 Å, but is not limited thereto.
[0034] As shown in
[0035]
[0036] Compared with
[0037] As shown in
[0038] The light sensing component 1200 may be disposed on the first insulating layer 1020. In detail, according to some embodiments, the light sensing component 1200 may be disposed between the first insulating layer 1020 and the second insulating layer 1040. According to some embodiments, the light sensing component 1200 may be disposed between the third insulating layer 1130 and the second insulating layer 1040. According to some embodiments, the light sensing component 1200 may be electrically connected to another driving component (not shown) according to design requirements. The other driving component may be disposed on the substrate 1000.
[0039] According to some embodiments, the third insulating layer 1130 and the fourth insulating layer 1140 may be an organic material, an inorganic material or a combination thereof, but is not limited thereto. According to some embodiments, the third insulating layer 1130 and the fourth insulating layer 1140 may be the inorganic material. The inorganic material may include Silicon nitride, Silica, Silicon oxynitride, Al2O3, HfO2 or any combination thereof, but is not limited thereto. Furthermore, the third insulating layer 1130 and the fourth insulating layer 1140 may serve as a passivation layer.
[0040] In the prior art, the second electrode layer 1050 needs to be connected to the first electrode layer 1010A via the fourth opening 1141 of the fourth insulating layer 1140 in an absence of the connecting layer 1030. Since there is a thicker second insulating layer 1040 below the fourth insulating layer 1140, during a process of forming the opening of the fourth insulating layer 1140 by using a photoresist via a lithography process, photoresist residues may easily be formed, resulting in poor electrical connection between the second electrode layer 1050 and the first electrode layer 1010A. According to some embodiments of the present disclosure, however, as shown in
[0041] In some embodiments, the light sensing component 1200 may include a photodiode or may include a PIN diode or a NIP diode having an undoped intrinsic semiconductor region between the p-type semiconductor and the n-type semiconductor. The light sensing component 1200 may convert a received light into a current signal. In terms of function, the light sensing component 1200 may be a biometric identification component, such as a fingerprint identification component or a palmprint identification component.
[0042] As shown in
[0043] As shown in
[0044]
[0045] As shown in
[0046] As shown in
[0047] As shown in
[0048]
[0049] As shown in
[0050] As shown in
[0051] As shown in
[0052] The following embodiments may be used in various figures in the present disclosure.
[0053] The electronic device may include a display device, an antenna device, a sensing device, or a splicing device, but is not limited thereto. The electronic device may be a bendable electronic device or a flexible electronic device. The electronic device may include, for example, a liquid crystal light emitting diode (LED). The light emitting diode may include, for example, an organic LED (OLED), a sub-millimeter LED (mini LED), a micro LED or a quantum dot LED (quantum dot (QD), e.g. QLED, QDLED), fluorescence, phosphor or other suitable materials, but is not limited thereto. The above materials may be arranged and combined arbitrarily. The antenna device may be, for example, a liquid antenna, but is not limited thereto. The splicing device may be, for example, a display splicing device or an antenna splicing device, but is not limited thereto. It is noted that the electronic device may be any arrangement and combination of the above devices, but is not limited thereto.
[0054] In some embodiments, the first insulating layer 1020 or the second insulating layer 1040 may include a planarization layer, but is not limited thereto. In some embodiments, a material of the planarization layer may include an organic material with a higher light transmittance and/or used for forming a thick film, such as resist, an OC, other suitable materials or combination thereof, but is not limited thereto. In some embodiments, the third insulating layer 1130 or the fourth insulating layer 1140 may include a passivation layer, which may be patterned with a photoresist, but is not limited thereto. In some embodiments, a material of the passivation layer may include an inorganic material, but is not limited thereto.
[0055] It is noted that, for purposes of illustrative clarity and ease of understanding, various figures of this disclosure label a portion of the same (i.e. shown with the same pattern) components, layers or openings in this disclosure. For example, the layers shown with diagonal stripes from the upper left to the lower right are all the gate lines 1110, the components shown with dot patterns are all the conductive layers 1010, and the layers shown with diagonal stripes from the upper right to the lower left are all the connecting layers 1030. In addition, only the component of one pixel, the layer of the one pixel or the opening of the one pixel are labeled in
[0056] It is noted that the technical features in the above embodiments can be replaced, recombined or mixed with one another to constitute another embodiment without departing from the spirit of the present disclosure.
[0057] To sum up, in the electronic device of the present disclosure, at least a portion of the second electrode layer 1050 is disposed in the second opening 1041 of the second insulating layer 1040, and is electrically connected to the first electrode layer 1010A via the connecting layer 1030 disposed in the first opening 1021 of the first insulating layer 1020. Thus, according to some embodiments, the connection between the two electrode layers may have a higher reliability. According to some embodiments, the first opening 1021 and the second opening 1041 do not need to be aligned, which may simplify the manufacturing process.
[0058] The above description details various embodiments of the present disclosure, but is not intended to limit the present disclosure.
[0059] Those skilled in the art will readily observe that numerous modifications and alterations of the device and method may be made while retaining the teachings of the disclosure. Accordingly, the above disclosure should be construed as limited only by the metes and bounds of the appended claims.