Pressure Transducer and Method for Operating Same

Abstract

Pressure transducer for determining a pressure variable, comprising at least a pressure sensor with a measuring membrane and resistance elements integrated in the measuring membrane, wherein the pressure sensor is arranged between a first and a second counter body, such that a pressure chamber forms between the measuring membrane and the first counter body, which pressure chamber can be subjected to a first pressure; wherein the side of the measuring membrane facing towards the second counter body can be subjected to a second pressure, and a displacement of the measuring membrane dependent upon the first and second pressures set; wherein the pressure-dependent displacement of the measuring membrane can be detected by the resistance elements and, via a bridge voltage of a bridge circuit formed with the resistance elements, a pressure variable can be determined; wherein the measuring membrane has a membrane electrode and the second counter body has at least one counter body electrode on the side facing towards the measuring membrane, such that the membrane electrode and the counter body electrode form a capacitance, wherein, on the basis of the capacitance, at least one additional piece of information can be determined and/or at least one additional function of the pressure transducer can be performed.

Claims

1. Pressure transducer (1) for determining a pressure variable, comprising at least a pressure sensor (2) with a measuring membrane (3) and resistance elements (4) integrated in the measuring membrane (3), wherein the pressure sensor (2) is arranged between a first and a second counter body (5, 6) and is firmly connected in its peripheral zone to at least the first counter body (5), such that a pressure chamber (7) is formed between the measuring membrane (3) and the first counter body (5) and can be subjected to a first pressure; wherein the side of the measuring membrane (3) facing the second counter body (6) can be subjected to a second pressure, and a displacement of the measuring membrane (3) dependent upon the first and the second pressures set; wherein the pressure-dependent displacement of the measuring membrane (3) can be registered by the integrated resistance elements (4), and a measured pressure value can be determined via a bridge voltage (U.sub.B) of a bridge circuit (8) formed with the integrated resistance elements (4); wherein the measuring membrane (3) has a membrane electrode (9), and the second counter body (6) on the side facing the measuring membrane (3) has one counter body electrode (10) at least in the area of the measuring membrane (3), so that the membrane electrode (9) and the counter body electrode (10) create a capacitance, wherein, on the basis of this capacitance, at least one piece of additional information can be obtained and/or at least one additional function of the pressure transducer (1) can be performed.

2. Pressure transducer according to claim 1, wherein the integrated resistance elements (4) in relation to a substrate of the pressure sensor are designed as a p-n junction, and/or the membrane electrode (9) in relation to the substrate is designed as a p-n junction.

3. Pressure transducer according to claim 1, additionally comprising an operating circuit (32) for determining the capacitance and/or its course, for determining at least one piece of additional information and/or for performing at least one additional function based upon the capacitance.

4. Pressure transducer according to claim 3, wherein the operating circuit (32) is established to apply a variable or adjustable voltage at the membrane electrode (9) and the counter body electrode (10).

5. Pressure transducer according to claim 1, wherein the second counter body (6) is made out of plastic or ceramic.

6. Pressure transducer according to claim 1, wherein the pressure sensor (1) is mainly made out of silicon.

7. Pressure transducer according to claim 1, wherein the membrane electrode (9) is connected to the highest, voltage-wise, or the lowest point of the bridge circuit (8).

8. Method for operating a pressure transducer according to one or more of the preceding claims, wherein the method includes the following steps: Determining the capacitance and/or its course; Determining at least one piece of additional information and/or performing at least one additional function based upon the capacitance.

9. Method according to claim 8, wherein a comparison of the bridge voltage (U.sub.B) and/or its course with a capacitance voltage corresponding to the capacitance and/or its course is performed, and if the bridge voltage (U.sub.B) and/or its course and the capacitance voltage and/or its course match in a specified tolerance zone, the determined current measured pressure values are likely to be trustworthy.

10. Method according to claim 9, wherein, in case the bridge voltage (U.sub.B) and/or its course and/or the capacitance voltage and/or its course do not match in the specified tolerance zone, a change in the pressure transducer (1) is determined as additional information.

11. Method according to claim 8, wherein, based upon the capacitance and/or its course and/or the bridge voltage (U.sub.B) and/or its course, a drift in the bridge voltage (U.sub.B) is recognized as additional information.

12. Method according to claim 11, wherein the capacitance and/or its course and the bridge voltage (U.sub.B) and/or its course are set as a ratio as a test criterion for recognizing the drift of the bridge voltage (U.sub.B).

13. Method according to claim 8, wherein a test of a process membrane that separates the pressure transducer (1) from a process medium is performed as an additional function, wherein an error is recognized in the process membrane if the capacitance and/or course changes, and the bridge voltage (U.sub.B) and/or its course is mostly constant.

14. Method according to claim 8, wherein a test voltage is applied through the operating circuit (32) to the membrane electrode (9) and the counter body electrode (10), so that a change in distance between the membrane electrode (9) and the counter body electrode (10) is created, and a self-test is performed as an additional function, whereby the ratio of the bridge voltage (U.sub.B) and/or its course to the capacitance and/or its course is tested, and if this ratio is not within a pre-set tolerance zone, a change in the pressure transducer is recognized.

Description

[0028] The invention is explained in more detail based upon the following drawings. Illustrated are:

[0029] FIG. 1a: a detailed view of a filling material and an insulator plate or a second counter body of a preferable configuration of the invention,

[0030] FIG. 1b: a first spatial representation of the inventive pressure transducer (without the second counter body),

[0031] FIG. 1c: a second spatial representation of the pressure transducer according to the invention (with the second counter body),

[0032] FIG. 1d: a schematic longitudinal section through a pressure transducer according to the invention,

[0033] FIG. 2: a schematic section of the pressure sensor located in the pressure transducer, as well as of the second counter body,

[0034] FIG. 3: a top view of the pressure sensor located in the pressure transducer, and

[0035] FIG. 4: a schematic representation of a bridge circuit that is used to register the resistance values of the resistance elements.

[0036] The filling material 11 shown in FIG. 1 mainly has a cylindrical basic form, inside of which there is a specifically square opening 12, in which a pressure sensor 2 is inserted. The shape of the opening 12 must match the shape of the pressure sensor 2 in such a way that there is a gap between the pressure sensor 2 and the filling material 11, which, on the one hand, prevents contact between the components and makes it possible to fully cover the surfaces of the pressure sensor 2 with the transfer fluid, and which, on the other hand, taking into account the above conditions, is designed to be as narrow as possible, to minimize the volume of the transfer fluid.

[0037] At the top, the filling material 11 has a first recess clearance 13 and a second recess clearance 14, whose purpose is to receive complementary first and second axial lugs 18, 19 at a second counter body 6 or an insulator plate 17.

[0038] The front surface of the filling material 11 in the presented configuration of the invention has a large, smooth surface sufficient for lifting and transporting the filling material 11 with a suction tool.

[0039] Four axial drilled holes 15 lead through the filling material 11 from its front surface; these can be used to lead electrical circuits to the pressure sensor 2. Furthermore, at the bottom of the filling material 11, there is a recess clearance 16, which acts as an exit opening for the transfer fluid when filling a fluid chamber located between a process membrane and the gap between the pressure sensor 2 and the filling material 11.

[0040] A disk-shaped insulator plate 17 is presented with its bottom side up in FIG. 1a. Along its perimeter, it has a first axial lug 18 and a second axial lug 19, wherein both the axial lugs are provided so that both the recess clearances along the perimeter of the top side of the filling material are positively locked. Provided that the lugs or the recess clearances differ from one another in size or are not distributed rotation-symmetrically around the cylinder axis of the filling material, the orientation of the insulation plate to the lid is unambiguously determined by the lugs. On its bottom side, the insulator plate 17 has four recess clearances 20 that are provided to make room for connection wires for making contact with the pressure sensor. There is an axial hole leading through the center of the insulator plate 17. It serves as a channel aligned with the center of a measuring membrane of the pressure sensor for the transfer fluid. This channel improves the dynamic response behavior of the pressure sensor, but it is not absolutely required. Furthermore, the insulator plate includes, according to the invention, a counter body electrode, which—when the insulator plate is positively locked with the filling material—creates a capacitance together with a membrane electrode, which includes the measuring membrane.

[0041] In FIG. 1b, a wall assembly 22 is presented, which includes a support body 23, to which the pressure sensor 2 is affixed with a pressure-retaining circuit, the details of which are not included here. The filling material 11 is arranged around the pressure sensor 2 and can be glued, for example, to the support body 23. The support body 23 includes a base plate 24 over which protrudes radially an annular seal edge 25. Along this seal edge 25, the support body 23 can be welded to a second wall assembly 26 to close up the fluid chamber. Four electric openings 27 extend through the base plate 24 of the support body 23 in an axial direction aligning with the holes 15 through the filling material 11, wherein the openings 27 have contact pins, which preferably extend in an axial direction up to the surface of the filling material 11. Likewise, the surface of the pressure sensor 2 aligns somewhat with the surface of the filling material 11. Thus, contact surfaces on the surface of the pressure sensor 2 can be connected to the contact pins automatically by an assembly robot using bond wire 28. The electric bushings 27 extend far from the bottom side of the support body 23, so that they can penetrate through a potting compound that will cover the bottom side of the body after a later stage of assembly.

[0042] Additionally, a reference air tube 29 extends through the base plate 24, leading approximately through the center of the base in an axial direction, to apply atmospheric pressure to the back of the measuring membrane of the pressure sensor 2. The embodiment example expressly relates to a relative pressure sensor. Of course, the invention also includes absolute pressure sensors, in which the measuring membrane seals an evacuated space on the rear side. In this case, no reference air path is present.

[0043] Furthermore, a filling pipe 30 extends through the base plate 24, ending under the recess clearance 16 of the filling material; through this filling pipe, the fluid chamber can be filled with a transfer fluid, or the ready pressure sensor can be filled.

[0044] FIG. 1c shows the next stage in the assembly of the components from FIG. 1b, wherein the insulator plate 17 is additionally placed onto the filling material 11. The side recess clearances 20 on the bottom side of the insulator plate, on the other hand, provide the bond wires for contacting the pressure sensor 2 with the space required, and, on the other hand, serve as openings for the transfer fluid.

[0045] The sectional drawing in FIG. 1d show the next stage of assembly for manufacturing the pressure transducer. The second wall assembly 26 that is shown here in a simplified way includes a chamber hole 31, into which the parts mounted onto the support body 23, i.e., the filling material 11, the insulator plate 17, and the pressure sensor 2 with a first glass or semiconductor counter body 5 visible here under the pressure sensor 2, are inserted, wherein the support body 23 along its seal edge is welded pressure-tight to the second wall assembly 26.

[0046] As shown in FIG. 1d, a channel opens at the front side of the chamber hole 31; the channel is used to apply to the pressure sensor 2 a medium pressure to be measured through the fluid chamber using a transfer fluid. In doing so, the medium pressure is applied to the front-side surface of the measuring membrane 3 of the pressure sensor 2 that faces the channel, while to the rear-side surface of the measuring membrane 3 is applied atmospheric pressure via the reference air pipe or channel 29. As specified above, the embodiment example relates to a relative pressure sensor. Of course, the invention also includes absolute pressure sensors, in which the measuring membrane seals an evacuated space on the rear side. In this case, no reference air pipe is present.

[0047] The material of the filling material 11 and the insulator plate 17 comprise, for example, a temperature-resistant plastic that is chemically inert with respect to the transfer fluid, e.g., PPS.

[0048] FIG. 2 provides for clarification a schematic section through the semiconductor pressure sensor 2 arranged between the first counter body 5 and the second counter body 6. As specified in the description for FIG. 1, the first counter body 5 can be a glass or semiconductor counter body, and the second counter body 6 can be designed as the insulator plate 17.

[0049] According to the invention, the pressure transducer 1 includes at least the pressure sensor 2 made using a conventional semiconductor method, with the measuring membrane 3 and (especially, piezo-resistive) resistance elements 4 integrated in the measuring membrane 3, as well as membrane electrode 9, which is also integrated in this embodiment example in the measuring membrane 3. There is another possible embodiment wherein the membrane electrode 9 is mounted in the form of an electrically conductive layer, e.g., a metallic layer.

[0050] The integrated resistors 4, as well as the membrane electrode 9, are introduced in the measuring membrane using a doping method, so that they have an increased doping as compared to their environment. To save an additional doping step, the resistance elements 4 and the membrane electrode 9 are doped in the same way, so that they are of the same doping type.

[0051] As shown in FIG. 2, the second counter body 6 or the insulator plate 17 have a counter body electrode 10. By mounting the insulator plate 17 at or on the filling material 11, both the electrodes 9 and 10 are arranged in such a way that a capacitance is created. In comparison to the pressure transducers 1 known from the state of the art that use a resistive or capacitive effect to determine a pressure value, the capacitance makes it possible to perform additional diagnostic functions. Such diagnostic functions include, for example, determining additional information about the pressure transducer and/or performing additional functions that are made possible based upon the introduced capacitance.

[0052] The pressure sensor 2 additionally includes, as shown in FIG. 4, a bridge circuit 8 that is formed by means of the integrated resistance elements. The purpose of the bridge circuit 8 is to make it possible for a pressure-dependent displacement of the measuring membrane 3 to be registered through the piezo-resistive resistance elements 4, and a measured pressure value to be determined via a created bridge circuit UB.

[0053] The membrane electrode 9 is connected to the upper- or lowermost voltage point of the bridge circuit 8—for example, via a line integrated in the measuring membrane 3.

[0054] Besides the bridge circuit 8, the pressure transducer 1 additionally includes the operating circuit 32, which is designed to apply a variable or adjustable voltage at or between the membrane electrode 9 and the counter body electrode 10. Furthermore, the operating circuit 8 is set up to perform the method described below or its steps, so as to obtain at least one piece of additional information and/or carry out one additional function.

[0055] The already indicated method provides as a first step that the capacitance and/or its course be determined. Based upon the determined capacitance and/or it course, a number of pieces of additional information can be determined through the pressure transducer 1.

[0056] Thus, for example, a redundant measurement or verification of the measured pressure value can be conducted. For this purpose, the bridge voltage UB and/or its course is compared to a capacitance voltage and/or its course corresponding to the capacitance and checked to see if the result lies within the pre-set tolerance zone.

[0057] If the result lies within the pre-set tolerance zone, the current measured pressure value determined via the integrated resistors and verified through the capacitance can, with high probability, be regarded as trustworthy or true, i.e., the currently determined measured pressure value may essentially be error-free.

[0058] If the result does not lie within the pre-set tolerance zone, it can be assumed that a change has taken place in the pressure transducer 1, and that the currently determined measured pressure value is only conditionally trustworthy, i.e., the currently determined measured pressure value is, with high probability, erroneous.

[0059] Besides the redundant measurement or verification of the measured pressure value and the additional information derived from it, drift detection can also be implemented—especially since additional information requires determining the presence of a drift in the bridge voltage due to changed resistance values of the resistance elements. The method provides here that, to decide if there is a drift or not, the capacitance and/or its course and the bridge voltage and/or its course be set as a ratio as a test criterion.

[0060] Furthermore, according to the method, it can be provided that a test of a process membrane can be performed as an additional function. The pressure transducers 1 described above are typically separated via a process membrane from the process medium whose medium pressure is to be measured. In order to now perform a test of the process membrane, the capacitance or its course and the bridge voltage and/or its course are compared to one another. In order to be able to now make a statement about the process membrane, it is tested whether or not the capacitance and/or its course change, while at the same time the bridge voltage and/or its course essentially do not. If this is so, there is a high probability of a defect in the process membrane.

[0061] Likewise, the operating circuit 32 can be set up in such a way that it performs a self-test of the pressure transducer 1. For this purpose, a test voltage is applied to or between the membrane electrode 9 and the counter body electrode 10. The applied test voltage, whose voltage value is variable or modifiable by means of operating circuit 32, then results in a change in distance between the two electrodes 9 and 10. During the application of the test voltage, the ratio of the bridge voltage and/or its course to the capacitance and/or its course is determined. Based upon this ratio, a statement can then be made as to whether or not there is a change in the pressure transducer.

[0062] If the ratio lies outside a tolerance zone, a change in the pressure transducer 1 is detected, and if the ratio is within the tolerance zone, no change in the pressure transducer is detected.

LIST OF REFERENCE CHARACTERS

[0063] 1 Pressure transducer
2 Pressure sensor
3 Measurement membrane
4 Integrated resistance elements
5 First counter body
6 Second counter body
7 Pressure chamber
8 Bridge circuit
9 Membrane electrode
10 Counter body electrode
11 Filling material

12 Opening

[0064] 13 First recess clearance
14 Second recess clearance

15 Holes

[0065] 16 Recess clearance
17 Insulator plate
18 First axial lug
19 Second axial lug
20 Recess clearances
21 Axial hole
22 First wall assembly
23 Support body
24 Base plate
25 Seal edge
26 Second wall assembly
27 Electric bushings
28 Bond wires
29 Reference air pipe
30 Filling pipe (37)
31 Chamber hole
32 Operating circuit
U.sub.B Bridge voltage