Pt-OXIDE SPUTTERING TARGET AND PERPENDICULAR MAGNETIC RECORDING MEDIUM

Abstract

Provided is a magnetic recording medium having a large magnetocrystalline anisotropy constant K.sub.u and a high coercivity H.sub.c as well as a sputtering target used for producing such a magnetic recording medium.

A Pt-oxide-based sputtering target consists of 60 vol % or more and less than 100 vol % of a Pt-base alloy phase and more than 0 vol % and 40 vol % or less of an oxide, where the Pt-base alloy phase contains 50 at % or more and 100 at % or less of Pt.

Claims

1. A Pt-oxide-based sputtering target consisting of 60 vol % or more and less than 100 vol % of a Pt-base alloy phase and more than 0 vol % and 40 vol % or less of an oxide, wherein the Pt-base alloy phase contains 50 at % or more and 100 at % or less of Pt.

2. The Pt-oxide-based sputtering target according to claim 1, wherein the Pt-base alloy phase further contains, in total, 0 at % or more and 50 at % or less of one or more selected from Si, Ti, Cr, B, V, Nb, Ta, Ru, Mn, Zn, Mo, W, and Ge.

3. The Pt-oxide-based sputtering target according to claim 1, wherein the oxide is one or more selected from B.sub.2O.sub.3, WO.sub.3, Nb.sub.2O.sub.5, SiO.sub.2, Ta.sub.2O.sub.5, TiO.sub.2, Al.sub.2O.sub.3, Y.sub.2O.sub.3, Cr.sub.2O.sub.3, ZrO.sub.2, and HfO.sub.2.

4. A perpendicular magnetic recording medium comprising: a CoPt-base alloy-oxide granular magnetic layer containing Co-rich grains; and a Pt-base alloy-oxide thin layer containing Pt-rich grains and being stacked under the magnetic layer, wherein: the granular magnetic layer consists of 60 vol % or more and less than 100 vol % of a CoPt-base alloy phase and more than 0 vol % and 40 vol % or less of an oxide; the CoPt-base alloy phase of the magnetic layer contains 60 at % or more and 85 at % or less of Co and 15 at % or more and 40 at % or less of Pt; the Pt-base alloy-oxide thin layer has a thickness of more than 0 nm and 2 nm or less and consists of 60 vol % or more and less than 100 vol % of a Pt-base alloy phase and more than 0 vol % and 40 vol % or less of an oxide; and the Pt-base alloy phase of the Pt-base alloy-oxide thin layer contains 50 at % or more and 100 at % or less of Pt.

5. A perpendicular magnetic recording medium comprising: a CoPt-base alloy-oxide granular magnetic layer containing Co-rich grains; and a Pt-base alloy-oxide thin layer containing Pt-rich grains and being stacked on the magnetic layer, wherein: the granular magnetic layer consists of 60 vol % or more and less than 100 vol % of a CoPt-base alloy phase and more than 0 vol % and 40 vol % or less of an oxide; the CoPt-base alloy phase of the magnetic layer contains 60 at % or more and 85 at % or less of Co and 15 at % or more and 40 at % or less of Pt; the Pt-base alloy-oxide thin layer has a thickness of more than 0 nm and 4 nm or less and consists of 60 vol % or more and less than 100 vol % of a Pt-base alloy phase and more than 0 vol % and 40 vol % or less of an oxide; and the Pt-base alloy phase of the Pt-base alloy-oxide thin layer contains 50 at % or more and 100 at % or less of Pt.

6. A perpendicular magnetic recording medium comprising a plurality of combinations, each of which comprises: a CoPt-base alloy-oxide granular magnetic layer containing Co-rich grains; and a Pt-base alloy-oxide thin layer containing Pt-rich grains and being stacked on the magnetic layer, wherein: the granular magnetic layer consists of 60 vol % or more and less than 100 vol % of a CoPt-base alloy phase and more than 0 vol % and 40 vol % or less of an oxide; the CoPt-base alloy phase of the magnetic layer contains 60 at % or more and 85 at % or less of Co and 15 at % or more and 40 at % or less of Pt; the Pt-base alloy-oxide thin layer consists of 60 vol % or more and less than 100 vol % of a Pt-base alloy phase and more than 0 vol % and 40 vol % or less of an oxide; the Pt-base alloy phase of the Pt-base alloy-oxide thin layer contains 50 at % or more and 100 at % or less of Pt; and a total thickness of the Pt-base alloy-oxide thin layers included in the perpendicular magnetic recording medium is more than 0 nm and 4 nm or less.

7. The perpendicular magnetic recording medium according to claim 4, wherein the Pt-base alloy phase of the Pt-base alloy-oxide thin layer further contains, in total, 0 at % or more and 50 at % or less of one or more selected from Si, Ti, Cr, B, V, Nb, Ta, Ru, Mn, Zn, Mo, W, and Ge.

8. The perpendicular magnetic recording medium according to claim 4, wherein the Pt-base alloy-oxide thin layer contains, in total, 0 vol % or more and 40 vol % or less of one or more oxides selected from B.sub.2O.sub.3, WO.sub.3, Nb.sub.2O.sub.5, SiO.sub.2, Ta.sub.2O.sub.5, TiO.sub.2, Al.sub.2O.sub.3, Y.sub.2O.sub.3, Cr.sub.2O.sub.3, ZrO.sub.2, and HfO.sub.2.

9. The perpendicular magnetic recording medium according to claim 4, wherein the Pt-base alloy phase of the Pt-base alloy-oxide thin layer further contains, in total, 0 at % or more and 50 at % or less of one or more selected from Si, Ti, Cr, B, V, Nb, Ta, Ru, Mn, Zn, Mo, W, and Ge, and wherein the Pt-base alloy-oxide thin layer contains, in total, 0 vol % or more and 40 vol % or less of one or more oxides selected from B.sub.2O.sub.3, WO.sub.3, Nb.sub.2O.sub.5, SiO.sub.2, Ta.sub.2O.sub.5, TiO.sub.2, Al.sub.2O.sub.3, Y.sub.2O.sub.3, Cr.sub.2O.sub.3, ZrO.sub.2, and HfO.sub.2.

10. The perpendicular magnetic recording medium according to claim 5, wherein the Pt-base alloy phase of the Pt-base alloy-oxide thin layer further contains, in total, 0 at % or more and 50 at % or less of one or more selected from Si, Ti, Cr, B, V, Nb, Ta, Ru, Mn, Zn, Mo, W, and Ge.

11. The perpendicular magnetic recording medium according to claim 5, wherein the Pt-base alloy-oxide thin layer contains, in total, 0 vol % or more and 40 vol % or less of one or more oxides selected from B.sub.2O.sub.3, WO.sub.3, Nb.sub.2O.sub.5, SiO.sub.2, Ta.sub.2O.sub.5, TiO.sub.2, Al.sub.2O.sub.3, Y.sub.2O.sub.3, Cr.sub.2O.sub.3, ZrO.sub.2, and HfO.sub.2.

12. The perpendicular magnetic recording medium according to claim 5, wherein the Pt-base alloy phase of the Pt-base alloy-oxide thin layer further contains, in total, 0 at % or more and 50 at % or less of one or more selected from Si, Ti, Cr, B, V, Nb, Ta, Ru, Mn, Zn, Mo, W, and Ge, and wherein the Pt-base alloy-oxide thin layer contains, in total, 0 vol % or more and 40 vol % or less of one or more oxides selected from B.sub.2O.sub.3, WO.sub.3, Nb.sub.2O.sub.5, SiO.sub.2, Ta.sub.2O.sub.5, TiO.sub.2, Al.sub.2O.sub.3, Y.sub.2O.sub.3, Cr.sub.2O.sub.3, ZrO.sub.2, and HfO.sub.2.

13. The perpendicular magnetic recording medium according to claim 6, wherein the Pt-base alloy phase of the Pt-base alloy-oxide thin layer further contains, in total, 0 at % or more and 50 at % or less of one or more selected from Si, Ti, Cr, B, V, Nb, Ta, Ru, Mn, Zn, Mo, W, and Ge.

14. The perpendicular magnetic recording medium according to claim 6, wherein the Pt-base alloy-oxide thin layer contains, in total, 0 vol % or more and 40 vol % or less of one or more oxides selected from B.sub.2O.sub.3, WO.sub.3, Nb.sub.2O.sub.5, SiO.sub.2, Ta.sub.2O.sub.5, TiO.sub.2, Al.sub.2O.sub.3, Y.sub.2O.sub.3, Cr.sub.2O.sub.3, ZrO.sub.2, and HfO.sub.2.

15. The perpendicular magnetic recording medium according to claim 6, wherein the Pt-base alloy phase of the Pt-base alloy-oxide thin layer further contains, in total, 0 at % or more and 50 at % or less of one or more selected from Si, Ti, Cr, B, V, Nb, Ta, Ru, Mn, Zn, Mo, W, and Ge, and wherein the Pt-base alloy-oxide thin layer contains, in total, 0 vol % or more and 40 vol % or less of one or more oxides selected from B.sub.2O.sub.3, WO.sub.3, Nb.sub.2O.sub.5, SiO.sub.2, Ta.sub.2O.sub.5, TiO.sub.2, Al.sub.2O.sub.3, Y.sub.2O.sub.3, Cr.sub.2O.sub.3, ZrO.sub.2, and HfO.sub.2.

16. The Pt-oxide-based sputtering target according to claim 2, wherein the oxide is one or more selected from B.sub.2O.sub.3, WO.sub.3, Nb.sub.2O.sub.5, SiO.sub.2, Ta.sub.2O.sub.5, TiO.sub.2, Al.sub.2O.sub.3, Y.sub.2O.sub.3, Cr.sub.2O.sub.3, ZrO.sub.2, and HfO.sub.2.

Description

BRIEF DESCRIPTION OF DRAWINGS

[0026] FIG. 1 is a schematic vertical sectional view illustrating the stacked state of a Ru underlayer, a Pt-rich thin layer (Pt-rich buffer layer), and a Co-rich magnetic layer of a magnetic recording medium of the present invention.

[0027] FIG. 2 is a schematic vertical sectional view illustrating the stacked state of a Ru underlayer and a CoPt magnetic layer of a conventional magnetic recording medium.

[0028] FIG. 3-A schematically illustrates the stacking structure of a magnetic recording medium sample A prepared in Examples 1 to 108.

[0029] FIG. 3-B schematically illustrates the stacking structure of a magnetic recording medium sample B prepared in Examples 109 to 119.

[0030] FIG. 3-C schematically illustrates the stacking structure of a magnetic recording medium sample C prepared in Examples 120 to 122 and Comparative Example 16.

[0031] FIG. 4 is a graph showing the relationships between the magnetocrystalline anisotropy constant K.sub.u grain solely for magnetic grains of a magnetic recording medium sample and the thickness of the Pt-rich thin layer (Pt-rich buffer layer) measured in Examples 1 to 108.

[0032] FIG. 5 is a graph showing the relationships between the coercivity of a magnetic recording medium sample and the thickness of the Pt-rich thin layer (Pt-rich buffer layer) measured in Examples 1 to 108.

[0033] FIG. 6 is a graph showing the relationship between the magnetocrystalline anisotropy constant K.sub.u grain solely for magnetic grains of a magnetic recording medium sample and the oxide content in the Pt-rich thin layer (Pt-rich buffer layer) measured in Examples 1 to 108.

[0034] FIG. 7 is a graph showing the relationship between the magnetocrystalline anisotropy constant K.sub.u grain solely for magnetic grains of a magnetic recording medium sample and the thickness of the Co-rich magnetic layer measured in Examples 1 to 108.

[0035] FIG. 8 is a graph showing the relationship between the coercivity H.sub.c of a magnetic recording medium sample and the thickness of the Co-rich magnetic layer measured in Examples 1 to 108.

[0036] FIG. 9 is a graph showing the relationship between the magnetocrystalline anisotropy constant K.sub.u grain solely for magnetic grains of a magnetic recording medium sample and the Co content in the Co-rich magnetic layer measured in Examples 1 to 108.

[0037] FIG. 10 is a graph showing the relationship between the coercivity H.sub.c of a magnetic recording medium sample and the Co content in the Co-rich magnetic layer measured in Examples 1 to 108.

[0038] FIG. 11 is a graph showing the relationship between the magnetocrystalline anisotropy constant K.sub.u grain solely for magnetic grains of a magnetic recording medium sample and the thickness of the Pt-rich buffer layer (BL thickness) measured in Examples 120 to 122 and Comparative Examples 15 and 16.

[0039] FIG. 12 is a graph showing the relationship between the coercivity H.sub.c of a magnetic recording medium sample and the thickness of the Pt-rich buffer layer (BL thickness) measured in Examples 120 to 122 and Comparative Examples 15 and 16.

[0040] FIG. 13 is a graph showing the relationship between the magnetocrystalline anisotropy constant K.sub.u grain solely for magnetic grains of a magnetic recording medium sample and the total thickness of the Pt-rich buffer layers (total BL thickness) measured in Examples 111, 121, and 123 to 130 and Comparative Examples 15 and 17.

[0041] FIG. 14 is a graph showing the relationship between the coercivity H.sub.c of a magnetic recording medium sample and the total thickness of the Pt-rich buffer layers (total BL thickness) measured in Examples 111, 121, and 123 to 130 and Comparative Examples 15 and 17.

DESCRIPTION OF EMBODIMENTS

[0042] The present invention provides a Pt-oxide-based sputtering target consisting of 60 vol % or more of a Pt-base alloy phase and 40 vol % or less of an oxide. The Pt-oxide-based sputtering target preferably consists of 65 vol % or more (excluding 100 vol %) of a Pt-base alloy phase and 35 vol % or less (excluding 0 vol %) of an oxide and more preferably consists of 70 vol % or more and 90 vol % or less of a Pt-base alloy phase and 10 vol % or more and 30 vol % or less of an oxide.

[0043] The Pt-oxide-based sputtering target of the present invention is characterized in that the Pt-base alloy phase contains 50 at % or more (including 100 at %) of Pt. The Pt-base alloy phase preferably contains 60 at % or more and 100 at % or less of Pt and more preferably contains 70 at % or more and 100 at % or less of Pt.

[0044] The Pt-base alloy phase may further contain, in total, 50 at % or less (including 0 at %), preferably 0 at % or more and 40 at % or less, and more preferably 0 at % or more and 30 at % or less of one or more selected from Si, Ti, Cr, B, V, Nb, Ta, Ru, Mn, Zn, Mo, W, and Ge.

[0045] Examples of the preferable composition (at %) of the Pt-base alloy phase include the following.

[0046] (Pt)

[0047] (Pt95Si5)

[0048] (Pt95Ti5)

[0049] (Pt95 Cr5)

[0050] (Pt95B5)

[0051] (Pt95V5)

[0052] (Pt95Nb5)

[0053] (Pt95Ta5)

[0054] (Pt95Ru5)

[0055] (Pt95Mn5)

[0056] (Pt95Zn5)

[0057] (Pt95Mo5)

[0058] (Pt95W5)

[0059] (Pt95Ge5)

[0060] (Pt95Ti5)

[0061] (Pt80Ti10)

[0062] (Pt80Ti20)

[0063] (Pt70Ti30)

[0064] (Pt60Ti40)

[0065] (Pt50Ti50)

[0066] Preferable exemplary oxides of the Pt-oxide-based sputtering target of the present invention may be one or more selected from B.sub.2O.sub.3, WO.sub.3, Nb.sub.2O.sub.5, SiO.sub.2, Ta.sub.2O.sub.5, TiO.sub.2, Al.sub.2O.sub.3, Y.sub.2O.sub.3, Cr.sub.2O.sub.3, ZrO.sub.2, and HfO.sub.2. The oxide content may be set to, in total, 40 vol % or less (excluding 0 vol %), preferably 10 vol % or more and 40 vol % or less, more preferably 20 vol % or more and 40 vol % or less, and particularly preferably 25 vol % or more and 35 vol % or less.

[0067] The Pt-oxide-based sputtering target of the present invention preferably has a microstructure in which the Pt-base alloy phase and the oxide are finely dispersed. By finely dispersing the oxide, it is possible to reduce particles to be generated during sputtering.

[0068] The Pt-oxide-based sputtering target of the present invention can be produced by mixing Pt metal powder or Pt-base alloy atomized powder with oxide powder using a ball mill to prepare a mixed powder for sintering, followed by pressure sintering under vacuum at a sintering temperature of 1000° C. or higher and 1300° C. or lower.

[0069] The Pt-oxide-based sputtering target of the present invention can suitably be used for producing a perpendicular magnetic recording medium. For example, a novel perpendicular magnetic recording medium of the present invention can be produced by (1) stacking, using the Pt-oxide-based sputtering target of the present invention, a Pt-base alloy-oxide thin layer (Pt-rich buffer layer) on a Ru underlayer and further stacking thereon a granular magnetic layer, (2) stacking, using the Pt-oxide-based sputtering target of the present invention, a Pt-base alloy-oxide thin layer (Pt-rich buffer layer) on a granular magnetic layer stacked on a Ru underlayer, or (3) stacking, using the Pt-oxide-based sputtering target of the present invention, a Pt-base alloy-oxide thin layer (Pt-rich buffer layer) on a granular magnetic layer stacked on a Ru underlayer, then stacking a granular magnetic layer, stacking again, using the Pt-oxide-based sputtering target of the present invention, a Pt-base alloy-oxide thin layer (Pt-rich buffer layer), and repeating these steps.

[0070] The perpendicular magnetic recording medium of the present invention is characterized by including: a CoPt-base alloy-oxide granular magnetic layer containing Co-rich grains; and a Pt-base alloy-oxide thin layer containing Pt-rich grains and being stacked on or under the magnetic layer. In other words, it is important to stack Pt-rich grains on or under a magnetic layer containing Co-rich grains. As illustrated in FIG. 1, for example, a Pt-base alloy-oxide thin layer containing Pt-rich grains may be disposed between an underlayer containing Ru grains and a magnetic layer containing Co-rich grains. Alternatively, a magnetic layer containing Co-rich grains may be stacked on an underlayer containing Ru grains, and a Pt-base alloy-oxide thin layer containing Pt-rich grains may be stacked on the magnetic layer containing Co-rich grains. Alternatively, a magnetic layer containing Co-rich grains may be stacked on an underlayer containing Ru grains, a Pt-base alloy-oxide thin layer containing Pt-rich grains may be stacked on the magnetic layer containing Co-rich grains, and a magnetic layer containing Co-rich grains may be further stacked thereon. By providing a Pt-base alloy-oxide thin layer containing Pt-rich grains on or under a magnetic layer containing Co-rich grains, an oxide is present between Co-rich magnetic grains of the magnetic layer, between Pt-rich grains, and between Ru grains to form partition walls as illustrated in FIG. 1. Consequently, it is possible to well separate these grains and reduce magnetic interactions between the magnetic grains, thereby increasing the coercivity of the magnetic layer.

[0071] The granular magnetic layer of the perpendicular magnetic recording medium of the present invention consists of 60 vol % or more (excluding 100 vol %) of a CoPt-base alloy phase and 40 vol % or less (excluding 0 vol %) of an oxide. The magnetic layer preferably consists of 60 vol % or more and 90 vol % or less of a CoPt-base alloy phase and 10 vol % or more and 40 vol % or less of an oxide and more preferably consists of 70 vol % or more and 80 vol % or less of a CoPt-base alloy phase and 20 vol % or more and 30 vol % or less of an oxide.

[0072] The CoPt-base alloy phase of the granular magnetic layer comprises Co-rich grains containing 60 at % or more and 85 at % or less of Co and 15 at % or more and 40 at % or less of Pt. Co is a ferromagnetic metal element and plays a central role in the formation of granular magnetic grains (tiny magnets). Meanwhile, Pt acts to reduce the magnetic moment of the alloy phase and plays a role in adjusting the intensity of magnetism of the magnetic grains.

[0073] The CoPt-base alloy phase contains 60 at % or more and 85 at % or less, preferably 65 at % or more and 80 at % or less, and more preferably 70 at % or more and 75 at % or less of Co and 15 at % or more and 40 at % or less, preferably 20 at % or more and 35 at % or less, and more preferably 25 at % or more and 30 at % or less of Pt. The CoPt-base alloy phase may contain elements excluding Co and Pt unless the magnetic characteristics are impaired. Preferable examples of such other elements include Cr, Ru, B, Ti, Si, V, Nb, Ta, Ru Mn, Zn, Mo, W, and Ge. The content of other elements may be set to, in total, 0 at % or more and 20 at % or less, preferably 5 at % or more and 15 at % or less, and more preferably 5 at % or more and 10 at % or less.

[0074] Preferable examples of the CoPt-base alloy phase may include the composition (at %) below.

[0075] (Co80Pt20)

[0076] (Co85Pt15)

[0077] (Co70Pt30)

[0078] (Co60Pt40)

[0079] (Co75Pt20Cr5)

[0080] (Co75Pt20B5)

[0081] (Co75Pt20Ru5)

[0082] (Co75Pt20Ti5)

[0083] The oxide of the granular magnetic layer is present between Co-rich grains to form partition walls that separate the Co-rich grains. Preferable examples of the oxide may be at least one selected from B.sub.2O.sub.3, WO.sub.3, Nb.sub.2O.sub.5, SiO.sub.2, Ta.sub.2O.sub.5, TiO.sub.2, Cr.sub.2O.sub.3, Ge.sub.02, Al.sub.2O.sub.3, Y.sub.2O.sub.3, ZrO.sub.2, HfO.sub.2, and CoO or combinations thereof. The total oxide content may be set to 40 vol % or less (excluding 0 vol %), preferably 5 vol % or more and 40 vol % or less, and more preferably 10 vol % or more and 35 vol % or less.

[0084] The Pt-base alloy-oxide thin layer (Pt-rich buffer layer) stacked on or under the Co-rich magnetic layer consists of 60 vol % or more and less than 100 vol % of a Pt-base alloy phase and more than 0 vol % and 40 vol % or less of an oxide. The Pt-base alloy-oxide thin layer preferably consists of 65 vol % or more (excluding 100 vol %) of a Pt-base alloy phase and 35 vol % or less (excluding 0 vol %) of an oxide and more preferably consists of 70 vol % or more and 90 vol % or less of a Pt-base alloy phase and 10 vol % or more and 30 vol % or less of an oxide.

[0085] The Pt-base alloy phase of the Pt-base alloy-oxide thin layer (Pt-rich buffer layer) comprises Pt-rich grains containing 50 at % or more and 100 at % or less of Pt. By including 50 at % or more of Pt, it is possible to increase the magnetocrystalline anisotropy constant K.sub.u. The Pt-base alloy phase preferably contains 60 at % or more and 100 at % or less of Pt and more preferably contains 70 at % or more and 100 at % or less of Pt. The Pt-base alloy phase may contain elements excluding Pt unless the magnetic characteristics of the Co-rich magnetic layer are impaired. Preferable examples of such other elements may be one or more selected from Si, Ti, Cr, B, V, Nb, Ta, Ru, Mn, Zn, Mo, W, and Ge. The content of other elements may be set to, in total, 50 at % or less (including 0 at %), preferably 0 at % or more and 40 at % or less and more preferably 0 at % or more and 30 at % or less.

[0086] Examples of the preferable composition (at %) of the Pt-base alloy phase of the Pt-base alloy-oxide thin layer (Pt-rich buffer layer) may include the following.

[0087] (Pt)

[0088] (Pt95Si5)

[0089] (Pt95Ti5)

[0090] (Pt95 Cr5)

[0091] (Pt95B5)

[0092] (Pt95V5)

[0093] (Pt95Nb5)

[0094] (Pt95Ta5)

[0095] (Pt95Ru5)

[0096] (Pt95Mn5)

[0097] (Pt95Zn5)

[0098] (Pt95Mo5)

[0099] (Pt95W5)

[0100] (Pt95Ge.sub.5)

[0101] (Pt95Ti5)

[0102] (Pt80Ti10)

[0103] (Pt80Ti20)

[0104] (Pt70Ti30)

[0105] (Pt60Ti40)

[0106] (Pt50Ti50)

[0107] Preferable examples of the oxide of the Pt-base alloy-oxide thin layer (Pt-rich buffer layer) stacked on or under the Co-rich magnetic layer may be one or more selected from B.sub.2O.sub.3, WO.sub.3, Nb.sub.2O.sub.5, SiO.sub.2, Ta.sub.2O.sub.5, TiO.sub.2, Al.sub.2O.sub.3, Y.sub.2O.sub.3, Cr.sub.2O.sub.3, ZrO.sub.2, and HfO.sub.2. The oxide content may be set to, in total, 40 vol % or less (excluding 0 vol %), preferably 10 vol % or more and 40 vol % or less, more preferably 20 vol % or more and 40 vol % or less, and particularly preferably 25 vol % or more and 35 vol % or less. By setting the oxide content within the above-mentioned range, it is possible to increase the magnetocrystalline anisotropy constant K.sub.u of a magnetic recording medium (see the Examples section described hereinafter).

[0108] The Pt-base alloy-oxide thin layer (Pt-rich buffer layer) stacked under the Co-rich magnetic layer has a thickness of more than 0 nm and 2 nm or less. The studies by the present inventors revealed that the thickness of the Pt-rich Pt-base alloy-oxide thin layer (Pt-rich buffer layer) affects the coercivity and the magnetocrystalline anisotropy constant K.sub.u of a magnetic recording medium; the magnetocrystalline anisotropy constant K.sub.u reaches the maximum at the thickness of 0.6 nm; and the coercivity H.sub.c reaches the maximum at the thickness of 1.0 nm (see the Examples section described hereinafter). For these reasons, to produce a magnetic recording medium having a large magnetocrystalline anisotropy constant K.sub.u and a high coercivity H.sub.c, the thickness of the Pt-rich Pt-base alloy-oxide thin layer (Pt-rich buffer layer) is set to more than 0 nm and 2 nm or less, preferably 0.5 nm or more and 1.5 nm or less, and more preferably 0.8 nm or more and 1.2 nm or less.

[0109] The Pt-base alloy-oxide thin layer (Pt-rich buffer layer) stacked on the Co-rich magnetic layer has a thickness of more than 0 nm and 4 nm or less. The studies by the present inventors revealed that the thickness of the Pt-rich Pt-base alloy-oxide thin layer (Pt-rich buffer layer) affects the coercivity H.sub.c and the magnetocrystalline anisotropy constant K.sub.u of a magnetic recording medium; the magnetocrystalline anisotropy constant K.sub.u reaches the maximum at the thickness of 0.9 to 1.3 nm; and the coercivity H.sub.c reaches the maximum at the thickness of 2.6 nm (see the Examples section described hereinafter). For these reasons, to produce a magnetic recording medium having a large magnetocrystalline anisotropy constant K.sub.u and a high coercivity H.sub.c, the thickness of the Pt-rich Pt-base alloy-oxide thin layer (Pt-rich buffer layer) is set to more than 0 nm and 4 nm or less, preferably 0.4 nm or more and 3 nm or less, and more preferably 0.8 nm or more and 2.6 nm or less.

[0110] In the case of including a plurality of combinations, each of which comprises a Pt-base alloy-oxide thin layer (Pt-rich buffer layer) stacked on a Co-rich magnetic layer, the total thickness of such Pt-base alloy-oxide thin layers (Pt-rich buffer layers) is more than 0 nm and 4 nm or less. The studies by the present inventors revealed that the total thickness of the Pt-rich Pt-base alloy-oxide thin layers (Pt-rich buffer layers) affects the coercivity H.sub.c and the magnetocrystalline anisotropy constant K.sub.u of a magnetic recording medium; the magnetocrystalline anisotropy constant K.sub.u increases at the total thickness of 0.4 to 4 nm; the magnetocrystalline anisotropy constant K.sub.u reaches the maximum at the total thickness of 1.6 nm (=0.4 nm×4 layers); and the coercivity H.sub.c reaches the maximum at the total thickness of 0.4 nm (see the Examples section described hereinafter). For these reasons, to produce a magnetic recording medium having a large magnetocrystalline anisotropy constant K.sub.u and a high coercivity H.sub.c, the total thickness of the Pt-rich Pt-base alloy-oxide thin layers (Pt-rich buffer layers) is set to more than 0 nm and 4 nm or less, preferably 0.4 nm (=0.2 nm×2 layers) or more and 4 nm (=0.4 nm×10 layers) or less, more preferably 0.8 nm (=0.2 nm×4 layers or 0.4 nm×2 layers) or more and 3.2 nm (=0.32 nm×10 layers or 0.4 nm×8 layers) or less, and particularly preferably 1 nm or more and 3 nm or less. The stacking number is not limited provided that the total thickness of the Pt-rich Pt-base alloy-oxide thin layers (Pt-rich buffer layers) is more than 0 nm and 4 nm or less but is preferably one or more and ten or less and more preferably one or more and eight or less.

[0111] The underlayer of the perpendicular magnetic recording medium of the present invention is not particularly limited but is preferably a Ru underlayer of Ru-base alloy phase-oxide. Preferable examples include Ru—SiO.sub.2, Ru—TiO.sub.2, Ru—Ta.sub.2O.sub.5, Ru—B.sub.2O.sub.3, Ru—WO.sub.3, Ru—Nb.sub.2O.sub.5, Ru—MoO.sub.3, Ru—SnO, Ru—Cr.sub.2O.sub.3, RuCo—SiO.sub.2, RuCo—TiO.sub.2, RuCo—Ta.sub.2O.sub.5, RuCo—B.sub.2O.sub.3, RuCo—WO.sub.3, RuCo—Nb.sub.2O.sub.5, RuCo—MoO.sub.3, RuCo—SnO, RuCo—Cr.sub.2O.sub.3, RuCoCr—SiO.sub.2, RuCoCr—TiO.sub.2, RuCoCr—Ta.sub.2O.sub.5, RuCoCr—B.sub.2O.sub.3, RuCoCr—WO.sub.3, RuCoCr—Nb.sub.2O.sub.5, RuCoCr—MoO.sub.3, RuCoCr—SnO, RuCoCr—Cr.sub.2O.sub.3, RuTi—TiO.sub.2, RuTa—Ta.sub.2O.sub.5, RuB—B.sub.2O.sub.3, RuW—WO.sub.3, RuNb—Nb.sub.2O.sub.5, RuMo—MoO.sub.3, RuSn—SnO, and RuCr—Cr.sub.2O.sub.3.

[0112] The Pt-rich Pt-base alloy-oxide thin layer (Pt-rich buffer layer) of the perpendicular magnetic recording medium of the present invention can be formed by, for example, (1) after stacking a Ru underlayer, stacking through magnetron sputtering using the Pt-base alloy-oxide sputtering target of the present invention, (2) after stacking a Ru underlayer and a Co-rich magnetic layer, stacking through magnetron sputtering using the Pt-base alloy-oxide sputtering target of the present invention, or (3) after stacking a Ru underlayer and a Co-rich magnetic layer, stacking through magnetron sputtering using the Pt-base alloy-oxide sputtering target of the present invention, further stacking a Co-rich magnetic layer on the resulting Pt-rich buffer layer through magnetron sputtering using a Co-rich sputtering target, then stacking on the resulting Co-rich magnetic layer through magnetron sputtering using the Pt-base alloy-oxide sputtering target of the present invention, and repeating these steps.

Examples

[0113] Hereinafter, the present invention will be described further specifically by means of Examples and Comparative Examples.

[0114] [Preparation of Sputtering Targets]

[0115] Pt powder or Pt alloy atomized powder (hereinafter, referred to as “Pt-containing powder”) was classified through a sieve to obtain Pt-containing powder of 100 μm or less in particle size. To have the target composition shown in the “composition of Pt-rich layer” in each Example or Comparative Example below, the Pt-containing powder and an oxide powder were mixed in a ball mill to obtain a mixed powder for pressure sintering.

[0116] The mixed powder for pressure sintering was hot-pressed under conditions of a sintering temperature of 1000° C. or higher and 1300° C. or lower, a sintering pressure of 25 MPa, a sintering time of 60 minutes, and a sintering atmosphere of vacuum of 5×10.sup.−2 Pa or less to yield a sintered body. The sintered body was processed using a lathe or a surface grinder to prepare a sputtering target of 161.0 mm in diameter×4.0 mm in thickness.

[0117] Each raw material powder used for preparing a Pt-containing powder is as follows.

[0118] Pt metal powder

[0119] PtSi atomized powder

[0120] PtTi atomized powder

[0121] PtCr atomized powder

[0122] PtB atomized powder

[0123] PtV atomized powder

[0124] PtNb atomized powder

[0125] PtTa atomized powder

[0126] PtRu atomized powder

[0127] PtMn atomized powder

[0128] PtZn atomized powder

[0129] PtMo atomized powder

[0130] PtW atomized powder

[0131] PtGe atomized powder

[0132] [Preparation of Magnetic Recording Medium Samples A]

[0133] Each magnetic recording medium sample A was prepared by stacking on a Ru underlayer, through sputtering with a DC sputtering apparatus using the prepared sputtering target, a Pt-base alloy-oxide thin layer (Pt-rich buffer layer) having the composition shown in each Example or Comparative Example below at the thickness shown in each Example or Comparative Example and then stacking, on the resulting Pt-rich buffer layer, a Co-rich magnetic layer of CoPt-base alloy-oxide having the composition shown in each Example or Comparative Example at the thickness shown in each Example or Comparative Example.

[0134] As shown in FIG. 3-A, each magnetic recording medium sample A comprises, on a glass substrate, a Ta layer (5 nm, 0.6 Pa), a Ni90W10 seed layer (6 nm, 0.6 Pa), a Ru underlayer 1 (10 nm, 0.6 Pa), a Ru underlayer 2 (10 nm, 8.0 Pa), a Pt-rich layer (0 to 2.5 nm, 4 Pa), a Co-rich magnetic layer (0.5 to 16 nm, 4 Pa), and a C surface protective layer (7 nm, 0.6 Pa) stacked in this order. Here, the figures within the parentheses represent the thickness (nm) and the Ar atmosphere pressure (Pa) during sputtering. The Ru underlayer 2 is a layer stacked for forming a surface concavo-convex shape. The Pt-rich layer and the Co-rich magnetic layer were deposited at room temperature without elevating the temperature of the substrate.

[0135] [Preparation of Magnetic Recording Medium Samples B]

[0136] Each magnetic recording medium sample B was prepared, through sputtering with a DC sputtering apparatus using the prepared sputtering target, by stacking, on a Ru underlayer, a Co-rich magnetic layer of CoPt-base alloy-oxide having the composition shown in each Example or Comparative Example below at the thickness shown in each Example or Comparative Example and then stacking, on the resulting Co-rich magnetic layer, a Pt-base alloy-oxide thin layer (Pt-rich buffer layer) having the composition shown in each Example or Comparative Example at the thickness shown in each Example or Comparative Example.

[0137] As shown in FIG. 3-B, each magnetic recording medium sample B comprises, on a glass substrate, a Ta layer (5 nm, 0.6 Pa), a Ni90W10 seed layer (6 nm, 0.6 Pa), a Ru underlayer 1 (10 nm, 0.6 Pa), a Ru underlayer 2 (10 nm, 8.0 Pa), a Co-rich magnetic layer (0.5 to 16 nm, 4 Pa), a Pt-rich layer (0 to 2.6 nm, 4 Pa), and a C surface protective layer (7 nm, 0.6 Pa) stacked in this order. Here, the figures within the parentheses represent the thickness (nm) and the Ar atmosphere pressure (Pa) during sputtering. The Ru underlayer 2 is a layer stacked for forming a surface concavo-convex shape. The Pt-rich layer and the Co-rich magnetic layer were deposited at room temperature without elevating the temperature of the substrate.

[0138] [Preparation of Magnetic Recording Medium Samples C]

[0139] Each magnetic recording medium sample C was prepared, through sputtering with a DC sputtering apparatus using the prepared sputtering target, by stacking, on a Ru underlayer, a Co-rich magnetic layer of CoPt-base alloy-oxide having the composition shown in each Example or Comparative Example below at the thickness shown in each Example or Comparative Example, stacking, on the resulting Co-rich magnetic layer, a Pt-base alloy-oxide thin layer (Pt-rich buffer layer) having the composition shown in each Example or Comparative Example at the thickness shown in each Example or Comparative Example, and subsequently repeating stacking of a Co-rich magnetic layer and a Pt-rich buffer layer in the above-mentioned order three times.

[0140] As shown in FIG. 3-C, each magnetic recording medium sample C comprises, on a glass substrate, a Ta layer (5 nm, 0.6 Pa), a Ni90W10 seed layer (6 nm, 0.6 Pa), a Ru underlayer 1 (10 nm, 0.6 Pa), a Ru underlayer 2 (10 nm, 8.0 Pa), a Co-rich magnetic layer 1 (4 nm, 4 Pa), a Pt-rich layer 1 (0 to 0.8 nm, 4 Pa), a Co-rich magnetic layer 2 (4 nm, 4 Pa), a Pt-rich layer 2 (0 to 0.8 nm, 4 Pa), a Co-rich magnetic layer 3 (4 nm, 4 Pa), a Pt-rich layer 3 (0 to 0.8 nm, 4 Pa), a Co-rich magnetic layer 4 (4 nm, 4 Pa), a Pt-rich layer 4 (0 to 0.8 nm, 4 Pa), and a C surface protective layer (7 nm, 0.6 Pa) stacked in this order. Here, the figures within the parentheses represent the thickness (nm) and the Ar atmosphere pressure (Pa) during sputtering. The Ru underlayer 2 is a layer stacked for forming a surface concavo-convex shape. The Pt-rich layers and the Co-rich magnetic layers were deposited at room temperature without elevating the temperature of the substrate.

[0141] As for the magnetic characteristics of each magnetic recording medium sample, the coercivity H.sub.c was measured using a vibrating sample magnetometer (VSM: TM-VSM211483-HGC from Tamagawa Co., Ltd.), and the magnetocrystalline anisotropy constant K.sub.u was measured using a torque magnetometer (TM-TR2050-HGC from Tamagawa Co., Ltd.).

[0142] [Magnetic Characteristics and Thickness of Pt-rich Buffer Layer (1)]

[0143] The magnetic characteristics were investigated in Comparative Examples 1 and 2 as well as Examples 1 to 9 by changing the thickness of the Pt-rich buffer layer from 0 nm to 2.5 nm.

[0144] Here, the Pt-rich buffer layer was Pt-30 vol % TiO.sub.2, and the Co-rich magnetic layer was Co80Pt20-30 vol % B.sub.2O.sub.3 of 16 nm in thickness. The results are shown in Table 1 and FIGS. 4 and 5. In the table and the figures, K.sub.u grain represents the magnetocrystalline anisotropy constant (K.sub.u) for the respective magnetic grains.

[0145] [Table 1]

TABLE-US-00001 TABLE 1 Magnetic Characteristics and Thickness of Pt-rich Layer (Pt-30 vol % TiO.sub.2) Thickness of Thickness of Pt-rich Co-rich buffer layer magnetic layer K.sub.u grain H.sub.c (nm) (nm) (×10.sup.7 erg/cm.sup.3) (kOe) Comp. Ex. 1 0 16 1.23 8.53 Ex. 1 0.1 16 1.30 8.75 Ex. 2 0.2 16 1.33 8.95 Ex. 3 0.4 16 1.36 9.39 Ex. 4 0.6 16 1.38 9.65 Ex. 5 0.8 16 1.37 9.87 Ex. 6 1.0 16 1.34 9.94 Ex. 7 1.2 16 1.32 9.90 Ex. 8 1.5 16 1.30 9.39 Ex. 9 2.0 16 1.27 8.85 Comp. Ex. 2 2.5 16 1.23 8.51

[0146] It was confirmed that both magnetocrystalline anisotropy constant K.sub.u grain and coercivity H.sub.c increase relative to those of Comparative Example 1, in which no Pt-rich buffer layer is provided, when the thickness of the Pt-rich buffer layer is 0.1 nm or more and 2.0 nm or less and become comparable to those of Comparative Example 1 when the thickness reaches 2.5 nm. Meanwhile, it is found that the magnetocrystalline anisotropy constant K.sub.u grain reaches the largest of 1.38×10.sup.7 erg/cm.sup.3 when the thickness is 0.6 nm and remains large as 1.30×10.sup.7 erg/cm.sup.3 or more when the thickness falls within the range of 0.1 nm or more and 1.5 nm or less. Moreover, it is found that the coercivity H.sub.c reaches the highest of 9.94 kOe when the thickness is 1.0 nm and remains high as 9.39 kOe or more when the thickness falls within the range of 0.4 nm or more and 1.5 nm or less.

[0147] [Magnetic Characteristics and Thickness of Pt-rich Buffer Layer (2)]

[0148] The magnetic characteristics were investigated in Comparative Examples 1 and 3 as well as Examples 10 to 18 by changing the thickness of the Pt-rich buffer layer from 0 nm to 2.5 nm.

[0149] Here, the Pt-rich buffer layer was Pt-30 vol % SiO.sub.2, and the Co-rich magnetic layer was Co80Pt20-30 vol % B.sub.2O.sub.3 of 16 nm in thickness. The results are shown in Table 2 and FIGS. 4 and 5.

TABLE-US-00002 TABLE 2 Magnetic Characteristics and Thickness of Pt-rich Buffer Layer (Pt-30 vol % SiO.sub.2) Thickness of Thickness of Pt-rich Co-rich buffer layer magnetic layer K.sub.u grain H.sub.c (nm) (nm) (×10.sup.7 erg/cm.sup.3) (kOe) Comp. Ex. 1 0 16 1.23 8.53 Ex. 10 0.1 16 1.28 8.60 Ex. 11 0.2 16 1.30 8.70 Ex. 12 0.4 16 1.33 8.85 Ex. 13 0.6 16 1.36 9.15 Ex. 14 0.8 16 1.37 9.30 Ex. 15 1.0 16 1.38 9.35 Ex. 16 1.2 16 1.36 9.20 Ex. 17 1.5 16 1.33 8.90 Ex. 18 2.0 16 1.28 8.70 Comp. Ex. 3 2.5 16 1.23 8.52

[0150] It was confirmed that both magnetocrystalline anisotropy constant K.sub.u grain and coercivity H.sub.c increase relative to those of Comparative Example 1, in which no Pt-rich buffer layer is provided, when the thickness of the Pt-rich buffer layer is 0.1 nm or more and 2.0 nm or less and become comparable to those of Comparative Example 1 when the thickness reaches 2.5 nm. Meanwhile, it is found that the magnetocrystalline anisotropy constant K.sub.u grain reaches the largest of 1.38×10.sup.7 erg/cm.sup.3 when the thickness is 1.0 nm and remains large as 1.30×10.sup.7 erg/cm.sup.3 or more when the thickness falls within the range of 0.2 nm or more and less than 2.0 nm. Moreover, it is found that the coercivity H.sub.c reaches the highest of 9.35 kOe when the thickness is 1.0 nm and remains high as 8.90 kOe or more when the thickness falls within the range of more than 0.4 nm and 1.5 nm or less.

[0151] Further, as shown in FIGS. 4 and 5, it is revealed that both magnetocrystalline anisotropy constant K.sub.u grain and coercivity H.sub.c increase compared with those of Comparative Example 1 regardless of the types of oxides when the thickness of the Pt-rich buffer layer falls within the range of more than 0 nm and 2 nm or less.

[0152] [Magnetic Characteristics and Oxide (TiO.sub.2) Content in Pt-rich Buffer Layer]

[0153] The magnetic characteristics were investigated in Comparative Examples 4 to 6 and Examples 19 to 25 by changing the oxide (TiO.sub.2) content in the Pt-rich layer from 0 vol % to 45 vol %.

[0154] Here, the Pt-rich buffer layer was Pt—TiO.sub.2 of 1.0 nm in thickness, and the Co-rich magnetic layer was Co80Pt20-30 vol % B.sub.2O.sub.3 of 16 nm in thickness. The results are shown in Table 3 and FIG. 6.

TABLE-US-00003 TABLE 3 Magnetic Characteristics and Oxide Content in Pt-rich Buffer Layer Composition of K.sub.u grain H.sub.c Pt-rich buffer layer (×10.sup.7 erg/cm.sup.3) (kOe) Comp. Ex. 4 Pt 1.26 7.70 Comp. Ex. 5 Pt-5 vol % TiO.sub.2 1.29 8.52 Ex. 19 Pt-10 vol % TiO.sub.2 1.33 8.85 Ex. 20 Pt-15 vol % TiO.sub.2 1.35 8.95 Ex. 21 Pt-20 vol % TiO.sub.2 1.36 9.23 Ex. 22 Pt-25 vol % TiO.sub.2 1.37 9.45 Ex. 23 Pt-30 vol % TiO.sub.2 1.38 9.94 Ex. 24 Pt-35 vol % TiO.sub.2 1.38 10.1 Ex. 25 Pt-40 vol % TiO.sub.2 1.35 9.85 Comp. Ex. 6 Pt-45 vol % TiO.sub.2 1.27 7.95

[0155] It was confirmed that both magnetocrystalline anisotropy constant K.sub.u grain and coercivity H.sub.c increase relative to those of Comparative Example 4, in which the Pt-rich buffer layer contains no oxide, when the oxide content in the Pt-rich buffer layer is 10 vol % or more and 40 vol % or less and become comparable to those of Comparative Example 1 when the oxide content reaches 45 vol %. Meanwhile, it is found that the magnetocrystalline anisotropy constant K.sub.u grain remains extremely large as 1.35×10.sup.7 erg/cm.sup.3 or more and 1.38×10.sup.7 erg/cm.sup.3 or less when the oxide content falls within the range of 15 vol % or more and 40 vol % or less. Moreover, it is found that the coercivity H.sub.c reaches the highest of 10.1 kOe when the oxide content is 35 vol % and remains high as 8.95 kOe or more when the oxide content falls within the range of 15 vol % or more and 40 vol % or less.

[0156] Further, as shown in FIG. 6, it is revealed that both magnetocrystalline anisotropy constant K.sub.u grain and coercivity H.sub.c increase regardless of the types of oxides when the oxide content is 10 vol % or more and 40 vol % or less.

[0157] [Magnetic Characteristics and Oxide (SiO.sub.2) Content in Pt-rich Buffer Layer]

[0158] The magnetic characteristics were investigated in Comparative Examples 4, 7, and 8 as well as Examples 26 to 32 by changing the oxide (SiO.sub.2) content in the Pt-rich buffer layer from 0 vol % to 45 vol %.

[0159] Here, the Pt-rich buffer layer was Pt—SiO.sub.2 of 1.0 nm in thickness, and the Co-rich magnetic layer was Co80Pt20-30 vol % B.sub.2O.sub.3 of 16 nm in thickness. The results are shown in Table 4 and FIG. 6.

TABLE-US-00004 TABLE 4 Magnetic Characteristics and Oxide Content in Pt-rich Buffer Layer Composition of K.sub.u grain H.sub.c Pt-rich buffer layer (×10.sup.7 erg/cm.sup.3) (kOe) Comp. Ex. 4 Pt 1.26 7.70 Comp. Ex. 7 Pt-5 vol % SiO.sub.2 1.28 8.49 Ex. 26 Pt-10 vol % SiO.sub.2 1.32 8.75 Ex. 27 Pt-15 vol % SiO.sub.2 1.34 8.95 Ex. 28 Pt-20 vol % SiO.sub.2 1.35 9.10 Ex. 29 Pt-25 vol % SiO.sub.2 1.37 9.25 Ex. 30 Pt-30 vol % SiO.sub.2 1.38 9.35 Ex. 31 Pt-35 vol % SiO.sub.2 1.38 9.55 Ex. 32 Pt-40 vol % SiO.sub.2 1.34 9.25 Comp. Ex. 8 Pt-45 vol % SiO.sub.2 1.27 7.85

[0160] It was confirmed that both magnetocrystalline anisotropy constant K.sub.u grain and coercivity H.sub.c increase relative to those of Comparative Example 4, in which the Pt-rich buffer layer contains no oxide, when the oxide content in the Pt-rich buffer layer is 10 vol % or more and 40 vol % or less and become comparable to those of Comparative Example 1 when the oxide content reaches 45 vol %. Meanwhile, it is found that the magnetocrystalline anisotropy constant K.sub.u grain remains extremely large as 1.34×10.sup.7 erg/cm.sup.3 or more and 1.38×10.sup.7 erg/cm.sup.3 or less when the oxide content falls within the range of 15 vol % or more and 40 vol % or less. Moreover, it is found that the coercivity H.sub.c reaches the highest of 9.55 kOe when the oxide content is 35 vol % and remains high as 8.95 kOe or more when the oxide content falls within the range of 15 vol % or more and 40 vol % or less.

[0161] [Magnetic Characteristics and Types of Oxides in Pt-rich Buffer Layer]

[0162] The magnetic characteristics were investigated in Comparative Example 1 and Examples 33 to 43 by changing oxides in the Pt-rich buffer layer.

[0163] Here, the Pt-rich buffer layer had a thickness of 1.0 nm, and the Co-rich magnetic layer was Co80Pt20-30 vol % B.sub.2O.sub.3 of 16 nm in thickness. The results are shown in Table 5.

TABLE-US-00005 TABLE 5 Magnetic Characteristics and Types of Oxides in Pt-rich Buffer Layer Composition of K.sub.u grain H.sub.c Pt-rich buffer layer (×10.sup.7 erg/cm.sup.3) (kOe) Comp. Ex. 1 — 1.23 8.53 Ex. 33 Pt-30 vol % B.sub.2O.sub.3 1.33 8.95 Ex. 34 Pt-30 vol % WO.sub.3 1.35 9.15 Ex. 35 Pt-30 vol % Nb.sub.2O.sub.5 1.36 9.20 Ex. 36 Pt-30 vol % SiO.sub.2 1.38 9.35 Ex. 37 Pt-30 vol % Ta.sub.2O.sub.5 1.39 9.63 Ex. 38 Pt-30 vol % TiO.sub.2 1.38 9.94 Ex. 39 Pt-30 vol % Al.sub.2O.sub.3 1.39 10.12 Ex. 40 Pt-30 vol % Y.sub.2O.sub.3 1.41 10.21 Ex. 41 Pt-30 vol % CrO.sub.3 1.41 10.12 Ex. 42 Pt-30 vol % ZrO.sub.2 1.42 10.07 Ex. 43 Pt-30 vol % HfO.sub.2 1.39 9.98 Ex. 44 Pt-15 vol % TiO.sub.2-15 vol % B.sub.2O.sub.3 1.37 9.62 Ex. 45 Pt-15 vol % TiO.sub.2-15 vol % WO.sub.3 1.36 9.71 Ex. 46 Pt-15 vol % TiO.sub.2-15 vol % Nb.sub.2O.sub.5 1.35 9.52 Ex. 47 Pt-15 vol % TiO.sub.2-15 vol % SiO.sub.2 1.37 9.97 Ex. 48 Pt-15 vol % TiO.sub.2-15 vol % Ta.sub.2O.sub.5 1.36 9.98 Ex. 49 Pt-15 vol % TiO.sub.2-15 vol % Al.sub.2O.sub.3 1.35 9.77 Ex. 50 Pt-15 vol % TiO.sub.2-15 vol % Y.sub.2O.sub.3 1.35 9.98 Ex. 51 Pt-15 vol % TiO.sub.2-15 vol % Cr.sub.2O.sub.3 1.35 9.67 Ex. 52 Pt-15 vol % TiO.sub.2-15 vol % ZrO.sub.2 1.36 9.98 Ex. 53 Pt-15 vol % TiO.sub.2-15 vol % HfO.sub.2 1.35 9.98

[0164] Relative to Comparative Example 1, in which no Pt-rich buffer layer is provided, it was confirmed that Examples 33 to 53, in which a Pt-rich buffer layer is provided, exhibit both a large magnetocrystalline anisotropy constant K.sub.u grain and a high coercivity H.sub.c regardless of the types of oxides or even when a plurality of oxides are contained.

[0165] [Magnetic Characteristics and Types of Additional Elements in Pt-rich Buffer Layer]

[0166] The magnetic characteristics were investigated in Comparative Example 1 and Examples 54 to 66 by changing additional elements in the Pt-base alloy of the Pt-rich buffer layer.

[0167] Here, the Pt-rich buffer layer was Pt95M5-30 vol % TiO.sub.2 (M represents an additional element) of 1.0 nm in thickness, and the Co-rich magnetic layer was Co80Pt20-30 vol % B.sub.2O.sub.3 of 16 nm in thickness. The results are shown in Table 6.

TABLE-US-00006 TABLE 6 Magnetic Characteristics and Types of Additional Elements in Pt-rich Buffer Layer Composition of K.sub.u grain H.sub.c Pt-rich buffer layer (×10.sup.7 erg/cm.sup.3) (kOe) Comp. Ex. 1 — 1.23 8.53 Ex. 54 Pt95Si5-30 vol % TiO.sub.2 1.35 9.35 Ex. 55 Pt95Ti5-30 vol % TiO.sub.2 1.37 9.75 Ex. 56 Pt95Cr5-30 vol % TiO.sub.2 1.34 9.45 Ex. 57 Pt95B5-30 vol % TiO.sub.2 1.38 10.32 Ex. 58 Pt95V5-30 vol % TiO.sub.2 1.38 10.14 Ex. 59 Pt95Nb5-30 vol % TiO.sub.2 1.37 9.89 Ex. 60 Pt95Ta5-30 vol % TiO.sub.2 1.36 10.13 Ex. 61 Pt95Ru5-30 vol % TiO.sub.2 1.39 9.85 Ex. 62 Pt95Mn5-30 vol % TiO.sub.2 1.37 10.04 Ex. 63 Pt95Zn5-30 vol % TiO.sub.2 1.37 9.98 Ex. 64 Pt95Mo5-30 vol % TiO.sub.2 1.39 10.01 Ex. 65 Pt95W5-30 vol % TiO.sub.2 1.39 10.05 Ex. 66 Pt95Ge5-30 vol % TiO.sub.2 1.36 10.08

[0168] Relative to Comparative Example 1, in which no Pt-rich buffer layer is provided, it was confirmed that Examples 54 to 66, in which a Pt-rich buffer layer is provided, exhibit both a large magnetocrystalline anisotropy constant K.sub.u grain and a high coercivity H.sub.c regardless of the types of additional elements.

[0169] [Magnetic Characteristics and Pt Content in Pt-rich Buffer Layer]

[0170] The magnetic characteristics were investigated in Comparative Examples 1 and 9 as well as Examples 67 to 73 by changing the Pt content in the Pt-rich buffer layer.

[0171] Here, the Pt-rich buffer layer was PtTi-30 vol % TiO.sub.2 of 1.0 nm in thickness, and the Co-rich magnetic layer was Co80Pt20-30 vol % B.sub.2O.sub.3 of 16 nm in thickness. The results are shown in Table 7.

TABLE-US-00007 TABLE 7 Magnetic Characteristics and Pt Content in Pt-rich Buffer Layer Composition of K.sub.u grain H.sub.c Pt-rich buffer layer (×10.sup.7 erg/cm.sup.3) (kOe) Comp. Ex. 1 — 1.23 8.53 Ex. 67 Pt-30 vol % TiO.sub.2 1.38 9.94 Ex. 68 Pt95Ti5-30 vol % TiO.sub.2 1.37 9.75 Ex. 69 Pt80Til0-30 vol % TiO.sub.2 1.35 9.63 Ex. 70 Pt80Ti20-30 vol % TiO.sub.2 1.32 9.52 Ex. 71 Pt70Ti30-30 vol % TiO.sub.2 1.28 9.34 Ex. 72 Pt60Ti40-30 vol % TiO.sub.2 1.26 9.03 Ex. 73 Pt50Ti50-30 vol % TiO.sub.2 1.24 8.75 Comp. Ex. 9 Pt45Ti55-30 vol % TiO.sub.2 1.19 8.23

[0172] It was confirmed that the magnetocrystalline anisotropy constant K.sub.u grain and the coercivity H.sub.c increase relative to those of Comparative Example 1, in which no Pt-rich buffer layer is provided, as the Pt content in the Pt-rich buffer layer increases and decrease to be comparable to those of Comparative Example 1 when the Pt content is 45 at % in Comparative Example 9.

[0173] [Magnetic Characteristics and Thickness of Co-rich Magnetic Layer]

[0174] The magnetic characteristics and the thickness of the Co-rich magnetic layer were investigated in Examples 74 to 78.

[0175] Here, the Pt-rich buffer layer was Pt-30 vol % TiO.sub.2 of 1.0 nm in thickness, and the Co-rich magnetic layer was Co80Pt20-30 vol % B.sub.2O.sub.3. The results are shown in Table 8 and FIGS. 7 and 8.

TABLE-US-00008 TABLE 8 Magnetic Characteristics and Thickness of Co-rich Magnetic Layer Thickness of Co-rich magnetic layer K.sub.u grain H.sub.c (nm) (×10.sup.7 erg/cm.sup.3) (kOe) Ex. 74 1 1.61 0.24 Ex. 75 2 1.53 0.57 Ex. 76 4 1.45 1.83 Ex. 77 8 1.42 5.30 Ex. 78 16 1.38 9.94

[0176] It was confirmed that the magnetocrystalline anisotropy constant K.sub.u grain slightly decreases but the coercivity H.sub.c increases as the thickness of the Co-rich magnetic layer increases.

[0177] [Magnetic Characteristics and Oxide Content in Co-rich Magnetic Layer]

[0178] The magnetic characteristics and the oxide content in the Co-rich magnetic layer were investigated in Comparative Examples 10 and 11 as well as Examples 79 to 82.

[0179] Here, the Pt-rich buffer layer was Pt-30 vol % TiO.sub.2 of 1.0 nm in thickness, and the Co-rich magnetic layer was Co80Pt20-B.sub.2O.sub.3 of 16 nm in thickness. The results are shown in Table 9.

TABLE-US-00009 TABLE 9 Magnetic Characteristics and Oxide Content in Co-rich Magnetic Layer Composition of K.sub.u grain H.sub.c Co-rich magnetic layer (×10.sup.7 erg/cm.sup.3) (kOe) Comp. Ex. 10 Co80Pt20 1.29 0.30 Ex. 79 Co80Pt20-10 vol % B.sub.2O.sub.3 1.47 5.41 Ex. 80 Co80Pt20-20 vol % B.sub.2O.sub.3 1.43 8.54 Ex. 81 Co80Pt20-30 vol % B.sub.2O.sub.3 1.38 9.94 Ex. 82 Co80Pt20-40 vol % B.sub.2O.sub.3 1.36 10.37 Comp. Ex. 11 Co80Pt20-45 vol % B.sub.2O.sub.3 1.31 9.37

[0180] It was confirmed that the magnetocrystalline anisotropy constant K.sub.u grain decreases but the coercivity H.sub.c increases as the oxide content in the Co-rich magnetic layer increases within the range of 10 vol % or more and 40 vol % or less. When the oxide content is 45 vol %, the coercivity H.sub.c is high but the magnetocrystalline anisotropy constant K.sub.u grain is comparable to that of Comparative Example 10, in which no oxide is contained.

[0181] [Magnetic Characteristics and Types of Oxides in Co-rich Magnetic Layer]

[0182] The magnetic characteristics and the types of oxides in the Co-rich magnetic layer were investigated in Examples 83 to 99.

[0183] Here, the Pt-rich buffer layer was Pt-30 vol % TiO.sub.2 of 1.0 nm in thickness, and the Co-rich magnetic layer was Co80Pt20-30 vol % XO (XO represents an oxide) of 16 nm in thickness. The results are shown in Table 10.

TABLE-US-00010 TABLE 10 Magnetic Characteristics and Types of Oxides in Co-rich Magnetic Layer Composition of K.sub.u grain H.sub.c Co-rich magnetic layer (×10.sup.7 erg/cm.sup.3) (kOe) Ex. 83 Co80Pt20-30 vol % B.sub.2O.sub.3 1.38 9.94 Ex. 84 Co80Pt20-30 vol % WO.sub.3 1.35 8.85 Ex. 85 Co80Pt20-30 vol % Nb.sub.2O.sub.5 1.30 8.75 Ex. 86 Co80Pt20-30 vol % SiO.sub.2 1.31 8.61 Ex. 87 Co80Pt20-30 vol % Ta.sub.2O.sub.5 1.32 8.61 Ex. 88 Co80Pt20-30 vol % TiO.sub.2 1.34 8.71 Ex. 89 Co80Pt20-15 vol % B.sub.2O.sub.3-15 vol % TiO.sub.2 1.37 10.14 Ex. 90 Co80Pt20-15 vol % B.sub.2O.sub.3-15 vol % SiO.sub.2 1.35 10.15 Ex. 91 Co80Pt20-15 vol % B.sub.2O.sub.3-15 vol % Cr.sub.2O.sub.3 1.39 9.75 Ex. 92 Co80Pt20-15 vol % B.sub.2O.sub.3-15 vol % WO.sub.3 1.35 9.96 Ex. 93 Co80Pt20-15 vol % B.sub.2O.sub.3-15 vol % Nb.sub.2O.sub.5 1.37 9.81 Ex. 94 Co80Pt20-15 vol % B.sub.2O.sub.3-15 vol % Ta.sub.2O.sub.5 1.36 10.17 Ex. 95 Co80Pt20-10 vol % B.sub.2O.sub.3-10 vol % TiO.sub.2-10 vol % SiO.sub.2 1.38 9.94 Ex. 96 Co80Pt20-10 vol % B.sub.2O.sub.3-10 vol % SiO.sub.2-10 vol % Cr.sub.2O.sub.3 1.39 9.85 Ex. 97 Co80Pt20-10 vol % B.sub.2O.sub.3-10 vol % TiO.sub.2-10 vol % Cr.sub.2O.sub.3 1.39 9.75 Ex. 98 Co80Pt20-10 vol % B.sub.2O.sub.3-10 vol % SiO.sub.2-10 vol % CoO 1.38 9.61 Ex. 99 Co80Pt20-10 vol % B.sub.2O.sub.3-10 vol % TiO.sub.2-10 vol % CoO 1.39 9.63

[0184] A large magnetocrystalline anisotropy constant K.sub.u grain and a high coercivity H.sub.c were confirmed regardless of the types of oxides in the Co-rich magnetic layer or even when a plurality of oxides are contained.

[0185] [Magnetic Characteristics and Co Content in Co-rich Magnetic Layer]

[0186] The magnetic characteristics and the Co content in the Co-rich magnetic layer were investigated in Comparative Examples 12 to 14 and Examples 100 to 103.

[0187] Here, the Pt-rich buffer layer was Pt-30 vol % TiO.sub.2 of 1.0 nm in thickness, and the Co-rich magnetic layer was CoPt-30 vol % B.sub.2O.sub.3 of 16 nm in thickness. The results are shown in Table 11 and FIGS. 9 and 10.

TABLE-US-00011 TABLE 11 Magnetic Characteristics and Co Content in Co-rich Magnetic Layer Composition of K.sub.u grain H.sub.c Co-rich magnetic layer (×10.sup.7 erg/cm.sup.3) (kOe) Comp. Ex. 12 Co-30 vol % B.sub.2O.sub.3 0.33 0.87 Comp. Ex. 13 Co90Pt10-30 vol % B.sub.2O.sub.3 0.81 5.30 Ex. 100 Co85Pt15-30 vol % B.sub.2O.sub.3 1.25 8.72 Ex. 101 Co80Pt20-30 vol % B.sub.2O.sub.3 1.34 9.94 Ex. 102 Co70Pt30-30 vol % B.sub.2O.sub.3 1.51 10.61 Ex. 103 Co60Pt40-30 vol % B.sub.2O.sub.3 1.31 9.12 Comp. Ex. 14 Co55Pt45-30 vol % B.sub.2O.sub.3 0.92 6.76

[0188] It was confirmed that the magnetocrystalline anisotropy constant K.sub.u grain remains large as 1.25×10.sup.7 erg/cm.sup.3 or more and the coercivity H.sub.c remains high as 8.72 kOe or more when the Co content in the Co-rich magnetic layer falls within the range of 60 at % or more and 85 at % or less.

[0189] [Magnetic Characteristics and Types of Additional Elements in Co-rich Magnetic Layer]

[0190] The magnetic characteristics and the types of additional elements in the Co-rich magnetic layer were investigated in Examples 104 to 107.

[0191] Here, the Pt-rich layer was Pt-30 vol % TiO.sub.2 of 1.0 nm in thickness, and the Co-rich magnetic layer was CoPtM-30 vol % B.sub.2O.sub.3 (M represents an additional element) of 16 nm in thickness. The results are shown in Table 12.

TABLE-US-00012 TABLE 12 Magnetic Characteristics and Types of Additional Elements in Co-rich Magnetic Layer Composition of K.sub.u grain H.sub.c Co-rich magnetic layer (×10.sup.7 erg/cm.sup.3) (kOe) Ex. 104 Co75Pt20Cr5-30 vol % B.sub.2O.sub.3 1.31 10.15 Ex. 105 Co75Pt20B5-30 vol % B.sub.2O.sub.3 1.38 10.25 Ex. 106 Co75Pt20Ru5-30 vol % B.sub.2O.sub.3 1.36 9.59 Ex. 107 Co75Pt20Ti5-30 vol % B.sub.2O.sub.3 1.33 10.05

[0192] A large magnetocrystalline anisotropy constant K.sub.u grain and a high coercivity H.sub.c were confirmed regardless of the types of additional elements in the Co-rich magnetic layer.

[0193] [Magnetic Characteristics and Stacked Position of Pt-rich Buffer Layer]

[0194] The magnetic characteristics and the stacked position of the Pt-rich buffer layer were investigated in Comparative Example 1 and Examples 108 and 109.

[0195] Here, the Pt-rich buffer layer was Pt-30 vol % TiO.sub.2 of 1.0 nm in thickness, and the Co-rich magnetic layer was CoPt-30 vol % B.sub.2O.sub.3 of 16 nm in thickness. The results are shown in Table 13.

TABLE-US-00013 TABLE 13 Magnetic Characteristics and Stacked Position of Pt-rich Buffer Layer Stacked position of K.sub.u grain H.sub.c Pt-rich buffer layer (×10.sup.7 erg/cm.sup.3) (kOe) Comp. Ex. 1 — 1.23 8.53 Ex. 108 under Co-rich magnetic layer 1.38 9.94 Ex. 109 on Co-rich magnetic layer 1.38 8.95

[0196] It was confirmed that both magnetocrystalline anisotropy constant K.sub.u grain and coercivity H.sub.c increase compared with those of Comparative Example 1, in which no Pt-rich buffer layer is stacked, in either case of stacking the Pt-rich buffer layer under or on the Co-rich magnetic layer; the magnetocrystalline anisotropy constant K.sub.u grain is the same value in either case; and the coercivity H.sub.c is higher in the case of stacking under the Co-rich magnetic layer.

[0197] [Stacked Position and Thickness of Pt-rich Buffer Layer and Magnetic Characteristics]

[0198] The stacked position and thickness of the Pt-rich buffer layer and the magnetic characteristics were investigated in Comparative Examples 15 and 16 as well as Examples 110 to 122.

[0199] Here, the Pt-rich buffer layer was Pt-30 vol % SiO.sub.2, and the Co-rich magnetic layer was Co80Pt20-30 vol % B.sub.2O.sub.3. The thickness of the Co-rich magnetic layer was set to 16 nm in Examples 110 to 119, and the thickness of the Co-rich magnetic layers was set to 4 nm for each layer and 16 nm in total in Examples 120 to 122 and Comparative Examples 15 and 16. The results are shown in Table 14. Moreover, the relationship between the thickness of the Pt-rich buffer layer and K.sub.u grain and the relationship between the thickness of the Pt-rich buffer layer and H.sub.c in Examples 120 to 122 and Comparative Example 16, in which the Pt-rich buffer layers are stacked between the Co-rich magnetic layers, are shown respectively in FIGS. 11 and 12.

TABLE-US-00014 TABLE 14 Stacked Position and Thickness of Pt-rich Buffer Layer and Magnetic Characteristics Pt-rich buffer layer Thickness K.sub.u grain H.sub.c Stacked position (nm) (×10.sup.7 erg/cm.sup.3) (kOe) Comp. Ex. 15 — 0 1.23 8.53 Ex. 110 on Co-rich magnetic layer 0.2 1.33 9.46 Ex. 111 on Co-rich magnetic layer 0.4 1.34 9.66 Ex. 112 on Co-rich magnetic layer 0.5 1.36 9.61 Ex. 113 on Co-rich magnetic layer 0.7 1.35 9.63 Ex. 114 on Co-rich magnetic layer 0.9 1.35 9.76 Ex. 115 on Co-rich magnetic layer 1.1 1.37 9.71 Ex. 116 on Co-rich magnetic layer 1.3 1.37 9.72 Ex. 117 on Co-rich magnetic layer 1.7 1.36 9.74 Ex. 118 on Co-rich magnetic layer 2.2 1.35 9.76 Ex. 119 on Co-rich magnetic layer 2.6 1.36 9.77 Comp. Ex. 16 between Co-rich magnetic layers 0.8 1.09 6.30 Ex. 120 between Co-rich magnetic layers 0.2 1.65 9.07 Ex. 121 between Co-rich magnetic layers 0.4 1.89 9.53 Ex. 122 between Co-rich magnetic layers 0.6 1.51 8.72

[0200] It was confirmed that both magnetocrystalline anisotropy constant K.sub.u grain and coercivity H.sub.c increase compared with those of Comparative Example 15, in which no Pt-rich buffer layer is stacked, in either case of stacking the Pt-rich buffer layer(s) on the Co-rich magnetic layer or between the Co-rich magnetic layers; and the magnetocrystalline anisotropy constant K.sub.u grain is almost the same value in any example. Moreover, it was confirmed that the coercivity H.sub.c increases as the thickness of the Pt-rich buffer layer increases and is higher at the same thickness in the case of stacking the Pt-rich buffer layer on the Co-rich magnetic layer than in the case of stacking between the Co-rich magnetic layers.

[0201] [Magnetic Characteristics and Each Thickness of Co-rich Magnetic Layers]

[0202] In Comparative Examples 15 and 17 as well as Examples 111, 121, and 123 to 130 in which the thickness of each Pt-rich buffer layer was set to 0.4 nm and the combination of a Pt-rich buffer layer stacked on a Co-rich magnetic layer was stacked a plurality of times, the magnetic characteristics were investigated by changing each thickness of the Co-rich magnetic layers and by changing the stacked number of a Co-rich magnetic layer and a Pt-rich buffer layer.

[0203] Here, the Pt-rich buffer layer was Pt-30 vol % SiO.sub.2, and the Co-rich magnetic layer was Co80Pt20-30 vol % B.sub.2O.sub.3. The results are shown in Table 15. Moreover, the relationship between the total thickness of the Pt-rich layers and K.sub.u grain and the relationship between the total thickness and H.sub.c are shown respectively in FIGS. 13 and 14.

TABLE-US-00015 TABLE 15 Magnetic Characteristics and Thickness of Co-rich Magnetic Layers/Pt-rich Buffer Layers Stacked Plurality of Times Total thickness Thickness of buffer of each Thickness layer(s) and magnetic Stacked of buffer magnetic K.sub.u grain H.sub.c layer (nm) number layer (nm) layer(s) (nm) (×10.sup.7 erg/cm.sup.3) (kOe) Comp. Ex. 15 16 0 0 16.0 1.23 8.53 Ex. 111 16 1 0.4 16.4 1.34 9.66 Ex. 123 8 2 0.8 16.8 1.52 9.63 Ex. 124 5.3 3 1.2 17.1 1.71 9.59 Ex. 121 4 4 1.6 17.6 1.89 9.53 Ex. 125 3.2 5 2.0 18.0 1.85 9.57 Ex. 126 2.7 6 2.4 18.6 1.86 9.58 Ex. 127 2.3 7 2.8 18.9 1.66 9.47 Ex. 128 2 8 3.2 19.2 1.53 9.45 Ex. 129 1.8 9 3.6 19.8 1.47 9.37 Ex. 130 1.6 10 4.0 20.0 1.40 9.22 Comp. Ex. 17 1.5 11 4.4 20.9 1.21 8.49

[0204] Compared with those of Comparative Example 15, in which no Pt-rich buffer layer is stacked, it was confirmed that both magnetocrystalline anisotropy constant K.sub.u grain and coercivity increase by repeating stacking of a Co-rich magnetic layer and a Pt-rich buffer layer; whereas both magnetocrystalline anisotropy constant K.sub.u grain and coercivity H.sub.c decrease when the total thickness of Pt-rich buffer layers exceeds 4 nm and the total thickness of Co-rich magnetic layers and Pt-rich buffer layers exceeds 20 nm by repeating stacking of a Co-rich magnetic layer and a Pt-rich buffer layer 11 times.