System and Method for Decapsulation of Plastic Integrated Circuit Packages

Abstract

System and method for decapsulation of plastic integrated circuit packages by providing a microwave generator, providing a Beenakker resonant cavity connected to the microwave generator, which cavity comprises a coupling antenna loop, providing the cavity with a tube or tubes for supply of plasma gas and etchant gas or gases and with means for igniting the plasma gas, and providing that the cavity is set at a predefined value of its Q factor by embodying the coupling antenna loop and/or a wire optionally attached to the coupling antenna loop in a metal or metal alloy, or providing that at least at part of its surface area the coupling antenna loop and/or the wire is coated with a metal or metal alloy different than copper and with a higher resistivity than copper.

Claims

1. A system for decapsulation of plastic integrated circuit packages, comprising a microwave generator and a Beenakker resonant cavity connected to the microwave generator, wherein said Beenakker cavity has a predefined Q factor and is provided with a tube or tubes for supply of plasma gas and etchant gas or gases and with means for igniting the plasma gas, which Beenakker resonant cavity comprises a coupling antenna loop which is optionally provided with a wire attached to the coupling antenna loop, and wherein the Q factor of the Beenakker resonant cavity is set at a predefined value by arranging that the coupling antenna loop and/or said wire optionally attached to the coupling antenna loop is implemented in a metal or metal alloy different than copper and with a higher resistivity than copper (1.724×10.sup.−8 ohm.Math.m), or that at least at part of its surface area the coupling antenna loop and/or said wire is provided with a coating of a metal or metal alloy different than copper and with a higher resistivity than copper (1.724×10.sup.−8 ohm.Math.m).

2. The system according to claim 1, wherein the coupling antenna loop and/or said wire optionally attached to the coupling antenna loop is made in a metal or metal alloy or has at least at part of its surface area a coating of a metal or metal alloy with a resistivity in the range of 4.0-17.0×10.sup.−8 ohm.Math.m.

3. The system according to claim 1, wherein the coupling antenna loop and/or said wire optionally attached to the coupling antenna loop is made of a metal or coated with a metal selected from the group consisting of cadmium, chromium, cobalt, iron, iridium, lithium, magnesium, molybdenum, nickel, niobium, osmium, palladium, platinum, selenium, tantalum, tin, tungsten, and any alloy of these materials.

4. The system according to claim 3, wherein the coupling antenna loop and/or said wire optionally attached to the coupling antenna loop is made of tin-coated copper.

5. The system according to claim 1, wherein the Q factor of the Beenakker resonant cavity is set at a predefined value by arranging that an electrical field disturbing clip is mounted on the coupling antenna loop and/or said wire optionally attached to the coupling antenna loop.

6. A method for decapsulation of plastic integrated circuit packages, comprising the steps of: providing a microwave generator; providing a Beenakker resonant cavity connected to the microwave generator, which Beenakker resonant cavity comprises a coupling antenna loop; providing the Beenakker resonant cavity with a tube or tubes for supply of plasma gas and etchant gas or gases and with means for igniting the plasma gas; optionally providing a wire to the coupling antenna loop, and providing that the Beenakker resonant cavity is set at a predefined value of its Q factor by embodying the coupling antenna loop and/or said wire optionally attached to the coupling antenna loop in a metal or metal alloy different than copper and with a higher resistivity than copper (1.724×10.sup.−8 ohm.Math.m), or providing that at least at part of its surface area the coupling antenna loop and/or said wire is coated with a metal or metal alloy different than copper and with a higher resistivity than copper (1.724×10.sup.−8 ohm.Math.m).

7. The method according to claim 6, comprising embodying the coupling antenna loop and/or said wire optionally attached to the coupling antenna loop in a metal or metal alloy, or embodying the coupling antenna loop and/or said wire at least at part of its surface area with a coating of a metal or metal alloy having a resistivity in the range of 4.0-17.0×10.sup.−8 ohm.Math.m.

8. The method according to claim 6, comprising providing that the coupling antenna loop and/or or said wire optionally attached to the coupling antenna loop is made of a metal or coated with a metal selected from the group consisting of cadmium, chromium, cobalt, iron, iridium, lithium, magnesium, molybdenum, nickel, niobium, osmium, palladium, platinum, selenium, tantalum, tin, tungsten, and any alloy of these materials.

9. The method according to claim 8, comprising providing that the metal of the coupling antenna loop and/or said wire optionally attached to the coupling antenna loop is made of tin-coated copper.

10. The method according to claim 6, comprising disturbing an electrical field in the Beenakker cavity by mounting a clip on the coupling antenna loop and/or or said wire optionally attached to the coupling antenna loop.

11. A Beenakker cavity comprising a coupling antenna loop which is optionally provided with a wire attached to the coupling antenna loop, wherein the coupling antenna loop and/or said wire optionally attached to the coupling antenna loop is implemented in a metal or metal alloy different than copper and with a higher resistivity than copper (1.724×10.sup.−8 ohm.Math.m), or at at least part of its surface area the coupling antenna loop and/or said wire is provided with a coating of a metal or metal alloy different than copper and with a higher resistivity than copper (1.724×10.sup.−8 ohm.Math.m).

12. The Beenakker cavity according to claim 11, wherein the coupling antenna loop and/or said wire optionally attached to the coupling antenna loop is made in a metal or metal alloy or has at least at part of its surface area a coating of a metal or metal alloy with a resistivity in the range of 4.0-17.0×10.sup.−8 ohm.Math.m.

13. The Beenakker cavity according to claim 11, wherein the coupling antenna loop and/or said wire optionally attached to the coupling antenna loop is made of a metal or coated with a metal selected from the group consisting of cadmium, chromium, cobalt, iron, iridium, lithium, magnesium, molybdenum, nickel, niobium, osmium, palladium, platinum, selenium, tantalum, tin, tungsten, and any alloy of these materials.

14. The Beenakker cavity according to claim 13, wherein the metal of the coupling antenna loop and/or or the said wire optionally attached to the coupling antenna loop is tin-coated copper.

15. The Beenakker cavity according to claim 11, wherein an electrical field disturbing clip is mounted on the coupling antenna loop and/or or said wire optionally attached to the coupling antenna loop.

Description

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

[0023] The accompanying drawings, which are incorporated into and form a part of the specification, illustrate one or more embodiments of the present invention and, together with the description, serve to explain the principles of the invention. The drawings are only for the purpose of illustrating one or more embodiments of the invention and are not to be construed as limiting the invention. In the drawings:

[0024] FIG. 1 depicts a schematic representation of a system according to the invention;

[0025] FIG. 2 shows a diametrical cross-section of a Beenakker cavity according to the invention;

[0026] FIG. 3 depicts an electrical field distribution along the diameter of the Beenakker cavity shown in FIG. 2;

[0027] FIG. 4 depicts the Beenakker cavity shown in FIG. 2 completed with the optional copper wire attached to the coupling antenna loop of the Beenakker cavity; and

[0028] FIG. 5 provides a comparative graph of the resonance characteristics of a Beenakker cavity as modified according to the invention with a conventional Beenakker cavity.

DETAILED DESCRIPTION OF THE INVENTION

[0029] The invention is based on an insight that by intentionally reducing the Q factor of the Beenakker resonant cavity its bandwidth is widened, and the cavity is less sensitive for the disturbing contribution of the supplied etching gases. According to the invention the system for decapsulation of plastic integrated circuit passages is therefore provided with a Q factor of the Beenakker resonant cavity which is set at a predefined value by arranging that the coupling antenna loop and/or the said wire optionally attached to the coupling antenna loop is implemented in a metal or metal alloy different than copper and with a higher resistivity than copper (1.724×10.sup.−8 ohm.Math.m), or that at least at part of its surface area the coupling antenna loop and/or the said wire is provided with a coating of a metal or metal alloy different than copper and with a higher resistivity than copper (1.724×10.sup.−8 ohm.Math.m). If a metal or metal alloy coating is applied to the wire, the core of the wire may be made of metal or of a nonmetal, and even in a material such as glass. With this configuration, the plasma can be stable while adding etching gases in the amount of 8%. In comparison: if the coupling antenna loop and the wire which is optionally attached to the coupling antenna loop is made of copper, the addition of 1% etching gas makes that the plasma becomes unstable and extinguishes.

[0030] Although in the foregoing Argon is mentioned as the gas for the plasma and O2 and CF4 are mentioned as etching gases, it is also possible to apply other suitable gases such as Helium for the plasma, and CO2, C2F6, C3F8, CHF3, SF6, CF3Cl, Cl2, N2 as etching gases. In principle any suitable etchant gas can be regarded and applied, while the plasma will be stable when operating according to the invention, no matter the etching gas composition.

[0031] By applying the features of the invention, the resonant spectrum broadens of the system and Beenakker cavity in comparison with the spectrum of the system and Beenakker cavity according to the prior art, so that more etchant gas can be added into the plasma without detuning the cavity and cause instability of the plasma. The invention avoids the application of any tuning rods which are known to be applied to control a plasma's spatial uniformity as disclosed in US2013/0084706. The invention has however nothing to do with controlling the plasma's spatial uniformity, but is aimed at improving the plasma's stability when etching gases are added to the plasma.

[0032] It is preferable that the coupling antenna loop and/or the said wire optionally attached to the coupling antenna loop is made in a metal or metal alloy or has at least at part of its surface area a coating of a metal or metal alloy with a resistivity in the range of 4.0-17.0×10.sup.−8 ohm.Math.m. This ensures an appropriate balance in the reduction of microwave power due to the decreased Q factor on the one hand, and the required maintenance and stability of the plasma in the Beenakker cavity on the other hand.

[0033] Suitably the coupling antenna loop and/or or the said wire optionally attached to the coupling antenna loop is made of a metal or coated with a metal selected from the group comprising cadmium, chromium, cobalt, iron, iridium, lithium, magnesium, molybdenum, nickel, niobium, osmium, palladium, platinum, selenium, tantalum, tin, tungsten, or of any alloy of these materials.

[0034] Appropriate results at low costs are achieved when the metal of the coupling antenna loop and/or or the said copper wire that is optionally attached to the coupling antenna loop, is tin-coated copper.

[0035] The benefits of the invention can be promoted by arranging that an electrical field disturbing clip is mounted on the coupling antenna loop and/or or the said wire that is optionally attached to the coupling antenna loop. This can be applied with same effect independent from any and each of the other features of the system according to the invention for tuning the system's Q factor.

[0036] Corresponding with the foregoing disclosure the invention is also embodied in a method for decapsulation of plastic integrated circuit packages, comprising the steps of: [0037] providing a microwave generator; [0038] providing a Beenakker resonant cavity connected to the microwave generator, which Beenakker resonant cavity comprises a coupling antenna loop; [0039] providing the Beenakker resonant cavity with a tube or tubes for supply of plasma gas and etchant gas or gases and with means for igniting the plasma gas; [0040] optionally providing a copper wire to the coupling antenna loop, and [0041] providing that the Beenakker resonant cavity is set at a predefined value of its Q factor by embodying the coupling antenna loop and/or the said wire optionally attached to the coupling antenna loop in a metal or metal alloy different than copper and with a higher resistivity than copper (1.724×10.sup.−8 ohm.Math.m), or providing that at least at part of its surface area the coupling antenna loop and/or the said wire is coated with a metal or metal alloy different than copper and with a higher resistivity than copper (1.724×10.sup.−8 ohm.Math.m).

[0042] Preferably the metal or metal alloy has a resistivity in the range of 4.0-17.0×10.sup.−8 ohm.Math.m. A suitable selection can be made from the group comprising cadmium, chromium, cobalt, iron, iridium, lithium, magnesium, molybdenum, nickel, niobium, osmium, palladium, platinum, selenium, tantalum, tin, tungsten, or any alloy of these materials. Preferably the metal of the coupling antenna loop and/or the said wire that is optionally attached to the coupling antenna loop is made of tin-coated copper. The benefits of the invention are promoted by disturbing an electrical field in the Beenakker cavity by mounting a clip on the coupling antenna loop and/or or the said wire that is optionally attached to the coupling antenna loop.

[0043] The invention will hereinafter be further discussed with reference to the attached drawings of a nonlimiting exemplary embodiment of a system according to the invention.

[0044] Whenever in the figures the same reference numerals are applied, these numerals refer to the same parts. It is further remarked that the figures resemble the figures shown in the above-mentioned article “Optimization of the Microwave Induced Plasma System for Failure Analysis in Integrated Circuit Packaging” by J. Tang, J. B. J. Schelen, and C. I. M. Beenakker, 2010 11th International Conference on Electronic Packaging Technology & High Density Packaging, pages 1034-1038. The figures are however deemed helpful in understanding the invention which basically concerns features that as such cannot be shown in a figure.

[0045] Referring first to FIG. 1 a system 1 is shown for decapsulation of one or more plastic integrated circuit packages 2. The system 1 comprises a microwave generator 3, a Beenakker resonant cavity 4 connected to the microwave generator 3.

[0046] The Beenakker cavity 4 is provided with a supply tube 5 for supply of plasma gas (notably Ar) and etchant gas or gases (notably O2 and CF4). There are also (not shown) means for igniting the plasma gas by an electrical field. A preferable field strength distribution of this electrical field is shown in FIG. 3, which shows on the X-axis the radial position along the diameter of the Beenakker cavity 4 shown in FIG. 2, and along the Y-axis the electrical field strength at the respective radial positions. FIG. 3 shows that the electrical field has its highest strength in the central portion of the Beenakker cavity 4, at which also the plasma gas and etchant gases enter the cavity. At the bottom the Beenakker cavity 4 is provided with an exit tube 6 to release the effluent of the plasma towards the plastic integrated circuit package 2 underneath the cavity 4 and which is intended to be decapsulated.

[0047] FIG. 2 shows that the Beenakker resonant cavity 4 comprises a coupling antenna loop 7 which, according to what is shown in FIG. 4, can be optionally provided with a (copper or other material) wire 8 attached to the coupling antenna loop 7. Said wire 8 has a length-width-ratio of at least approximately 10, such as for instance a length of 1-2 cm and a diameter of 0.1 cm.

[0048] The invention is embodied in the feature that the Q factor of the Beenakker resonant cavity 4 is set at a predefined value by arranging that the coupling antenna loop 7 and/or the said wire 8 optionally attached to the coupling antenna loop 7 is implemented in a metal or metal alloy different than copper and with a higher resistivity than copper (1.724×10.sup.−8 ohm.Math.m), or that at least at part of its surface area the coupling antenna loop 7 and/or the said wire 8 is provided with a coating of a metal or metal alloy different than copper and with a higher resistivity than copper (1.724×10.sup.−8 ohm.Math.m).

[0049] Best results are achieved when the coupling antenna loop 7 and/or the said wire 8 optionally attached to the coupling antenna loop 7 is made in a metal or metal alloy or has at least at part of its surface area a coating of a metal or metal alloy with a resistivity in the range of 4.0-17.0×10.sup.−8 ohm.Math.m.

[0050] Based on this preferable range the material can be selected from the following table provided below (possible selections are underlined).

TABLE-US-00001 Table of resistivity values (ohm .Math. m) Aluminum 2.65 × 10.sup.−8 Antimony 41.8 × 10.sup.−8 Beryllium  4.0 × 10.sup.−8 Bismuth  115 × 10.sup.−8 Brass - 58% Cu  5.9 × 10.sup.−8 Brass - 63% Cu  7.1 × 10.sup.−8 Cadmium  7.4 × 10.sup.−8 Carbon (graphite).sup.1) 3-60 × 10.sup.−5 Cast iron  100 × 10.sup.−8 Chromium .sup. 13 × 10.sup.−8 Cobalt   9 × 10.sup.−8 Constantan .sup. 49 × 10.sup.−8 Copper 1.724 × 10.sup.−8  Germanium.sup.1) 1-500 × 10.sup.−3  Gold 2.24 × 10.sup.−8 Graphite  800 × 10.sup.−8 Iridium  5.3 × 10.sup.−8 Iron  9.7 × 10.sup.−8 Lead 20.6 × 10.sup.−8 Lithium 9.28 × 10.sup.−8 Magnesium 4.45 × 10.sup.−8 Manganese  185 × 10.sup.−8 Mercury 98.4 × 10.sup.−8 Mica   1 × 10.sup.13 Mild steel .sup. 15 × 10.sup.−8 Molybdenum  5.2 × 10.sup.−8 Nickel 6.85 × 10.sup.−8 Nickeline .sup. 50 × 10.sup.−8 Nichrome (alloy of nickel and chromium) 100-150 × 10.sup.−8    Niobium (Columbium) .sup. 13 × 10.sup.−8 Osmium   9 × 10.sup.−8 Palladium 10.5 × 10.sup.−8 Phosphorus   1 × 10.sup.12 Platinum 10.5 × 10.sup.−8 Plutonium 141.4 × 10.sup.−8  Rhodium  4.6 × 10.sup.−8 Selenium 12.0 × 10.sup.−8 Silver 1.59 × 10.sup.−8 Sodium  4.2 × 10.sup.−8 Solder .sup. 15 × 10.sup.−8 Tantalum 12.4 × 10.sup.−8 Thorium .sup. 18 × 10.sup.−8 Tin 11.0 × 10.sup.−8 Titanium .sup. 43 × 10.sup.−8 Tungsten 5.65 × 10.sup.−8 Uranium .sup. 30 × 10.sup.−8 Vanadium .sup. 25 × 10.sup.−8 Zinc 5.92 × 10.sup.−8

[0051] From this table, it follows that the coupling antenna loop 7 and/or or the said wire 8 optionally attached to the coupling antenna loop 7 is suitably made from a metal or coated with a metal selected from the group comprising cadmium, chromium, cobalt, iron, iridium, lithium, magnesium, molybdenum, nickel, niobium, osmium, palladium, platinum, selenium, tantalum, tin, tungsten, or any alloy of these materials.

[0052] From a cost perspective, the metal of the coupling antenna loop 7 and/or or the said copper wire 8 optionally attached to the coupling antenna loop 7 is preferably tin-coated copper.

[0053] One manner to further promote the benefits of the invention is to disturb an electrical field in the Beenakker cavity by mounting a clip on the coupling antenna loop 7 and/or the said wire 8 that is optionally attached to the coupling antenna loop 7. The way this should be implemented is clear to the skilled person and requires no further elucidation.

[0054] Finally, reference is made to FIG. 5. FIG. 5 provides a comparative graph of resonance characteristics of a Beenakker cavity according to the prior art and a Beenakker cavity according to the invention. On the X axis, a frequency sweep of 2 GHz up to 3 GHz is shown, whereas on the Y axis the cavity's response in S11 parameter is shown. The graph indicated with arrow A relates to the response of the Beenakker cavity according to the prior art. The graph indicated with arrow B relates to the response of the Beenakker cavity according to the invention. Evidently the Beenakker cavity according to the invention exhibits a lower Q factor than the Beenakker cavity according to the prior art considering its lower peak and wider bandwidth. This lower Q factor is responsible for the improved stability of the plasma in the Beenakker cavity according to the invention when etching gases are supplied to the cavity.

[0055] Although the invention has been discussed in the foregoing with reference to an exemplary embodiment of the apparatus of the invention, the invention is not restricted to this particular embodiment which can be varied in many ways without departing from the gist of the invention. The discussed exemplary embodiment shall therefore not be used to construe the appended claims strictly in accordance therewith. On the contrary, the embodiment is merely intended to explain the wording of the appended claims without intent to limit the claims to this exemplary embodiment. The scope of protection of the invention shall therefore be construed in accordance with the appended claims only, wherein a possible ambiguity in the wording of the claims shall be resolved using this exemplary embodiment.