Abstract
Optical element (1) comprising a first window (21) and a second window (22), wherein the first window (21) is connected to the second window (22) by an elastic membrane (41) such that the first window (21), the second window (22) and the membrane (41) enclose a deformable, sealed volume (42), which is filled with a fluid, wherein at least one first actuator (51) is arranged to tilt the first window (21) with respect to the second window (22) around a first tilting axis (81) in a first direction, wherein the first actuator (51) comprises a Shape Memory Alloy and has the shape of a wire.
Claims
1. Optical element (1) comprising a first window (21) and a second window (22), wherein the first window (21) is connected to the second window (22) by an elastic membrane (41) such that the first window (21), the second window (22) and the membrane (41) enclose a deformable, sealed volume (42), which is filled with a fluid, wherein at least one first actuator (51) is arranged to tilt the first window (21) with respect to the second window (22) around a first tilting axis (81) in a first direction, wherein the first actuator (51) comprises a Shape Memory Alloy and has the shape of a wire.
2. Optical element (1) according to claim 1, wherein at least one first resetting element (61) comprises the Shape Memory Alloy and has the shape of a wire, wherein the first resetting element (61) is arranged to tilt the first window (21) in a first counter direction, wherein the first counter direction is opposed to the first direction.
3. Optical element (1) according to claim 1, wherein the first tilting axis (81) extends parallel to a main extension plane of the first window (21) and either along a first geometric axis (91) of the sealed volume (42) as seen in a top view along an optical axis of the optical element (1), or through a first attachment point (33) of the first actuator (51) to a top shaper (31), wherein the top shaper (31) is connected to the first window (21).
4. Optical element (1) according to claim 1, wherein at least one second actuator (52) is arranged to tilt the second window (22) with respect to the first window (21) around a second tilting axis (82) in a second direction, wherein a second actuator (52) comprises the Shape Memory Alloy and has the shape of a wire.
5. Optical element (1) according to claim 4, wherein at least one second resetting element (62) comprises the Shape Memory Alloy and has the shape of a wire, wherein the second resetting element (62) is arranged to tilt the second window (22) in a second counter direction, wherein the second counter direction is opposed to the second direction.
6. Optical element (1) according to claim 4, wherein the second tilting axis (82) extends obliquely with respect to the first tilting axis (81) and along a main extension plane of the second window (22) and either along a geometric axis (91) of the sealed volume (42) as seen in a top view along an optical axis of the optical element (1) or through a second attachment point (34) of the second actuator (52) to a bottom shaper (32), wherein the bottom shaper (32) is connected to the second window (22).
7. Optical element (1) according to claim 1, wherein a third resetting element (63) is arranged to tilt the first window (21) in a third counter direction, wherein the third counter direction is opposed to the first direction and/or is arranged to tilt the second window (22) in a fourth counter direction, wherein the fourth counter direction is opposed to the second direction, wherein the third resetting element (63) comprises at least one of the following: the elastic membrane (41), at least one resetting spring (65), at least one resetting magnet (64).
8. Optical element (1) according to claim 3, wherein a mount (7) provides at least one first bearing for the top shaper (31) to define the first tilting axis (81), and/or provides at least one second bearing for the bottom shaper (32) to define the second tilting axis (82).
9. Optical element (1) according to claim 6, wherein the top shaper (31) and the bottom shaper (32) are connected by the first actuator (51) or by the second actuator (52).
10. Method for operating an optical element (1) according to claim 1, wherein a Shape Memory Alloy of at least one first actuator (51) is heated up by supplying current, once a transition temperature is reached, the first actuator (51) contracts, and the contraction tilts the first window (21) with respect to the second window (22) around a first tilting axis (81) in a first direction.
11. Method according to claim 10, wherein a Shape Memory Alloy of at least one second actuator (52) is heated up by supplying current, once a transition temperature is reached, the second actuator (52) contracts, and the contraction tilts the second window (22) with respect to the first window (21) around a second tilting axis (82) in a second direction.
12. Method according to claim 10, wherein the transition temperature of the first actuator (51) is 80° C., preferably 90° C., wherein the first actuator (51) contracts along its main extension direction by at least 2%, preferably by at least 3%, and/or wherein the transition temperature of the second actuator (52) is 80° C., preferably 90° C., wherein the second actuator (52) contracts along its main extension direction by at least 2%, preferably by at least 3%.
13. Method according to claim 10, wherein the first actuator (51) cools down deceeding the transition temperature, and a third resetting element (63) tilts the first window (21) in a third counter direction with the third counter direction being opposed to the first direction, and/or the second actuator (52) cools down deceeding the transition temperature, the third resetting element (63) tilts the second window (22) in a fourth counter direction with the fourth counter direction being opposed to the second direction.
14. Method according to claim 10, wherein the first actuator (51) cools down deceeding the transition temperature, a Shape Memory Alloy of a first resetting element (61) is heated up by supplying current, once a transition temperature is reached, the first resetting element (61) contracts, and the first resetting element (61) tilts the first window (21) in a first counter direction with the first counter direction being opposed to the first direction, and/or the second actuator (52) cools down deceeding the transition temperature, a Shape Memory Alloy of a second resetting element (62) is heated up by supplying current, once a transition temperature is reached, the second resetting element (62) contracts, and the second resetting element (62) tilts the second window (22) in a second counter direction with the second counter direction being opposed to the second direction.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0043] Further advantages and applied refinements and developments of the optical element and the method for operating an optical element emerge from the following exemplary embodiments illustrated in connection with the Figures.
[0044] FIG. 1 shows a first exemplary embodiment of an optical element with an actuator to tilt the first window around a first tilting axis;
[0045] FIG. 2 shows the first exemplary embodiment of an optical element in its deflected state, where the first window has been tilted;
[0046] FIG. 3 shows a second exemplary embodiment of an optical element comprising the features of the first exemplary embodiment with a third resetting element;
[0047] FIG. 4 shows a third exemplary embodiment of an optical element comprising the features of the first exemplary embodiment with yet another third resetting element;
[0048] FIG. 5 shows a fourth exemplary embodiment of an optical element comprising the features of the first exemplary embodiment with another third resetting element;
[0049] FIG. 6 shows a fifth exemplary embodiment of an optical element comprising the features of the first exemplary embodiment with a first resetting element;
[0050] FIG. 7 shows a six exemplary embodiment of an optical element, where one first actuator and one first resetting element is on the same side of the prism;
[0051] FIG. 8 shows the six exemplary embodiment of an optical element in its deflected state, where the first window has been tilted and where one first actuator and one first resetting element is on the same side of the prism;
[0052] FIG. 9-11 shows a seven exemplary embodiment of an optical element, where two first actuators are on one side of the prism and two first resetting elements are both on the other side of the prism;
[0053] FIG. 12 shows an eight exemplary embodiment of an optical element, where four first actuators and four first resetting elements are tilting the first window around two different first tilting axes.
DETAILED DESCRIPTION
[0054] Identical, similar or identically acting elements are provided with the same reference symbols in the figures. The figures and the proportions of the elements shown in the figures among one another are not to be considered to scale, unless units are expressly stated. Rather, individual elements can be shown in an exaggerated size for better representation and/or for better comprehensibility.
[0055] FIG. 1 shows an exemplary embodiment of an optical element 1 in a schematic sectional view, comprising a first window 21, a second window 22 and a membrane 41. The first window 21 is connected to the second window 22 by the elastic membrane 41. The connection is such that the first window 21, the second window 22 and the membrane 41 enclose a sealed volume 42. The sealed volume 42 is filled with a fluid. The fluid may be a liquid or a gas. The membrane 41 encloses the sealed volume 42 in lateral directions. In one of the directions perpendicular to lateral directions the sealed volume 42 is delimited by the first window 21, whereas in an opposite direction the sealed volume 42 is delimited by the second window 22. In the embodiment of FIG. 1 the first window 21 and the second window 22 delimit the sealed volume 42 on opposite sides. Alternatively, the membrane 41 may enclose the entire sealed volume 42, meaning the membrane 41 encloses the sealed volume 42 in lateral directions and in directions perpendicular to lateral directions. Thus, according to the alternative the first window 21 and the second window 22 are attached extensively to the membrane 41. In particular, in case the membrane 41 encloses the sealed volume 42 completely on all sides, the first window 21 and the second window 22 are arranged to stiffen the membrane 41.
[0056] The first window 21 as well as the second window 22 are tiltable. Each window 21, 22 can be tilted separately by an actuator. The first window 21 is tiltable around a first tilting axis 81, whereas the second window 22 is tiltable around a second tilting axis 82. At least one first actuator 51 is arranged to tilt the first window 21. In FIG. 1 two first actuators 51 are shown. At least one second actuator 52 is arranged to tilt the second window 22. The second actuator 52 is not shown in FIG. 1. The first actuator 51 tilts the first window 21 with respect to the second window 22 around a first tilting axis 81 in a first direction, whereas the second actuator 52 tilts the second window 22 with respect to the first window 21 around a second tilting axis 82 in a second direction.
[0057] The first tilting axis 81 extends parallel to a main extension plane of the first window 21. In addition, in FIG. 1, the first tilting axis 81 extends through a first attachment point 33 of the first actuator 51 to a top shaper 31. The top shaper 31 is connected to the first window 21. Alternatively, the first tilting axis 81 extends along a first geometric axis 91 of the sealed volume 42 as seen in a top view along an optical axis of the optical element 1. The second tilting axis 82 extends parallel to a main extension plane of the second window 22. In addition, the second tilting axis 82 extends through a second attachment point 34 of the second actuator 52 to a bottom shaper 32. The bottom shaper 32 is connected to the second window 22. Alternatively, the second tilting axis 82 extends along a second geometric axis 92 of the sealed volume 42 as seen in a top view along an optical axis of the optical element 1. The second tilting axis 82 is not shown in FIG. 1. The first tilting axis 81 and the second tilting axis 82 extend oblique to each other. In FIG. 1, the first tilting axis 81 and the second tilting axis 82 extend 90° to each other. The first tilting axis 81 for tilting the first window 21 is associated with the x-axis, whereas the second tilting axis 82 for tilting the second window 22 is associated with the y-axis. Alternatively, the first tilting axis 81 for tilting the first window 21 is associated with the y-axis, whereas the second tilting axis 82 for tilting the second window 22 is associated with the x-axis.
[0058] The first actuator 51 comprises a Shape Memory Alloy and the second actuator 52 comprises a Shape Memory Alloy as well. The Shape Memory Alloy has the advantage that a movement can be executed by just heating up the element comprising the Shape Memory Alloy. Typically, the heating will be performed by supplying current. Above a certain transition temperature, the element comprising the Shape Memory Alloy contracts. The first actuator 51 has the shape of a wire and the second actuator 52 has the shape of a wire, too. Heating an element comprising the Shape Memory Alloy and having a shape of a wire leads to a contraction along its main extension direction by at least 2%, preferably by at least 3%. Typically wires with a Shape Memory Alloy change their phase at a transition temperature of 80° C., preferably 90° C. So, the first actuator 51 contracts along its main extension direction by at least 2%, preferably by at least 3%, when heated up above 80° C., preferably 90° C., and the second actuator 52 contracts along its main extension direction by at least 2%, preferably by at least 3%, when heated up above 80° C., preferably 90° C.
[0059] Particular in the embodiment of FIG. 1, the top shaper 31 and the bottom shaper 32 are connected by the first actuator 51, especially by the two first actuators 51.
[0060] FIG. 2 shows the exemplary embodiment of an optical element 1 of FIG. 1 in a schematic sectional view, in which the first window 21 is tilted. This exemplary embodiment having a first window 21, a second window 22 and a membrane 41 comprises a sealed volume 42, which is deformed. The deformation of the sealed volume 42 has been taken place due to tilting the first window 21 around the first tilting axis 81 with respect to the second window 22. The first tilting axis 81 extends parallel to a main extension plane of the first window 21 and through a first attachment point 33 of the first actuator 51 to the top shaper 31.
[0061] The tilting of the first window 21 has been taken place by the first actuator 51. The first actuator 51 has the shape of a wire and comprises the Shape Memory Alloy. By supplying current, the first actuator 51 has been heated to 80° C., preferably 90° C. At a temperature of 80° C., preferably 90° C., the first actuator 51 had reached the transition temperature. Once the transition temperature has been exceeded the first actuator 51 has started to contract. The first actuator 51 has been contracted along its main extension direction by at least 2%, preferably by at least 3%.
[0062] The heating of the first actuator 51 leads to a protagonistic force, which tilts the first window 21 around the first tilting axis 81. The embodiment of the optical element 1 in FIG. 2 as well as in FIG. 1 comprises a third resetting element 63. The third resetting element 63 leads to an antagonistic force, which acts opposite to the said protagonistic force. The third resetting element 63 is arranged to tilt the first window 21 in a third counter direction, wherein the third counter direction is opposed to the first direction and, if the second window 22 is tilted as well, the third resetting element 63 is arranged to tilt the second window 22 in a fourth counter direction, wherein the fourth counter direction is opposed to the second direction.
[0063] In FIG. 2, the third resetting element 63 comprises the elastic membrane 41, which encloses together with the first window 21 and the second window 22 the sealed volume 42. The elastic membrane 41 comprises the antagonistic force in order to tilt the first window 21 in the third counter direction.
[0064] FIGS. 3-6 each show an exemplary embodiment of an optical element 1 in a schematic sectional view. In the exemplary embodiments neither of the two windows 21, 22 are tilted. Each exemplary embodiment of the optical element 1 comprises all the features of the exemplary embodiment of the optical element 1 of FIG. 1. Thus, each embodiment comprises a first window 21, a second window 22 and a membrane 41, which, all three, enclose a sealed volume 42. Each embodiment also comprises two first actuators 51 which connect the top shaper 31 to the bottom shaper 32 and tilt the first window 21 around a first tilting axis 81.
[0065] When the first window 21 is tilted as needed, the first actuator 51 cools down deceeding the transition temperature. When the second window 22 is tilted as needed, the second actuator 52 cools down deceeding the transition temperature. After the first actuator 51 has been cooled down or while the first actuator 51 is cooling down the third resetting element 63 tilts the first window 21 in a third counter direction with the third counter direction being opposed to the first direction. After the second actuator 52 has been cooled down or while the second actuator 52 is cooling down the third resetting element 63 tilts the second window 22 in a fourth counter direction with the fourth counter direction being opposed to the second direction.
[0066] In FIG. 3, a third resetting element 63 comprises at least one resetting spring 65. Here, the resetting spring 65 comprises a circumferential leaf. The circumferential leaf comprises the antagonistic force in order to tilt the first window 21 in the third counter direction and/or to tilt the second window 22 in the fourth counter direction.
[0067] In FIG. 4, a third resetting element 63 comprises at least one resetting spring 65. Here, the resetting spring 65 comprises an individual coil spring. The individual coil spring comprises the antagonistic force in order to tilt the first window 21 in the third counter direction and/or to tilt the second window 22 in the fourth counter direction.
[0068] In FIG. 5, a third resetting element 63 comprises at least one resetting magnet 64. Here, the resetting magnet 64 comprises a repelling magnet. The repelling magnet comprises the antagonistic force in order to tilt the first window 21 in the third counter direction and/or to tilt the second window 22 in the fourth counter direction.
[0069] In FIG. 6, a first resetting element 61 comprises the antagonistic force and is arranged to tilt the first window 21 in the third counter direction. The first resetting element 61 is only arranged to tilt the first window 21 in the third counter direction and not arranged to tilt the second window 22 in the fourth counter direction. The first resetting element 61 comprises the Shape Memory Alloy. So, heating the first resetting element 61 above a certain transition temperature leads to a contraction of the first resetting element 61. The first resetting element 61 has the shape of a wire, so the transition temperature is reached by 80° C., preferably by 90° C. At this temperature and above the first resetting element 61 starts to change its phase and contracts. The contraction leads to tilting the first window 21 in the third counter direction. The heating is provided by supplying current to the first resetting element 61.
[0070] FIG. 7 shows another exemplary embodiment of an optical element 1 in a schematic sectional view. The exemplary embodiment in FIG. 7 comprises a first window 21, a second window 22 and a membrane 41, which, all three, enclose a sealed volume 42. The exemplary embodiment in FIG. 7 comprises two first actuators 51 to tilt the first window 21 around a first tilting axis 81 in a first direction. The exemplary embodiment in FIG. 7 comprises two first resetting elements 61 to tilt the first window 21 in the third counter direction with the third counter direction being opposed to the first direction.
[0071] Whereas in the exemplary embodiments of FIGS. 1 to 6 the first tilting axis 81 extends parallel to a main extension plane of the first window 21 and through a first attachment point 33 of the first actuator 51 to a top shaper 31, the first tilting axis 81 of the exemplary embodiment in FIG. 7 extends parallel to a main extension plane of the first window 21 and along a first geometric axis 91 of the sealed volume 42 as seen in a top view along an optical axis of the optical element 1.
[0072] Whereas in the exemplary embodiments of FIGS. 1 to 6 two first actuators 51 connect the top shaper 31 with the bottom shaper 32, in FIG. 7 the top shaper 31 and the bottom shaper 32 are connected with each other by one first actuator 51 and one first resetting element 61.
[0073] In FIG. 7, the two first actuators 51 for tilting the first window 21 are arranged on the opposite side of the prism. The two first resetting elements 61 for tilting the first window 21 in the third counter direction are arranged on the opposite side of the prism, too. Having the first actuators 51 and the first resetting elements 61 on both sides (protagonist and antagonist) of the first tilting axis 81 allow for a fast response time since only contraction (heating) of the Shape Memory Alloy is fast and the elongation (cooling) is slow.
[0074] The exemplary embodiment in FIG. 7 comprises a mount 7, which is in particular a Printed Circuit Board. The mount 7 in FIG. 7 is extensively connected to the bottom shaper. To the top shaper 31, the mount 7 is connected by one first actuator 51 and one first resetting element 61. FIG. 8 shows the exemplary embodiment of an optical element 1 of FIG. 7 in a schematic sectional view, in which the first window 21 is tilted. This exemplary embodiment having a first window 21, a second window 22 and a membrane 41 comprises a sealed volume 42, which is deformed. The deformation of the sealed volume 42 has been taken place due to tilting the first window 21 with respect to the second window 22 around a first tilting axis 81 in a first direction. The first tilting axis 81 extends parallel to a main extension plane of the first window 21 and along a first geometric axis 91, through a center point 9, of the sealed volume 42 as seen in a top view along an optical axis of the optical element 1.
[0075] The tilting of the first window 21 in the embodiment of FIG. 8 has been taken place by two first actuators 51. Each of the two first actuators 51 has the shape of a wire and comprises the Shape Memory Alloy. By supplying current, each of the two first actuators 51 has been heated to 80° C., preferably to 90° C. At a temperature of 80° C., preferably 90° C., each of the first actuators 51 had reached its transition temperature. Once the transition temperature has been exceeded each of the first actuators 51 has started to contract. Each of the first actuators 51 has been contracted along its main extension direction by at least 2%, preferably by at least 3%.
[0076] The heating of the first actuators 51 leads to a protagonistic force, which tilts the first window 21 around the first tilting axis 81 in a first direction. The embodiment of the optical element 1 in FIG. 8 as well as in FIG. 7 comprises two first resetting elements 61. Each of the two first resetting elements 61 comprises the antagonistic force and is arranged to tilt the first window 21 in a third counter direction with the third counter direction being opposed to the first direction. When the first window 21 is tilted as needed, the two first actuators 51 cool down deceeding their transition temperatures. After the two first actuators 51 have been cooled down or while the two first actuators 51 have been cooling down the two first resetting elements 61 have tilted the first window 21 in the third counter direction with the third counter direction being opposed to the first direction.
[0077] Each of the two first resetting elements 61 comprises the Shape Memory Alloy and has the shape of a wire, so the transition temperature is reached by 80° C., preferably by 90° C. At this temperature each of the first resetting elements 61 starts to change its phase and contracts. The contraction leads to tilting the first window 21 in the third counter direction. The heating is provided by supplying current to each of the two first resetting elements 61.
[0078] FIGS. 9, 10 and 11 show another exemplary embodiment of an optical element 1. FIG. 9 shows the embodiment in a schematic sectional side view. FIG. 10 shows the embodiment in a schematic sectional bottom view. FIG. 11 shows the embodiment in a schematic sectional top view. The exemplary embodiment shown in FIGS. 9, 10 and 11 comprises a first window 21, a second window 22 and a membrane 41, which, all three, enclose a sealed volume 42. The embodiment comprises two first actuators 51 to tilt the first window 21 around a first tilting axis 81 in a first direction. The embodiment comprises two first resetting elements 61 to tilt the first window 21 in a third counter direction with the third counter direction being opposed to the first direction, shown in FIG. 11. Further, the embodiment comprises two second actuators 52 to tilt the second window 22 around a second tilting axis 82 in a second direction. The embodiment comprises two second resetting elements 62 to tilt the second window 22 in a fourth counter direction with the fourth counter direction being opposed to the first direction, shown in FIG. 10.
[0079] Whereas in the exemplary embodiments of FIGS. 1 to 6 the first tilting axis 81 extends parallel to a main extension plane of the first window 21 and through a first attachment point 33 of the first actuator 51 to a top shaper 31, the first tilting axis 81 of the embodiment in FIGS. 9, 10 and 11 extends parallel to a main extension plane of the first window 21 and along a first geometric axis 91 of the sealed volume 42 as seen in a top view along an optical axis of the optical element 1, shown in FIG. 11. The second tilting axis 82 of the embodiment in FIGS. 9, 10 and 11 extends parallel to a main extension plane of the second window 22 and along a second geometric axis 92 of the sealed volume 42 as seen in a top view along an optical axis of the optical element 1, shown in FIG. 10.
[0080] The second tilting axis 82 extends obliquely with respect to the first tilting axis 81. In FIGS. 9-11, the second tilting axis 82 extends 90° with respect to the first tilting axis 81. In FIGS. 9-11, the first tilting axis 81 is associated with the axis for the x-tilt and the second tilting axis 82 is associated with the axis for the y-tilt. Hence, the first window 21 is arranged to tilt around the x-axis and the second window 22 is arranged to tilt around the y-axis. Alternatively, the first tilting axis 81 is associated with the axis for the y-tilt and the second tilting axis 82 is associated with the axis for the x-tilt leading to an arrangement for the first window 21 to tilt around the y-axis and for the second window 22 to tilt around the x-axis.
[0081] Whereas in the FIGS. 7 and 8 the two first actuators 51 for tilting the first window 21 are arranged on the opposite side of the prism, in FIGS. 9-11 the two first actuators 51 for tilting the first window 21 are arranged on the same side of the prism, shown in FIG. 11. The two second actuators 52 for tilting the second window 22 are arranged on the same side of the prism, shown in FIG. 10. Whereas in FIG. 7 the two first resetting elements 61 for tilting the first window 21 in the third counter direction are arranged on the opposite side of the prism, in FIGS. 9-11 the two first resetting elements 61 for tilting the first window 21 in the third counter direction are arranged on the same side of the prism, shown in FIG. 11. The two second resetting elements 62 for tilting the second window 22 in the fourth counter direction are arranged on the same side of the prism, shown in FIG. 10.
[0082] The embodiment in FIGS. 9-11 comprises a mount 7, which is in particular a Printed Circuit Board. The mount 7 is connected to the two first actuators 51, connected to the two first resetting elements 61, connected to the two second actuators 52 and connected to the two second resetting elements 62. The mount 7 provides two bearings for the top shaper 31 to define the first tilting axis 81, indicated in FIG. 11. The mount 7 provides two bearings for the bottom shaper 32 to define the second tilting axis 82, indicated in FIG. 10.
[0083] FIG. 12 shows another exemplary embodiment of an optical element 1 in a schematic sectional view. The embodiment in FIG. 12 comprises a first window 21, a second window 22 and a membrane 41, which, all three, enclose a sealed volume 42. The embodiment in FIG. 12 comprises two first actuators 51 to tilt the first window 21 around one first tilting axis 81 and two first actuators 51 to tilt the first window 21 around another first tilting axis 81. The embodiment comprises two first resetting elements 61 to tilt the first window 21 in one third counter direction and two first resetting elements 61 to tilt the first window 21 in another third counter direction.
[0084] The one first tilting axis 81 extends parallel to a main extension plane of the first window 21 and through one first attachment point 33 of the first actuator 51 to a top shaper 31. The other first tilting axis 81 extends parallel to a main extension plane of the first window 21 and through another first attachment point 33 of the first actuator 51 to a top shaper 31. The one first tilting axis 81 extends obliquely with respect to the other first tilting axis 81.
[0085] The invention is not restricted to the exemplary embodiments by the description based on these. Rather, the invention encompasses every new feature and every combination of features, which in particular includes every combination of features in the patent claims, even if this feature or this combination itself is not explicitly specified in the patent claims or exemplary embodiments.
LIST OF REFERENCE SIGNS
[0086] 1 Optical element
[0087] 21 First window
[0088] 22 Second window
[0089] 31 Top shaper
[0090] 32 Bottom shaper
[0091] 33 First attachment point
[0092] 34 Second attachment point
[0093] 41 Membrane
[0094] 42 Sealed volume
[0095] 51 First actuator
[0096] 52 Second actuator
[0097] 61 First resetting element
[0098] 62 Second resetting element
[0099] 63 Third resetting element
[0100] 64 Resetting magnet
[0101] 65 Resetting spring
[0102] 7 Mount
[0103] 81 First tilting axis
[0104] 82 Second tilting axis
[0105] 9 Center point
[0106] 91 First geometric axis
[0107] 92 Second geometric axis
