GAS AND VAPOR SENSING DEVICES BASED ON 2D NANOSHEET MATERIAL
20170350816 · 2017-12-07
Inventors
- Katalin Szendrei (München, DE)
- Pirmin Ganter (Stuttgart, DE)
- Olalla Sanchez-Sobrado (Stuttgart, DE)
- Alexander Kuhn (Leipzig, DE)
- Bettina Lotsch (Pahl, DE)
Cpc classification
International classification
Abstract
The present invention relates to a device, comprising at least one layer of an active material having a first optical thickness, the active material being selected so as to experience a change (i) of at least one size dimension, (ii) of the resistance, (iii) of the refractive index or (iv) combinations of two or more of the foregoing, when the active material is subjected to a change in environment, wherein at least one and preferably all of the layers of the at least one layer of the active material is composed of at least two nanosheets of the active material, with the at least two nanosheets randomly overlapping one another. The invention further relates to a nanosheet of active material and to a use of the nanosheet of the material.
Claims
1.-15. (canceled)
16. A device, comprising at least one layer of an active material having a first optical thickness, the active material being selected so as to experience a change (i) of at least one size dimension, (ii) of the resistance, (iii) of the refractive index or (iv) combinations of two or more of the foregoing, when the active material is subjected to a change in environment, wherein at least one layer of the active material is composed of at least two nanosheets of the active material, with the at least two nanosheets randomly overlapping one another.
17. The device in accordance with claim 16, wherein all layers of the active material are composed of at least two nanosheets of the active material.
18. The device in accordance with claim 16, wherein the change in environment is at least one of a change in humidity of the environment and a change of the amount of a compound present in the environment.
19. The device in accordance with claim 16, wherein the active material of at least one layer has the general formula:
Ha(M1)x(M2)yOz.nH2O, where M1 is selected from the group comprising group 2 elements, group 4 elements, group 5 elements, group 14 elements, group 15 elements, rare earth elements, as well as Mn, Fe, Co, Ni, Zn, Cd and all solid solution and substitution compounds of these elements; M2 is selected from the group of elements comprising group 15 elements, group 5 elements and all solid solutions of these elements, with M2 being different from M1; where a=0-10; x=0-10; y=0-10; z=1-30; and n=0-50, wherein when x=0, y is not equal to 0, and when y=0, x is not equal to 0.
20. The device in accordance with claim 19, wherein the active material has an aspect ratio of length to width to height of the nanosheets of at least 20:20:1.
21. The device in accordance with claim 19, wherein the active material of all of the layers has the general formula:
Ha(M1)x(M2)yOz.nH2O.
22. The device in accordance with claim 16, wherein at least one of the at least two nanosheets has an average sheet thickness of 0.5 to 10 nm.
23. The device in accordance with claim 22, wherein all of the at least two nanosheets has an average sheet thickness of 0.5 to 10 nm.
24. The device in accordance with claim 16, wherein at least one layer of the active material has an average layer thickness selected in the range of from 4 nm to 5 mm.
25. The device in accordance with claim 24, wherein all layers of the active material have an average layer thickness selected in the range of from 4 nm to 5 mm.
26. The device in accordance with claim 16, wherein the change of a size dimension and/or of the refractive index brings about (a) a change of colour of the device due to interference effects, and/or (b) a change in the resistance and/or of the resistivity of the active material.
27. The device in accordance with claim 16, further comprising a substrate.
28. The device in accordance with claim 27 wherein the substrate is selected from the group of materials consisting of selected from the group of materials consisting of quartz, glass, plastic, polymer, metal, silicon, silicon coated with silicon oxide, transparent conducting oxides and arbitrary combinations of two or more of the aforementioned compounds.
29. The device in accordance with claim 27, wherein a thickness of the substrate is selected in the range of from 200 nm to 20 mm.
30. The device in accordance with claim 16, further comprising at least one layer of a first optical contrast material having a refractive index, which is different from or equivalent to the refractive index of the active material at the first optical thickness.
31. The device in accordance with claim 30, wherein the device comprises a stack, wherein the stack is composed of at least one bilayer, wherein each bilayer is formed by one layer of the first optical contrast material and of one layer of the active material.
32. The device in accordance with claim 31, wherein each stack comprises 2 to 30 first bilayers.
33. The device in accordance with claim 31, wherein at least one further layer of the active material is incorporated in the stack as a defect structure, either as a bottom layer, a top layer or as a layer within the stack.
34. The device in accordance with claim 30, wherein the first optical contrast material is composed of a material being selected from the group consisting of dielectric materials, polymers, sol-gel materials, nanoparticles, framework materials or nanosheets and arbitrary combinations of two or more of the aforementioned materials.
35. The device in accordance with claim 16, wherein the change in colour is from a colour to transparent, from transparent to a colour, from transparent to transparent or from a first colour to a second colour, such as from blue to red, with the spectral change from a first colour to a second colour in particular being associated with a change of the position of the optical stop band measured in reflectance or transmittance of at least 1 pm.
36. The device in accordance with claim 30, further comprising at least one layer of a second optical contrast material being different from the at least one layer of first optical contrast material and having a refractive index different from that of the first optical contrast material, wherein the first optical contrast material, the second optical contrast material and the active material are laminated on top of one another so as to form a stack, in which the first and second optical contrast material form a bilayer, on the top of which or below which only one layer of the active material, exhibiting a different optical thickness from the layers in the stack, is deposited as a defect structure; or wherein a laminate comprising a layer of active material incorporated into a stack composed of at least one bilayer, with at least one bilayer being formed by one layer of the first optical contrast material and one layer of the second optical contrast material.
37. The device in accordance with claim 16, wherein the device is selected from the group of members consisting of a humidity level sensor, a humidity level indicator, a resistive or optical touchless positioning interface, a touchless visualization platform, a breath control or analyzer platform, a smart privacy window changing colour with changing environmental conditions and a visualization platform for humid objects or the degree of humidity.
38. A nanosheet of active material having the general formula:
Ha(M1)x(M2)yOz.nH2O, where M1 is selected from the group comprising group 2 elements, group 4 elements, group 5 elements, group 14 elements, group 15 elements, rare earth elements, as well as Mn, Fe, Co, Ni, Zn, Cd and all solid solution and substitution compounds of these elements; M2 is selected from the group of elements comprising group 15 elements, group 5 elements and all solid solutions of these elements, with M2 being different from M1; where a=0-10; x=0-10; y=0-10; z=1-30; and n=0-50, wherein when x=0, y is not equal to 0, and when y=0, x is not equal to 0, with the nanosheet having an average thickness of 0.3 to 10 nm, an average width of greater than 20 nm and an average length of greater than 20 nm.
39. Use of nanosheets of active material in a device, comprising at least one layer of an active material having a first optical thickness, the active material being selected so as to experience a change (i) of at least one size dimension, (ii) of the resistance, (iii) of the refractive index or (iv) combinations of two or more of the foregoing, when the active material is subjected to a change in environment, the device being adapted as one of a humidity level sensor, a humidity level indicator, a resistive touchless positioning interface, an optical touchless positioning interface, a resistive touch positioning interface, an optical touch positioning interface, a breath control or analyzer platform, a smart privacy window changing the colours with changing environmental conditions, and a visualization platform for humid objects or the degree of humidity.
Description
[0075] The invention will be described in the following in more detail by means of embodiments with reference to the drawings. In these there is shown:
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[0087] Depending on the specific type of active material selected, each of the nanosheets 16 has an average thickness in the range of 0.3 to 10 nm such that the layer 14 of the active material that includes a plurality of nanosheets 16 can have a thickness that is selected in the range of approximately 10 to 2000 nm. The layer 14 of the active material is hence typically composed of at least two nanosheets 16 of the active material. The nanosheets 16 can be formed on top of one another to form the layer 14 of active material by a spin coating process or by a dip coating process for example. After formation of the different nanosheets 16 on top of one another, the nanosheets 16 randomly overlap one another.
[0088] The layer of active material has a first optical thickness, defined as the thickness of the layer 14 of active material multiplied by the refractive index of the active material. The active material is selected such that it experiences a change of at least one size dimension, i.e. its thickness, of its resistance, of the refractive index or combinations of two or more of the foregoing, i.e. of the first optical thickness to a second optical thickness and optionally also of its resistivity, when the active material is subjected to a change in environment. A change in environment is usually brought about by a change in humidity, a change in the amount of a gas or vapour present in the environment.
[0089] Devices 10 existing of only one layer 14 of active material are typically referred to as thin film devices. Such thin film devices can be implemented in a humidity level sensor, a humidity level indicator, a resistive or optical touchless positioning interface (designed as a thin film interference device), a visualization platform, and a breath control or analyzer platform.
[0090]
[0091] The stack 22 forms a one-dimensional photonic crystal, i.e. a so-called Bragg stack or Bragg mirror or dielectric mirror. In this connection it should be noted that although the layer 14 of active material of each bilayer 18 can have a different thickness than the layer 20 of optical contrast material, each bilayer 18 at least substantially has the same bilayer thickness and each layer 14 of active material of a stack 22 at least substantially has the same layer thickness as the other layers 14 of active material of the same stack 22. The same is true for the layers of an optical contrast material 20 of each stack 22.
[0092] On forming a device 10 in accordance with
[0093] A first design option is to select the refractive index such that it is substantially the same for both materials at a given boundary condition of the environment. This given boundary condition can be a level of humidity or a gas or vapour concentration of the environment. When the level of humidity of the environment changes this leads to a change in the refractive index of the layers 14 of active material of the stack 22 and may also lead to a change in optical thickness of the optical contrast material 20. This leads to an optical contrast between the two layers 14, 20 and leads to a detectable colour (the sensing signal). Such Bragg stacks 22 exhibit colour changes from transparent to colour or transparent (like refractive indices) to transparent (different refractive indexes, however, the stop band is in the infrared or UV range).
[0094] A second design option is to provide an optical contrast material that has a refractive index different from that of the active material. Thereby an optical band gap is formed. The optical band gap shifts on an increase e.g. as the level of humidity of the environment increases or decreases. Depending on the selection of materials of the layers 14, 20 of active material and of the optical contrast material, the refractive indices can become like, i.e. the material experiences a colour change from colour to transparent. Alternatively the refractive indices remain different and at least one of the changes the Bragg stack 22 experiences is from colour to colour, e.g. from blue to red.
[0095] Regardless of whether the first or the second design option is selected, it is true that the layer thickness increases, this also leads to an optical shift in the band gap.
[0096] In this connection it should thus be noted that the change in layer thickness thus initially does not have any influence on the transparency of the structure; however, can contribute to the shift in colour from e.g. blue to red and can also contribute to the sensing signal.
[0097]
[0098] A device 10 as shown in
[0099] The defect layer acts like a “dopant” and localizes light in the band gap, creating an allowed wavelength range (a dip in the reflection spectrum) within the optical band gap, the changes of the layer 14 of active material—brought about due to a change in environment—lead to a change in the defect layer which leads to a change of the allowed wavelength range by at least 1 pm.
[0100]
[0101] Devices 10 in accordance with
[0102] Due to its remarkable swelling characteristics driven by moisture and the resulting humidity-dependent proton conductivity, phosphatoantimonic acid H.sub.3Sb.sub.3P.sub.2O.sub.14 is a promising candidate for TPI based on local humidity sensing. The integration of 2D nanosheets into resistive sensing devices has been shown to give rise to a superior sensing performance as compared to the corresponding bulk material and other nanomorphologies. In a recent work, VS.sub.2 nanosheets were used for resistive TPI. However, these VS.sub.2 nanosheets sensors have certain drawbacks such as low chemical stability under ambient conditions (oxidation from V(IV) to (V) and hydrolysis), and rather poor sensitivity.
[0103] By means of the devices 10 shown in
[0104] Thin films of phosphatoantimonic acid nanosheets and hybrid 1DPCs made thereof form chemically stable, transparent and low-cost humidity sensing devices operating with resistive and optical read-out, both of which can be applied as touchless positioning interfaces. The experimental realization of this new concept of an optical TPI, which is capable of finger movement tracking, is realized by a combination of unique features such as ultra-large stop band shift (>500 nm) and a switch from high reflectivity to complete transparency caused by the diminution of the RI contrast of the layers, as well as fast response time (<3 s), high reproducibility and stability.
[0105] The method of manufacture of devices 10 in accordance with
[0117] The step of deposition is preferably carried out using a spin coating process. Such a process will be described in the following in detail.
[0118] The step of removing the substrate 12 from the device 10 is preferably carried out using either an etching step using e.g. acid or acetone, or a mechanical step by means of cutting away or breaking away the substrate 12 from the device 10 or peeling off the device 10 from the substrate 12 with or without the use of a swelling agent or chemical etchant.
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[0120] The layered phosphatoantimonate K.sub.3Sb.sub.3P.sub.2O.sub.14 and the proton exchanged phosphatoantimonic acid H.sub.3Sb.sub.3P.sub.2O.sub.14 were synthesized by a conventional solidstate reaction starting from KNO.sub.3, Sb.sub.2O.sub.3 and NH.sub.4H.sub.2PO.sub.4, followed by ion-exchange with 8 M nitric acid. The phosphatoantimonate is built up from anionically charged Sb.sub.3P.sub.2O.sub.14.sup.3− 2 D layers interleaved by charge-compensating cations (
[0121] Thin films of restacked nanosheets 16 with thicknesses in the range of 50-150 nm can be prepared by spin-coating the aqueous suspension of exfoliated nanosheets at different spinning speeds. Upon increasing the relative humidity from 0-100%, the nanosheet film swells to almost double its thickness (e.g. from 72 nm to 128 nm). Hereby, a particularly pronounced change is observed in the high humidity range above 90% RH (112-128 nm). This effect is accompanied by a RI decrease (from 1.62 to 1.52) in the whole humidity range as determined by spectroscopic ellipsometry, with a pronounced drop in the RH range above 90%, corresponding to the water uptake and the resulting thickness change. The RI increase and the nearly unchanged layer thickness in the low humidity range up to 10% RH are rationalized by the structural pore filling of the randomly restacked nanosheets. The continuous RI decrease in the higher RH range then is the result of mixing the refractive indices of water (1.33) and the nanosheets 16.
[0122] The humidity-responsive nanosheet thin films can directly be used as a touchless positioning interface based on resistive humidity sensing. The transparent thin film device 10 for resistivity sensing is displayed in
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[0124] Remarkably, an increase in ionic conductance of the sample can be observed with increasing RH by five orders of magnitude over the complete humidity range, with only a small hysteresis loop (
[0125] Bragg stacks 22 were assembled from (i) H.sub.3Sb.sub.3P.sub.2O.sub.14 nanosheet thin films as the humidity-sensitive component and (ii) either TiO.sub.2 or SiO.sub.2 nanoparticle layers 20 providing the required RI contrast. At ambient air (30% RH), the nanosheet film shows a refractive index of 1.56 as determined by spectroscopic ellipsometry While TiO.sub.2 nanoparticles exhibit a higher RI (1.84), SiO.sub.2 nanoparticle layers show a lower RI (1.34). The particle nature of the TiO.sub.2 and SiO.sub.2 layer acts as a gate, ensuring the access of the water molecules to the moisture-sensitive nanosheet layers through textural porosity.
[0126] The morphology of the three different materials—the spherical silica colloids, the irregular shaped titania particles and the laminar nanosheets 16—can be clearly distinguished in the inset of the figures. The spectral position of the maximum of the Bragg peak and thus the structural colour at normal incidence are given by the expression (4):
λ.sub.B=2.Math.(n.sub.1d.sub.1+n.sub.2d.sub.2) (4)
where n.sub.1 and n.sub.2 are the RIs of the different layers and d.sub.1 and d.sub.2 their respective thicknesses.
[0127] With this, the spin-coating technique allows the thickness of the deposited films to be fine-tuned and hence, the structural colour displayed by the Bragg stacks 22 by modifying the experimental parameters. For the fabrication procedure carried out in this work, only the spin-coating speed was varied from 2000 rpm to 4000 rpm, while the concentration of the different colloidal suspension, or any other parameter of the process, was kept constant.
[0128] In order to study the different features of optical humidity sensors, the two Bragg stacks 22 were introduced into a closed chamber with a transparent upper window, and the position of the Bragg peak was measured for different RH values controlled by saturated salt solutions at 25° C. Note that the porous nature of the nanoparticle layers and the fast equilibration time of the nanosheet layers ensure an easy access of the water molecules into the device 10 and their fast equilibration throughout the device 10.
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[0130] The general sensing mechanism of the Bragg stacks 22 is schematically depicted in
[0131] In the case of the H.sub.3Sb.sub.3P.sub.2O.sub.14/SiO.sub.2 based Bragg stack 22, the photonic stop band red-shifts by 100 nm in the lower RH range. The sequence of experimentally taken spectra for different values of RH is plotted in
[0132] The specular reflectance spectra taken for the TiO.sub.2/H.sub.3Sb.sub.3P.sub.2O.sub.14 BS are plotted in
[0133] Simulations of the optical spectra were carried out with a Matlab code out to confirm the optical properties observed for the Bragg stacks 22 (
[0134] One essential property required from a humidity sensor is a low level of cross-talk with other analytes, i.e. a response exclusive to e.g. water molecules. The selectivity towards water was tested by studying the sensitivity of the sensor to solvent vapours with different chemical properties and polarities (water, ethanol, toluene, isopropanol, heptane and acetonitrile) by monitoring the Bragg peak position and the time for the Bragg peak total shift (referred to as response time) with two different Bragg stacks 22 (TiO.sub.2/H.sub.3Sb.sub.3P.sub.2Oi.sub.4 (
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[0136] Compared to water vapour, the apolar (heptane, 10 nm and toluene, 12 nm) and aprotic polar solvents (acetonitrile, 17 nm) only show minute shifts with fast response times (several seconds). In contrast, the protic solvents with medium polarity (ethanol, 30 nm and isopropanol, 25 nm) show somewhat larger shifts, with response times of more than 2000 s. The observed response is likely due to delayed interlayer diffusion of the protic solvents slowed down by the larger size (isopropanol>ethanol>water) and less pronounced solvation/hydrogen-bonding capability of the alcohols as compared to water. In summary, not only a significantly larger stop band shift (more than 15 fold) in response to water vapour is observed, but also considerably shorter response times (30 s) are observed, which establishes a unique selectivity of the Bragg stack 22 to water vapour.
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[0138] Both the conductance of the thin film and the optical properties of the Bragg stacks 22 show a reproducible and selective response to changes in RH. Therefore, these thin film devices 10 are potential candidates for touchless positioning interfaces, since the human finger 26 is surrounded by a distance-dependent humidity environment. To probe the touchless sensing capability of the thin films, first, the nanosheet film 14 on a quartz substrate 12 was studied. Hereby, an increase of the conductance by more than a factor of 170 was observed when the distance of the finger 26 from the substrate was reduced from 1.6 cm to 0.1 cm at 30% ambient RH (see
[0139] With the highly sensitive photonic read-out scheme presented above, the tools are at hand to go one step further and develop an optical touchless positioning interface based on the lateral tracking of “humid” objects with an optical read-out visible by the naked eye. For these BS-based optical devices 10, no integration in an electronic assembly is required to visualize the finger position above a photonic surface. The experiments presented herein demonstrate the feasibility of this touchless optical sensing principle and are summarized in
[0140] Positioning the finger at a vertical distance of 1 mm from both Bragg Stack surfaces (TiO.sub.2 and SiO.sub.2 based) leads to a colour gradient along a distance between 1.0 mm and 1.8 mm from the fingertip, as shown in the microscope pictures corresponding to the two configurations proposed for TiO.sub.2/H.sub.3Sb.sub.3P.sub.2O.sub.14 and SiO.sub.2/H.sub.3Sb.sub.3P.sub.2O.sub.14 Bragg stacks 22, respectively (
[0141] In both cases, the structural colour for a distance of 1.5 mm corresponds to a RH of around 90% (see
[0142] It should be noted that the Bragg Stack 22 response is exclusively due to the local water vapour atmosphere surrounding the finger, rather than a temperature effect, as (i) the response in the finger-on state is completely analogous to the measurement at very high RH, and (ii) no colour change is observed if the finger 26 is protected by a nitrile glove (no water atmosphere but higher local temperature) (
Example Manufacture of K.sub.3Sb.sub.3P.sub.2O.sub.14
[0143] For the synthesis of K.sub.3Sb.sub.3P.sub.2O.sub.14 the precursors (KNO.sub.3 (99%, Merck), Sb.sub.2O.sub.3 (99.6%, Alfa Aesar), NH.sub.4H.sub.2PO.sub.4 (98%+, Acros Organics)) were thoroughly ground in a stoichiometric ratio and heated in the first step to 300° C. and after grinding in a second heating step to 1000° C. (for a period of each 24 h). For the proton exchange reaction 2 g of K.sub.3Sb.sub.3P.sub.2O.sub.14 were treated with 250 mL of 8 M nitric acid (diluted 65 wt %, Merck) overnight (for a period of 12 h), filtrated, washed with ethanol (99.8%, ca 15 mL) and dried at room temperature for 4 h. This treatment was repeated a second time to complete the exchange reaction. The success was monitored by XRD. Exfoliation was carried out by stirring the H.sub.3Sb.sub.3P.sub.2O.sub.14 vigorously overnight (16 h) in pure water with a concentration of bulk protons of 7.3 mmol L.sup.−1. The obtained colloidal suspensions were centrifuged at 3000 rpm for 30 min to remove non-exfoliated bulk material. The supernatant is a suspension of mainly single-layer nanosheets. To obtain the nanosheet pellet, an additional centrifugation step was applied at 18000 rpm for 30 min. The supernatant was discarded and the gel-like colourless wet aggregate was dried at 100° C. for at least 4 hours.
[0144] Examples of other nanosheets that can be used in terms of the present invention are H.sub.2SnP.sub.2O.sub.8.nH.sub.2O, H.sub.2ZrP.sub.2O.sub.8.nH.sub.2O, HTaP.sub.2O.sub.8.nH.sub.2O, HSb.sub.1-yTa.sub.yP.sub.2O.sub.8.nH.sub.2O, HAsP.sub.2O.sub.8.nH.sub.2O, H.sub.3Sb.sub.3As.sub.2O.sub.14, where x=1, 3, 0<y<1 and n=1-20. In this respect it can be summarised that some of the materials quoted above can be produced according to known published methods of synthesis. It should however in this context be noted that the manufacture of the material per se is known, but not all of these materials have hitherto been produced in the form of 2D planar nanosheets 16 and none of these nanosheet materials has been applied in spatially resolved humidity sensors such as Bragg stacks or thin films.
[0145] For example, H.sub.2SnP.sub.2O.sub.8.nH.sub.2O, H.sub.2ZrP.sub.2O.sub.8.nH.sub.2O can be produced according to published synthesis methods. HSbP.sub.2O.sub.8.nH.sub.2O can be synthesized in a fashion similar to H.sub.3Sb.sub.3P.sub.2O.sub.14.nH.sub.2O and according to syntheses described in the literature. HSb.sub.1-yTa.sub.yP.sub.2O.sub.8.nH.sub.2O can also be produced and exfoliated with TBAOH. HTaP.sub.2O.sub.8.nH.sub.2O, HAsP.sub.2O.sub.8.nH.sub.2O can be synthesized according to the literature. Exfoliation can be achieved by stirring in an aqueous TBAOH solution (molar ratio bulk protons:TBAOH=1:1 and concentration of bulk protons of 7.3 mmol L.sup.−1). TiO.sub.2 nanoparticulate sols were synthesized using the following procedure: To 75 ml of 0.1 M HNO.sub.3 12.5 ml Ti(OEt).sub.4 was added dropwise under vigorous stirring at room temperature. The reaction mixture was heated to 80° C. for 8 h and afterwards sonicated for 8 h to remove agglomerates. The colloidal solution of titania nanoparticles used for spin-coating was obtained by collection of the particles by repeated centrifugation at 20000 rpm and redispersion in methanol.
[0146] In contrast to this, SiO.sub.2 nanocolloids were purchased from Dupont (LUDOX TMA, Aldrich) (Product no.: 420859-1L)
[0147] In order to prepare colloidal suspensions, the dried colourless precipitate of the water exfoliated H.sub.3Sb.sub.3P.sub.2O.sub.14 nanosheets 16 was redispersed with a concentration of 42 mmol in a water/ethanol mixture (60 vol % ethanol) and sonicated for 2 h. The TiO.sub.2 suspensions had a concentration of 2.5 wt % in methanol. The commercial colloids of SiO.sub.2 were redispersed at 3 wt % in methanol.
[0148] In order to fabricate the nanosheets 16 respectively the thin films 14, 20, 24 and the Bragg Stacks 22, all sheets respectively films were made by means of spin-coating using a spin coater (WS-650S-NPP-Lite, Laurel) Technologies Corporation) and concentrations given above. Different film thicknesses were accessed by varying the spin-coating speed which allowed the fine-tuning of the optical properties. 400 μl of the colloidal suspensions were spin-coated on plasma cleaned microscope glass slides with the dimensions of 2.5 cm×2.5 cm, alternatingly for 1 min with a defined speed, and heated to 80° C. for 15 min after each layer deposition. 2000 rpm, 3000 rpm and 4000 rpm spin-coating speeds were applied (the same speed for each layer within a Bragg stack) to tune the optical properties. For conductance measurements, this redispersed Sb.sub.3P.sub.2O.sub.14.sup.3− nanosheet colloid was spin-coated at 3000 rpm or 2000 rpm for 1 min with a 10000 rpm acceleration ramp on a 1.5 cm×1.5 cm plasma-cleaned quartz glass substrate. Gold contacts were sputter-coated (108auto, Cressington) with 180 s sputtering time.
[0149] In order to carry out the structural characterization TEM images and selected area electron diffraction (SAD) patterns were obtained using a Phillips CM30 ST TEM (300 kV, LaB.sub.6 cathode) equipped with a Gatan CCD camera. TEM-EDX analysis was performed using a Si/Li detector (Thermo Fisher, Noran System Seven). SEM images of the nanosheet pellet as well as cross-sectional images of the Bragg stacks 22 were collected using a Vega TS 5130 MM (Tescan) equipped with Si/Li detector (Oxford). AFM measurements were obtained using a Veeco CP II system in non-contact mode. XRD patterns were collected on a powder X-ray diffractometer (Stadi P, STOE) working with Ge(111) monochromated Mo-K.sub.α1 radiation (λ=70.926 pm) or Cu-K.sub.α1 radiation (λ=154.051 pm) in Debye-Scherrer or transmission geometry with an image-plate detector or a point detector. Well-ground samples were either put between two Mylar® foils or filled in a glass capillary. Indexing was performed with the software DiffracPlus TOPAS v4.2 (Bruker AXS). The images of the surfaces of the Bragg stack were obtained with an optical microscope (Olympus BX51), operating in reflection mode with a 4× objective.
[0150] In order to obtain the conductance measurements, two different methods were used. In the first one the films were kept over saturated salt solutions, at around 25° C. in a closed atmosphere at least 15 min before the conductance measurements. In the second measurement an argon flow set up was used. A dry Ar flow and a water vapour saturated Ar stream were mixed in different ratios to define the humidity between 0-93.5%. The setup was calibrated using the conductance values previously measured at the RH defined by the salt solutions. The cycling was performed using the Ar stream setup. The change in conductance was monitored by impedance spectroscopy with an impedance bridge (Princeton Apllied Research, VersaSTAT MC) applying an AC voltage of 500 mV and a frequency range of 1 Hz to 1 MHz. Cycling measurements were performed with a fixed frequency of 300 Hz.
[0151] All optical spectra were measured using a fiber optic spectrometer (USB2000+, Ocean Optics) attached to a microscope (DM2500, Leica) with normal incidence and the optical spectra were always taken at the same spot (1×1 mm.sup.2 in area). To obtain the optical changes with relative humidity change, the Bragg stacks 22 were kept over 2 mL of the saturated salt solutions described before at around 25° C. in a closed stainless steel chamber with a transparent glass window. At each step, 15 min atmosphere equilibration time was needed. To measure the shift of the Bragg peak with the different organic solvents a different methodology was applied. The application of other solvent vapours with a defined relative pressure was realized by connecting the inserted pipette tip with a liquid-gas flow controller (Bronkhorst) and a vapourizer (CEM) with a massflow-controlled carrier gas flow. To observe a desired relative pressure of the analyte of interest, the carrier gas nitrogen (200 mL min.sup.−1) and the liquid solvent were dosed into the CEM (controlled evaporation and mixing, W101A-130-K, Bronkhorst High-Tech), where the thermal evaporation of the solvent took place. The CEM was heated to temperatures above the boiling point. The vapour relative pressures were calculated via the software FLUIDAT, CEM calculation, which considers the actual atmospheric pressure, the temperature and the properties of the analyte (vapour pressure, heat capacity). The spectra were measured in the visible range with an OCEAN OPTICS QP400-2-UV-BX optical fiber interfaced with a LEICA DM 2500 M microscope. The obtained data were analyzed with the SPECTRA SUITE (2008) software.
[0152] The touchless positioning interface measurements were carried out using conductance measurements. The conductance measurements were carried out by impedance spectroscopy (see above) by placing a finger 26 at different distances of 0.1-1.6 cm without touching the thin film device 10.
[0153] Optical measurements were similarly carried out; a finger 26 was used to approach the Bragg stack 22 at a distance of 1 mm. Hereby lateral optical changes were detected by the optical microscope (Olympus BX51) coupled to a CMOS camera and an Ocean Optics USB4000-XR1-ES spectrometer. A finger cycling was carried out by approaching and distancing the finger 26 in regular intervals of ca. 15 sec. To detect the stop band changes, the intensity changes at the wavelength 475 nm were followed. The optical tracking of the finger movements by the Bragg stack 22 were recorded by a conventional smart phone camera.
[0154]
[0155] quartz substrate 12, thin layer of the nanosheets 16 and Au contacts 28).
[0156] Table 1 shows the refractive indices and monolayer thicknesses for the SiO.sub.2/H.sub.3Sb.sub.3P.sub.2O.sub.14 Bragg stack measured by ellipsometry at different relative humidity values. These values were taken for the simulations at different relative humidity values (
TABLE-US-00001 Monolayer property 11% RH 74% RH 93% RH n(H.sub.3Sb.sub.3P.sub.2O.sub.14) 1.6090 1.5729 1.5424 n(SiO.sub.2 NP) 1.4269 1.4409 1.4650 d(H.sub.3Sb.sub.3P.sub.2O.sub.14) 52.9 nm 70.0 nm 83.0 nm d(SiO.sub.2 NP) 90.0 nm 90.0 nm 90.0 nm
[0157] Table 2 shows the refractive indices and monolayer thicknesses for the TiO.sub.2/H.sub.3Sb.sub.3P.sub.2O.sub.14 Bragg stack measured by ellipsometry at different relative humidity values. These values were taken for the simulations at different relative humidity values (
TABLE-US-00002 Monolayer property 11% RH 74% RH 93% RH n(H.sub.3Sb.sub.3P.sub.2O.sub.14) 1.6090 1.5729 1.5424 n(TiO.sub.2 NP) 1.7500 1.7702 1.8000 d(H.sub.3Sb.sub.3P.sub.2O.sub.14) 51.0 nm 67.5 nm 80.0 nm d(TiO.sub.2 NP) 80.0 nm 80.0 nm 80.0 nm
REFERENCE NUMERALS
[0158] 10 device [0159] 12 substrate [0160] 14 layer of active material [0161] 16 nanosheet [0162] 18 bilayer [0163] 20 layer of a first optical contrast material [0164] 22 stack [0165] 24 layer of a second optical contrast material [0166] 26 finger [0167] 27 glove [0168] 28 contact