ISOLATOR FOR A STATIONARY VIBRATION ISOLATION SYSTEM

Abstract

An isolator for a stationary vibration isolation system, which is effective in the horizontal and vertical directions, the isolator comprising at least one pneumatic actuator.

Claims

1. An isolator for a stationary vibration isolation system, which is effective in horizontal direction and vertical direction, wherein the isolator comprises at least one pneumatic actuator.

2. The isolator as claimed in claim 1, wherein the isolator comprises a spring.

3. The isolator as claimed in claim 2, wherein the spring is a pneumatic spring.

4. The isolator as claimed in claim 3, wherein the pneumatic actuator extends annularly around a piston of the pneumatic spring.

5. The isolator as claimed in claim 3, wherein the pneumatic actuator is arranged in a working space of the pneumatic spring.

6. The isolator as claimed in claim 1, wherein a piston of the pneumatic actuator is guided axially by at least two leaf springs that are spaced apart from each other.

7. The isolator as claimed in claim 1, wherein a piston of a pneumatic spring is also guided axially by the at least two leaf springs that are spaced apart from each other.

8. The isolator as claimed in claim 1, wherein the pneumatic actuator is effective in two spatial directions.

9. The isolator as claimed in claim 1, wherein the isolator comprises one actuator that is effective in a horizontal direction and one actuator that is effective in a vertical direction.

10. A pneumatic actuator for a stationary vibration isolation system, comprising an annular working space in which a piston is arranged.

11. The pneumatic actuator as claimed in claim 10, wherein the piston is spaced apart from a wall of the working space by a gap.

12. The pneumatic actuator as claimed in claim 10, wherein the piston divides the working space into two pressure chambers.

13. The pneumatic actuator as claimed in claim 11, wherein the working space is sealed by at least one membrane.

14. An active vibration isolation system, comprising at least one isolator as claimed in claim 1.

15. An active vibration isolation system, comprising a control loop for controlling the pneumatic actuator, the control loop including a pressure sensor which measures the pressure within a working space of the pneumatic actuator, or a force sensor which measures the force exerted by the pneumatic actuator.

16. An isolator for a stationary vibration isolation system, which is effective in horizontal direction and vertical direction; wherein the isolator comprises a pneumatic spring; and wherein the isolator comprises at least one pneumatic actuator, which extends annularly around a piston of the pneumatic spring.

17. An isolator for a stationary vibration isolation system, which is effective in horizontal direction and vertical direction; wherein the isolator comprises a spring; and wherein the isolator comprises a first actuator that is effective in a horizontal direction and a second actuator that is effective in a vertical direction.

18. An active vibration isolation system, comprising at least one pneumatic actuator as claimed in claim 10.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0052] The subject matter of the invention will now be described in more detail with reference to an exemplary embodiment illustrated in the drawings of FIGS. 1 to 12.

[0053] FIG. 1 is a cutaway view of an exemplary embodiment of an isolator according to the invention.

[0054] FIG. 2 is a perspective view of the isolator.

[0055] FIG. 3 is a perspective view of a pneumatic actuator used for the isolator.

[0056] FIG. 4 is an exploded view of the actuator illustrated in FIG. 3.

[0057] FIG. 5 is a sectional view of the actuator.

[0058] FIG. 6 illustrates a detail of FIG. 5.

[0059] FIG. 7 is a perspective view of the actuator, where one part of the housing and a membrane sealing the working chamber have been omitted.

[0060] FIG. 8 is a sectional view of a detail, in which the actuator can be seen installed in the isolator.

[0061] FIG. 9 is an exploded view of the components located in the working space of the isolator.

[0062] FIG. 10 is a perspective view of the components arranged in the working space of the isolator.

[0063] FIG. 11 is an exploded view of another actuator which is provided for generating compensation forces in horizontal direction.

[0064] FIG. 12 is a schematic diagram of a vibration isolation system.

DETAILED DESCRIPTION

[0065] FIG. 1 is a cutaway perspective view of one embodiment of an isolator 1 according to the invention.

[0066] The isolator 1 comprises an upper part 5 which is provided in the form of a plate in this exemplary embodiment and which is part of the load to be isolated in the installed state.

[0067] The upper part 5 is mounted in vibration-isolated manner with respect to the base 6 which is connected to the floor in the installed state.

[0068] In the present exemplary embodiment, the isolator 1 comprises a pneumatic spring for this purpose.

[0069] The working space 3 of the pneumatic spring can be seen, into which compressed air can be introduced.

[0070] The piston 2 is supported through the working chamber 3, thus providing vibration isolation in the vertical direction.

[0071] Working chamber 3 is closed by a membrane 45.

[0072] Piston 2 is guided axially by two leaf spring assemblies 8, 9 that are spaced apart from each other.

[0073] In order to provide a horizontal isolation effect, the piston 2 is connected to the upper part 5 through a bending pendulum 4.

[0074] In order to provide a compact configuration, the bending pendulum 4 is located in a recess 7 of piston 2 in this embodiment.

[0075] Furthermore, the isolator 1 comprises the pneumatic actuator 10 which is effective in the vertical direction and is able to generate compensation forces.

[0076] The pneumatic actuator 10 has an annular configuration and is located within the working space 3 of the pneumatic spring.

[0077] Furthermore, the pneumatic actuator 10 is located between the two leaf spring assemblies 8 and 9.

[0078] For generating compensation forces in the horizontal direction, at least one further pneumatic actuator 11 is provided, which is located next to the housing 46 of working space 3 of the pneumatic spring.

[0079] FIG. 2 is a perspective view of the isolator illustrated in FIG. 1.

[0080] Here, in particular the pneumatic actuator 11 can be seen, which is used to generate counterforces in the horizontal direction.

[0081] As can be seen, an extension 13 protrudes out of the pneumatic actuator 11. Extension 13 is connected to a piston or part of a piston by means of which counterforces are generated.

[0082] The piston is connected to brackets 14 of the upper part 5 through bending rods 12.

[0083] Bending rods 12 serve to decouple the actuator 11 transversely to the direction of action thereof.

[0084] Extension 13 which is visible here protrudes laterally out of the housing of pneumatic actuator 11. Further extensions are arranged within the housing, and in this case the bending rods extend through openings of the housing of pneumatic actuator 11.

[0085] FIG. 3 is a perspective view of the pneumatic actuator 10 illustrated in FIG. 1.

[0086] Pneumatic actuator 10 has an annular configuration and consists of a housing 16 in which a piston 15 is arranged which is movable in axial direction.

[0087] FIG. 4 is an exploded view of the pneumatic actuator illustrated in FIG. 3.

[0088] As can be seen, the housing consists of three parts, namely the housing upper part 16a, the housing middle part 16b, and the housing lower part 16c.

[0089] Within the so defined housing, a piston is arranged, which in this exemplary embodiment consists of a piston middle part 17 to which the extensions 25a and 25b are secured.

[0090] Extensions 25a and 25b can be connected to the load to be isolated, while the housing (consisting of parts 16a to 16c) is coupled to the base.

[0091] The pneumatic actuator 10 illustrated here is effective in two opposite directions.

[0092] For this purpose, the piston, or the piston middle part 17, divides the working space into two pressure chambers.

[0093] The pressure chambers are each sealed by a membrane 18a, 18b, so that in this exemplary embodiment one pressure chamber is provided between the housing upper part 16a and membrane 18a, and the other pressure chamber is provided between the housing lower part 16c and membrane 18b.

[0094] Membranes 18a, 18b are connected to the piston, or piston middle part 17.

[0095] For this purpose, a respective clamping ring 19a, 19b is intended.

[0096] Thus, clamping rings 19a and 19b are each located in the pressure chamber.

[0097] Clamping rings 19a and 19b are secured to the piston or piston middle part 17 by means of screws 21a and 21b thereby fixing a respective membrane 18a, 18b. A clamping ring 22a, 22b which is arranged opposite to clamping rings 19a and 19b fixes the respective membrane 18a, 18b to the housing or housing upper part 16a and housing lower part 16c, respectively.

[0098] In this exemplary embodiment, housing upper part 16a and housing lower part 16c are connected to housing middle part 16b by means of screws 20a and 20b.

[0099] Furthermore, another annular array of screws 23a, 23b is provided. Screws 23a and 23b are screwed into threaded sleeves 24 thereby connecting the housing upper part 16a and the housing lower part 16c.

[0100] Threaded sleeves 24 extend through bores of the piston or piston middle part 17, which bores are sufficiently large so that the threaded sleeves 24 have enough clearance in the piston to not abut against the bores of the piston.

[0101] The additional connection produced through screws 23a and 23b and threaded sleeves 24 serves for optimum surface contact pressure of the housing components. It will be understood that this could as well be dispensed with.

[0102] Membranes 18a and 18b serve to seal the housing upper part 16a and at the same time the housing lower part 16c from the housing middle part 16b.

[0103] It will be understood that the pneumatic actuator 10 furthermore has fluid feeds for supplying compressed air to the working spaces.

[0104] FIG. 5 is a sectional view of the pneumatic actuator 10 illustrated before.

[0105] The annularly shaped piston 15 can be seen.

[0106] Furthermore, it can be seen that the pneumatic actuator 10 has a central passage 27 through which components of the isolator may extend, for example.

[0107] FIG. 6 is a detailed view of FIG. 5.

[0108] It can be seen that piston 15 is spaced apart from the adjacent housing wall by a gap 28.

[0109] Pressure chambers 26a and 26b are sealed a membrane 18a, 18b.

[0110] Furthermore, it can be seen that the working space defined by pressure chambers 26a, 26b is quite small. For the pneumatic actuator, a very small working space is sufficient, in particular a working space of less than 10 cm.sup.3, preferably less than 5 cm.sup.3, since the actuator is not used as a pneumatic spring, but only serves for producing counterforces.

[0111] In case a pneumatic spring is used as an isolating element, the volume of the working space of the pneumatic actuator (total of the volumes of the pressure chambers) is preferably at most ⅕, more preferably at most 1/10, of the volume of the working space of the pneumatic spring.

[0112] FIG. 7 is a perspective view of the pneumatic actuator, in which the housing upper part and the membrane sealing the upper working chamber have been omitted.

[0113] In this view, the clamping ring 19a can be seen which is used to secure the membrane (omitted) to the piston 15.

[0114] Furthermore, threaded sleeves 24 are visible which are used to connect the housing upper part and housing lower part and which are arranged with clearance in bores 29 of the piston 15.

[0115] FIG. 8 is another sectional view of the isolator.

[0116] The annular piston 15 of pneumatic actuator 10 can be seen extending around the piston 2 of the pneumatic spring of the isolator.

[0117] Piston 15 is connected to piston 2.

[0118] The effective axis of the pneumatic spring comprising piston 2 and the effective axis of the pneumatic actuator 10 thus coincide.

[0119] Moreover, leaf spring assemblies 8 and 9 can be seen, which are spaced apart from each other and between which the pneumatic actuator 10 is arranged.

[0120] Since piston 15 is rigidly connected to piston 2, both the piston 2 and the piston 15 of the pneumatic actuator is guided axially by the spaced apart leaf springs of leaf spring assemblies 8 and 9.

[0121] FIG. 9 is an exploded perspective view of the components which are arranged in the working space of the pneumatic spring in the installed state.

[0122] The bending rod 4 can be seen, which is connected to piston 2.

[0123] Furthermore, it can be seen that both the leaf springs 31 of the upper leaf spring assembly 9 and the leaf springs 30 of the lower leaf spring assembly 8 consist of annular segments.

[0124] Pneumatic actuator 10 can simply be mounted between the leaf spring assemblies 8 and 9.

[0125] Piston 15 is connected to piston 2 as well as to leaf spring assemblies 8 and 9.

[0126] FIG. 10 shows the components illustrated in FIG. 9 in the assembled state.

[0127] As can be seen, the pneumatic actuator 10 is an integral part of an inner portion of the pneumatic spring comprising the piston 2, from which the bending pendulum 4 is protruding which will be coupled to the load to be isolated.

[0128] FIG. 11 is an exploded view of the further pneumatic actuator 11 shown in FIG. 1, which serves to generate horizontal compensation forces.

[0129] It can be seen that the pneumatic actuator 11 comprises a housing with a housing upper part 33a and a housing lower part 33b, in which in the installed state the piston 32 is accommodated which divides the working space into two halves.

[0130] A membrane 36 can be seen here, which seals a pressure chamber and which is connected to the piston 32.

[0131] The housing upper part 33a is designed similarly and also comprises a pressure chamber sealed by a membrane, so that the actuator 11 is also effective in two opposite directions.

[0132] Furthermore, it can be seen that the piston 32 has three extensions 34a to 34c to which bending rods (12 in FIG. 2) can be mounted, which connect the pneumatic actuator 11 to the load to be isolated.

[0133] Extension 34b protrudes out of the housing.

[0134] The bending rods to be mounted to extensions 34a and 34c extend through the bores 35 in the housing in the installed state.

[0135] FIG. 12 is a schematic diagram of a vibration isolation system 40 in which the isolators 1 described above are installed.

[0136] Vibration isolation system 40 comprises a plate 44 which is mounted on the floor 39 supported by a plurality of isolators 1 for vibration isolation.

[0137] In this exemplary embodiment, a sensor 37 is provided which detects vibrations of the floor, and also a sensor 38 which detects vibrations of the load to be isolated.

[0138] Signals of these sensors are forwarded to control device 41 which in turn controls pneumatic valves 42, 43 for driving the pneumatic actuators 10, 11 incorporated in the isolators 1.

[0139] Based on the sensor signals, the pneumatic actuators 10, 11 generate compensation forces both in horizontal and vertical directions.

[0140] Only one respective control valve is illustrated here.

[0141] It will however be understood that for each pneumatic actuator 1 control valves have to be provided for both pressure chambers.

[0142] The invention permits to provide an isolator which is capable of generating high compensation forces in an active vibration isolation system with, at the same time, low heat dissipation.

LIST OF REFERENCE NUMERALS

[0143] 1 Isolator

[0144] 2 Piston

[0145] 3 Working space

[0146] 4 Bending pendulum

[0147] 5 Upper part

[0148] 6 Base

[0149] 7 Recess

[0150] 8 Leaf spring assembly

[0151] 9 Leaf spring assembly

[0152] 10 Actuator

[0153] 11 Actuator

[0154] 12 Bending rod

[0155] 13 Extension

[0156] 14 Bracket

[0157] 15 Piston

[0158] 16 Housing

[0159] 16a Housing upper part

[0160] 16b Housing middle part

[0161] 16c Housing lower part

[0162] 17 Piston middle part

[0163] 18a, 18b Membrane

[0164] 19a, 19b Clamping ring

[0165] 20a, 20b Screws

[0166] 21a, 21b Screws

[0167] 22a, 22b Clamping ring

[0168] 23a, 23b Screws

[0169] 24 Threaded sleeves

[0170] 25a, 25b Extension

[0171] 26a, 26b Pressure chamber

[0172] 27 Passage

[0173] 28 Gap

[0174] 29 Bore

[0175] 30 Leaf spring

[0176] 31 Leaf spring

[0177] 32 Piston

[0178] 33a Housing upper part

[0179] 33b Housing lower part

[0180] 34a-34c Extension

[0181] 35 Bore

[0182] 36 Membrane

[0183] 37 Sensor

[0184] 38 Sensor

[0185] 39 Floor

[0186] 40 Vibration isolation system

[0187] 41 Control device

[0188] 42 Valve

[0189] 43 Valve

[0190] 44 Plate

[0191] 45 Membrane

[0192] 46 Housing