CALIBRATION METHOD OF OPTICAL COHERENCE TOMOGRAPHY DEVICE
20230194238 ยท 2023-06-22
Inventors
Cpc classification
G01B9/02091
PHYSICS
International classification
Abstract
A calibration method of optical coherence tomography device using a non-transmissive planar target includes obtaining three-dimensional image of a surface and an inside of a calibration target (T) by scanning the calibration target (T) using the optical coherence tomography device, and extracting a surface shape image of the calibration target (T) from the obtained the three-dimensional image; and calibrating the surface shape image of the calibration target (T) obtained by the optical coherence tomography device, according to an actual surface shape of the calibration target (T).
Claims
1. A calibration method of an optical coherence tomography device which comprises a light source that generates a measurement light (L) irradiated to the surface of a calibration target (T); a beam splitter that splits the measurement light (L) into a reference light (R) and a sample measurement light (L1); a reference mirror that reflects the reference light (R) and generates a reflected reference light (R1); a scan unit that reflects the sample measuring light (L1) and directs the sample measuring light (L1) to the calibration target (T); and a photodetector that detects an interference light (I) formed by superimposing a reflected signal light (S) formed by reflecting the sample measurement light (L1) from the calibration target (T) and the reflected reference light (R1), and obtains the surface and inside image of the calibration target (T), comprising the steps of: obtaining three-dimensional image of the surface and the inside of the calibration target (T) by scanning the calibration target (T) using the optical coherence tomography device, and extracting a surface shape image of the calibration target (T) from the obtained the three-dimensional image; and calibrating the surface shape image of the calibration target (T) obtained by the optical coherence tomography device, according to the actual surface shape of the calibration target (T).
2. The calibration method of claim 1, wherein the calibration target (T) is a planar target (T) in which a pattern of predetermined shape is formed on the surface.
3. The calibration method of claim 2, wherein the calibration target (T) is a non-transmissive target (T) through which the sample measurement light (L1) does not pass.
4. The calibration method of claim 1, wherein the calibration of the surface shape image is carried out by comparing the location of the pattern formed on the calibration target (T) in real space with the location of the pattern in the surface shape image of the calibration target (T) obtained with the optical coherence tomography device to obtain a distortion coefficient of the image obtained by the optical coherence tomography device, and by correcting output image of the optical coherence tomography device using the distortion coefficient.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION
[0017] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. In the accompanying drawings, elements performing the same or similar functions as in the prior art are assigned the same reference numerals.
[0018]
[0019] The light source (10) generates a measurement light (L) irradiated to the surface of the calibration target (T). The measurement light (L) used for optical coherence tomography is generally broadband low-coherence light having a short coherence distance, for example, near-infrared light having a wavelength of 750 nm to 1500 nm. The beam splitter (12) splits the measurement light (L) into a reference light (R) and a sample measurement light (L1). The reference light (R) is irradiated to the reference mirror (20), and the sample measurement light (L1) is irradiated to the sample (s). The beam splitter (23) may split the measurement light (L) into, for example, the reference light (R) and the sample measurement light (L1) having an intensity of 50:50. The beam splitter (12) is also referred to as an optical coupler because it also serves to superimpose a reflected reference light (R1) and a reflected signal light (S), which will be described later. The scan unit (30) reflects the sample measurement light (L1), and induces the sample measurement light (L1) to the calibration target (T) through the objective lens (32). The scan unit (30) may use a micro electromechanical system mirror (MEMS mirror) capable of sequentially scanning the photographing locations of the target (T) by adjusting the reflection angle of the sample measurement light (L1). For example, the MEMS mirror rotates about two axes (e.g., x-axis and y-axis that are orthogonal to each other), and sequentially scans a plane (x-y plane) in which the target (T) is located. The sample measurement light (L1) is irradiated into the target (T) in a direction (z-axis direction, orthogonal to the x-axis and y-axis) perpendicular to the plane, and a three-dimensional tomography image of the target (T) can be obtained.
[0020] When the sample measurement light (L1) is irradiated to the target (T), the sample measurement light (L1) is reflected and scattered on the surface and inside of the target (T), and the reflected signal light (S) is generated. Meanwhile, the reference light (R) is reflected by the reference mirror (20) to generate the reflected reference light (R1). The generated reflected signal light (S) is induced to the scan unit (30) through the objective lens (32), and the scan unit (30) induces the reflected signal light (S) to the beam splitter (12). The reflected signal light (S) and the reflected reference light (R1) are superimposed in the beam splitter (12) to generate an interference light (I). The photodetector (40) detects the interference light (I) to obtain surface and inside image signals of the target (T). The optical coherence tomography device used in the present invention may be include optical elements such as collimators (22, 34, 42), lenses (24, 32, 44), and grating (46), if necessary, in order to focus, reflect, transmit or detect various lights such as the sample measurement light (L1), the reference light (R), and the interference light (I).
[0021]
[0022]
[0023] Next, according to the actual surface shape of the calibration target (T), the surface shape image of the calibration target (T) obtained by the optical coherence tomography device is calibrated. As described above, the optical coherence tomography device comprises various optical elements such as lenses such as collimators (22, 34, 42), lenses (24, 32, 44), and grating (46), and image elements. Depending on the characteristics of the optical elements and the image elements, a predetermined distortion occurs in the image obtained by the optical coherence tomography device. Meanwhile, the surface shape image of the calibration target (T), specifically, the location of the pattern formed on the surface of the calibration target (T) is known in advance. Using this, the distortion of the surface shape image of the calibration target (T) obtained by the optical coherence tomography device can be corrected, that is, it can be calibrated.
[0024] Although the present invention has been described above with reference to the accompanying drawings, the present invention is not limited to what is shown in the drawings described above. Reference numerals are labeled in the following claims to aid understanding, but the scope of the following claims is not limited to the reference numerals and what is shown in the drawings, and should be construed to encompass all modifications, equivalent constructions and functions of the exemplary embodiments.