Apparatus for manufacturing polysilicon rod

Abstract

An apparatus for manufacturing polysilicon rod by a Siemens method has a base plate 20; and a holding body 100 provided on the base plate 20 so as to be movable in a horizontal direction and electrically connect between a core wire holder 1 and an electrode 4. The holding body 100 is configured to rotatably hold the core wire holder 1 with respect to the base plate 20.

Claims

1. An apparatus for manufacturing polysilicon rod by a Siemens method comprising: a base plate; and a holding body provided on the base plate electrically connecting a core wire holder and an electrode, wherein the holding body is configured to rotatably and slidably hold the core wire holder with respect to the base plate; wherein the holding body includes: a pedestal provided on the base plate, the pedestal has a curved surface part on an upper part thereof, and an electrode adapter body between the core wire holder and the pedestal, the electrode adapter body is connected to the adapter base via the curved surface part of the pedestal so as to be rotatable with respect to the base plate and electrically connect between the core wire holder and the electrode, an electrode adapter slider extending in the horizontal direction from the electrode adapter body and contacting the electrode, a pressing plate, the electrode is clamped between the electrode adapter slider and the pressing plate so as the electrode adapter body is movable in the horizontal direction.

2. The apparatus for manufacturing polysilicon rod according to claim 1, wherein each of the base plate, the electrode adapter and the electrode is formed only by a flat surface and a spherical surface or a curved surface having a radius of 5 mm or more.

3. The apparatus for manufacturing polysilicon rod according to claim 2, wherein each of the base plate, the electrode adapter and the electrode does not have an internal corner part having an angle of less than 90 degrees.

4. The apparatus for manufacturing polysilicon rod according to claim 1, wherein the pedestal provided on the base plate is an insulator.

Description

BRIEF DESCRIPTION OF DRAWINGS

(1) FIG. 1 is a plan view illustrating a concept of an aspect in which an electrode holder according to an embodiment of the present invention is attached to a metal electrode to hold a core wire holder;

(2) FIG. 2 is a side cross sectional view taken along line II-II of FIG. 1;

(3) FIG. 3 is a view corresponding to FIG. 1, and is a plan view illustrating a modification example of an embodiment of the present invention; and

(4) FIG. 4 is a side cross sectional view illustrating a concept of an aspect in which an electrode holder in the related art is attached to a metal electrode to hold a core wire holder.

DETAILED DESCRIPTION

(5) The embodiment provides an apparatus for manufacturing polysilicon rod by a Siemens method. As illustrated in FIGS. 1 and 2, the apparatus for manufacturing polysilicon rod according to the embodiment includes a holding body 100 that is provided on a reactor base plate (base plate) 20 so as to be movable in a horizontal direction, and electrically connects between a core wire holder 1 and a metal electrode (electrode) 4. The holding body 100 is configured to rotatably (swingably) hold the core wire holder 1 with respect to the reactor base plate 20. The holding body 100 may hold the core wire holder 1 so as to be rotatable in a vertical direction with respect to the reactor base plate 20, and may hold the core wire holder 1 so as to be rotatable in a horizontal plane. In FIG. 2, arrows R1 and R2 for indicating that the holding body 100 holds the core wire holder 1 rotatably (swingably) in the vertical direction with respect to the reactor base plate 20 are illustrated. In FIG. 2, arrows S1 and S2 for indicating that the holding body 100 is movable in the horizontal direction with respect to the reactor base plate 20 are also illustrated.

(6) The holding body 100 may include an adapter base (pedestal) 3 that is provided on the reactor base plate 20 so as to be movable in the horizontal direction, and an electrode adapter 2 that is provided so as to be rotatable (swingable) with respect to the adapter base 3 and electrically connects between the core wire holder 1 and the metal electrode 4.

(7) The adapter base 3 may have a curved surface part 3a on an upper part thereof. The electrode adapter 2 may be rotatable along the curved surface part 3a and slidable in the horizontal direction with respect to the metal electrode 4.

(8) The electrode adapter 2 may include an electrode adapter body part 2a rotatably provided on the curved surface part 3a of the pedestal 3, and an electrode adapter slide part 2b extending in the horizontal direction from the electrode adapter body part 2a and contacting the metal electrode 4. The electrode adapter body part 2a and the electrode adapter slide part 2b may be integrally formed.

(9) As illustrated in FIG. 2, the electrode adapter body part 2a may have a quadrangular shape in a plan view, and the electrode adapter slide part 2b may also have a quadrangular shape in a plan view. The adapter base 3 may also have a quadrangular shape in a plan view. The curved surface part 3a of the adapter base 3 may have a circular shape in a plan view.

(10) In the aspect illustrated in FIGS. 1 and 2, the metal electrode 4 is fixed on the reactor base plate 20 via an insulator 5, and is formed as a substantially rectangular parallelepiped protrusion. The electrode adapter slide part 2b is in contact with a pressing part such as a pressing plate 10 by clamping the metal electrode 4 between the electrode adapter slide part 2b and the pressing part, and the electrode adapter slide part 2b and the pressing part are fastened by a bolt 9a and a nut 9b. The metal electrode 4 can be clamped between the electrode adapter slide part 2b and the holding plate 10 within a predetermined interval W of the electrode adapter slide part 2b. By loosening the fastening of the bolt 9a and the nut 9b, a position of the electrode adapter 2 with respect to the metal electrode 4 can be slid in the horizontal direction. The electrode adapter body part 2a has a protruding part 2a.sub.1 to which the core wire holder 1 can be connected on an upper part thereof. A lower part of the electrode adapter body part 2a is connected to the adapter base 3 via the curved surface part 3a. By adopting this aspect, the core wire holder 1 can be slid and rotated.

(11) A refrigerant 30 is provided in the metal electrode 4 (refer to FIG. 2), and the metal electrode 4 may be configured to be cooled from the inside.

(12) In the aspect illustrated in FIG. 2, a gap G is provided in the vertical direction between the electrode adapter body part 2a and the adapter base 3, and the electrode adapter body part 2a is rotatable (swingable) in the vertical direction in FIG. 2 (refer to arrow R1 in FIG. 2) and is movable in the horizontal direction in FIG. 2 (refer to arrow S1 in FIG. 2). When the electrode adapter body part 2a is rotated in the vertical direction, the electrode adapter slide part 2b is also rotated in the vertical direction (refer to arrow R2 in FIG. 2). When the electrode adapter body part 2a is moved in the horizontal direction, the electrode adapter slide part 2b is also moved in the horizontal direction (refer to arrow S2 in FIG. 2).

(13) As an example, the metal electrode 4 may be attached so as to be rotatable (swingable) in the horizontal direction. In this case, the electrode adapter body part 2a is also rotatable in the horizontal direction with respect to the adapter base 3.

(14) The electrode adapter 2, the adapter base 3, the metal electrode 4, and the holding plate 10 that are continuously used between the batches may all be formed as a flat surface and a simple spherical surface or a curved surface, the simple spherical surface or the curved surface being gently curved to have a radius of 5 mm or more, and furthermore may have a shape that does not have an internal corner part having an angle of less than 90 degrees. In this case, for example, cleaning can be easily performed manually by using a general cloth-like cleaning tool such as BEMCOT. Since the bolt 9a and the nut 9b are small components, even when the bolt 9a and the nut 9b are replaced with new components in each batch, an economic burden is small. In addition, even when two sets of the bolt 9a and the nut 9b are prepared and one set is cleaned while the other set is in use, a temporal burden is small. It is advantageous to adopt an aspect that does not have an internal corner part having an angle of less than 90 degrees in that the shape does not have a part that is difficult to clean. There is a possibility that a film deposited at a corner part having an acute angle peels off at the time of deposition (since stress of the deposited film increases to thicken the film, and/or to deposit the film without maintaining sufficient adhesion to the internal corner part), flies up in a chamber, and become a contamination source. However, by adopting an aspect that does not have the internal corner part having an angle of less than 90 degrees, an occurrence of the event described above can be prevented. It is more preferable that the ease of cleaning can be improved and the possibility of being a contamination source can be reduced by adopting the aspect that does not have an internal corner part having an angle of less than 120 degrees. It is also possible to adopt an aspect that does not have an internal corner part having an angle of less than 60 degrees. In this case, although an effect is low compared with that of the aspect that does not have an internal corner part having an angle of less than 90 degrees, a certain level of an effect can be obtained in that the ease of cleaning can be improved and the possibility of being the contamination source can be reduced. “c1” in FIG. 1 and “c2” in FIG. 2 have an angle of 90 degrees, and “c3” has an angle exceeding 90 degrees.

(15) It is desirable that the adapter base 3 is an insulator for preventing the current from be applied to the reactor base plate 20. However, the present invention is not limited to this, and a conductive member may be used as the adapter base 3. In this case, the intended function is achieved by using a material having high slidability and placing a flat plate formed of an insulator between the adapter base 3 and the reactor base plate 20.

(16) A cover 40 functioning as a stopper may be provided at the top of the metal electrode 4 so that the electrode adapter slide part 2b is not unintentionally detached from the metal electrode 4 (refer to FIG. 3).

(17) As illustrated in FIG. 3, the adapter base 3 may be provided on a guide part 50 extending in the horizontal direction, and movable in the horizontal direction along the guide part 50. In the aspect illustrated in FIG. 3, the guide part 50 extends in the same direction as the electrode adapter slide part 2b in a plan view.

(18) A cover for protecting the metal electrode 4 and a movable part of the electrode adapter slide part 2b may be provided, and a carbon sheet for assisting to apply the current and slide at a contact part may be provided therebetween.

Example

(19) By the Siemens method, a reaction to grow the polysilicon rod until the diameter of the polysilicon rod is about φ 160 mm was performed five batches each, and a crack generation rate was confirmed. In the most common fixed metal electrode and electrode adapter in the related art, which correspond to FIG. 4, a current fluctuation due to the crack generation was confirmed in two batches at the time of growth, a crack at the time of cooling were confirmed in all five batches, and collapse of the rod was confirmed in one batch of the five batches. On the other hand, in the configuration according to the embodiment illustrated in FIGS. 1 and 2, there was not the current fluctuation considered to be caused by the crack generation during growth, and a crack at the time of cooling were confirmed in three batches, but there was no collapse of the rod.

REFERENCE SIGNS LIST

(20) 1 core wire holder 2 electrode adapter 2a electrode adapter body part 2b electrode adapter slide part 3 adapter base (pedestal) 4 metal electrode (electrode) 5 insulator 9a bolt 9b nut 10 holding plate 20 reactor base plate (base plate) 20 refrigerant 100 holding body S1, S2 slide direction R1, R2 rotation direction (swinging direction)