HIGH-FREQUENCY POWER SUPPLY DEVICE AND OUTPUT CONTROL METHOD THEREFOR

Abstract

A high-frequency power supply device is provided with an AC-DC converter for converting an input from a three-phase alternating-current source into a direct current and a high-frequency amplifier including multiple FET elements and outputting a high-frequency alternating-current power, with the output of the AC-DC converter being directly input to the high-frequency amplifier, and further includes a phase conversion circuit for imparting phase differences to gate signals to be input to the multiple FET elements so as to offset fluctuation components included in the direct current. The device generates the high-frequency alternating-current power by converting the input from the three-phase alternating-current source into the direct current, directly inputting the direct current to the high-frequency amplifier, imparting the phase differences to the gate signals to be input to the multiple FET elements so as to offset the fluctuation components included in the direct current, and performing switching.

Claims

1. A high-frequency power supply device, comprising an AC-DC conversion unit that converts an input from a three-phase AC power source into a direct current, and a high-frequency amplifier that includes a plurality of FET elements to output high-frequency AC power, wherein an output from the AC-DC conversion unit is directly input to the high-frequency amplifier, and the high-frequency power supply device comprises a phase conversion circuit that provides to a gate signal to be input to each of the plurality of FET elements with a phase difference for cancelling a fluctuation component contained in the direct current.

2. The high-frequency power supply device according to claim 1, wherein the phase difference includes a residual phase caused by rated outputting, the residual phase being 30° or more.

3. The high-frequency power supply device according to claim 1, wherein the phase conversion circuit comprises an output detection unit that detects output voltage or output power of the high-frequency amplifier, an error calculation amplifier that determines an amount of operation for controlling a phase difference for the gate signal based on a difference between an output detection value detected by the output detection unit and an output command value, and a gate signal generation circuit that generates the gate signal set based on the amount of operation.

4. The high-frequency power supply device according to claim 1, wherein the high-frequency amplifier is provided more than one and arranged in parallel, to which plural high-frequency amplifiers a signal being distributed from a single phase conversion circuit, and an output synthesizing unit is disposed on output parts of the plural high-frequency amplifiers.

5. The high-frequency power supply device according to claim 1, wherein the high-frequency amplifier is provided more than one and arranged in parallel, to each of the plural high-frequency amplifiers the phase conversion circuit being arranged, and an output synthesizing unit is disposed on output parts of the plural high-frequency amplifiers.

6. The high-frequency power supply device according to claim 1, wherein the FET elements are SiC-FETs or GaN-FETs.

7. An output control method for outputting an input from a three-phase AC power source as high-frequency AC power by using a high-frequency amplifier including a plurality of FET elements, wherein the input from the three-phase AC power source is converted into a direct current to directly input it to the high-frequency amplifier, and a phase difference for cancelling a fluctuation component contained in the direct current is provided to a gate signal to be input to each of the plurality of FET elements, so as to perform switching to produce the high-frequency AC power.

8. The output control method according to claim 7, wherein the phase difference includes a residual phase caused by rated outputting, the residual phase being 30° or more.

9. The output control method according to claim 7 wherein the phase difference is set based on an amount of operation determined based on a difference between an output detection value obtained by detecting output voltage or output power by the high-frequency amplifier and an output command value.

10. The output control method according to claim 7, wherein the high-frequency amplifier is provided more than one and arranged in parallel, to which plural high-frequency amplifiers a single phase difference being distributed, and outputs from the plural high-frequency amplifiers are synthesized into the high-frequency AC power.

11. The output control method according to claim 7, wherein the high-frequency amplifier is provided more than one and arranged in parallel, to each of the plural high-frequency amplifiers the phase difference being provided, and output from the plural high-frequency amplifiers are synthesized into the high frequency AC power.

12. The output control method according to claim 7, wherein the FET elements are SiC-FETs or GaN-FETs.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0011] FIG. 1 is a block diagram showing schematically a high-frequency power supply device according to a representative example of the invention;

[0012] FIG. 2 is a circuit diagram showing an equivalent connection circuit of the high-frequency amplifier shown in FIG. 1;

[0013] FIG. 3 is a time chart showing examples of gate signals input to FET elements shown in FIG. 2;

[0014] FIG. 4 is a waveform chart showing a relationship between an input (DC voltage) and an output (AC voltage) in the high-frequency power supply device shown in FIG. 1;

[0015] FIG. 5 is a block diagram showing schematically a high-frequency power supply device according to a variation of the invention; and

[0016] FIG. 6 is a block diagram showing schematically a high-frequency power supply device according to another variation of the invention.

BEST MODE FOR CARRYING OUT THE INVENTION

[0017] A description will now be made about representative illustrative embodiments of a high-frequency power supply device and an output control method therefor according to the present invention by referring to FIGS. 1 to 6.

[0018] FIG. 1 is a block diagram that schematically shows a high-frequency power supply device according to a representative example of the invention. As shown in FIG. 1, a high-frequency power supply device 100 includes an AC-DC conversion unit 110 that converts an input from a three-phase power source 10 into a direct current, a high-frequency amplifier 120 that includes a plurality of FET elements 122A to 122B′, which will be described later, and outputs a high-frequency AC output V.sub.RF, and a phase conversion circuit 130 that provides to a gate signal V.sub.gs to be input to each of the FET elements 122A to 122B′ with a phase difference for cancelling a fluctuation component contained in the direct current. The significant feature of the high-frequency power supply device 100 is that an output V.sub.DC of the AC-DC conversion unit 110 is directly input into a high-frequency amplifier 120.

[0019] The AC-DC conversion unit 110 is configured as a circuit block that converts an input from a three-phase AC power source 10 for commercial use into a DC voltage V.sub.DC, and such circuit block may be a three-phase rectification circuit, a three-phase power factor correction circuit or similar. The high-frequency amplifier 120 is a circuit block that converts the DC voltage V.sub.DC from the AC-DC conversion unit 110 into AC power at a predetermined frequency (high frequency of several hundreds kHz to several tens MHz), whose specific configuration will be described later.

[0020] The phase conversion circuit 130 includes, as an example, an output detection unit 132 that detects an output voltage or output power output of a high-frequency AC output V.sub.RF from the high-frequency amplifier 120 as an output detection value, an error calculation control unit 134 that determines an amount of operation for controlling a phase difference in the gate signal V.sub.gs to be input to the high-frequency amplifier 120 based on a difference between the output detection value detected in the output detection unit 132 and an output command value, and a gate signal generation circuit 136 that generates the gate signal V.sub.gs to be input to each of the FET elements 122A to 122B′ of the high-frequency amplifier 120 when the phase difference is adjusted according to the amount of operation determined by the error calculation control unit 134. The error calculation control unit 134 is grounded through an output command 138, and calculates an amount of operation necessary for adjusting a phase difference ϕ.sub.DG to be given to the gate signal V.sub.gs based on an amount of ripples (affected component of V.sub.rip shown in FIG. 4) included in the output detection value of the high-frequency AC output V.sub.RF, for instance, so as to issue an output command of the gate signal V.sub.gs including the phase difference ϕ.sub.DG to the gate signal generation circuit 136. Then, the gate signal generation circuit 136 generates and outputs gate signals V.sub.gsA to V.sub.gsB′ to be input to the FET elements 122A to 122B′ after the phase difference is set according to the amount of operation obtained from the error calculation control unit 134.

[0021] FIG. 2 is a circuit diagram showing an equivalent connection circuit of the high-frequency amplifier shown in FIG. 1. As shown in FIG. 2, the high-frequency amplifier 120 in FIG. 1 consists of, as an example, a so-called full-bridge circuit 122 by use of four FET elements 122A, 122A′, 122B and 122B′, a coil 124 connected to one of the outputs of the full-bridge circuit 122, a transformer 126 connected on an output part of the full-bridge circuit 122, and a capacitor 128 connected on an output part of the transformer 126. In addition to that, the coil 124 and the capacitor 128 serve as high-frequency filters. The capacitor 128 may be arranged on an input part of the transformer. Furthermore, the coil 124 may be a wiring inductance as long as it looks like a lagging load (inductive load).

[0022] The full-bridge circuit 122 is configured in such a way that the DC voltage V.sub.DC output from the AC-DC conversion unit 110 is applied directly to perform switching between four FET elements 122A, 122A′, 122B and 122B′ at a predetermined timing, thereby applying power with a predetermined polarity while two of the FET elements are being driven simultaneously. The four FET elements 122A, 122A′, 122B and 122B′ are energized when the gate voltage V.sub.gs is applied as a gate signal to a gate electrode G, and this illustrative embodiment can present the cases where recovery loss is low even when a current of SiC-FET (silicon carbide FET), GaN-FET (gallium nitride FET) or the like flows back.

[0023] Next, with reference to FIGS. 3 and 4, a description will be made about a specific aspect of an output control method of the high-frequency power supply device according to a representative example of the present invention.

[0024] FIG. 3 is a time chart showing an example of the gate signals to be input to the FET elements shown in FIG. 2. FIG. 4 is a waveform chart showing a relationship between an input (DC voltage) and an output (AC voltage) in the high-frequency power supply device shown in FIG. 1.

[0025] FIG. 3(a) shows a gate signal V.sub.gs obtained by conventional output control in a high-frequency power supply device that includes a DC-DC conversion unit. In the conventional output control, for example, gate signals V.sub.gsA and V.sub.gsB′, which are turned on simultaneously, are applied to the FET elements 122A and 122B′ shown in FIG. 2. Then, after a lapse of a predetermined dead time DT, gate signals V.sub.gsA′ and V.sub.gsB, which are turned on simultaneously, are applied to the FET elements 122A′ and 122B, respectively.

[0026] After a lapse of another dead time DT, the gate signals V.sub.gsA and V.sub.gsB′ are applied again. Consequently, the conventional output control can remove ripples by a DC-DC conversion unit, and then output a high frequency AC output V.sub.RF in a shaded section.

[0027] FIG. 3(b) shows a gate signal V.sub.gs obtained by the output control in the high-frequency power supply device shown in FIG. 1. The output control according to a representative example of the invention starts inputting of gate signals V.sub.gsB and V.sub.gsB′ to the FET elements 122B and 122B′ at timing lagging behind start times of inputting gate signals V.sub.gsA and V.sub.gsA′ to the FET elements 122A and 122A′ by a phase difference ϕ.sub.DG. In this case, the difference ϕ.sub.DG is denoted as a phase angle that can be calculated by the following Formula 1 using a residual phase ϕ.sub.DZ caused by rated outputting and a dead time phase ϕ.sub.DT corresponding to a dead time.

[00001]${\varphi }_{\text{DG}}={180}^{\circ }-\left({\varphi }_{\text{DZ}}+{\varphi }_{\text{DT}}\right)$

[0028] In this context, when a period of transmitting the gate signal V.sub.gs is T, the dead time phase ϕ.sub.DT can be derived from the following Formula 2.

[00002]${\varphi }_{\text{DT}}=\left\{\text{DT/}\left(\text{T/2}\right)\right\}\times {180}^{\circ }$

[0029] In the DC voltage V.sub.DC obtained by the conversion by the AC-DC conversion unit 110, which is the above-mentioned three-phase rectification circuit, three-phase power factor correction circuit or similar, a ripple component V.sub.rip remains as fluctuation corresponding to the six times frequency component of commercial three-phase alternating current, as shown in FIG. 4. Thus, by making the above-described phase difference ϕ.sub.DG variable according to the fluctuation of the ripple component V.sub.rip, it is possible to cancel the ripple component V.sub.rip of the DC voltage V.sub.DC to be input to the high-frequency amplifier 120. Such switching control is performed on the high-frequency amplifier 120 to thereby obtain a high frequency AC output V.sub.RF from which the ripple component V.sub.rip is removed.

[0030] In general, the ripple component V.sub.rip of the DC voltage V.sub.DC subjected to the three-phase rectification, or conversion, in the AC-DC conversion unit 110 is approximately 14% of an amplitude value of an AC waveform before the conversion. Thus, when an acceptable fluctuation range of the commercial three-phase AC voltage is 10%, it is preferable to ensure the residual phase ϕ.sub.DZ according to the above Formula 1 to be at least 30°.

[0031] In this way, as shown in FIG. 3(b), if the residual phase ϕ.sub.DZ and the dead time phase ϕ.sub.DT are made as small as possible and the phase differences ϕ.sub.DG between the gate signals V.sub.gsA and V.sub.gsA′ as well as signals V.sub.gsB and V.sub.gsB′ are made as large as possible, the overlapping portion between them becomes large, so that the amplitude value of the high frequency AC output V.sub.RF that will be the final output can be made larger. On the other hand, as described above, since it is necessary to ensure that the residual phase ϕ.sub.DZ is 30° or more in order to cancel the ripple component V.sub.rip of the DC voltage V.sub.DC to be input to the high-frequency amplifier 120, the adjustable range of the phase difference ϕ.sub.DG is narrow even if the dead time DT can be minimized. Thus, in order to stably obtain the rated output, it is required to consider devising of design of the transformer 126 shown in FIG. 2.

[0032] The above-described control method enables to remove the ripple component contained in the DC voltage output from the AC-DC conversion unit without using a DC-DC conversion unit as with the conventional high-frequency power source. Thus, no DC-DC conversion unit and LC filter included in the conversion unit are needed, and thereby a response frequency of a feedback control loop is not limited with respect to the high-frequency amplifier, i.e. not limited to be one-tenth of an output frequency of the LC filter. It is therefore possible to increase a response speed of an AC voltage that will be eventually output (e.g., about 10 times faster than before).

[0033] FIG. 5 is a block diagram schematically showing a high-frequency power supply device according to a variation of the present invention. As shown in FIG. 5, a high-frequency power supply device 100 according to the variation includes the AC-DC conversion unit 110 shown in FIG. 1, a plurality of high-frequency amplifiers 120, a phase conversion circuit 130 connected to the plurality of high-frequency amplifiers 120, and an output synthesizing unit 140 arranged on output parts of the plurality of high-frequency amplifiers 120. More specifically, the high-frequency power supply device 100 according to the variation has the plurality of high-frequency amplifiers 120 arranged in parallel, each of the high-frequency amplifiers 120 being provided with one (single) phase conversion circuit 130 so as to be subjected to the output control.

[0034] The plurality of high-frequency amplifiers 120 is directly supplied with a DC voltage V.sub.DC output from the AC-DC conversion unit 110, and each of amplifiers independently outputs high frequency AC outputs V.sub.RF1 and V.sub.RF2. In this case, since the high-frequency amplifiers 120 are supplied with identical gate signals V.sub.gsA to V.sub.gsB′ from the phase conversion circuit 130, it is possible to derive AC outputs V.sub.PF1 and V.sub.RF2 in which ripples are removed and phases are matched in the high-frequency amplifiers.

[0035] The output synthesizing unit 140 is configured to synthesize the AC outputs V.sub.RF1 and V.sub.RF2 input from the plurality of high-frequency amplifiers 120 to output them as a high frequency AC output V.sub.RF. Thus, the magnitude (amplitude value) of the AC output V.sub.RF finally obtained by synthesizing the outputs from the plurality of high-frequency amplifiers 120 can be increased.

[0036] FIG. 6 is a block diagram schematically showing a high-frequency power supply device according to another variation of the invention. As shown in FIG. 6, a high-frequency power supply device 100 according to another variation includes, as with the device shown in FIG. 5, an AC-DC conversion unit 110, a plurality of high-frequency amplifiers 120, phase conversion circuits 130 arrange for respective high-frequency amplifiers 120, and an output synthesizing unit 140 arranged on output parts of the plurality of high-frequency amplifiers 120. More specifically, the high-frequency power supply device 100 according to another variation has the plurality of high-frequency amplifiers 120 arranged in parallel, each of the plurality of high-frequency amplifiers 120 being provided with a phase conversion circuit 130 so as to be subjected to the output control.

[0037] In the high-frequency power supply device 100 with such configuration, each of the plurality of high-frequency amplifiers 120 is individually arranged together with the phase conversion circuit 130, so that an operation of removing a ripple component V.sub.rip in the DC voltage V.sub.DC to be input is performed in each of the high-frequency amplifiers 120 based on the AC voltage V.sub.RF1 or V.sub.RF2. Consequently, the ripple removal is performed in individual high-frequency amplifiers 120, thereby enabling to enhance the effect of ripple reduction.

[0038] With the above configuration, the high-frequency power supply device and the output control method therefor according to the present invention can convert an input from a three-phase AC power source into a direct current and directly input it to a high-frequency amplifier, and provide a phase difference for cancelling a fluctuation component contained in the direct current to a gate signal to be input to each of a plurality of FET elements to thereby perform switching to generate high-frequency AC power. Thus, ripples caused by the conversion of the input from the three-phase AC power source into the direct current is reduced, and the output control can be performed at a high frequency band. That can achieve a response speed of the high-frequency amplifier adaptable for two-level pulse control for changing an output level of an output voltage at high speed, by way of example. Furthermore, since a DC-DC conversion unit, which is included in the conventional high-frequency power supply device, is not incorporated, the entire size of the power supply device can be reduced significantly.

[0039] The above embodiments are a few examples of the high-frequency power supply device and the output control method therefor of the present invention, and thus the present invention is not limited thereto. Furthermore, those skilled in the art can modify the present invention in various ways based on the gist of the invention, which modifications are not excluded from the scope of the present invention.

[0040] For example, the above embodiments illustrate the so-called voltage feedback control loop that adjusts the gate signals V.sub.gsA to V.sub.gsB′ to be applied to the FET elements 122A to 122B′ based on the output V.sub.RF from the high-frequency amplifier 120. However, a forward power feedback control loop for adjusting a forward wave component of a high frequency AC output V.sub.RF to be output may be employed. Furthermore, FIGS. 5 and 6 illustrate the variations in which two high-frequency amplifiers 120 are provided with one phase conversion circuit or separate phase conversion circuits 130. However, three or more high-frequency amplifiers 120 and the phase conversion circuit 130 may be arranged in parallel to each other.

[0041] Reference Signs List

TABLE-US-00001 10 Three-Phase AC Power Source 100 High-Frequency Power Supply Device 110 AC-DC Conversion Unit 120 High-Frequency Amplifier 122 Full-Bridge Circuit 122A, 122A′, 122B, 122B′ FET Element 124 Coil 126 Transformer 128 Capacitor 130 Phase Conversion Circuit 132 Output Detection Unit 134 Error Calculation Control Unit 136 Gate Signal Generation Circuit 138 Output Command 140 Output Synthesizing Unit VDC DC Voltage V.sub.RF AC Output V.sub.gsA, V.sub.gsA, V.sub.gsB, V.sub.gsB’ Gate Signal V.sub.rip Ripple Component ϕ.sub.DG Phase Difference ϕ.sub.DZ Residual Phase ϕ.sub.DT Dead Time Phase