Magnetic-Field-Assisted Plasma Coating System
20230203641 · 2023-06-29
Assignee
- Board Of Trustees Of Michigan State University (East Lansing, MI)
- Franhofer USA (East Lansing, MI, US)
Inventors
- Thomas Schuelke (Pinckney, MI, US)
- Michael Becker (East Lansing, MI, US)
- Lars Haubold (East Lansing, MI, US)
- Qi Hua Fan (Okemos, MI, US)
Cpc classification
F02F1/00
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F02F2200/00
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
C23C14/046
CHEMISTRY; METALLURGY
International classification
C23C14/32
CHEMISTRY; METALLURGY
F02F1/00
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
Abstract
A magnetic-field-assisted plasma coating system and method are provided. In another aspect, a coating system employs a cathode with a linearly moveable magnetic field. A further aspect employs a workpiece as an anode within which is located an elongated cathode which internally coats a bore of the workpiece. Still another aspect of the present system and method employs an elongated and hollow cathode with at least one magnetic source therein. In yet another aspect, end caps or plates seal against one or more open ends of a workpiece bore to be coated, with a cathode inserted into the bore and a vacuum being created within the bore such that the workpiece itself defines at least a portion of a vacuum chamber.
Claims
1. A method for coating a workpiece, the method comprising: (a) automatically inserting an elongated cathode inside an elongated internal bore of the workpiece; (b) sealing at least one open end of the bore, such that the workpiece itself defines a portion of a vacuum chamber; (c) creating a vacuum in the vacuum chamber between the workpiece and the cathode; (d) emitting a process gas into the vacuum chamber; (e) generating an arc in a plasma between the cathode and the workpiece, the workpiece acting as an anode; (f) ionizing the gas in the vacuum chamber while depositing an ionic ta-C plasma arc deposition coating on the internal bore of the workpiece within the magnetic field; (g) moving a magnetic field within the vacuum chamber to assist in linearly and rotationally moving the arc relative to the workpiece, the arc spanning between the cathode and the internal bore of the workpiece; (h) a complete coating cycle from when vacuum pressure is started to when vacuum pressure ends, is no greater than five minutes; and (i) exposing an exterior of the workpiece to ambient air during the coating cycle.
2. The method of claim 1, further comprising: causing the workpiece to be stationary when the magnetic field passes between the cathode and the workpiece; and only placing a single and stationary cathode within the internal bore of the workpiece when the magnetic field passes between the cathode and the workpiece.
3. The method of claim 1, further comprising: removably locating an end cap over the internal bore, the end cap defining part of the vacuum chamber, and the vacuum chamber being entirely within the internal bore inside the workpiece; and sealing the end cap to an open edge of the workpiece within which is the internal bore, the edge being of substantially a same thickness as a wall of the workpiece which surrounds at least a majority of the cathode.
4. The method of claim 1, further comprising: retaining a magnet holder to a distal end of a shaft; securing a permanent magnet to the holder; electrically isolating the magnet holder from the cathode; and longitudinally and rotationally moving the magnet with an automated actuator controlled by a programmable controller.
5. The method of claim 1, further comprising: locating at least two magnetic sources within a hollow interior of the cathode, the magnetic sources being longitudinally arranged relative to each other; and causing a magnetic force at an outer surface of the cathode to be 1-20 milliteslas.
6. The method of claim 1, further comprising: longitudinally spacing apart at least two electromagnets and locating the electromagnets within a hollow interior of the cathode; connecting a programmable controller and an electrical circuit to the electromagnets; and the outer surface of the elongated cathode including graphite.
7. The method of claim 1, further comprising a programmable controller controlling an electrical arc, a vacuum pump, a relief valve, a seal-actuator and a cathode-movement actuator.
8. The method of claim 1, wherein coating the internal bore of the workpiece includes depositing the coating on an internal piston cylinder of a metallic automotive vehicle engine block, and the cathode is a cool-cathode of less than 120° C. at an outer surface thereof to avoid the use of cooling fluid during the coating.
9. The method of claim 1, wherein the workpiece is a metallic tube or pipe which is at least three meters long and configured for transporting corrosive or abrasive liquids or slurries.
10. The method of claim 1, further comprising inflating a bulb seal to seal an endcap to the workpiece, a centerline of the cathode intersecting the endcap, and the endcap enclosing an adjacent end of the internal bore.
11. A method for coating a workpiece, the method comprising: (a) locating a cathode inside an internal bore of the workpiece; (b) covering an open end of the bore by removably contacting the workpiece with an endcap, such that a vacuum chamber is defined at least in part by the bore and the endcap; (c) creating a vacuum in the vacuum chamber while exposing an exterior of the workpiece to ambient air; (d) generating an arc in a plasma between the cathode and the workpiece; (e) causing the workpiece to be an anode; (f) depositing an ionic coating on a cylindrical surface defining the internal bore by plasma arc deposition coating; and (g) moving a magnetic field within the bore to cause the arc to move relative to the workpiece, the arc spanning between the cathode and the internal bore of the workpiece.
12. The method of claim 11, further comprising: causing the workpiece to be stationary when the magnetic field passes between the cathode and the workpiece; the depositing causing the coating to have an ion impact energy of at least 10 eV against the workpiece; locating an exterior surface of the cathode 2-5 cm away from an inner surface of the bore; and the depositing of the ionic coating including depositing an ionic ta-C coating on the bore surface in an outwardly extending fan-like side view shape.
13. The method of claim 11, further comprising sealing the end cap to an open edge of the workpiece within which is the internal bore, the edge being of substantially a same thickness as a wall of the workpiece which surrounds at least a majority of the cathode, and a longitudinal length of the cathode is greater than a lateral diameter of the cathode.
14. The method of claim 11, further comprising: retaining a magnet holder to an elongated shaft; securing a permanent magnet to the holder; electrically isolating the magnet holder from the cathode; and longitudinally and rotationally moving the magnet with an automated actuator controlled by a programmable controller.
15. The method of claim 11, further comprising: locating at least two magnetic sources within a hollow interior of the cathode, the magnetic sources being longitudinally arranged relative to each other; and causing a magnetic force at an outer surface of the cathode to be 1-20 milliteslas.
16. The method of claim 11, further comprising: longitudinally spacing apart at least two electromagnets and locating the electromagnets within a hollow interior of the cathode; connecting a programmable controller and an electrical circuit to the electromagnets; sequentially energizing and de-energizing the at least two electromagnets to sequentially energize and de-energize the electromagnetic fields in corresponding locations; and causing the arc and coating ions to linearly follow the magnetic field locations without movement of the cathode, the electromagnets or the workpiece during the depositing.
17. The method of claim 11, further comprising a programmable controller controlling the arc, a vacuum pump, a relief valve, a seal-actuator and a cathode-movement actuator.
18. The method of claim 11, wherein the workpiece is an internal piston cylinder, and the cathode is less than 120° C. at an outer surface thereof without the use of cooling fluid during the depositing.
19. The method of claim 11, wherein the workpiece is a metallic tube or pipe which is at least three meters long and configured for transporting corrosive or abrasive liquids or slurries.
20. The method of claim 11, further comprising inflating a bulb seal to seal the endcap to the workpiece, subsequently creating the vacuum within the sealed bore, and thereafter performing the depositing in the sealed bore.
21. A method for coating a workpiece, the method comprising: (a) inserting a cathode inside an internal bore of the workpiece; (b) sealing at least one open end of the bore; (c) generating an arc in a plasma between the cathode and the workpiece, which acts as an anode; (d) using a magnetic field adjacent the cathode to assist in controlling the arc; (e) plasma arc deposition coating an internal and metallic workpiece surface surrounding the bore with an ion impact energy of at least 10 eV; (f) the coating cycle being no greater than five minutes from when vacuum pressure is started to when vacuum pressure ends; and (g) the internal workpiece surface being coated with a harder material than the remainder of the workpiece adjacent the bore.
22. The method of claim 21, further comprising: reducing pressure within the bore for the coating process; and moving a magnet, internally located within a hollow center of the cathode, relative to the cathode during the coating process.
23. The method of claim 21, further comprising: causing the workpiece to be stationary when the magnetic field passes between the cathode and the workpiece; locating an exterior surface of the cathode 2-5 cm away from an inner surface of the bore; and the deposition coating depositing an ionic ta-C material layer on the bore surface in an outwardly extending fan-like side view shape.
24. The method of claim 21, further comprising sealing a removable end cap to an open edge of the workpiece within which is the internal bore, the edge being of substantially a same thickness as a wall of the workpiece which surrounds at least a majority of the cathode, and a longitudinal length of the cathode being greater than a lateral diameter of the cathode.
25. The method of claim 21, further comprising: retaining a magnet holder to an elongated shaft; securing a permanent magnet to the holder; electrically isolating the magnet holder from the cathode; and longitudinally and rotationally moving the magnet with an automated actuator controlled by a programmable controller.
26. The method of claim 21, further comprising: locating at least two magnetic sources within a hollow interior of the cathode, the magnetic sources being longitudinally arranged relative to each other; and causing a magnetic force at an outer surface of the cathode to be 1-20 milliteslas.
27. The method of claim 21, further comprising: longitudinally spacing apart at least two electromagnets and locating the electromagnets within a hollow interior of the cathode; connecting a programmable controller and an electrical circuit to the electromagnets; sequentially energizing and de-energizing the at least two electromagnets to sequentially energize and de-energize electromagnetic fields in corresponding locations; and causing the arc and coating ions to linearly follow the magnetic field locations without movement of the cathode, the electromagnets or the workpiece during the depositing.
28. The method of claim 21, further comprising a programmable controller controlling the arc, a vacuum pump, a relief valve, a seal-actuator and a cathode-movement actuator.
29. The method of claim 21, wherein the workpiece is an internal piston cylinder, and the cathode is less than 120° C. at an outer surface thereof without the use of cooling fluid during the coating.
30. The method of claim 21, wherein the workpiece is a metallic tube or pipe which is at least three meters long and configured for transporting corrosive or abrasive liquids or slurries.
31. The method of claim 21, further comprising inflating a bulb seal to seal the endcap to the workpiece, subsequently creating the vacuum within the sealed bore, and thereafter performing the coating in the sealed bore.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION
[0019] Referring to
[0020]
[0021] An actuator 71 and driven transmission 73 linearly move magnet 69 in the advancing and retracting directions within cathode 61. A programmable controller 101 of an electrical circuit 83 energizes and de-energizes actuator 71. Actuator 71 may be an automatically energized electric motor or fluid-powered cylinder. Transmission 73 may be a jack screw (as shown) with an interior of magnet 69 being attached to and moveable with an internally threaded nut or ball, a cable and slide mechanism, a piston rod if a fluid driven cylinder is used, or the like.
[0022] A longitudinal length of cathode 61 is at least twice and more preferably at least five times a lateral diameter dimension of cathode 61. Moreover, an arc ignitor 81 is located adjacent cathode 61 within cylinder bore 23 for initiating a plasma arc between cathode 61 and workpiece anode 26. Electrical circuit 83 connects a direct current power source 85 with both cathode 61 and workpiece anode 26. Alternately, power source 85 may combine direct and pulsed current, especially if carbon cathodes are employed.
[0023] A pair of opposed plates or end caps 87 and 89 of the present system and machine are moveable from a retracted position to an advanced position (as shown in
[0024] A vacuum source, such as a pump 97, is thereafter actuated to create a reduced pressure or vacuum through an outlet 99 in one of the caps 89. The vacuum pressure within bore 23 is preferably at least 10.sup.−3 and more preferably also less than 10.sup.−6 Torr for a bore diameter of about 10 cm and a cathode outer diameter of about 2 cm. It is noteworthy that in one exemplary configuration, exterior surface 65 of cathode 61 is only 2-5 cm away from inner bore surface 25 of engine block workpiece 26, thereby allowing the vacuum pressure that is sufficiently low for successful vapor deposition to be created relatively quickly and also subsequently allowing for relatively fast plasma coating especially as compared to conventional attempts.
[0025] During operation, after the seal is created and vacuum drawn, programmable controller 101 causes ignitor 81 to generate an electrical arc 103 from anode workpiece 26 to cathode 61 within the vacuum. This causes ionization of the cathodic material at various evaporative spots on the cathode adjacent a magnetic field 105 created by magnet 69. The magnetic field will control and guide the location of these cathode spots which in turn controls and guides where the plasma ionization is generated and emitted from. Thus, the ionic ta-C coating 107 is transferred within at least a portion of the magnetic field, and in a generally expanding fan-like side view shape, from the cathode to the anode workpiece 26. Based on predetermining time and speed values, programmable controller 101 subsequently causes actuator 71 to move magnet 69 in the linearly retracting and/or advancing direction(s) within the cathode in order to linearly move the magnetic field therealong. A tunnel magnetic field shape (as shown in
[0026] When completed, programmable controller 101 will electrically terminate the electrical arc, de-energize the vacuum pump 97 and cause a relief valve to vent the vacuum chamber to ambient outside air pressure, energize mechanism 63 to withdraw and retract cathode 61, and energize mechanism 95 to retract end caps 87 and 89. Thereafter, the engine block is moved from the workstation and a new engine block is subsequently inserted therein for another coating cycle. It is envisioned that the entire coating process, from sealing of the bore through unsealing of the bore will be five minutes or less, and more preferably two minutes or less.
[0027] The present system and method are expected to achieve an spa bond fraction percentage for carbon atoms of about 20-85%, which is controlled by the energy of the carbon ions and substrate temperature during plasma coating. It is envisioned that the present system and method will employ an ion impact energy of about 10-250 eV, which is far superior to traditional sputter coating of less than 5 eV. Furthermore, room temperature use of the present system and method are preferred to increase the fraction percentage, although temperatures less than 400° C. may also suffice.
[0028] The cathode is expected to generate less than 120° C. at its outer surface during the coating process, if about 2 kW of electrical power for about 120 seconds is employed. In this advantageously expected cool-cathode situation, cooling of the permanent magnet may be performed through a copper cylinder externally located adjacent to the proximal end of the cathode which acts as a heat sink, thereby avoiding the use of cooling fluid. Alternately, a hollow copper fluid-carrying tube with internal cooling channels, surrounded by a carbon sleeve or the like, is optionally located within the cathode around the permanent magnet. This alternate tube and sleeve serve to cool the magnet.
[0029] In an optional feature, the present system and method may employ a prior or subsequent separate cathode made of a different conductive material, such as a metal (for example: chromium, tantalum, niobium, titanium), using the same process within the bore vacuum before the use of the graphite cathode to deposit metals or metal nitrides. Metal nitrides would be deposited reactively, that is, by adding a partial pressure of nitrogen to the process during arc evaporation of the metal. This multiple cathode process allows for initial coating of the inner bore surface 25, especially if aluminum, with the more ductile metal material prior to application of the much harder ta-C coating layer to minimize cracking of the aluminum workpiece.
[0030] Reference should now be made to
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[0032] A fourth exemplary embodiment system 181 is shown in
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[0034] An insulator 280 is mounted between flange 266 and a vacuum flange 282 to which they are fastened. Moreover a motor support plate 284 is fastened to flange 270 with an insulator 286 therebetween. An actuator 271, such as an electric motor, and a longitudinally elongated and solid transmission shaft 273 are moveably coupled to support plate 284. Shaft 273 is operably driven by actuator 271.
[0035] A magnet holder 290 is retained to a distal end of shaft 273 via a connector 292 having a set screw 294 or other fastener. A permanent magnet 269 of a cylindrical shape (as illustrated in cross-section), ring (not shown), or rectangular-cubic shape (not shown) is secured within holder 290 for longitudinal and/or rotational movement by shaft 273 and motor 271. Magnet holder 290 is electrically isolated from cathode 268. Cathodes 268 and 261, and magnet 269 within the cathodes, are longitudinally insertable into and removeable from an open access end of an internal bore 223 of an engine or pipe workpiece 226. Any of the previously discussed end caps and/or seals may be employed to create a vacuum chamber within the internal bore area using workpiece 226 to define part of the vacuum chamber while the workpiece also acts as an anode. An exterior of the workpiece may be exposed to ambient air since a separate vacuum chamber is not necessary.
[0036] While various embodiments of the present system and method have been discussed, additional variations may be employed. For example, automated actuators, mechanisms and controllers have been disclosed for moving and activating the preferred machine, but manual movement and control may alternately be employed although various advantages may not be achieved. Furthermore, each of the features may be interchanged and intermixed between any and all of the embodiments. Changes and modifications are not to be regarded as a departure from the spirit or the scope of the present invention.