Abstract
A MEMS sound transducer for generating and/or detecting sound waves includes a support having a cavity wall which at least partially delimits a cavity of the MEMS sound transducer. At least one cantilever arm element includes a base section that is fixedly connected to the support. Each cantilever arm includes a flexible deflection section overhanging the cavity wall. At one end of the deflection portion is a base end that is disposed to face the cavity wall. Opposite the base end is a free end that is configured to be deflectable relative to the support in the direction of a stroke axis of the MEMS sound transducer. The base end of the deflection section in a sound transducer top view has a curved first contour.
Claims
1. A MEMS sound transducer for generating and/or detecting sound waves, including: a support, which has a cavity wall, which at least partially delimits a cavity of the MEMS sound transducer, and a cantilever arm element, which has a base section fixedly connected to the support and which has a flexible deflection section projecting over the cavity wall, wherein the deflection section has a base end facing the cavity wall and a free end deflectable relative to the support in the direction of a reciprocation axis of the MEMS sound transducer, wherein the base end of the deflection section and the cavity wall face each other along an interface that follows a curved contour.
2. The MEMS sound transducer according to claim 1, wherein the base end has a curved first contour and wherein the cavity wall has a curved second contour corresponding to the first contour of the deflection section, wherein the first contour is convexly curved and the second contour is concavely curved.
3. The MEMS sound transducer of claim 1, wherein the cantilever arm element has a multi-layer design and includes at least one support layer and at least one piezoelectric transducer layer, wherein the support layer and the transducer layer extend across the base section and the deflection section in a longitudinal direction of the cantilever arm element.
4. The MEMS sound transducer of claim 3, wherein each of the support layer and the transducer layer has two longitudinal sides, which converge towards each other in the direction of the free end, and a transverse side.
5. The MEMS sound transducer of claim 4, wherein the longitudinal sides of the transducer layer are spaced apart from the longitudinal sides of the support layer.
6. The MEMS sound transducer of claim 1, wherein the curved contour of the interface has multiple curvature sections with mutually different curvatures.
7. The MEMS sound transducer of claim 1, wherein the curved contour of the interface has a first curvature section, which has a first curvature, and a second curvature section, which has a second curvature.
8. The MEMS sound transducer of claim 7, wherein each of the first curvature and the second curvature is formed as a circle segment, and the first curvature has a larger radius compared to the second curvature.
9. The MEMS sound transducer of claim 7, wherein a first circle center of the first curvature lies on a longitudinal central axis of the cantilever arm element and is further away from the base end than the free end.
10. The MEMS sound transducer of claim 7, wherein a second circle center of the second curvature lies on a longitudinal lateral axis of the cantilever arm element and between the base end and the free end.
11. The MEMS sound transducer of claim 7, wherein the first curvature section is arranged between two second curvature sections.
12. The MEMS sound transducer of claim 1, further comprising: at least one further cantilever arm element; wherein the first cantilever arm elements are arranged relative to one another in such a way that their respective free ends are arranged in a center of the MEMS sound transducer.
13. The MEMS sound transducer of claim 12, wherein two adjacent cantilever arm elements are separated from each other by a separating slot, wherein the separating slot extends from the free ends of the two adjacent cantilever arm elements in the direction of the cavity wall and wherein a slot end of the separating slot facing the cavity wall is spaced from the cavity wall, so that the support layers of the two adjacent cantilever arm elements are connected in this region.
14. The MEMS sound transducer of claim 12, wherein the separating slot has at its slot end a relief slot extending in a transverse direction of the separating slot.
15. The MEMS sound transducer of claim 12, wherein each free end of each of the cantilever arm elements is formed as a rectangular tip and wherein multiple separating slots in the center of the MEMS sound transducer form an H-shaped separating slot region that separates the free ends of the cantilever arm elements from each other.
16. A MEMS sound transducer for generating and/or detecting sound waves, including: a support, which has a cavity wall, which at least partially delimits a cavity of the MEMS sound transducer, and at least one cantilever arm element, which has a base section fixedly connected to the support and a flexible deflection section projecting over the cavity wall, wherein the deflection section has a base end facing the cavity wall and a free end deflectable relative to the support in the direction of a reciprocation axis of the MEMS sound transducer, wherein the free end of the deflection section has two corners in a sound transducer top view.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0032] Further advantages of the invention are described in the following exemplary embodiments, wherein:
[0033] FIG. 1 shows a top view of a MEMS sound transducer with cantilever arm elements having a curved first contour,
[0034] FIG. 2 shows a longitudinal section through the chain-dashed line A - A of the top plan view of the MEMS sound transducer shown in FIG. 1 in the region of one of the cantilever arm elements,
[0035] FIG. 3 shows a bottom view of the MEMS sound transducer shown in FIGS. 1 and 2 with visualized curvature geometries,
[0036] FIG. 4 shows an enlarged view of the area at a center of the MEMS sound transducer shown in FIGS. 1, 2 and 3, and
[0037] FIG. 5 shows a perspective view of a portion of the MEMS sound transducer shown in FIGS. 1, 2 and 3.
DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS
[0038] FIGS. 1 to 5 show various views of a MEMS sound transducer 1 in accordance with the present invention for generating and/or detecting sound waves. The MEMS sound transducer 1 desirably can be designed to generate and/or detect sound waves in the audible wavelength spectrum. In this case, the MEMS sound transducer 1 is preferably designed as a tweeter and/or provided for an audio system. Additionally or alternatively, the MEMS sound transducer 1 may be designed to generate and/or detect sound waves in the ultrasonic range. In this case, the MEMS sound transducer 1 is preferably an ultrasonic sensor and/or ultrasonic transmitter. Additionally or alternatively, the MEMS transducer 1 may be designed to transmit and/or receive data, preferably encoded in audio information. In this case, the MEMS transducer 1 is preferably an integral part of a data transmission device.
[0039] According to FIGS. 1,2, 3 and 5, the MEMS transducer 1 includes a support 2. The support 2 may be a silicon substrate. Alternatively, the support 2 can also be a PCB circuit board. Furthermore, the MEMS sound transducer 1 includes a cavity 3, which is generally designated in FIGS. 1 and 2 and is an acoustic cavity preferably formed on a rear side of an acoustic element that can generate and/or detect sound pressure on its front side.
[0040] The support 2 has at least one cavity wall designated in phantom (not actually visible to the viewer of FIG. 1) by the dashed line in FIG. 1 and identified by the numeral 4, and which at least partially delimits the cavity 3. In the embodiment shown, the support 2 includes multiple, in particular four, cavity walls designated 4a, 4b, 4c, 4d in FIG. 2. As shown therein, each of two pairs of these walls has one of the paired walls arranged opposite the other one of the paired walls. The cavity walls 4a, 4b, 4c, 4d thus form a frame, which is, in particular, quadrangular and/or closed in the circumferential direction. The perspective view of FIG. 5 shows the curvature of a section of the cavity wall 4a for example. For generating and/or detecting the sound pressure, the MEMS sound transducer 1 includes the at least one acoustic element, which in the present case is designed as a cantilever arm element 5, 6, 7, 8.
[0041] With the viewer looking in the direction of the arrows designated A -A in FIG. 1, FIG. 2 shows a longitudinal section through such a cantilever arm element 5, which includes a base section 9 and a deflection section 10 that elongates in the longitudinal direction, which is indicated by the double headed arrow designated L. Each of the other cantilever arm elements 6, 7 and 8 is configured as will be described for the exemplary cantilever arm element 5 shown in FIG. 2. In the base section 9, the cantilever arm element 5, 6, 7, 8 is firmly connected to the support 2. As a result, the cantilever arm element 5, 6, 7, 8 is fixedly clamped to the support 2 on one side, namely in its base section 9, and thus cannot move in this section relative to the support 2. In contrast, the deflection section 10 projects beyond the cavity wall 4 or overhangs the cavity wall 4. As a result, the cantilever arm element 5, 6, 7, 8 is not supported by the support 2 in its deflection section 10, so that the cantilever arm element 5, 6, 7, 8 can be bent along its length in this section in the direction of a reciprocation axis, which is indicated by the double headed arrow designated H in FIG. 2. In the longitudinal direction of the cantilever arm element 5, 6, 7, 8, the deflection section 10 includes a base end 11 facing the cavity wall 4 and a free end 12 facing away from the cavity wall 4. The base end 11 is formed to be disposed immediately adjacent to the cavity wall 4 and therefore intersects with the cavity wall 4 along a line that has a shape corresponding to the cavity wall 4. The entire deflection section 10 and in particular the free end 12 are completely stand-alone, i.e. not connected to any other element.
[0042] The deflection section 10 of the cantilever arm element 5, 6, 7, 8 is designed to be flexible, preferably over its entire length, so that the free end 12 of the deflection section 10 or of the cantilever arm element 5, 6, 7, 8 can be deflected in the direction of a reciprocation axis H by bending the deflection section 10, in particular by bending it across the entire length of the deflection section 10. This can be done either reactively due to incoming sound waves or actively to generate sound waves.
[0043] As can be seen in particular from FIG. 2, the cantilever arm element 5, 6, 7, 8 has a multi-layer design. Thus, the cantilever arm element 5, 6, 7, 8 includes multiple layers lying on top of each other in the direction of the reciprocation axis H. One of these layers is a support layer 13, which is preferably made of a flexible material, such as silicon or a polymer. In this case, the support layer 13 takes on a load-bearing function for at least one further layer. Thus, in addition to the support layer 13, the cantilever arm element 5, 6, 7, 8 further includes at least one transducer layer 14. With this transducer layer 14, sound waves can be detected and/or generated. This is done by converting kinetic energy into electricity and/or electricity into kinetic energy. In order to be able to be deflected, the transducer layer 14 is also designed to be flexible, in particular across its entire length. The transducer layer 14 is preferably a piezoelectric layer. In order to generate sound waves, the transducer layer 14 can therefore be designed as an actuator layer, in particular a piezoelectric actuator layer. Additionally or alternatively, the transducer layer 14 can be designed as a sensor layer, in particular a piezoelectric sensor layer, for detecting sound waves. Additional layers (not shown) configured and disposed to function as electrodes can be arranged adjacent to the transducer layer 14.
[0044] According to the longitudinal section through one of the cantilever arm elements 5, 6, 7, 8 shown in FIG. 2, the support layer 13 extends across the entire length of the cantilever arm element 5, 6, 7, 8. In contrast, the transducer layer 14 is shorter than the support layer 13 in the longitudinal direction L of the cantilever arm element 5, 6, 7, 8. Thus, a first end 15 of the transducer layer 14 facing away from the cavity wall 4 is spaced apart from the free end 12 of the cantilever arm element 5, 6, 7, 8 in the longitudinal direction of the cantilever arm element 5, 6, 7, 8. An opposite second end 16 of the transducer layer 14 is spaced apart from an outer end 17 of the cantilever arm element 5, 6, 7, 8 or the support layer 13. The transducer layer 14 is located at least partially in both the base section 9 and the deflection section 10 of the cantilever arm element 5, 6, 7, 8. The portion of the transducer layer 14 located in the base section 9 of the respective cantilever arm element 5, 6, 7, 8 is thus firmly fixed to the support 2 so that it cannot be bent. The part of the transducer layer 14 located in the deflection section 10 protrudes beyond the cavity wall 4. As a result, when the deflection section 10 is deflected, the part of the transducer layer 14 located in the deflection section 10 is bent across its length, in particular its entire length, in the direction of the reciprocation axis H.
[0045] In the top view shown in FIG. 1 and the cavity-side bottom view of the MEMS sound transducer 1 shown in FIG. 3, it is apparent that the cantilever arm element 5, 6, 7, 8 tapers in the direction of the free end 12. Thus, the cantilever arm element 5, 6, 7, 8 is wider in the region of the base section 9 than in the region of the free end 12. In the present exemplary embodiment, the cantilever arm element 5, 6, 7, 8 tapers in a triangular shape. The free end 12 thus forms a tip of the cantilever arm element 5, 6, 7, 8 oscillating freely in the direction of the reciprocation axis H.
[0046] The cantilever arm element 5, 6, 7, 8 has two longitudinal sides 18, 19 shown in FIG. 1. According to FIG. 1, these two longitudinal sides 18, 19 extend toward each other in the direction of the free end 12. The two longitudinal sides 18, 19 desirably are straight. At the outer end 17, the cantilever arm element 5, 6, 7, 8 has a transverse side 22, which preferably forms the widest point of the cantilever arm element 5, 6, 7, 8. According to the top view shown in FIG. 1, the transducer layer 14 has longitudinal sides 20, 21 corresponding to the longitudinal sides 18, 19 of the cantilever arm element 5, 6, 7, 8. However, the transducer layer 14 is narrower than the support layer 13, so that the longitudinal sides 20, 21 of the transducer layer 14 are spaced apart from the longitudinal sides 18, 19 of the cantilever arm element 5, 6, 7, 8. Preferably, the longitudinal sides 20, 21 of the transducer layer 14 are formed parallel to the longitudinal sides 18, 19 of the cantilever arm element 5, 6, 7, 8. Furthermore, the transducer layer 14 also has a transverse side 23 formed at the second end 16 of the transducer layer 14 and/or forming the second end 16. The transverse side 23 of the transducer layer 14 is convexly curved away from the first end 15 according to the top view shown in FIG. 1. Furthermore, the transducer layer 14 has corners 24 between the transverse side 23 and one opposite end of the respective longitudinal side 20, 21, which corners 24 are preferably rounded.
[0047] As shown in FIGS. 1 and 3, the MEMS sound transducer 1 includes multiple cantilever arm elements 5, 6, 7, 8, which are formed as described above. Furthermore, the MEMS sound transducer 1 includes multiple cavity walls 4a, 4b, 4c, 4d, which can be seen in particular in FIG. 3. Preferably, each of these cavity walls 4a, 4b, 4c, 4d is associated with a cantilever arm element 5, 6, 7, 8. The cavity walls 4a, 4b, 4c, 4d delimit the cavity 3 laterally and/or form a frame 25, which is closed in the circumferential direction. The frame 25 is open in the direction of the reciprocation axis H at at least one end, so that a frame opening 26 is formed. The cantilever arm elements 5, 6, 7, 8 are arranged in the direction of the reciprocation axis H in the region of this frame opening 26 and/or at least partially close it.
[0048] In the present embodiment, the MEMS transducer 1 includes four cantilever arm elements 5, 6, 7, 8 and/or four cavity walls 4a, 4b, 4c, 4d. The four cavity walls 4a, 4b, 4c, 4d form a quadrangular, in particular square, frame 25. Two cantilever arm elements 5, 6, 7, 8 are arranged opposite each other. As a result, their base ends 11 are located on two opposite cavity walls 4a, 4b, 4c, 4d of the frame 25.
[0049] As shown in particular in FIGS. 1, 2 and 3, the base end 11 of the deflection section 10 of the at least one cantilever arm element 5, 6, 7, 8 has a curved first contour 27. This first contour 27 is defined by the top edge of the immediately adjacent and/or corresponding cavity wall 4a, 4b, 4c, 4d. Accordingly, the cavity wall 4a, 4b, 4c, 4d according to the sound transducer top view shown in FIGS. 1 and 3 has, in particular at least in a region adjacent to the deflection section 10 in the direction of the reciprocation axis H, a curved second contour 28 corresponding to the first contour 27 of the deflection section 10. As a result, the first contour 27 of the base end 11 forms a positive shape and the second contour 28 of the cavity wall 4a, 4b, 4c, 4d forms a corresponding negative shape. The first contour 27 of the base end 11 of the cantilever arm element 5, 6, 7, 8 is convexly curved according to FIGS. 1 and 3. The second contour 28 of the cavity wall 4a, 4b, 4c, 4d is concavely curved.
[0050] In the exemplary embodiment shown, the curved first contour 27 and the curved second contour 28 are designed as a curve, in particular as shown in FIGS. 1 and 3. This has a variable slope so that the curve is smooth or stepless. Alternatively, the curved first contour 27 and the curved second contour 28 could also be formed as a polygonal line. In this case, the curvature of the first contour 27 and the curvature of the second contour 28 would be formed from a plurality of points that are connected to each other via straight connecting sections. The polygonal line could also be stepped and/or designed as a discrete curve.
[0051] As can be seen in particular from FIG. 3, the first contour 27 and the corresponding second contour 28 are at least partially formed as part of at least one circle 34, 38 or as at least one circle segment 33, 37. In the sound transducer top view shown in FIG. 3, the first contour 27 and the corresponding second contour 28 have multiple curvature sections 29, 31 with mutually different curvatures 30, 32. Thus, the first contour 27 and/or the second contour 28 have/has a first curvature section 29, which has a first curvature 30. The first curvature 30 is formed as a first circle segment 33 of a first circle 34 having a first circle center 35. The first circle center 35 lies on a longitudinal central axis 36 of the corresponding cantilever arm element 5, 6, 7, 8. Furthermore, the first circle center 35 is further away from the base end 11 of the deflection section 10 than the free end 12 of the MEMS sound transducer 1. The first curvature section 29 extends in the transverse direction of the cantilever arm element 5, 6, 7, 8 across the entire width of the transducer layer 14.
[0052] If the cavity wall 4a, 4b, 4c, 4d is straight in the top view, local load peaks occur in the cantilever arm element 5, 6, 7, 8, which can lead to destruction of the cantilever arm element 5, 6, 7, 8, namely in particular of the transducer layer 14. Such local load peaks occur in particular in the region of the base end 11, in particular in the region of the longitudinal central axis 36 of the cantilever arm element 5, 6, 7, 8. The curved first contour 27 and/or the second contour 28 cause(s) the loads in the deflection section 10, namely in particular in the region of the base end 11, to be distributed evenly in the transverse direction of the cantilever arm element 5, 6, 7, 8. This can prevent damage to the cantilever arm element 5, 6, 7, 8 due to overloading. Due to the even distribution of the load in the transverse direction, the cantilever arm element 5, 6, 7, 8 can also absorb higher forces overall. As a result, the performance of the MEMS sound transducer 1 can therefore also be increased by the first contour 27 and/or the second contour 28. Furthermore, the curved first contour 27 and/or the second contour 28 reduce(s) structural differences between the center of the cantilever arm element 5, 6, 7, 8 and its corner regions, as the result of which the coupling of the regions of the cantilever arm element 5, 6, 7, 8 formed with the transducer layer 14 with the support 2 is improved, which in turn ensures a more stable operation of the MEMS sound transducer 1. A further advantage of the curved first contour 27 and/or second contour 28 is that the cantilever arm element 5, 6, 7, 8, in particular its free end 12, performs a much cleaner reciprocating motion along the reciprocation axis H. Advantageously, this can increase the manufacturing tolerances for the MEMS sound transducer 1, which in turn can reduce the manufacturing costs. Accordingly, for example, higher alignment errors of the cantilever arm element 5, 6, 7, 8 relative to the support 2 and/or other cantilever arm elements 5, 6, 7, 8 are tolerable due to the curved first contour 27 and/or second contour 28.
[0053] In addition to the first curvature section 29, the first contour 27 and/or the second contour 28 according to FIG. 3 include(s) at least a second curvature section 31, which has a second curvature 32. The second curvature 32 is more curved than the first curvature 30. The second curvature 32 is formed as a second circle segment 37 of a second circle 38 having a second circle center 39. The second circle center 39 lies on a longitudinal lateral axis 40 of the cantilever arm element 5, 6, 7, 8. The longitudinal lateral axis 40 is arranged between two cantilever arm elements 5, 6, 7, 8, which are adjacent to each other in the circumferential direction. The second circle center 39 is located between the base end 11 of the deflection section 10 and the free end 12 of the MEMS sound transducer 1. As a result, the second circle center 39 is located closer to the base end 11 in comparison to the first circle center 35. The second circle segment 37 thus has a smaller radius in comparison to the first circle segment 33.
[0054] As shown in FIG. 3, the first contour 27 and/or the second contour 28 include(s) two second curvature sections 31, wherein the first curvature section 29 is arranged in the transverse direction of the cantilever arm element 5, 6, 7, 8 between these two second curvature sections 31.
[0055] The second contour 28 of the corresponding cavity wall 4a, 4b, 4c, 4d is formed according to the previous description corresponding to the first contour 27. Consequently, the second contour 28 also has a first curvature section 29 and two laterally adjacent second curvature sections 31. Here, the first curvature section 29 substantially forms one of the cavity walls 4a, 4b, 4c, 4d. As mentioned above, the support 2 includes a plurality of such cavity walls 4a, 4b, 4c, 4d, namely four according to the present exemplary embodiment. A respective cavity corner 41 is formed between two circumferentially adjacent cavity walls 4a, 4b, 4c, 4d. According to the present exemplary embodiment, these cavity corners 41 of the support 2 are rounded. As a result, two adjacent first curvature sections 29 merge smoothly into one another through the rounded cavity corner 41. The rounding of the respective cavity corner 41 is formed by the associated second curvature section 31. As a result, the rounding of the cavity corners 41 in the top view corresponds to the second curvature 32. According to FIG. 3, the cavity walls 4a, 4b, 4c, 4d of the support 2 are thus curved, in particular concave, in the top view. Furthermore, the cavity corners 41 formed between two adjacent cavity walls 4a, 4b, 4c, 4d are rounded.
[0056] According to FIGS. 1 and 3, the cantilever arm elements 5, 6, 7, 8 extend from the cavity walls 4a, 4b, 4c, 4d of the support 2 in the direction of a center 42 of the MEMS sound transducer 1. The free ends 12 of the cantilever arm elements 5, 6, 7, 8 are thus located in the region of the center 42. A separating slot 43a, 43b, 43c, 43d is formed between each two adjacent cantilever arm elements 5, 6, 7, 8, which separates the two adjacent cantilever arm elements 5, 6, 7, 8 from each other at least in one region. Here the separating slot 43a, 43b, 43c, 43d extends completely through all layers of the cantilever arm element 5, 6, 7, 8, i.e., from a cantilever arm upper side to a cantilever arm lower side. According to FIGS. 1 and 3, the respective separating slot 43a, 43b, 43c, 43d extends in the sound transducer top view from the free ends 12 of the two adjacent cantilever arm elements 5, 6, 7, 8 in the direction of the respective corresponding cavity wall 4a, 4b, 4c, 4d of the support 2. As a result, the cantilever arm elements 5, 6, 7, 8 are completely cut free and/or spaced apart in the region of their free ends 12. The separating slots 43a, 43b, 43c, 43d extend along the respective corresponding longitudinal lateral axis 40.
[0057] The separating slots 43a, 43b, 43c, 43d each have a slot end 44 facing the corresponding cavity wall 4a, 4b, 4c, 4d. The slot end 44 is spaced apart from the corresponding cavity wall 4a, 4b, 4c, 4d, in particular in the direction of the longitudinal lateral axis 40. As a result, the support layers 13 of the two adjacent cantilever arm elements 5, 6, 7, 8 are connected to each other in this slot-free region and are formed in one piece of material. Advantageously, a circumferentially closed support layer edge 45 is formed as a result in the region of the deflection sections 10 of the cantilever arm elements 5, 6, 7, 8. This improves the stability and robustness of the MEMS sound transducer 1.
[0058] To avoid tearing in the region of the slot ends 44, the separating slots 43a, 43b, 43c, 43d have relief slots 46 at their slot ends 44. These relief slots 46 extend in the transverse direction of the slot and are preferably curved.
[0059] FIG. 4 shows a detailed view of the center 42 of the MEMS sound transducer 1, in which it can be clearly seen that the free ends 12 of the cantilever arm elements 5, 6, 7, 8 are completely separated from each other by the separating slots 43a, 43b, 43c, 43d arranged between them. Furthermore, these are also not connected to additional components either on their upper side or on their lower side. As a result, these are completely exposed free ends 12. In order to be able to ensure the narrowest possible air gap between the cantilever arm elements 5, 6, 7, 8, in particular between their free ends 12, the free ends 12 have two corners 47, 48 in the sound transducer top view shown here. The two corners 47, 48 are connected to each other via an end side 49. The end side 49 thus forms the front side of the free end 12. Preferably, the end side 49 is straight. As can be seen from FIG. 4, the two corners 47, 48 and the end side 49 are an integral part of a rectangle, so that the free end 12 is formed as a rectangular tip 50a, 50b, 50c, 50d. In order to be able to ensure the narrowest possible air gap, the rectangular tips 50a, 50c of a first pair of rectangular tips, which includes two rectangular tips 50a, 50c of two mutually opposite cantilever arm elements 5, 7, are narrower than the rectangular tips 50b, 50d of a second pair of rectangular tips. Preferably, the first pair of rectangular tips is offset by 90° with respect to the second pair of rectangular tips in the top view or bottom view. Furthermore, the narrower rectangular tips 50a, 50c of the first pair of rectangular tips are arranged between the two end sides 49 of the rectangular tips 50b, 50d of the second pair of rectangular tips. The separating slots 43a, 43b, 43c, 43d are connected to each other in the area of the free ends 12, so that they form a common contiguous separating slot. Together with the rectangular tips 50a, 50b, 50c, 50d, the separating slots 43a, 43b, 43c, 43d thus form an H-shaped separating slot area in the center 42.
[0060] The present invention is not limited to the embodiments shown and described. Variations within the scope of the patent claims are possible, as is a combination of the features, even if these are shown and described in different exemplary embodiments.
LIST OF REFERENCE NUMERALS
[0061] TABLE-US-00001 1 MEMS sound transducer 2 support 3 cavity 4 cavity wall 5 first cantilever arm element 6 second cantilever arm element 7 third cantilever arm element 8 fourth cantilever arm element 9 base portion 10 deflection section 11 base end 12 free end 13 support layer 14 transducer layer 15 first end of transducer layer 16 second end of transducer layer 17 outer end 18 first longitudinal side of the cantilever arm element 19 second longitudinal side of the cantilever arm element 20 first longitudinal side of the transducer layer 21 second longitudinal side of the transducer layer 22 transverse side of cantilever arm element 23 transverse side of the transducer layer 24 corner of the transducer layer 25 frame 26 frame opening 27 first contour 28 second contour 29 first curvature section 30 first curvature 31 second curvature section 32 second curvature 33 first circle segment 34 first circle 35 first circle center 36 longitudinal central axis 37 second circle segment 38 second circle 39 second circle center 40 longitudinal lateral axis 41 cavity corner 42 enter 43 separating slot 44 slot end 45 support layer edge 47 first corner of the free end 48 second corner of the free end 49 end side 50 rectangular tip H reciprocation axis
