EMITTER AND METHOD FOR PLASMA FUSING OF MATERIALS
20230189424 · 2023-06-15
Inventors
- William Jack MacNeish, III (Santa Ana, CA, US)
- Charles Brandon Sweeney (Pflugerville, TX, US)
- Blake Teipel (Pflugerville, TX, US)
Cpc classification
B33Y10/00
PERFORMING OPERATIONS; TRANSPORTING
B33Y30/00
PERFORMING OPERATIONS; TRANSPORTING
B22F2999/00
PERFORMING OPERATIONS; TRANSPORTING
B22F2999/00
PERFORMING OPERATIONS; TRANSPORTING
H01L21/67126
ELECTRICITY
Y02P10/25
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
International classification
H01L21/67
ELECTRICITY
Abstract
An emitter and process for plasma fusing of materials. The emitter including a discharge device defining an emitter or an emitter array configured to create a directed plasma to transfer energy to a target object; and a plasma generating electrical system including a power source and two poles, wherein one of said two poles is connected to the target object and the other of said two poles is connected to the discharge device.
Claims
1. An emitter for plasma fusing of materials, comprising: a discharge device defining an emitter or an emitter array configured to create a directed plasma to transfer energy to a target object; and a plasma generating electrical system including a power source and two poles, wherein one of said two poles is connected to the target object and the other of said two poles is connected to the discharge device.
2. The emitter of claim 1, wherein a ratio of extents of the discharge device to a gap between the discharge device and the target object is greater than 1 to 1.
3. The emitter of claim 1, further comprising an applicator.
4. The emitter of claim 3, wherein the discharge device directly contacts the applicator allowing the plasma to be generated directly through the target object.
5. The emitter of claim 1, wherein a material of the target object is conductive and is connected to one pole of a plasma-generating electrical system.
6. The emitter of claim 1, wherein the discharge device is proximate to the target object on a device-under-build (DUB).
7. The emitter of claim 1, wherein the emitter defines a surface dielectric barrier discharge device (SDBD).
8. The emitter of claim 7, wherein the SDBD comprises a silicon wafer having an array of cathode pads and anode pads on a surface of the SDBD, the array of cathode pads and anode pads covered with a layer of material having a high dielectric constant defining the target object.
9. An additive manufacturing system, comprising: a support bed, including a build surface; an applicator head; wherein the support bed is moveable relative to the applicator head; and a discharge device, mounted over the support bed.
10. The additive manufacturing system of claim 9, wherein a target object is disposed on the support bed.
11. The additive manufacturing system of claim 9, wherein the applicator head is mounted on a first gantry and the discharge device is mount on a second gantry.
12. A process for plasma fusing of a target object, comprising: disposing a target object on a support bed with an applicator; discharging plasma from a plasma discharge device defining an emitter or an emitter array; and altering the target object with the discharged plasma.
13. The process of claim 12, wherein altering the target object comprises fusing the target object to a device under build.
14. The process of claim 12, wherein the target object comprises a polymer material and altering the target object further comprises de-binding the target object from an other material.
15. The process of claim 12, wherein the other material comprises metal.
16. The process of claim 12, wherein the target object comprises a vaporizable material and altering the target object further comprises vaporizing the target object.
17. The process of claim 12, wherein the applicator provides the target object in powder form and the target object is applied directly onto the discharge device.
18. The process of claim 17, further comprising: moving the discharge device proximate to the applicator allowing the plasma to pass through the target object; and fusing the target object.
19. The process of claim 12, wherein a material of the target object is conductive and is connected to one pole of a plasma-generating electrical system.
20. The process of claim 12, further comprising: moving the discharge device proximate to the target object on a device-under-build (DUB); and firing a power source, wherein a geometry of the target object is imaged into a desired geometry.
21. The process of claim 12, further comprising selectively energizing portions of the discharge device.
22. The process of claim 12, further comprising discharging the plasma in multiple successive shots of applied energy to the target object.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0016] The drawings described herein are for illustration purposes only and are not intended to limit the scope of the present disclosure in any way.
[0017]
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DETAILED DESCRIPTION
[0025] The following description is merely exemplary in nature and is not intended to limit the present disclosure, application, or uses.
[0026] Referring to
[0027] According to several aspects, a discharge device may have the target object, for example in powder form, applied directly onto the discharge device, with the discharge device moved proximate to an applicator shown and described in reference to
[0028] With continuing reference to
[0029] According to several aspects, the target object 16, for example in the form of a polymeric material powder is initially applied to a device-under-build (DUB) 22. According to several aspects, a geometry of the target object 16 is “imaged” into a desired geometry. The discharge device 12 is then moved into a position proximate to the target object 16 on the device-under-build (DUB) 22 and “fired” or energized by the power source 20. When charged to a different potential, the plasma 14 is generated between the discharge device 12 and the DUB 22, which heats and fuses the material of the target object 16 to the device-under-build (DUB) 22 using as few as a single shot of energy from the discharge device 12 applied over an entire area of the target object 16. According to further aspects, multiple successive shots of energy and therefore multiple applications of the plasma 14 may be applied to achieve the desired geometry of the target object 16.
[0030] A pattern or image of the target object 16 may be predetermined before or during application of the plasma 14 and may be selected from multiple image portions which together define a finished or desired pattern. One or multiple images or patterns defining the target object 16 may be saved in a memory which may be generated for example by an image slicer known in the art and therefore applied in one or more layers by sintering the single layer or by successively sintering multiple layers of material. According to several aspects, a desired geometry of the target object 16 may also be achieved by selectively energizing portions of the discharge device 12 or by operating the discharge device 12 in multiple successive shots of applied energy to melt or sinter the powder which creates the target object 16. According to several aspects, individual pixels 24 created in the target object 16 may have an individual pixel brightness increased or decreased with respect to adjacent ones of multiple pixels 26 by modifying local power levels at the individual pixels 24 delivered by the discharge device 12.
[0031] Referring to
[0032] According to several aspects, the SDBD 28 may comprise a silicon wafer having an array of cathode pads 44 and anode pads 46 on the surface 34 of the SDBD 28. The SDBD 28 may be similar to a wafer used for integrated circuit boards, having the array of cathode pads 44 and anode pads 46 on the surface 34 covered with a layer of material having a high dielectric constant defining a target object 32. Both poles for plasma generation are therefore positioned on the SDBD 28 or plasma applicator, eliminating the need for the target object 32 to be conductive and to act as a conductive pole. When adjoining or successive ones of the cathode pads 44 and the anode pads 46 are thereafter charged to a different potential the plasma 30 generates as an arc in an ambient medium of the gap 38. The ambient medium may be air, argon, hydrogen or other medium material between the adjoining ones of the cathode pads 44 and anode pads 46 and the applicator 36. The plasma 30 fuses the target object 32 to the SDBD 28 in the predetermined pattern.
[0033] Referring to
[0034] Referring to
[0035] Referring to
[0036] Plasma generated using any of the emitter aspects of the present disclosure may be used to de-bind low-energy-content polymers from a metal target material composite. Plasma generated using any of the emitter aspects of the present disclosure may also be used to provide energy to fully fuse materials, as opposed to de-binding polymers and other materials. A plasma-generating emitter of the present disclosure may further be used to fuse pre-imaged polymeric powder or polymeric film layers of one or more polymers to a device-under-build (DUB).
[0037] The plasma emitters of the present disclosure including the aspects described above with respect to
[0038] As the plasma-emitting surface of the emitter having a layer of powder/film/FFF material as the target object is heated and fused with plasma energy, the material of the target object dielectric constant and other properties will change. A control system is therefore implemented that senses these changes and adapts to them. According to several aspects, in an exemplary aspect the control system monitors voltage and current through a plasma generator electronics package to observe loading and coupling of a stream of the plasma relative to the target object.
[0039] The emitters of the present disclosure may comprise many small plasma cells 80 defining an image array to control uniformity, and to image/shape a fusing area 82. The emitters may also be operated to electrostatically image raw polymeric powder prior to conducting the coining and fusing operations.
[0040] In aspects, and with reference to
[0041]
[0042] In aspects of the processes described above, the process chamber 104 may exhibit a controlled atmosphere, wherein vacuum is applied to the atmosphere during the processes described above. In addition to the application of vacuum, or alternatively to the application of vacuum, a gas may be supplied to the process chamber, such as argon, helium, and hydrogen.
[0043] In aspects, the controller 128 is used to provide a power supply and regulate the power to the discharge device 12. The controller 128 also includes executable code to control the plasma energy discharged by the discharge device in synchronization with the fusing process using voltage-current sensing. In aspects, the controller 128 also includes executable code to select and charge specific cells 80 of the discharge device.
[0044] In particular aspects, the process of fusing the target object of the present disclosure may occur in approximately 100 ms for a 300×300×0.2 mm volume of material in a 3D printing machine. Having the layers fused allows the layers to be imaged/shaped in parallel with the fusing process, providing a throughput of approximately 1 kg per minute, compared to current 3D printing technologies which average approximately 1 kg per hour. A spatially and temporally managed plasma field of the present disclosure may be used to de-bind some materials and areas, fuse other materials and areas, and remove or vaporize other materials and areas.
[0045] A process and an emitter for plasma fusing of materials 10 of the present disclosure offers several advantages. These include fusing raw material layers with a plasma field, fusing deposited, but un-fused FFF layers—polymer, metal or ceramic material. The process and an emitter for plasma fusing of materials 10 of the present disclosure provides an SDBD approach to plasma generation/management, mechanically coins layers in conjunction with fusing, fuses films with a certain, known dielectric constant, and uses V/I sensing to control plasma energy in synchronization with the fusing process.
[0046] The description of the present disclosure is merely exemplary in nature and variations that do not depart from the gist of the present disclosure are intended to be within the scope of the present disclosure. Such variations are not to be regarded as a departure from the spirit and scope of the present disclosure.