TEMPERATURE-CONTROL DEVICE, SYSTEM, AND METHOD FOR CONTROLLING THE TEMPERATURE OF A PROBER TABLE FOR SEMICONDUCTOR WAFERS AND/OR HYBRIDS

Abstract

A temperature-control device (1) is provided for controlling the temperature of a prober table (110) for semiconductor wafers and/or hybrids. The device has a fluid inlet (10) for introducing a temperature-control fluid into the temperature-control device (1) and a first heat exchanger (20) for preliminary control of the temperature of the temperature-control fluid that is introduced. A second heat exchanger (30) is used to control the temperature of the temperature-control fluid. The temperature-controlled temperature-control fluid can be conducted to the prober table (110) through a prober temperature-control line (40). A return circuit (60) is configured, so that upon receiving a return switch signal, the return circuit (60) selectively either conducts a temperature-control fluid returned from the prober table (110) through the first heat exchanger (20) or allows the temperature control fluid to flow out bypassing the first heat exchanger (20).

Claims

1. A temperature-regulating apparatus (1) for temperature regulation of a sampler stage (110) for semiconductor wafers and/or hybrids, having a fluid inlet (10) for introducing a temperature-regulating fluid into the temperature-regulating apparatus (1); a first heat exchanger (20) for temperature pre-regulation of the introduced temperature-regulating fluid; a second heat exchanger (30) for temperature regulation of the temperature-regulating fluid; a sampler temperature-regulating line (40) through which the temperature-regulated temperature-regulating fluid can be conducted to the sampler stage (110); and a feedback circuit (60), which, in response to a feedback switch signal, optionally either conducts a temperature-regulating fluid fed back from the sampler stage (110) through the first heat exchanger (20) or allows it to flow out while bypassing the first heat exchanger (20).

2. The temperature-regulating apparatus (1) according to claim 1, wherein, in a feedback operating state of the temperature-regulating apparatus (1), the fed back temperature-regulating fluid temperature pre-regulates the introduced temperature-regulating fluid in the first heat exchanger (20) when it is conducted by the feedback circuit (60) through the first heat exchanger (20).

3. The temperature-regulating apparatus (1) according to claim 1 or 2, wherein, after flowing through the first heat exchanger (20), the fed back temperature-regulating fluid is allowed to flow out via an outflow outlet (61).

4. The temperature-regulating apparatus (1) according to any one of the preceding claims, wherein, in an outflow operating state of the temperature-regulating apparatus (1), the feedback circuit (60) allows the temperature-regulating fluid fed back from the sampler stage (110) to flow out while bypassing the first heat exchanger (20) when the sampler stage (110) is cooled off from a heated state.

5. The temperature-regulating apparatus (1) according to any one of the preceding claims, wherein, upon cooling of the sampler stage (110) in an outflow operating state of the temperature-regulating apparatus (1), the feedback circuit (60) allows the temperature-regulating fluid fed back from the sampler stage (110) to flow out while bypassing the first heat exchanger (20) until a temperature of the sampler stage (110) falls below a sampler stage threshold temperature within a range of approximately 20° C. to approximately 40° C.

6. The temperature-regulating apparatus (1) according to any one of the preceding claims, wherein, in a feedback operating state of the temperature-regulating apparatus (1), the feedback circuit (60) conducts the temperature-regulating fluid fed back from the sampler stage (110) through the first heat exchanger (20) when the sampler stage (110) is temperature-regulated to a temperature below a feedback threshold temperature.

7. The temperature-regulating apparatus (1) for temperature-regulating a sampler stage (110) for semiconductor wafers and/or hybrids, in particular according to any one of the preceding claims, having a fluid inlet (10) for introducing a temperature-regulating fluid into the temperature-regulating apparatus (1); at least one heat exchanger (20; 30) for temperature regulation of the temperature-regulating fluid; a cooling booster (70) for temperature regulation of the temperature-regulating fluid; a sampler temperature-regulating line (40), through which the temperature-regulated temperature-regulating fluid can be conducted to the sampler stage (110); and an inlet fluid circuit (80), which, in response to an introduction switch signal, optionally conducts the introduced temperature-regulating fluid into the sampler temperature-regulating line (40) either through the at least one heat exchanger (20; 30) or through the cooling booster (70).

8. The temperature-regulating apparatus (1) according to claim 7, wherein, in a heat exchanger mode of the temperature-regulating apparatus (1), the inlet fluid circuit (80) conducts the introduced temperature-regulating fluid through the at least one heat exchanger (20; 30) into the sampler temperature-regulating line (40) when the sampler stage (110) is cooled off from a heated state.

9. The temperature-regulating apparatus (1) according to claim 7 or 8, wherein, in a heat exchanger mode of the temperature-regulating apparatus (1), the inlet fluid circuit (80) conducts the introduced temperature-regulating fluid through the at least one heat exchanger (20; 30) into the sampler temperature-regulating line (40) when the sampler stage (110) is temperature-regulated to a temperature below a lower threshold temperature lying within a range of approximately 10° C. to approximately 25° C.

10. The temperature-regulating apparatus (1) according to claim 7 or 9, wherein, in a booster mode of the temperature-regulating apparatus (1), the inlet fluid circuit (80) conducts the introduced temperature-regulating fluid through the cooler booster (70) into the sampler temperature-regulating line (40) when the sampler stage (110) is temperature-regulated to a temperature above an upper threshold temperature lying within a range of approximately 10° C. to approximately 25° C. and below a lower threshold temperature lying within a range of approximately 40° C. to approximately 70° C.

11. The temperature-regulating apparatus (1) according to any one of claims 7 to 10, wherein the cooling booster (70) comprises a vortex tube in which the introduced temperature-regulating fluid is divided into a warm and a cold flow portion, of which only the cold flow portion is conducted into the sampler temperature-regulating line (40).

12. The temperature-regulating apparatus (1) according to any one of claims 7 to 11, wherein the inlet fluid circuit (80) comprises a switch valve through which the introduced temperature-regulating fluid is optionally conducted to either the at least one heat exchanger (20; 30) or the cooling booster (70) as a function of the switch position of the switch valve.

13. A system having a sampler stage (110) and a temperature-regulating apparatus (1) according to any one of the preceding claims connected thereto at least via its sampler temperature-regulating line (40).

14. A method for temperature regulation of a sampler stage (110) for semiconductor wafers and/or hybrids, having the following steps: introducing a temperature-regulating fluid into a first heat exchanger (20) for temperature pre-regulation of the introduced temperature-regulating fluid; conducting the temperature-regulating fluid from the first heat exchanger (20) into a second heat exchanger (30) for temperature regulation of the temperature-regulating fluid; conducting the temperature-regulated temperature-regulating fluid to the sampler stage (110); and providing a feedback switch signal for controlling and/or adjusting a feedback circuit (60), wherein, in response to a feedback switch signal, a temperature-regulating fluid fed back from the sampler stage (110) is optionally either conducted through the first heat exchanger (20) or is allowed to flow out while bypassing the first heat exchanger (20).

15. The method according to claim 14, having at least one of the following steps: allowing the outflow of the temperature-regulating fluid fed back from the sampler stage (110) while bypassing the first heat exchanger (20) when the sampler stage (110) is cooled off from a heated state; and/or conducting the temperature-regulating fluid fed back from the sampler stage (110) through the first heat exchanger (20) when the sampler stage (110) is temperature-regulated to a temperature below a feedback threshold temperature.

16. The method for temperature regulation of a sampler stage (110) for semiconductor wafers and/or hybrids, in particular according to any one of claim 14 or 15, having the following steps: introducing a temperature-regulating fluid into at least one heat exchanger (20; 30) for temperature regulation of the temperature-regulating fluid; introducing the temperature-regulating fluid into a cooling booster (70) for temperature regulation of the temperature-regulating fluid; conducting the temperature-regulated temperature-regulating fluid to the sampler stage (110); and providing an introduction switch signal for controlling and/or adjusting an inlet fluid circuit (80), wherein, in response to an introduction switch signal, the introduced temperature-regulating fluid is optionally conducted to the sampler stage (110) either through the at least one heat exchanger (20; 30) or through the cooling booster (70).

17. The method according to claim 16, having at least one of the following steps: conducting the introduced temperature-regulating fluid through the at least one heat exchanger (20; 30) to the sampler stage (110) when the sampler stage (110) is temperature-regulated to a temperature below a lower threshold temperature lying within a range of approximately 10° C. to approximately 25° C.; conducting the introduced temperature-regulating fluid through the cooler booster (70) to the sampler stage (110) when the sampler stage (110) is temperature-regulated to a temperature above an upper threshold temperature lying within a range of approximately 10° C. to approximately 25° C. and below a lower threshold temperature lying within a range of approximately 40° C. to approximately 70° C.; switching off a cooling apparatus (35) used for temperature regulation within the heat exchanger (20; 30) when the introduced temperature-regulating fluid is conducted through the cooling booster (70) to the sampler stage (110); and/or switching off a cooling apparatus (35) used for temperature regulation within the heat exchanger (20; 30) and/or switching off the cooling booster (70) when the sampler stage (110) is temperature-regulated to a temperature above the upper threshold temperature lying within a range of approximately 40° C. to approximately 70° C.

Description

[0074] In the following, the invention is further described on the basis of exemplary embodiments shown in the figures. For this purpose, the same or similar reference numerals refer to the same or similar features of the embodiments. Individual features shown in the figures can be implemented in other exemplary embodiments. The following are shown:

[0075] FIG. 1 a schematic outline of a sampler system having a temperature-regulating apparatus with a feedback circuit;

[0076] FIG. 2 a schematic outline of a sampler system having a temperature-regulating apparatus with an inlet fluid circuit;

[0077] FIG. 3 a schematic outline of a sampler system having a temperature-regulating apparatus with a feedback circuit and an inlet fluid circuit; and

[0078] FIG. 4 a schematic circuit diagram of a sampler system having a feedback circuit and an inlet fluid circuit;

[0079] FIG. 1 shows a schematic outline of the sampler system having a temperature-regulating apparatus 1 and a sampler container 100. The sampler container 100 can be configured as a substantially closed space, in which a sampler stage 110 is arranged. The sampler stage 110 is also referred to as a chuck. For the temperature monitoring, a temperature sensor 111 can be arranged in the sampler stage 110. Furthermore, a radiator 120 can be arranged in the sampler stage 110 in order to condition the sampler stage 110 to testing temperatures above room temperature, for example to testing temperatures in the positive three-digit Celsius range.

[0080] The temperature-regulating apparatus 1 can be configured as a component that is separate from the sampler container 100 and can comprise, for example, a housing in which a plurality of design elements are arranged. The temperature-regulating apparatus 1 is also referred to as a chiller. A sampler system having a temperature-regulating apparatus 1 and a sampler stage 110 is also referred to as a chuck system.

[0081] The temperature-regulating apparatus 1 can comprise a control unit 90, which, as shown, can be arranged so as to be integrated in the housing of the temperature-regulating apparatus 1. Alternatively, the control unit 90 can be provided as a separate component, which can be connected to the temperature-regulating apparatus 1, for example electrically and/or via fluid lines. The control unit 90 can furthermore be connected electrically to the elements of the sampler system, in particular to the temperature sensor 111, the radiator 120, a feedback circuit 60, valves, and/or a cooling apparatus 35.

[0082] The temperature-regulating apparatus 1 comprises a fluid inlet 10 for freshly introduced temperature-regulating fluid. The fluid inlet 10 can be supplied, for example, with dry air, which can be introduced into the temperature-regulating apparatus 1 at approximately room temperature. In principle, a different temperature-regulating fluid than air can be used, for example another gas mixture and/or a liquid fluid. However, the temperature-regulating apparatus 1 is preferably configured as an air-cooling apparatus, which performs the temperature regulation of the sampler stage 110 with a mixture of air that is as dry as possible.

[0083] The temperature-regulating apparatus 1 further comprises a first heat exchanger 20 and the second heat exchanger 30. The temperature-regulating fluid freshly introduced via the fluid inlet 10 can first be conducted via an inlet line 11 through the first heat exchanger 20, in which it can be temperature pre-regulated. From there, it can be conducted through a heat exchanger connection line 21 to and then through the second heat exchanger 30 and from there through a heat exchanger outlet line 31 to a fluid outlet 41. Before the fluid outlet 41, for example in the heat exchanger outlet line 31, a fluid temperature sensor can be arranged, which checks the temperature of the temperature-regulated temperature-regulating fluid and is connected to and/or communicates with the control unit 90. The fluid temperature sensor can be used for expanded monitoring and/or control and/or regulation of the various operating states of the cooling apparatus 35, the temperature-regulating apparatus 1, and/or the sampler system. Alternatively, the fluid temperature sensor can also be arranged behind the fluid outlet in the sampler temperature-regulating line 40.

[0084] While passing through the first heat exchanger 20, the freshly introduced temperature-regulating fluid can be temperature pre-regulated. Depending on the operating state of the temperature-regulating apparatus 1, the freshly introduced temperature-regulating fluid can also pass through the first heat exchanger 20 without a temperature pre-regulation, i.e. at a nearly unchanged temperature.

[0085] The second heat exchanger 30 serves to adjust the desired target temperature of the temperature-regulating fluid. In the second heat exchanger 30, there is a heat exchange with a cooling fluid, which is cooled in the cooling apparatus 35. The cooling apparatus 35 can comprise one or more cooling aggregates, condensers, and/or similar cooling devices in order to cool the cooling fluid. The cooling apparatus 35 provides a majority of the cooling capacity to be expended and can furthermore be responsible for a majority of the operating noise. For this reason, the temperature-regulating apparatus 1 uses the cooling apparatus 35, to the extent possible, only when its cooling capacity is absolutely necessary. In all other operating states of the temperature-regulating apparatus 1, the cooling apparatus 35 is either switched off or placed into standby mode, to the extent possible, in order to save energy as well as reduce operating noise.

[0086] From the fluid outlet 41, the temperature-regulating fluid that has been temperature-regulated to its target temperature is conducted via a sampler temperature-regulating line 40 to the sampler stage 110. In the sampler stage 110, the temperature-regulated temperature-regulating fluid serves to set the desired testing temperature of the sampler stage 110. A testing temperature in the negative Celsius range and/or below room temperature can be set, for example, solely by using the coldness of the temperature-regulating fluid. In a temperature range significantly above the room temperature, the testing temperature of the sampler stage 110 can be set solely by the radiator 120.

[0087] To check the current actual temperature of the sampler stage 110, the temperature sensor 111 can be connected to and/or communicate with the control unit 90. Furthermore, the radiator 120 can be controlled and/or regulated via the control unit 90 in order to set the testing temperature of the sampler stage 110. In a moderate temperature range around room temperature, the testing temperature can be regulated by a controlled regulation of both the radiator 120 and the temperature regulation in the temperature-regulating apparatus 1.

[0088] The aforementioned temperature ranges are valid at least when the introduced temperature-regulating fluid has a provisional temperature around room temperature. If the introduced temperature-regulating fluid is provided with a greatly deviating temperature, then the temperature regulation is performed with a combination of cold and heat in a range around the provisional temperature, solely with the radiator 120 in a temperature range significantly above this, and solely with the coldness of the temperature-regulating fluid in a temperature range significantly below this.

[0089] Specifically when regulating the sampler stage 110 to lower temperatures, i.e., for example, when setting testing temperatures in the negative Celsius range, it can be sensible in terms of energy to use a temperature-regulating fluid fed back from the sampler stage 110 for the temperature pre-regulation of the fresh temperature-regulating fluid in the second heat exchanger 30. The temperature-regulating fluid used for the temperature regulation in the sampler stage 110 can be fed back from the sampler stage 110 via a feedback line 50 into a feedback inlet 51 of the temperature-regulating apparatus 1. From the feedback inlet 51, it can be conducted via a feedback circuit inlet line 52 into the feedback circuit 60 of the temperature-regulating apparatus 1. The feedback circuit 60 can be controlled and/or regulated by the control unit 90. For this purpose, the control unit 90 can provide and/or generate a feedback switch signal, with which the feedback circuit 60 can be reversibly switched between at least two states. Depending on the switch position of the feedback circuit 60, the temperature-regulating apparatus 1 is either in a feedback operating state or in an outflow operating state.

[0090] In the outflow operating state, the fed back temperature-regulating fluid is conducted via a second outflow line 65 to a second outflow outlet 62, where it is allowed to flow out. At the second outflow outlet 62, a sound damper and/or at least one outflow valve can be arranged, for example, in order to discharge the temperature-regulating fluid as noiselessly and/or as safely as possible into the environment. In the outflow operating state, the hot and cold energy of the fed back temperature-regulating fluid is not used for the temperature pre-regulation of the freshly introduced temperature-regulating fluid.

[0091] In the feedback operating state, the fed back temperature-regulating fluid is conducted by the feedback circuit via a heat exchanger feedback line 63 through the first heat exchanger 20. In the first heat exchanger 20, a heat exchange can occur between the fed back temperature-regulating fluid and the temperature-regulating fluid freshly introduced through the fluid inlet 10, wherein a temperature pre-regulation takes place.

[0092] After passing through the first heat exchanger 20, the fed back temperature-regulating fluid can be conducted to a first outflow outlet 61 via a first outflow line 64. The first outflow outlet 61 can also be configured similar to the second outflow outlet 62, i.e. having a sound damper and/or outflow valve(s).

[0093] For this purpose, the temperature-regulating apparatus 1 can be configured so as to enter into the feedback operating state when the sampler stage 110 is to be set to a comparatively low testing temperature. This can be the case, for example, for testing temperatures in a range from a minimum adjustable temperature up to a range around room temperature or just below room temperature. If the sampler stage 110 is to be cooled to a testing temperature of −40° C., for example, then the temperature-regulating fluid conducted to the sampler stage 110 via the sampler temperature-regulating line 40 can be temperature-regulated to an approximate target temperature of −40° C. The temperature-regulating fluid fed back via the feedback line 50 can still have a temperature of, for example, approximately −30° C., so that it can be well used in the first heat exchanger 20 for the temperature pre-regulation of the fresh temperature-regulating fluid introduced at approximately room temperature. As a result, the freshly introduced temperature-regulating fluid is pre-cooled in the first heat exchanger 20, before it is completely cooled down to a target temperature of −40° C. degrees Celsius in the second heat exchanger 30 via a cooling capacity of the cooling apparatus 35.

[0094] However, in other operating states, the use of the fed back temperature-regulating fluid can be counterproductive. If, for example, the sampler stage 110 is to be cooled down from a current testing temperature of, for example, 300° C. to a new testing temperature in the negative range and/or close to room temperature, then the use of the very hot fed back temperature-regulating fluid in the first heat exchanger 20 would be counterproductive when cooling off the sampler stage 110. During the cooling, in particular when setting a testing temperature which is at least approximately 50K lower than the previously used testing temperature, the temperature-regulating apparatus 1 can be put into the outflow operating state. In this state, the fed back temperature-regulating fluid can no longer be conducted through the first heat exchanger 20, but rather is allowed to flow out via the second outflow outlet 62 while bypassing the first heat exchanger 20. In the outflow operating state, the sampler stage 110 can thus be cooled down significantly faster to the new testing temperature to be set while expending less cooling capacity.

[0095] FIG. 2 shows a schematic outline of a further exemplary embodiment of the sampler system having a temperature-regulating apparatus 1 and a sampler container 100. In the exemplary embodiment shown in FIG. 2, the same or similar components and/or features bear the same reference numerals as in FIG. 1.

[0096] Like the sampler system described in FIG. 1, the sampler system shown in FIG. 2 also comprises a temperature-regulating apparatus 1 and the sampler container 100 with the sampler stage 110. The sampler system shown in FIG. 2 comprises a temperature-regulating apparatus 1, in which an inlet fluid circuit 80 is integrated. The freshly introduced temperature-regulating fluid is conducted from the fluid inlet 10 via vet inlet line 11 to the inlet fluid circuit 80. The inlet fluid circuit 80 can be switched between at least two states. Here, the inlet fluid circuit 80 can be switched into either a heat exchanger mode or a booster mode, for example in response to an introduction switch signal provided by the control unit 90.

[0097] If the inlet fluid circuit 80 is switched into the heat exchanger mode, then the introduced temperature-regulating fluid is conducted from the inlet fluid circuit 80 via a heat exchanger inlet line 11w to the heat exchanger 30. In the heat exchanger 30, the temperature-regulating fluid is temperature-regulated, for example by the cooling apparatus 35, and subsequently conducted to the sampler temperature-regulating line 40 through a heat exchanger outlet line 31 and, for example, a convergence 42. The convergence 42 can be configured, for example, as an “OR”/shuttle valve.

[0098] Although only a single heat exchanger 30 is shown in FIG. 2, the introduced temperature-regulating fluid can also pass through more than one heat exchanger in the heat exchanger mode.

[0099] As an alternative to the heat exchanger mode, the inlet fluid circuit can also switch the temperature-regulating apparatus 1 into a booster mode. In the booster mode, the freshly introduced temperature-regulating fluid is not conducted through the heat exchanger 30, but rather via a booster inlet line 11b to a cooling booster 70. In the cooling booster 70, the temperature-regulating fluid is temperature-regulated and subsequently conducted via a booster outlet line 71 to the convergence 42 and from there to the fluid outlet 41 and/or to the sampler temperature-regulating line 40. At the convergence 42, the outlet lines 31 and 71 from the heat exchanger 30 and the cooling booster 70 are combined and, from there, further conducted to the fluid outlet 41 and/or to the sampler temperature-regulating line 40. The convergence, which can be configured for example as an “OR” valve, can prevent an undesired fluid flow to the cooling booster 70 in the heat exchanger mode and can prevent an undesired fluid flow to the heat exchanger 30 in the booster mode.

[0100] The cooling booster 70 can be based on the principle of the vortex tube. In the vortex tube, the temperature-regulating fluid is separated into a warm portion and a cold portion as a result of the swirling. The warm portion of the temperature-regulating fluid can be allowed to flow out via a booster outflow line 73 and a booster outflow outlet 72. The cold portion of the temperature-regulating fluid can be further used for the temperature regulation of the sampler stage 110.

[0101] The cooling booster 70 shown can use less operational energy than the cooling apparatus 35. For this reason, when circumstances allow, the cooling booster 70 is preferably used for cooling, and not the cooling apparatus 35 with the heat exchanger 30.

[0102] In one embodiment, the temperature-regulating apparatus can be operated at temperatures in the negative Celsius range in the heat exchanger mode, in particular up to a temperature just below room temperature.

[0103] In a temperature range around room temperature, the temperature-regulating apparatus 1 can be operated in the booster mode. The temperature range around room temperature can be regulated solely by means of the cooling booster 70. In a range significantly above room temperature, the sampler stage 110 can be temperature-regulated solely by the radiator 120.

[0104] For example, in a range from the minimum adjustable testing temperature (e.g. −40° C. or −55° C.) up to the lower threshold temperature (e.g. approximately +15° C.), the temperature-regulating apparatus 1 can normally be operated in the heat exchanger mode. At testing temperatures from the lower threshold temperature (e.g. approximately 15° C.) up to the upper threshold temperature (e.g. approximately 60° C. or approximately 50° C.), the temperature-regulating apparatus 1 can be operated in the booster mode. At warmer testing temperatures, the temperature-regulating apparatus 1 can largely be switched off, and the temperature of the sampler stage 110 can be set by means of the radiator 120.

[0105] FIG. 3 shows a schematic outline of a sampler system having a temperature-regulating apparatus 1 and a sampler container 100, which unifies and combines the advantages of the two sampler systems shown in FIG. 1 and FIG. 2. This can lead to a particularly energy-efficient and/or noiseless operation of the temperature-regulating apparatus, which can quickly set various testing temperatures.

[0106] The reference numerals used in FIG. 3 refer to features that have already been described with respect to the exemplary embodiments shown in FIG. 1 and FIG. 2. Thus, the sampler system shown in FIG. 3 can be operated in various operating states.

[0107] The temperature-regulating apparatus 1 can be operated in the booster mode as well as in the heat exchanger mode. For this purpose, it comprises the inlet fluid circuit 80, which conducts the freshly introduced temperature-regulating fluid to the sampler temperature-regulating line 40 either through the cooling booster 70 or the first heat exchanger 20 and the second heat exchanger 30. In the booster mode, the cooling apparatus 1 can be switched off, turned down, and/or placed into standby mode.

[0108] As an alternative to the booster mode, the temperature-regulating apparatus 1 can be operated in the heat exchanger mode. In the heat exchanger mode, the temperature-regulating apparatus 1 can either be operated in the outflow operating state or in the feedback operating state. These operating states are controlled and/or regulated via the control unit 90 and the feedback circuit 60. If the feedback circuit 60 conducts the fed back temperature-regulating fluid through the first heat exchanger 20, it can be used there for the temperature pre-regulation of the freshly introduced temperature-regulating fluid. If the feedback circuit 60 conducts the fed back temperature-regulating fluid around the first heat exchanger 20, then the freshly introduced temperature-regulating fluid flows through the first heat exchanger 20 substantially without a temperature change and is temperature-regulated exclusively in the second heat exchanger 30.

[0109] In a heating operating state, both the cooling apparatus 35 and the cooling booster 70 can be switched off and/or placed into standby mode.

[0110] Due to the various operating states and operating modes, the embodiment shown in FIG. 3 is particularly energy-efficient and sparing and reduces the operating noise.

[0111] FIG. 4 shows a schematic outline of an exemplary embodiment of a sampler system having a temperature-regulating apparatus, of which at least components are shown in FIG. 4, and a sampler stage. FIG. 4 shows an exemplary embodiment that is the same as the one shown in FIG. 3, but to a different degree of detail.

[0112] As in the exemplary embodiment shown in FIG. 3, the sampler system can comprise a fluid inlet, through which freshly introduced temperature-regulating fluid can be conducted. The freshly introduced temperature-regulating fluid is conducted [by] the control unit 90 [through] a proportional valve V1. Alternatively, the freshly introduced temperature-regulating fluid can also be conducted through a switch valve V5, which can be configured as a discharge and/or sound damper valve. In the proportional valve V1, it can be adjusted how much temperature-regulating fluid is to be used for the temperature regulation.

[0113] Depending on the operating state and the switch positions of the proportional valve V1 and/or the switch valve V5, a component of the freshly introduced temperature-regulating fluid can also be allowed to directly flow out while bypassing the heat exchangers 20, 30 and the cooling booster 70, either via a sound damper valve V3 and the first outflow outlet 61 and/or via a discharge valve V4 and the second outflow outlet 62.

[0114] From the proportional valve V1, the temperature-regulating fluid is conducted through a switch valve V2, which can be configured as a component of the inlet fluid circuit 80. Depending on the switch position of the inlet fluid circuit 80, the temperature-regulating apparatus 1 is either in the booster mode or in the heat exchanger mode.

Booster Mode, e.g. in the Moderate Temperature Range

[0115] In the booster mode, the temperature-regulating fluid is conducted from the switch valve V2 through the cooling booster 70 and temperature-regulated there. From there, the warm portion of the temperature-regulating fluid is conducted out via the booster outflow outlet 72, while the cold portion is conducted into the sampler temperature-regulating line 40 via a convergence 42. The convergence 42 can comprise a shuttle valve and/or an “OR” valve.

[0116] In the booster mode, the introduced temperature-regulating fluid is conducted to the sampler stage 110 via the cooling booster 70. The booster mode can be used, for example, when the sampler stage 110 is to be conditioned to a testing temperature in a moderate temperature range, for example a temperature range from a lower threshold temperature up to an upper threshold temperature. This moderate temperature range can include the room temperature and/or the provisional temperature at which the freshly introduced temperature-regulating fluid is provided. In one exemplary embodiment, the lower threshold temperature is approximately 10° C. to approximately 25° C., for example approximately 15° C. In one exemplary environment, the upper threshold temperature is approximately 40° C. to approximately 80° C., preferably approximately 50° C. to approximately 70° C., particularly preferably approximately 60° C.

[0117] In the booster mode, the proportional valve V1 is opened so that the fresh temperature-regulating fluid can flow through the proportional valve V1. Furthermore, the switch valve V2 is opened such that the temperature-regulating fluid is conducted to the cooling booster 70. The switch valve V5 is also opened in order to be able to divert any excess temperature-regulating fluid. The discharge valve V4 can be closed, and the sound damper valve V3 can be opened, so that the fed back temperature-regulating fluid can flow out through the first heat exchanger 20 and the sound damper valve 20 (feedback operating state) without temperature pre-regulating the freshly introduced temperature-regulating fluid, because it does not pass through the first heat exchanger 20 at all in the booster mode. Alternatively, the discharge valve V3 can be opened (outflow operating state) in order to allow the fed back temperature-regulating fluid to flow out through the discharge valve V3 and the second outflow outlet 62. In the booster mode, the cooling apparatus 35 can be switched off and/or operated in standby mode.

Heat Exchanger Mode

[0118] In the heat exchanger mode, the introduced temperature-regulating fluid is conducted from the switch valve V2 into the first heat exchanger 20 and from there into the second heat exchanger 30. In the second heat exchanger 30, the temperature-regulating fluid is temperature-regulated by the cooling apparatus as a coldness stage and subsequently conducted to the convergence 42. From there, it is conducted further through the sampler temperature-regulating line 40 to the sampler stage 110.

[0119] From the sampler stage 110, the temperature-regulating fluid already used there for the temperature regulation is brought into the feedback line 50 and conducted back to the temperature-regulating apparatus. In doing so, the fed back temperature-regulating fluid passes a bifurcation 60′, which can be configured as a component of the feedback circuit 60. The feedback circuit 60 comprises a discharge valve V4, via which the fed back temperature-regulating fluid can be allowed to flow out in the second outflow outlet 62 while bypassing the first heat exchanger. Depending on the switch position of the discharge valve V4, the temperature-regulating apparatus is either in the outflow operating state or the feedback operating state.

Feedback Operating State, e.g. in a Low Temperature Range

[0120] In the heat exchanger mode and the feedback operating state, the inlet fluid circuit 80 is switched to the heat exchanger mode, and the feedback circuit 60 is switched to the feedback operating state. Such an operation of the temperature-regulating apparatus can be used sensibly, in particular, when a significant cooling of the sampler stage 110 is required. This can be the case when a testing temperature is to be set, for example, in a low temperature range, i.e., for example, a testing temperature between the minimum adjustable temperature, for example −40° C. or −60° C., up to a previously described lower threshold temperature of the moderate temperature range.

[0121] In the heat exchanger mode and the feedback operating state, the proportional valve V1 and the switch valve V2 are opened. Furthermore, the switch valve V5 is also opened and the discharge valve V4 is also closed. This forces the fed back temperature-regulating fluid through the first heat exchanger 20, after which it can flow through an opened sound damper valve V3 to the first outflow outlet 61. The fed back temperature-regulating fluid is conducted into the first heat exchanger 20, where it can temperature pre-regulate the freshly introduced temperature-regulating fluid in order to not waste its coldness content, but rather to further utilize it.

Outflow Operating State, e.g. When Cooling the Sampler Stage

[0122] In a heat exchanger mode and outflow operating state, the temperature-regulating apparatus can be used in order to cool off the sampler stage 110 from a high temperature. This combination of operating modes and states is sensible, for example, when the sampler stage 110 is to be cooled off from a high first temperature (for example, a temperature in the range of approximately 100° C. to to 400° C.) to a significantly lower second temperature, for example a second temperature that is at least 50K lower than the first temperature, particular at least 100K lower. The second temperature can be, for example, in the range from the minimum adjustable temperature to the upper threshold temperature.

[0123] The inlet fluid circuit 80 is switched to the heat exchanger mode, and the feedback circuit 60 is switched to the outflow operating state. This can be realized in that the proportional valve V1 is opened and the switch valve V2 is opened in such a way that no introduced temperature-regulating fluid is conducted to the first heat exchanger. The switch valve V5 is closed and the discharge valve V4 is opened, while the sound damper valve V3 is closed. The closed position of the sound damper valve V3 causes a backlog so that the temperature-regulating fluid fed back via the feedback line 50 can no longer be conducted through the first heat exchanger 20. Rather, it flows out through the discharge valve V4 via the second outflow outlet 62. Thus, the freshly introduced temperature-regulating fluid can be temperature-regulated and cooled down alone in the second heat exchanger 30 without the hot fed back temperature-regulating fluid causing an inefficient and unfavorable temperature pre-regulation in the first heat exchanger 20.

Heating Operating State

[0124] In the heating operating state, both the cooling booster 70 and the cooling apparatus 35 can be switched off or placed into standby mode, and the temperature of the sampler stage 110 can be conditioned solely by a radiator 120 (not shown in FIG. 4). In particular, the heating mode can be used in a temperature range above the upper threshold temperature, i.e., for example, a temperature range from the upper threshold temperature to the maximum adjustable temperature of the sampler stage 110.

[0125] In an alternative embodiment not shown in the figures, the inlet circuit is arranged between the first heat exchanger and the second heat exchanger. Thus, the feedback and the temperature pre-regulation by means of the fed back temperature-regulating fluid can be used in the heat exchanger mode as well as in the booster mode. The remaining construction of this temperature-regulating apparatus and/or this sampler system can be configured analogously to the embodiments shown in FIG. 3 and/or FIG. 4.

[0126] With the sampler system and/or the temperature-regulating apparatus, a particularly efficient energy usage is enabled, as well as a rapid switching and setting of a changed testing temperature of the sampler stage 110. Furthermore, operating noise can be reduced.

LIST OF REFERENCE NUMERALS

[0127] 1 Temperature-regulating apparatus [0128] 10 Fluid inlet [0129] 11 Inlet line [0130] 11b Booster inlet line [0131] 11w Heat exchanger inlet line [0132] 20 First heat exchanger [0133] 21 Heat exchanger connection line [0134] 30 Second heat exchanger [0135] 31 Heat exchanger outlet line [0136] 35 Cooling apparatus [0137] 40 Sampler temperature-regulating line [0138] 41 Fluid outlet [0139] 42 Convergence [0140] 50 Feedback line [0141] 51 Feedback inlet [0142] 52 Feedback circuit inlet line [0143] 60 Feedback circuit [0144] 60′ Bifurcation [0145] 61 First outflow outlet [0146] 62 Second outflow outlet [0147] 63 Heat exchanger feedback line [0148] 64 First outflow line [0149] 65 Second outflow line [0150] 70 Cooling booster [0151] 71 Booster outlet line [0152] 72 Booster outflow outlet [0153] 73 Booster outflow line [0154] 80 Inlet fluid circuit [0155] 90 Control unit [0156] 100 Sampler container [0157] 110 Sampler stage [0158] 111 Temperature sensor [0159] 120 Radiator [0160] V1 Proportional valve [0161] V2 Switch valve [0162] V3 Sound damper valve [0163] V4 Discharge valve [0164] V5 Switch valve