Photo-sensitive device and a method for light detection in a photo-sensitive device
11647641 ยท 2023-05-09
Assignee
Inventors
Cpc classification
H04N25/79
ELECTRICITY
H10K30/152
ELECTRICITY
H10K30/10
ELECTRICITY
H01L27/14641
ELECTRICITY
H01L27/14603
ELECTRICITY
H10K19/20
ELECTRICITY
International classification
H04N25/79
ELECTRICITY
H10K19/20
ELECTRICITY
Abstract
A photo-sensitive device comprises: an active layer configured to generate charges in response to incident light; a charge transport layer arranged below the active layer, wherein the charge transport layer comprises a first portion and a second portion being laterally displaced in relation to the first portion; a gate separated by a dielectric material from the charge transport layer, wherein said gate is arranged below the first portion and configured to control a potential thereof; and a transfer gate, which is separated by a dielectric material from a transfer portion of the charge transport layer between the first portion and the second portion, wherein the transfer gate is configured to control transfer of accumulated charges in the first portion to the second portion for read-out of detected light.
Claims
1. A photo-sensitive device comprising a layer structure, said photo-sensitive device comprising: an active layer, wherein the active layer is configured to generate charges in response to incident light on the active layer; a charge transport layer separate and distinct from the active layer, wherein the charge transport layer is formed of a semiconductor and comprises a first portion and a second portion, the second portion being laterally displaced in a plane of the charge transport layer in relation to the first portion; a gate separated by a dielectric material from the first portion of the charge transport layer, wherein said gate and said charge transport layer are arranged such that the first portion of the charge transport layer is between the gate and the active layer and wherein the gate is configured to control a potential of the first portion of the charge transport layer, wherein the gate and the active layer are arranged on opposite sides of the charge transport layer; and a transfer gate, which is arranged to be separated by a dielectric material from a transfer portion of the charge transport layer between the first portion and the second portion, wherein the transfer gate is configured to control transfer of accumulated charges in the first portion to the second portion for read-out of detected light by the photo-sensitive device.
2. The photo-sensitive device according to claim 1, wherein the gate is configured to provide a voltage for fully depleting the first portion of the charge transport layer.
3. The photo-sensitive device according to claim 1, wherein the active layer and charge transport layer are arranged on a read-out integrated circuit substrate.
4. The photo-sensitive device according to claim 1, wherein the active layer comprises a quantum dot, an organic photodetector material or a perovskite material.
5. The photo-sensitive device according to claim 1, wherein the active layer and charge transport layer are formed using thin-film layer deposition.
6. The photo-sensitive device according to claim 1, wherein the charge transport layer is an electron transport layer and wherein the photo-sensitive device further comprises a hole transport layer arranged such that the active layer is between the hole transport layer and the electron transport layer.
7. The photo-sensitive device according to claim 6, further comprising a top electrode layer arranged above the hole transport layer, wherein the top electrode layer is configured to control a potential of the hole transport layer.
8. The photo-sensitive device according to claim 1, wherein the charge transport layer is formed by a metal-oxide semiconductor.
9. The photo-sensitive device according to claim 1, wherein the gate and the transfer gate are arranged on different sides of the charge transport layer or the gate and the transfer gate are arranged on a same side of the charge transport layer or the transfer gate comprises a first portion and a second portion, wherein the first portion of the transfer gate and the second portion of the transfer gate are arranged on opposite sides of the charge transport layer.
10. An image sensor comprising an array of photo-sensitive devices according to claim 1.
11. The image sensor according to claim 10, wherein at least a second portion of a first photo-sensitive device in the array and a second portion of a second photo-sensitive device in the array are shared in the charge transport layer.
12. A method for light detection in a photo-sensitive device comprising a layer structure, said method comprising: generating charges in an active layer in response to incident light on the active layer; accumulating charges, based on the generated charges, in a first portion of a charge transport layer that is separate and distinct from the active layer; transferring charges from the first portion of the charge transport layer to a second portion of the charge transport layer, the second portion being laterally displaced in a plane of the charge transport layer in relation to the first portion, said transferring of charges being controlled by a signal to a transfer gate, wherein the transfer gate is arranged to be separated by a dielectric material from a transfer portion of the charge transport layer between the first portion and the second portion, wherein the transfer gate and the active layer are arranged on opposite sides of the charge transport layer; and reading out a signal from the second portion of the charge transport layer as a representation of an amount of incident light on the active layer.
13. The method according to claim 12, further comprising, before generating of charges in the active layer, depleting the charge transport layer based on a voltage provided to a gate separated by a dielectric material from the charge transport layer, wherein said gate and said charge transport layer are arranged such that the first portion of the charge transport layer is between the gate and the active layer.
14. The method according to claim 13, wherein the charge transport layer is an electron transport layer, wherein the transfer gate is controlled such that a potential of the transfer portion is lower than a potential of the first portion during accumulating of charges, and wherein the transfer gate is controlled such that a potential of the transfer portion is set to be higher than a potential of the first portion and lower than a potential of the second portion during transferring of charges.
15. The method according to claim 14, wherein a constant gate voltage is provided to the gate throughout said depleting, generating, accumulating and transferring.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) The above, as well as additional objects, features and advantages of the present inventive concept, will be better understood through the following illustrative and non-limiting detailed description, with reference to the appended drawings. In the drawings like reference numerals will be used for like elements unless stated otherwise.
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DETAILED DESCRIPTION
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(14) The layer structure 102 of the photo-sensitive device 100 may be suitable for being formed by thin-film layer deposition. This may ensure that the photo-sensitive device 102 may be very compact and small-size and may also facilitate use of the photo-sensitive device 102 in combination with a read-out integrated circuit, which may also be formed using thin-film technology or which may be formed by semiconductor processing on a semiconductor substrate. It should however be realized that the layer structure 102 need not necessarily be formed using thin-film layer deposition.
(15) The photo-sensitive device 100 may comprise an active layer 116, which may be configured to absorb light and generate charges based on the absorbed light. Thus, electron-hole pairs may be generated by the active layer based on light being absorbed. The electron charges and hole charges may be transferred to respective charge transport layers 114, 118 on opposite sides of the active layer 116 such that the active layer 102 may be sandwiched between the charge transport layers 114, 118. Thus, generated electron charges may be transferred to an electron transport layer 114 and generated hole charges may be transferred to a hole transport layer 118.
(16) The photo-sensitive device 100 may comprise electrodes 110, 120 on opposite sides of the charge transport layers 114, 118. The electrodes 110, 120 may be configured to provide an electric field for driving charges generated in the active layer 116 towards the electron transport layer 114 and hole transport layer 118, respectively.
(17) Thus, when light is incident on the active layer 116, charges will be generated and accumulated in the electron transport layer 114, whereas charges may be transported to the hole transport layer 118 and be drained through the electrode 120. The accumulation of charges in the electron transport layer 114 and the hole transport layer 118 prevents or at least reduces recombination of holes and electrons in the active layer 116 to ensure that a high efficiency in light detection is provided by the photo-sensitive device 100.
(18) The active layer 116 may be sensitive to a particular, that is a specific, predetermined or selective, range of wavelengths of light. The range of wavelengths may be narrow to allow detection of a specific wavelength, but the range of wavelengths may alternatively be broad such that the photo-sensitive device 100 may be able to generally detect an amount of light over a broad range, such as covering the range of visible light and extending into the range of infrared light. In the latter case, the photo-sensitive device 100 may be combined with a filter such that the filter may select which range of wavelengths that should be detected by the photo-sensitive device 100. Also, having an active layer 116 which is sensitive to a broad range of wavelengths would allow using the same type of active layer 116 within an array of photo-sensitive devices 100, wherein different photo-sensitive devices 100 in the array may be associated with different filters for providing spectrally resolved imaging. Hence, spectrally resolved imaging would not require using different materials for the active layer 102 in different photo-sensitive devices 100.
(19) In particular, the active layer 116 may be formed from a material which is sensitive to wavelengths in the infrared range. Thus, the photo-sensitive device 100 may be used for infrared detection, which may not be achieved with photo-sensitive devices using silicon for light detection. Thus, the photo-sensitive device 100 may be particularly interesting to use for detection of infrared light. However, it should be understood that the photo-sensitive device 100 may also be well suited for detection of visible light by proper selection of the active layer 116.
(20) The active layer 116 may be formed from various different materials. In particular, the photo-sensitive device 100 is well suited for using an organic material in the active layer 116, such as an organic semiconductor material.
(21) The active layer 116 may, for example, comprise a quantum dot, an organic photodetector material or a perovskite material. Such materials may be suitable for use in manufacturing of the photo-sensitive device 100 using thin-film technology. Also, such materials may be used for selecting a sensitivity of wavelengths of light of the photo-sensitive device 100 to enable using the photo-sensitive device 100 in various different applications spanning a broad range of wavelengths of light from ultraviolet light to infrared light.
(22) However, it should be understood that the photo-sensitive device 100 is not necessarily limited to use of the particular examples of materials of the active layer 116 provided herein. Rather, other materials may also be available and used with the photo-sensitive device 100.
(23) The light to be detected may be incident on a top electrode 120 arranged above the active layer 116 such that light encounters the top electrode 120 before reaching the active layer 116. However it should be understood that the photo-sensitive device 100 may alternatively be configured for back-side illumination such that light to be detected may be incident on a bottom electrode 110 below the active layer 116 such that light encounters the bottom electrode 110 before reaching the active layer 116.
(24) The top electrode 120 may be formed from a material that is transparent to relevant wavelengths (to be detected by the photo-sensitive device 100) to ensure that the light is passed to the active layer for detection with high sensitivity. For instance, the top electrode 120 may be formed by indium tin oxide.
(25) The electrodes 110, 120 may be configured to control a potential of the charge transport layers 114, 118 to control function of the photo-sensitive device 100. The top electrode 120 sets a potential of the charge transport layer 118 above the active layer 116 and a bottom electrode 110 sets a potential of the charge transport layer 114 below the active layer 116.
(26) The bottom electrode 110 arranged below the active layer 116 and below the charge transport layer 114 may be formed as a gate 110 for controlling the potential of the charge transport layer 114. The gate 110 may thus be separated from the charge transport layer 114 by a dielectric material 112.
(27) The bottom electrode 110 may e.g. be formed by a gate metal or polysilicon or a transparent material such as indium tin oxide in case the photo-sensitive device 100 is used for back-side illumination. The bottom electrode 110 may be separated by a layer of a dielectric material 112, such as SiO.sub.2, from the charge transport layer 114. The bottom electrode 110 may thus be well suited for being formed by semiconductor processing on a semiconductor substrate, which may be combined with the remaining layers of the layer structure 102 by forming these layers on top of the semiconductor substrate using thin-film layer deposition.
(28) The gate 110 may be arranged below a first portion 114a of the charge transport layer 114 to control a potential of the first portion 114a.
(29) The charge transport layer 114 may comprise the first portion 114a, a transfer portion 114b and a second portion 114c, which are arranged in different lateral areas of a plane of the charge transport layer 114.
(30) The charge transport layer 114 may further be configured to be controlled for controlling accumulation of charges in the first portion 114a and controlling transfer of charges from the first portion 114a to the second portion 114c via the transfer portion 114b. The control of the charge transport layer 114 may be provided by the gate 110 for controlling a potential of the first portion 114a and a transfer gate 122 for controlling a potential of the transfer portion 114b.
(31) The transfer gate 122 may be arranged adjacent to the gate 110 and may be separated by the same layer of dielectric material 112 from the charge transport layer 114. The transfer gate 122 may e.g. be formed by a gate metal or polysilicon.
(32) The transfer gate 122 may be configured to control transfer of charges from the first portion 114a to the second portion 114c. Thus, a signal may be provided to the transfer gate 122 to allow or prevent charges to be transferred from the first portion 114a to the second portion 114c.
(33) The second portion 114c may form a floating diffusion node for read-out of a signal representing an amount of light detected by the photo-sensitive device 100. The transfer gate 122 may thus be switched ON or OFF to connect (or disconnect) the photo-sensitive device 100 to the floating diffusion.
(34) As mentioned above and shown in
(35) As shown in
(36) As shown in
(37) The gate 110 and the transfer gate 122 may be provided with voltage signals for controlling potentials of the first portion 114a and the transfer portion 114b, respectively, of the charge transport layer 114. The voltage signals may be set such that, when the charges are removed from the first portion 114a by switching on the transfer gate 122, the charges may be completely removed from the first portion 114a of the charge transport layer 114.
(38) Thus, a potential of the first portion 114a of the charge transport layer 114 may be modulated from below the charge transport layer 114, which may be used to ensure full depletion of the first portion 114a. The modulation of the potential of the first portion 114a of the charge transport layer 114 may be achieved without affecting the read-out of signals from the charge transport layer 114.
(39) Full depletion is beneficial in providing good noise characteristics of the photo-sensitive device 100, which may be useful in e.g. providing high image quality based on detection of light by an array of photo-sensitive devices 100.
(40) The full depletion of the first portion 114a allows reset noise of the photo-sensitive device 100, i.e. a signal level of the photo-sensitive device 100 remaining after reset of a floating diffusion node, to be limited. Also, a dark current, i.e. a current signal when no light is incident on the photo-sensitive device 100, may be limited. Further, the photo-sensitive device 100 may provide a high conversion gain.
(41) The charge transport layer 114 may be configured to accumulate charges in the first portion 114a. Thus, the first portion 114a may be arranged below the active layer 116 and may be covered by the active layer 116. The active layer 116, the charge transport layer 118 and the top electrode 120 may be arranged above only the first portion 114a of the charge transport layer 114. In other words, a projection of the active layer 116, the charge transport layer 118 and the top electrode 120 onto the plane of the charge transport layer 114 may cover only the first portion 114a of the charge transport layer 114 (or a part of the first portion 114a). This implies that the charges will only be accumulated in the first portion of the charge transport layer 114a. However, it is possible that the active layer 116 could be arranged partly above the transfer portion 114b as well.
(42) The second portion 114c of the charge transport layer 114 may be connected to read-out circuitry, as indicated by connection 126 in
(43) The photo-sensitive device 100 may be integrated with a substrate on which read-out integrated circuit is provided. This ensures that the photo-sensitive device 100 with read-out circuitry may be very compact and allows processing of detected signals in a small-scale device. The read-out integrated circuit may be used for reading out signals of detected amount of light, and may also be used for more advanced processing of the signals.
(44) The photo-sensitive device 100 may be integrated on a silicon CMOS wafer, on which a read-out integrated circuit is formed. However, it should be realized that the photo-sensitive device 100 may alternatively be formed on other substrates, such as a thin-film technology wafer, which may, for example, use organic materials and on which the read-out integrated circuit may be formed.
(45) It should be realized that the layer structure 102 of the photo-sensitive device 100 may be arranged in various, alternate and/or different relations to a read-out integrated circuit. For instance, the layer structure 102 may be arranged on top of the read-out integrated circuit on the substrate. However, in another embodiment, the layer structure 102 may be arranged on a common substrate with the read-out integrated circuit, but the layer structure 102 of the photo-sensitive device 100 may be arranged next to the read-out integrated circuit on the substrate, e.g. in a common plane. For instance, the layer structure 102 of the photo-sensitive device 100 and the read-out integrated circuit may be arranged on the same polyimide substrate. In such case, the read-out integrated circuit may be designed by using thin-film technology.
(46) It should be realized that the second portion 114c of the photo-sensitive device 100 may in another alternative be connected to a wire for transferring a signal from the second portion 114c. The wire may be connected to a separate substrate, such that the read-out integrated circuit need not even be provided on the same substrate as the photo-sensitive device 100.
(47) According to an embodiment, the charge transport layer 114 arranged below the active layer 116 is an electron transport layer 114.
(48) The electron transport layer 114 may be formed by a n-type metal-oxide semiconductor. Various alternatives exist, such as indium-gallium-zinc oxide (IGZO), e.g. amorphous IGZO, indium-tin-zinc-oxide or hafnium-indium-zinc-oxide.
(49) In such embodiment, the charge transport layer 118 arranged above the active layer 116 may be a hole transport layer 118.
(50) According to another embodiment, the charge transport layer 114 arranged below the active layer 116 is a hole transport layer 114.
(51) The hole transport layer 114 may be formed by a p-type metal-oxide semiconductor. Various alternatives exist, such as tin-oxide, copper-oxide, selenides and sulfides.
(52) In such embodiment, the charge transport layer 118 arranged above the active layer 116 may be an electron transport layer 118.
(53) Referring now to
(54) The circuitry 300 may comprise the photo-sensitive device 100 that is configured to detect incident light. The gate 110 is used for modulating a potential of the first portion 114a of the charge transport layer 114 such that the first portion 114a may be fully depleted when accumulated charges are removed from the first portion 114a. The transfer gate 122 is used for controlling connection of the photo-sensitive device 100 to a floating diffusion node 302 for reading out a signal representing an amount of detected light by the photo-sensitive device 100.
(55) The circuitry 300 may further comprise a reset transistor 304 for resetting the floating diffusion node 302 before a signal is read out from the photo-sensitive device 100.
(56) The floating diffusion node 302 may be connected to a gate of a source follower transistor 306. A source of the source follower transistor 306 may further be connected to a select transistor 308. A signal to the select transistor 308 may select the source follower transistor 306 to be connected to a read-out line for reading out the signal on the floating diffusion node 302.
(57) As illustrated in
(58) Referring now to
(59) Referring now to
(60) As shown in
(61) As shown in
(62) In
(63) With sharing of the second portion 114c in plural photo-sensitive devices 100a-d the transistors for read-out of the signal from the photo-sensitive devices 100a-d may be shared. Hence, the reset transistor 304, the source follower transistor 306 and the select transistor 308 may be shared by all the photo-sensitive devices 100a-d that share the second portion 114c. The signals from the photo-sensitive devices 100a-d may be sequentially read-out from the second portion 114c by sequentially switching on the transfer gates 122 of the photo-sensitive devices 100a-d to provide the signal from the respective photo-sensitive devices 100a-d to the floating diffusion node 302 and by resetting the floating diffusion node 302 between sequential read-outs.
(64) In the embodiment of
(65) Further, in the array 402 of photo-sensitive devices 100, top electrodes 120 may be shared by a plurality of photo-sensitive devices 100 to simultaneously control the potential of the charge transport layer 118 of a plurality of photo-sensitive devices 100.
(66) Referring now to
(67) The method may comprise generating 502 charges in an active layer 116 in response to incident light. The method may further comprise accumulating 504 charges, based on the generated charges, in a first portion 114a of a charge transport layer 114, which is arranged below the active layer 116.
(68) The method may further comprise transferring 506 charges from the first portion 114a of the charge transport layer 114 to a second portion 114c of the charge transport layer 114. The transferring of charges may be controlled by a signal to a transfer gate 122, which is configured to control a potential of a transfer portion 114b of the charge transport layer 114 between the first portion 114a and the second portion 114c.
(69) The method may further comprise reading out 508 a signal from the second portion 114c of the charge transport layer 114 as a representation of an amount of incident light on the active layer 116.
(70) Before the charges are transferred to the second portion 114c of the charge transport layer, a reset signal may be provided by the reset transistor 304 to reset the charges in the second portion 114c and a reset sampling operation may also be performed to read out a signal from the second portion 114c after reset and before the charges are transferred from the first portion 114a of the charge transport layer 114 to the second portion 114c of the charge transport layer 114.
(71) A potential of the first portion 114a of the charge transport layer 114 may further be modulated using a gate 110 arranged below the first portion 114a of the charge transport layer 114. The potential of the first portion 114a may be set such that when the charges are transferred from the first portion 114a to the second portion 114c, all charges are removed and the first portion 114a may be fully depleted before a following sequence of generating charges in the active layer 116 and accumulating charges in the first portion 114a of the charge transport layer 114.
(72) Referring now to
(73) Thus, in
(74) When integration starts (indicated by timing a in
(75) Right after the reset transistor 304 is closed, a reset signal voltage may be sampled from the floating diffusion node 302, indicated by timing c in
(76) Then charges may be transferred from the first portion 114a of the charge transport layer 114 to the floating diffusion node 302. This may be achieved by lowering the gate voltage and applying a high voltage on the transfer gate 122, indicated by timing d in
(77) As shown in part (d) of
(78) After charges are transferred from first portion 114a of the charge transport layer 114 to the floating diffusion node 302, a signal voltage level may be sampled from the floating diffusion node 302, indicated by timing e in
(79) Referring now to
(80) In the above the inventive concept has mainly been described with reference to a limited number of examples. However, as is readily appreciated by a person skilled in the art, other examples than the ones disclosed above are equally possible within the scope of the inventive concept, as defined by the appended claims.