ELECTRODE STRUCTURE FOR GUIDING A CHARGED PARTICLE BEAM

Abstract

An electrode structure for guiding and, for example, for splitting a beam of charged particles, for example an electron beam, along a longitudinal path has multipole electrode arrangements that are spaced apart from one another along the longitudinal path and that have DC voltage electrodes. The electrode arrangements are configured to generate static multipole fields centered around the path in transverse planes oriented perpendicular to the longitudinal path, wherein the field strengths of the static multipole fields in the transverse planes each have a local minimum at the location of the path and increase as the distance from the location of the path increases. Field directions of the static multipole fields vary periodically with a period length along the path so that the particles propagating along the path are subjected to an inhomogeneous alternating electric field due to their intrinsic movement and experience a transverse return force towards the longitudinal path on average over time.

Claims

1. An electrode structure for guiding a beam of charged particles along a longitudinal path, wherein the electrode structure has multipole electrode arrangements that are spaced apart from one another along the longitudinal path, the multipole electrode arrangements having DC voltage electrodes, the DC voltage electrodes being configured to generate static multipole fields centered around the longitudinal path in transverse planes oriented perpendicular to the longitudinal path, wherein field strengths of the static multipole fields in the transverse planes each have a local minimum at the location of the path and increase as the distance from the location of the path increases, wherein field directions of the static multipole fields vary periodically with a period length along the longitudinal path so that the charged particles propagating along the longitudinal path are subjected to an inhomogeneous alternating electric field due to their intrinsic movement and experience a transverse return force towards the longitudinal path on average over time.

2. The electrode structure in accordance with claim 1, wherein the electrode structure comprises electrode arrangements formed as a junction, wherein the electrode arrangements of the junction vary along the longitudinal path such that the longitudinal path can be split into a first partial path and a second partial path so that a first portion of the charged particles can be guided along the first partial path and a second portion of the charged particles can be guided along the second partial path.

3. The electrode structure in accordance with claim 2, wherein a dominant multipole component of the static multipole fields of the electrode arrangements is formed by a quadrupole component at an input side of the longitudinal path and/or at respective output sides of the partial paths in the transverse planes.

4. The electrode structure in accordance with claim 2, wherein the electrode arrangements of the junction each comprise three DC voltage electrodes that are arranged next to one another in a transverse direction and that have an inner electrode and two outer electrodes arranged at both sides of the inner electrode, wherein the inner and outer electrodes of the individual electrode arrangements form three electrode rows extending along the longitudinal path, wherein a transverse width of the inner electrodes increases along the longitudinal path.

5. The electrode structure in accordance with claim 2, wherein the junction is configured to simultaneously split the incoming charged particles into the first and second portions of charged particles and to simultaneously guide the first portion of charged particles along the first partial path and the second portion of charged particles along the second partial path.

6. The electrode structure in accordance with claim 5, wherein a dominant multipole component of the static multipole fields of the electrode arrangements of the junction is formed by a hexapole component in at least one transverse plane.

7. The electrode structure in accordance with claim 2, wherein the junction is configured to selectively guide the incoming charged particles either as the first portion along the first partial path or as the second portion along the second partial path.

8. The electrode structure in accordance with claim 1, wherein the static multipole fields generated by the electrode arrangements vary along the longitudinal path such that only first charged particles and not second charged particles experience a stable confinement along the longitudinal path, wherein the first charged particles have a first longitudinal speed and the second charged particles have a second speed different from the first longitudinal speed.

9. The electrode structure in accordance with claim 8, wherein the multipole fields alternate along the longitudinal path by a mean multipole field different from zero so that the particles guided along the longitudinal path are subjected to an inhomogeneous static superposition field, which is defined by the mean multipole field, in addition to the inhomogeneous alternating electric field and only the first charged particles and not the second charged particles perform a stable transverse oscillation along the longitudinal path.

10. The electrode structure in accordance with claim 9, wherein a first stability parameter derived from the alternating field and a second stability parameter derived from the superposition field define an operating point within the stability range of a linear multipole trap for the first charged particles and define an operating point outside the stability range of the linear multipole trap for the second charged particles.

11. The electrode structure in accordance with claim 1, wherein the period length of the longitudinal variation of the field directions of the static multipole fields is less than 60 mm.

12. The electrode structure in accordance with claim 1, wherein a longitudinal spacing between the individual electrode arrangements is less than 10 mm.

13. The electrode structure in accordance with claim 1, wherein the electrode arrangements are arranged directly adjoining one another along the longitudinal path.

14. The electrode structure in accordance with claim 1, wherein the electrode arrangements have equal spacings from one another along the longitudinal path.

15. The electrode structure in accordance with claim 1, wherein a longitudinal length of the electrode structure along the path amounts to between 1 mm and 1000 mm.

16. The electrode structure in accordance with claim 1, wherein the DC voltage electrodes are formed in at least one conductor layer oriented in parallel with the longitudinal path and structured along the longitudinal path.

17. The electrode structure in accordance with claim 1, wherein the DC voltage electrodes are formed in two conductor layers arranged spaced apart from one another.

18. The electrode structure in accordance with claim 17, wherein the DC voltage electrodes are formed with mirror symmetry with respect to one another in the two conductor layers.

19. The electrode structure in accordance with claim 16, wherein the structured conductor layer is arranged on a continuous surface extending in parallel with the longitudinal path.

20. The electrode structure in accordance with claim 16, wherein the structured conductor layer is arranged on a carrier structure.

21. The electrode structure in accordance with claim 20, wherein a supply line, which contacts individual DC voltage electrodes of the electrode arrangements, is formed in a further conductor layer of the carrier structure, said further conductor layer extending in parallel with the conductor layer, and is connected to the DC voltage electrodes via vias extending through the carrier structure.

22. The electrode structure in accordance with claim 21, wherein a plurality of supply lines in the further conductor layer extend in parallel with one another along the longitudinal path.

23. The electrode structure in accordance with claim 1, wherein the DC voltage electrodes of the individual electrode arrangements can each be supplied with two oppositely polarized DC voltages.

24. A system comprising an electrode structure in and an acceleration apparatus, wherein the electrode structure has multipole electrode arrangements that are spaced apart from one another along a longitudinal path, the multipole electrode arrangements having DC voltage electrodes, the DC voltage electrodes being configured to generate static multipole fields centered around the longitudinal path in transverse planes oriented perpendicular to the longitudinal path, wherein field strengths of the static multipole fields in the transverse planes each have a local minimum at the location of the path and increase as the distance from the location of the path increases, wherein field directions of the static multipole fields vary periodically with a period length along the longitudinal path so that the charged particles propagating along the longitudinal path are subjected to an inhomogeneous alternating electric field due to their intrinsic movement and experience a transverse return force towards the longitudinal path on average over time wherein the acceleration apparatus is configured to accelerate the charged particles with a predefined acceleration voltage and subsequently to feed them along the longitudinal path into the electrode structure, wherein the acceleration voltage and electrode voltages, which are applied to the multipole electrode arrangements, are matched to one another such that the accelerated charged particles perform a stable transverse oscillation about the location of the longitudinal path on average over time.

25. The system in accordance with claim 24, wherein the acceleration device is configured to accelerate a plurality of types of charged particles to the acceleration voltage and to feed them along the longitudinal path into the electrode structure.

26. The system in accordance with claim 24, wherein the system is configured as an electron microscope and the beam of charged particles is an electron microscopy beam for irradiating a microscopy object.

27. A method of guiding a beam of charged particles along a longitudinal path comprising the following steps: providing an electrode structure, wherein the electrode structure has multipole electrode arrangements that are spaced apart from one another along the longitudinal path, the multipole electrode arrangements having DC voltage electrodes, the DC voltage electrodes being configured to generate static multipole fields centered around the longitudinal path in transverse planes oriented perpendicular to the longitudinal path, wherein field strengths of the static multipole fields in the transverse planes each have a local minimum at the location of the path and increase as the distance from the location of the path increases, wherein field directions of the static multipole fields vary periodically with a period length along the longitudinal path so that the charged particles propagating along the longitudinal path are subjected to an inhomogeneous alternating electric field due to their intrinsic movement and experience a transverse return force towards the longitudinal path on average over time; applying electrode voltages varying periodically along the longitudinal path to the DC voltage electrodes of the electrode arrangements so that charged particles propagating along the path are subjected to an oscillating inhomogeneous alternating electric field due to their intrinsic movement and experience a transverse return force towards the longitudinal path on average over time; feeding the charged particles along the longitudinal path into the electrode structure; and guiding the charged particles along the longitudinal path by means of the transverse return force.

Description

DRAWINGS

[0088] The drawings described herein are for illustrative purposes only of selected embodiments and not all possible implementations, and are not intended to limit the scope of the present disclosure.

[0089] The invention will be explained in the following with reference to Figures. There are shown in a schematic representation in each case:

[0090] FIG. 1 a linear quadrupole trap in accordance with the prior art;

[0091] FIG. 2 a system for guiding a beam of charged particles with an electrode structure;

[0092] FIG. 3 a perspective representation of a first embodiment of the electrode structure;

[0093] FIG. 4 a plan view of a first conductor layer of the electrode structure;

[0094] FIG. 5 a section through the electrode structure in one of the transverse planes;

[0095] FIG. 6 a ponderomotive potential generated by the electrode structure;

[0096] FIG. 7 a plan view of a conductor layer of an electrode structure in accordance with a second embodiment;

[0097] FIG. 8 a plan view of a further conductor layer of the electrode structure in accordance with the second embodiment;

[0098] FIG. 9 a detailed view of supply lines at an input side of the electrode structure in accordance with the second embodiment;

[0099] FIG. 10 a detailed view of supply lines at an output side of the electrode structure in accordance with the second embodiment;

[0100] FIG. 11 experimental detector signals for detecting electrons at the output side of the electrode structure in accordance with the second embodiment;

[0101] FIG. 12 experimental detector signals for detecting helium ions at the output side of the electrode structure in accordance with the second embodiment;

[0102] FIG. 13 an intensity of the detector signal of a guided beam of electrons in dependence on an acceleration voltage and an electrode voltage;

[0103] FIG. 14 an intensity of the detector signal of a guided beam of helium ions in dependence on the acceleration voltage and the electrode voltage;

[0104] FIG. 15 a plan view of a conductor layer of a third embodiment of the electrode structure;

[0105] FIG. 16 a contacting of DC voltage electrodes of the electrode structure in accordance with the third embodiment;

[0106] FIG. 17 a stability diagram of the electrode structure in accordance with the third embodiment;

[0107] FIG. 18 a plan view of a first conductor layer of a fourth embodiment of the electrode structure formed as a junction;

[0108] FIG. 19 a transverse section through an electrode arrangement of the junction;

[0109] FIG. 20 transverse sections through ponderomotive potentials of the junction;

[0110] FIG. 21 detector signals for detecting electrons at the output side of the junction;

[0111] FIG. 22 a contacting of DC voltage electrodes of a first conductor layer of an alternative embodiment of the junction;

[0112] FIG. 23 a plan view of a first conductor layer of a further alternative embodiment of the junction; and

[0113] FIG. 24 a use of the junction in an electron microscope.

DETAILED DESCRIPTION

[0114] Example embodiments will now be described more fully with reference to the accompanying drawings.

[0115] FIG. 2 shows a system 1 for guiding a beam 10 of charged particles along a longitudinal path 20. The system 1 comprises an acceleration apparatus 60 for accelerating the charged particles with a predefined acceleration voltage 62, and an electrode structure 100 having a planar conductor layer 212 arranged along the path 20. After the charged particles have been accelerated in the acceleration apparatus 60 with the acceleration voltage 62, they enter into a ponderomotive potential, which is generated by the conductor layer 212 along the path 20, at an input side 150 of the electrode structure 100, said ponderomotive potential transversely confining the charged particles along the path 20 in directions oriented perpendicular to the path 20. After the charged particles have passed through the transversely confining ponderomotive potential along the path 20, they exit the potential at an output side 152 of the electrode structure 100. The electrode structure 100 shown in FIG. 2 is configured by way of example to transversely deflect the beam 10 along a curve by means of the ponderomotive potential.

[0116] The system 1 furthermore comprises a DC voltage source 75 that is connected to the electrode structure 100 and that provides all the electrode voltages 51, 52 necessary for generating the ponderomotive potential to DC voltage electrodes, not shown in FIG. 2, of the electrode structure 100. The system 1 further comprises an acceleration voltage source 73 that is connected to the acceleration apparatus 60 and that provides the acceleration voltage 62.

[0117] The DC voltage source 75 and the acceleration voltage source 73 are connected to a control apparatus 70 that predefines the acceleration voltage 62 and the electrode voltages 51, 52 applied to the DC voltage electrodes of the electrode apparatus 100 and matches them to one another such that the charged particles along the path 20 execute stable trajectories within the ponderomotive potential.

[0118] FIG. 3 sectionally shows a perspective representation of a first embodiment of the electrode structure 100 in which the path 20, along which the charged particles 11 are guided at a longitudinal speed 16, extends in a straight manner in a longitudinal direction 101. The electrode structure 100 comprises a planar first conductor layer 212 and a planar second conductor layer 222 arranged disposed opposite the first conductor layer 212 in a vertical direction 103 oriented perpendicular to the longitudinal direction 101. The conductor layers 212, 222 are aligned in parallel with one another and have a spacing 201 of 1 mm from one another in the vertical direction 103. The conductor layers 212, 222 extend along the longitudinal direction 101 and along a transverse direction 102 oriented perpendicular to the longitudinal direction 101 and to the vertical direction 103.

[0119] In alternative embodiments of the electrode structure 100, the spacing can generally also be less than 10 mm, less than 5 mm, less than 1 mm, less than 0.5 mm, less than 0.1 mm, less than 0.05 mm, or less than 0.01 mm.

[0120] The first conductor layer 212 comprises a first row 251 of DC voltage electrodes 120 extending along the longitudinal direction 101 and a second row 252 of DC voltage electrodes 120 extending in parallel next to the first row 251 in the transverse direction 102. In the individual rows 251, 252, DC voltage electrodes 120 alternately configured as first DC voltage electrodes 121 and as second DC voltage electrodes 222 are arranged in the longitudinal direction 101. In the transverse direction 102, the first and second DC voltage electrodes 121, 122 are arranged in pairs next to one another in each case. The first and second DC voltage electrodes 121, 122 each have opposite polarities with respect to ground, wherein the first DC voltage electrodes 121 are supplied with a first DC voltage 51 provided by the DC voltage source 75 and the second DC voltage electrodes 122 are supplied with a second DC voltage 52 provided by the DC voltage source 75. The DC voltages 51, 52 are oppositely polarized with respect to ground and have the same voltage magnitude U.sub.DC with respect to ground so that the first DC voltage 51 amounts to +U.sub.DC and the second DC voltage 52 amounts to −U.sub.DC.

[0121] In the second conductor layer 222, the DC voltage electrodes 120 are likewise arranged in a first row 251 and a second row 252 along the longitudinal direction 101, wherein the first and second rows 251, 252 of the first and second conductor layers 212, 222 are in each case disposed opposite one another in the vertical direction 103. In the rows 251, 252 of the second conductor layer 222, DC voltage electrodes 120 alternately configured as first counter-electrodes 123 and as second counter-electrodes 124 are arranged in the longitudinal direction 101. In this respect, in the vertical direction 103, the first counter-electrodes 123 are disposed opposite the first DC voltage electrodes 121 of the first conductor layer 212 and the second counter-electrodes 124 are disposed opposite the second DC voltage electrodes 122 of the first conductor layer 212. The first counter-electrodes 123 are supplied with the second DC voltage 52 and the second counter-electrodes 124 are supplied with the first DC voltage 51.

[0122] FIG. 4 shows a plan view of the first conductor layer 212. The DC voltage electrodes 120 are arranged at a spacing 111 of 1.4 mm from one another in the two rows 251, 252 and have an electrode length 141 of 1.3 mm in the longitudinal direction 101. The DC voltage electrodes 120 are formed in a ground plane 125 of the first conductor layer 212 and are electrically insulated from the ground plane 125 by insulating gaps 129. A period length 112 with which the DC voltages of the DC voltage electrodes vary along the longitudinal direction 101 amounts to L.sub.p=2.4 mm, wherein two DC voltage electrodes 120 are arranged behind one another within the period length 112 in the longitudinal direction 101. Overall, the electrode structure 100 has a length 105 of, for example, 100 mm in the longitudinal direction 101.

[0123] DC voltage electrodes 121, 122 arranged next to one another in the transverse direction 102, together with the counter-electrodes 123, 124 disposed opposite them in the vertical direction 103, in each case form electrode arrangements 110 that generate static quadrupole fields centered around the path 20 in transverse planes 30 extending centrally through the electrode arrangements 110 and oriented perpendicular to the longitudinal direction 101. Between the individual electrode arrangements 110, the ground plane 125 in each case forms ground electrodes that separate the DC voltage electrodes 120 of the individual electrode arrangements 110 from one another along the longitudinal direction 101.

[0124] FIG. 5 shows a section through the electrode structure 100 in one of the transverse planes 110. In the transverse direction 102, the DC voltage electrodes 120 each have an electrode width 140 of 1.4 mm. The insulating gap 129 that surrounds the DC voltage electrodes 120 has a gap width 142 of 0.1 mm. The longitudinal path 20 along which the charged particles 11 are guided in a transversely confined manner lies in a central plane 108 between the first and second conductor layer 212, 222 and in each case has a path spacing 106 of R.sub.0=0.5 mm from the conductor layers 212, 222. As shown in FIGS. 3 to 5, the first and second conductor layers 212, 222 are formed with mirror symmetry with respect to the central plane 108.

[0125] The first conductor layer 212 is arranged on a first surface 211 of a first carrier structure 21 and the second conductor layer 222 is arranged on a second surface 221 of a second carrier structure 220. At sides that are disposed opposite the surfaces 211, 221, the carrier structures 210, 220 each have further conductor layers 214, 224 in each of which a first supply line 215 and a second supply line 216 are formed. The supply lines 215, 216 each extend along the longitudinal path 20 in the conductor layers 214, 224.

[0126] The first supply line 215 is supplied with the first electrode voltage 51 and the second supply line 216 is supplied with the second electrode voltage 52. The first DC voltage electrodes 121 and the second counter-electrodes 124 are connected via vias 218, which each extend through the carrier structures 210, 220, to the respective first supply lines 215 of the conductor layers 214, 224 and the second DC voltage electrodes 122 and the second counter-electrodes 124 are connected via analogous vias 218 to the respective second supply line 216 of the conductor layers 214, 224.

[0127] The individual electrode arrangements 110 each form quadrupole lenses that are centered around the path 20 and that have a longitudinally alternating polarity. In the rest frame of the charged particles 11 propagating along the path 20, the electrode arrangements 110 generate an oscillating quadrupole field with an effective frequency

[00013]$\Omega =2\pi \frac{v_l}{L_p}=\frac{2\pi \sqrt{2.Math.{\mathrm{QU}}_A/M}}{L_p}.$

On average over time, the charged particles 11 experience a transverse return force towards the path 20 that is described by the ponderomotive potential.

[0128] In FIG. 6, the ponderomotive potential

[00014]$\Psi =\frac{Q^2.Math.E^2.Math.}{4M{\Omega }^2}$

is shown which the electrode structure 100 shown in the images 4 and 5 generates in the transverse planes 30 for electrons having a kinetic energy of 1 keV (.sub.UA=1 kV) and electrode voltages 51, 52 of U.sub.DC=+100 V. The mean value E.sup.2 of the square of the absolute value of the electric field was in this respect formed over a period length 112, wherein the square of the absolute value of the field was formed from all three spatial field components E.sub.x, E.sub.y, E.sub.z along the direction 101, 102, 103. In a first approximation, the ponderomotive potential Ψ forms a harmonic potential that generates a linear return force towards the path 20 in all the directions 102, 103 perpendicular to the longitudinal path 20.

[0129] FIG. 7 shows a second embodiment of the electrode structure 100 in which the charged particles 11 are guided along an s-shaped path 20. In this respect, a plan view of the first conductor layer 212 of the electrode structure 100 is shown in FIG. 7. Unless differences are apparent from the Figures and the description, the second embodiment of the electrode structure 100 shown in FIG. 7 is formed as disclosed in connection with the first embodiment shown in FIGS. 3 to 5, and vice versa.

[0130] At a longitudinal side, the electrode structure 100 has a first contact surface 217, which is electrically conductively connected via a via 218 to the first supply line 215 at the further conductor layer 214 disposed opposite the first conductor layer 212, and a contact surface 219 that is electrically conductively connected via a further via 218 to the second supply line 215 at the further conductor layer 214.

[0131] FIG. 8 shows a plan view of the further conductor layer 214 of the second embodiment of the electrode structure 100. In this respect, the viewing direction is oriented opposite the vertical direction 103 so that a side of the further conductor layer 214 facing the first carrier structure 210 can be seen. The supply lines 215, 216 extend next to one another along the longitudinal path 20, with the first supply line 215 branching into two partial lines arranged at both sides of the second supply line 216. In this respect, the partial lines of the first supply line 215 and the second supply line 216 in each case extend in a meandering manner next to one another along the path 20.

[0132] FIG. 9 shows a detailed view of the supply lines 215, 216 at the input side 150 of the electrode structure 100 and FIG. 10 shows a detailed view of the supply lines 215, 216 at the output side 152 of the electrode structure 100. In addition, the DC voltage electrodes 120 formed in the first conductor layer 212 are shown as dashed lines in FIGS. 9 and 10 in each case. The second DC voltage electrodes 122 are electrically conductively connected in order via the vias 218 to the second supply line 216 extending between the two partial lines of the first supply line 215. The partial lines of the first supply line 215 are electrically conductively connected to the first DC voltage electrodes 121 of the individual electrode arrangements 110, in an alternating manner in each case, via vias 218 along the longitudinal direction 101. The contacting of the DC voltage electrodes 121, 122 shown in FIGS. 8 to 10 can also take place analogously in the first embodiment of the electrode structure 100.

[0133] FIGS. 11a and 11b show experimental detector signals for detecting electrons that have a kinetic energy of 2.5 keV and that exit the ponderomotive potential of the s-shaped electrode structure 100 in accordance with the second embodiment at the output side 152. The DC voltage electrodes 120 were connected to ground potential (U.sub.DC=0 V) during recording of the detector signal shown in FIG. 11a, whereas the DC voltage electrodes 120 were supplied with electrode voltages of U.sub.DC=410 V during the recording of the detector signal shown in FIG. 11b. If the DC voltage electrodes 120 are at ground potential, the electrons exit the electrode structure 100 as an unguided beam 15. In contrast, at electrode voltages of U.sub.DC=410 V, all the electrons are guided as a transversely confined beam 10 along the path 20 so that they exit the electrode structure 100 in the transverse direction 102 laterally offset from the position of the unguided beam 10.

[0134] FIGS. 12a and 12b show analogous detector signals for helium ions for the same acceleration voltage 62 of 2.5 kV. As can be seen from FIGS. 11a/b and 12a/b, the transverse confinement of the charged particles in the transverse ponderomotive potential generated by the electrode structure 100 is independent of the mass of the charged particles 11 at the same acceleration voltage 62.

[0135] FIG. 13 shows the intensity 80 of the detector signal of the guided beam 10 of electrons in dependence on the acceleration voltage 62 and the electrode voltages 51, 52 and FIG. 14 shows the corresponding intensity 80 of the detector signal of the guided beam 10 of helium ions. As can be seen from FIGS. 13 and 14, both types of charged particles 11 are stably guided along the longitudinal path when the stability parameter q.sub.DC given by the ratio of the electrode voltage U.sub.DC and the acceleration voltage U.sub.A lies between 0.4 and 0.9. The effective frequencies

[00015]$\Omega =\frac{2\pi \sqrt{2.Math.{\mathrm{QU}}_A/M}}{L_p},$

which result for the respective particles from the acceleration voltage U.sub.A determining the kinetic energy of the particles, are furthermore specified in FIGS. 13 and 14. Further experimental investigations have shown that the mentioned limits of the stability parameter q.sub.DC are also valid for ions of a larger mass, for instance for neon ions, argon ions, krypton ions, or xenon ions.

[0136] As can be seen from FIG. 13, effective frequencies of more than 5 GHz, in particular of more than 6.5 GHz, can be generated for electrons. Alternative embodiments of the electrode structure 100 with smaller period lengths 112 can also be configured to produce effective frequencies for electrons of more than 10 GHz, for example, of more than 50 GHz, 100 GHz, 500 GHz, or 1 THz. For example, with a period length 112 of 56 μm, an effective frequency of 330 GHz can be generated for electrons having a kinetic energy of 1 keV.

[0137] FIG. 15 shows a plan view of the first conductor layer 212 of a third embodiment of the electrode structure 100. Unless differences are apparent from the Figures and the description, the third embodiment of the electrode structure 100 is formed as is disclosed for the first embodiment, and vice versa. In the third embodiment of the electrode structure 100, the DC voltage electrodes 120, unlike in the first embodiment, are arranged directly adjoining one another along the longitudinal path 20. The third embodiment of the electrode structure 100 in particular does not have any sections of the ground plane 125 arranged in the longitudinal direction 101 between the individual electrode arrangements 110. Instead, the individual DC voltage electrodes 120 are spaced apart at a longitudinal spacing 111 in the longitudinal direction 101 that corresponds to the gap width 142 between the DC voltage electrodes 120 and the ground plane 125. In general, all other described embodiments of the electrode structure 100 can also have DC voltage electrodes 120 that are arranged directly adjoining another as shown in FIG. 15.

[0138] The third embodiment of the electrode structure 100 shown in FIG. 15 is furthermore configured to generate multipole fields formed as quadrupole fields in the transverse planes 30, said multipole fields alternating along the path 20 by a multipole field that is different from zero and that is likewise formed as a quadrupole field. This is achieved in that electrode arrangements 110 disposed next to one another along the longitudinal direction 101 each generate multipole fields having opposite polarities and different field magnitudes.

[0139] For this purpose, first DC voltage electrodes 131 having a first electrode voltage U.sub.0+U.sub.DC and second DC voltage electrodes 132 having a second electrode voltage U.sub.0−U.sub.DC are alternately arranged in the first row 251, wherein the first and second electrode voltages have a first mean value U.sub.0. Third DC voltage electrodes 133 having a third electrode voltage −U.sub.0−U.sub.DC and fourth DC voltage electrodes 134 having a fourth electrode voltage −U.sub.0+U.sub.DC are alternately arranged in the second row 252, wherein the third and fourth electrode voltages have a second mean value −U.sub.0. In this respect, the first and second mean values are symmetrically disposed about the ground potential of 0 V. Alternatively, the first and second mean values can also be symmetrically disposed about a potential different from zero, which brings about an electrical potential different from zero at the location of the path 20.

[0140] DC voltage electrodes 120 arranged next to one another in the transverse direction 102 are each configured either as first DC voltage electrodes 131 having the first electrode voltage U.sub.0+U.sub.DC and as third DC voltage electrodes 133 having the third electrode voltage −U.sub.0−U.sub.DC or as second DC voltage electrodes having the second electrode voltage U.sub.0−U.sub.DC and fourth DC voltage electrodes 134 having the fourth electrode voltage −U.sub.0+U.sub.DC. As in the first and second embodiments of the electrode structure 100, the third embodiment of the electrode structure 100 also comprises counter-electrodes that are disposed opposite the DC voltage electrodes 120 in the vertical direction 103 in each case, wherein both electrodes disposed opposite one another in the vertical direction 103 and electrodes arranged next to one another in the transverse direction 102 have different electrode voltages in each case.

[0141] Thus, the counter-electrodes disposed opposite the first DC voltage electrodes 131 in the vertical direction 103 are supplied with the third electrode voltage −U.sub.0−U.sub.DC and the counter-electrodes disposed opposite the third DC voltage electrodes 133 in the vertical direction 103 are supplied with the first electrode voltage U.sub.0+U.sub.DC. Analogously, the counter-electrodes disposed opposite the second DC voltage electrodes 132 in the vertical direction 103 are supplied with the fourth electrode voltage −U.sub.0+U.sub.DC and the counter-electrodes disposed opposite the fourth DC voltage electrodes 134 in the vertical direction 103 are supplied with the second electrode voltage U.sub.0−U.sub.DC.

[0142] FIG. 16 shows a schematic representation of the contacting of the DC voltage electrodes 120 arranged in the first conductor layer 212 by a first supply line 135 guiding the first electrode voltage U.sub.0+U.sub.DC, a second supply line 136 guiding the second electrode voltage U.sub.0−U.sub.DC, a third supply line 137 guiding the third electrode voltage −U.sub.0−U.sub.DC, and a fourth supply line 138 guiding the fourth electrode voltage −U.sub.0+U.sub.DC. The supply lines 135, 136, 137, 138 each extend in parallel with one another in the further conductor layer 214 at the side of the carrier structure 210 disposed opposite the first conductor layer 212 and are electrically conductively connected to the DC voltage electrodes 120 of the first conductor layer 212 by means of individual vias 218.

[0143] Due to the first and second mean values ±U.sub.0 of the electrode voltages, a quadrupole field centered around the path 20 and homogeneous along the path 20 is generated that generates a stability parameter

[00016]$a_{\mathrm{DC}}=\frac{\eta .Math.L_P^2.Math.U_0}{{\pi }^2.Math.R^2.Math.U_A}$

different from zero as a superposition field. Only charged particles 11 whose kinetic energies lie in an energy range bounded at both sides are thereby stably guided along the longitudinal path 20.

[0144] This is illustrated by FIG. 17, which shows a stability diagram 400 of the electrode structure in accordance with the third embodiment, wherein the stability diagram corresponds to the stability diagram of a linear quadrupole trap. A stability range 405 comprises all the value pairs of a first stability parameter 401 (q.sub.DC) and a second stability parameter 402 (a.sub.DC) for which the charged particles 11 propagate on stable trajectories along the path 20. The stability range 405 is bounded by a first stability limit 407 for large values of the first stability parameter 401 and is bounded by a parabolic second stability limit 408, which extends through the origin, for small values of the first stability parameter 401. The stability limits 407, 408 intersect at a vertex 409 that defines a maximum value 422 of the second stability parameter 402 of a.sub.DC,max=0.237 and an associated value 423 of the first stability parameter 401 of q.sub.DC=0.706.

[0145] With a predefined ratio U.sub.0/U.sub.DC, the operating parameters for all the acceleration voltages U.sub.A lie on a working line 410 that is a line through the origin with a gradient 2U.sub.0/U.sub.DC. Individual acceleration voltages U.sub.A or particle energies then define operating points 411, 412 on the working line 410, wherein the operating points 411, 412 move away from the origin as the acceleration voltage U.sub.A or particle energy decreases. Thus, a first operating point 411 shown in FIG. 17 corresponds to a first acceleration voltage and the second operating point 412 that is likewise shown corresponds to a higher second acceleration voltage.

[0146] A pass band 415, which is defined by the intersection of the stability range 405 with the working line 410, then determines the particle energies at which the charged particles 11 execute stable trajectories in the ponderomotive potential of the electrode structure 100. The greater the ratio U.sub.0/U.sub.DC is selected, the narrower the pass band 415 is. Without the static superposition field, a.sub.DC=0 and the electrode structure 100 acts as a high-pass filter, wherein a maximum value 421 of the first stability parameter 401 is defined by q.sub.DC,max=0.92.

[0147] FIG. 18 shows a representation, not to scale, of a first conductor layer 212 of a fourth embodiment of the electrode structure 100. Unless differences are apparent from the Figures and the description, the fourth embodiment of the electrode structure 100 shown in FIG. 18 is formed as disclosed in connection with the first embodiment shown in FIGS. 3 to 5, and vice versa.

[0148] The fourth embodiment of the electrode structure 100 is formed as a junction 300 to guide the charged particles along a path 20 that splits into a first partial path 21 and a second partial path 22. The individual electrode arrangements 110 each comprise three DC voltage electrodes 120, which are arranged next to one another in the transverse direction 102, in the first conductor layer 212, wherein the DC voltage electrodes 120 are arranged along the longitudinal direction 101 in an inner electrode row 320 and in two outer electrode rows 330, 340 extending at both sides of the inner electrode row 320 in the transverse direction 102. The individual DC voltage electrodes 120 have a length of 550 μm and a spacing of 750 μm from one another in the longitudinal direction 101. The electrode structure 100 has a length 105 of 113 mm along the longitudinal direction 101.

[0149] The junction 300 forms a beam splitter that simultaneously splits the charged particles 11 into a first portion propagating along the first partial path 21 and a second portion propagating along the second partial path 22. A first electrode voltage +U.sub.DC and an oppositely polarized second electrode voltage −U.sub.DC are in each case alternately applied to the DC voltage electrodes 120 of the individual electrode rows 320, 330, 340 in the longitudinal direction 101. Furthermore, the first and second electrode voltages +U.sub.DC, −U.sub.DC are likewise alternately applied to the DC voltage electrodes 120 of the individual electrode arrangements 110 arranged next to one another in the transverse direction 102 so that DC voltage electrodes 120 adjacent to one another in the transverse direction 102 each have different electrode voltages.

[0150] FIG. 19 shows a transverse section perpendicular to the longitudinal direction 101 through one of the electrode arrangements 110 of the junction 300. The junction 300 comprises a planar second conductor layer 222 that is arranged at a spacing 201 of 1 mm in parallel with the first conductor layer 212. The electrode structure of the second conductor layer 222 corresponds to the electrode structure of the first conductor layer 212 mirrored at the central plane 108.

[0151] In the first conductor layer 212, the DC voltage electrodes 120 of the first outer electrode row 330 each form first outer electrodes 331 and the DC voltage electrodes 120 of the second outer electrode row 340 each form second outer electrodes 341. Inner electrodes 321 of the inner electrode row 320 are in each case arranged between the outer electrodes 331, 341. First outer counter-electrodes 332 which are disposed opposite the first outer electrodes 331 of the first conductor layer 212; second outer counter-electrodes 342 which are disposed opposite the second outer electrodes 341 of the first conductor layer 212; and inner counter-electrodes 322, which are disposed opposite the inner electrodes 321 of the first conductor layer 212, are arranged in the second conductor layer 222.

[0152] In the junction 300, the DC voltage electrodes 321, 331, 341 of the first conductor layer 212 and the counter-electrodes 322, 332, 342 that are in each case disposed opposite the individual DC voltage electrodes 321, 331, 341 have different electrode voltages. If the two outer electrodes 331, 341 of the first conductor layer 212, for example, have the first electrode voltage +U.sub.DC and the inner electrode 321 has the second electrode voltage −U.sub.DC, the two outer counter-electrodes 332, 342 are at the second electrode voltage −U.sub.DC and the inner counter-electrodes 322 are at the first electrode voltage +U.sub.DC. In the case of electrode arrangements 110 arranged longitudinally adjacent to such an electrode arrangement 110, the two outer electrodes 331, 341 and the inner counter-electrodes 322 then have the second electrode voltage −U.sub.DC and the inner electrode 321 as well as the two outer counter-electrodes 332, 342 have the first electrode voltage +U.sub.DC.

[0153] At the sides of the carrier structures 210, 220 facing away from the conductor layers 212, 222, the junction 300 in each case has two first supply lines 215 guiding the first electrode voltage +U.sub.DC and two second supply line 216 guiding the second electrode voltage −U.sub.DC, wherein the first and second supply lines 215, 216 each extend along the longitudinal direction 101 and are arranged alternately next to one another in the transverse direction 102. Analogously to the supply lines 215, 216 of the electrode structure 100 in accordance with the second embodiment, the supply lines 215, 216 of the junction 300 extend in a meandering manner along the longitudinal direction 101. In this respect, the supply lines 215, 216 inwardly arranged at the first carrier structure 210 each alternately contact either one of the outer electrodes 331, 341 or the inner electrode 321, 322, while the two outwardly arranged supply lines 215, 216 are alternately connected to every second first or second outer electrode 331, 341 in the longitudinal direction 101. The contacting of the counter-electrodes 322, 332, 342 takes place analogously at the second carrier structure 220.

[0154] As shown in FIG. 18, the DC voltage electrodes 120 of the inner electrode row 320 widen continuously along the longitudinal direction 101. The inner electrodes 321, 322 have a transverse width 325 of 300 μm at the input side 150 and have a transverse width 325 of 2.2 mm at the output side 152. The outer electrodes 331, 332, 341, 342 each have a constant transverse width 335 of 1.4 mm along the longitudinal direction 101.

[0155] The junction 303 is configured to generate a multipole field having a dominant quadrupole component in transverse planes 310 disposed at the input side 150. The corresponding ponderomotive potential 44 is shown in a transverse section in FIG. 20a and has a single minimum at the location of the longitudinal path 20. At the center of the junction 300, the electrode arrangements 110 generate a multipole field having a dominant hexapole component due to the widening of the central electrodes 321, 32 in a transverse plane 311. The associated ponderomotive potential 44 is shown in FIG. 20b and has two minima, which are spaced apart along the transverse direction 102, at the location of the two partial paths 21, 22. At the output side 152, the junction 300 generates a multipole field in a transverse plane 312 whose dominant components are two quadrupole fields having two centers, which are spaced apart along the transverse direction 102, at the location of the partial paths 21, 22. The associated ponderomotive potential 44 is shown in FIG. 20c and has two minima at the location of the two partial paths 21, 22 that have a significantly larger transverse spacing from one another than the two minima of the potential shown in FIG. 20b.

[0156] The ponderomotive potentials 44 shown in FIGS. 20a, 20b, 20c were each calculated for an electron beam having a longitudinal energy of 800 eV and for a voltage amplitude of U.sub.DC=210V. FIG. 21a shows a corresponding detector signal having an electron beam split into a first portion 12 and a second portion 14. For comparison, FIG. 21a shows an experimental detector signal for grounded DC voltage electrodes 120 that only detects a single unguided beam 15 of electrons.

[0157] With the voltage assignment described above, the junction 300 simultaneously splits the incoming beam 10 of charged particles into the first and second portions 12, 14. In accordance with an alternative embodiment, the junction 300 can also be configured to selectively split the incoming beam 10 of charged particles either into the first portion 12 propagating along the first partial path 21 or into the second portion 14 propagating along the second partial path 22 so that the junction acts as a switch.

[0158] A selective splitting is, for example, possible when the junction 300 is configured to selectively apply the electrode voltage of the transversely adjacent first outer electrodes 331, 332 or the electrode voltage of the transversely adjacent second outer electrodes 341, 342 to the individual inner electrodes 321 and the corresponding counter-electrodes 322. If the electrode voltage of the transversely adjacent first outer electrodes 331, 332 is applied to the inner electrodes 321, 322, the charged particles follow the second partial path 22 extending along the second outer electrodes 341, 342. If, in contrast, the electrode voltage of the transversely adjacent second outer electrodes 341, 342 is applied to the inner electrodes 321, 322, the charged particles follow the first partial path 21 extending along the first outer electrodes 331, 332.

[0159] FIG. 22 shows a contacting of the DC voltage electrodes 120 of the first conductor layer 212 of the junction 300 with which the described selective splitting of the beam 10 along the first or second partial path 21, 22 is possible. The junction 300 in each case comprises a first supply line 351 and a second supply 352 for each of the electrode rows 320, 330, 340, wherein the supply lines 351, 352 are arranged in the further conductor layer 214 and are connected to the DC voltage electrodes 120 of the individual rows 320, 330, 340 in an alternating manner via vias 218 in the longitudinal direction 101.

[0160] The first supply lines 351 of the outer electrode rows 330, 340 each guide the first electrode voltage and the second supply lines 352 of the outer electrode rows 330, 340 each guide the second electrode voltage. In the inner electrode row 320, the first supply line 351 can selectively be supplied with the first electrode voltage and the second supply line 352 can be supplied with the second electrode voltage or the first supply line 351 can be supplied with the second electrode voltage and the second supply line 352 can be supplied with the first electrode voltage. In the first-named case, the inner electrodes 321 and the first outer electrodes 331 are at the same electrode voltage and the charged particles follow the second partial path 22 along the second outer electrode row 340. In the second-named case, the inner electrodes 321 and the second outer electrodes 341 are at the same electrode voltage and the charged particles follow the first partial path 21 along the first outer electrode row 330. A contacting of the counter-electrodes takes place analogously such that electrodes disposed opposite one another in the vertical direction 103 have different and opposite electrode voltages.

[0161] FIG. 23 shows a further alternative embodiment of the junction 300 with which a beam of charged particles entering along the path 20 can be selectively guided along the first or second partial path 21, 22. Unless differences are apparent from the Figures or the description, the further alternative embodiment of the junction 300 shown in FIG. 23 is designed like the alternative embodiment shown in FIGS. 18, 19 and 22, and vice versa.

[0162] The junction 300 shown in FIG. 23 has a first group 115 of electrode arrangements 110 that are arranged along the first path 21 and a second group 116 of electrode arrangements 110 that are arranged along the second partial path 22. In this respect, in each case only the DC voltage electrodes of the electrode arrangements 110 arranged in the first conductor layer 212 are shown in FIG. 23.

[0163] The electrode arrangements 110 of the first group 115 and the electrode arrangements 110 of the second group 116 are each alternately arranged along the longitudinal direction 101. The junction 300 is configured to selectively apply either the first and second DC voltages to the DC voltage electrodes of the first group 115 of electrode arrangements 110 to guide the charged particles along the first partial path 21 or to apply the first and second DC voltages to the DC voltage electrodes 120 of the second group 116 of electrode arrangements 110 to guide the charged particles along the second partial path 22.

[0164] Compared to the alternative embodiment, described in connection with FIG. 22, of the junction that is configured and contacted as a switch, the further alternative embodiment shown in FIG. 23 does not require supply lines to one and the same DC voltage electrode 120 to be selectively supplied with the first or the second DC voltage. Instead, in the further alternative embodiment shown in FIG. 23, it is sufficient to connect all the DC voltage electrodes only to a single voltage source whose output is selectively connectable to a single electrode voltage or to ground.

[0165] FIG. 24 shows a use of the junction 300 described in connection with FIGS. 18 to 21 and configured as a beam splitter in an electron microscope 500. The electron microscope 500 comprises an acceleration apparatus 60 that generates an electron beam 10 and accelerates it with the acceleration voltage U.sub.A. After exiting the acceleration apparatus 60, the electron beam 10 is imaged by means of a geometrical optics 510, which comprises a plurality of electron lenses 512, onto the output of the first partial path 21 at the output side 152 of the junction 300 so that the electrons propagate in a transversely confined manner along the first partial path 21 to the input side 150 of the junction 300.

[0166] An electron mirror 513 is arranged at the input side 150 of the junction 300 and reflects electrons propagating along the path 20 back into the junction 300. Within the junction 300, the electron beam 10 is subsequently split into a first portion propagating along the first partial path 21 and a second portion propagating along the second partial path 22. The first portion is imaged by the geometrical optics 510 back towards the acceleration apparatus 60 and the second portion is imaged onto a microscopy object 520.

[0167] In such an arrangement, the junction 300 can, after a reflection at the electron mirror 513, coherently split the quantum mechanical wave functions of the electrons into transverse quantum states of the first and second partial paths 21, 22. These coherent quantum states can then be used to image the microscopy object 520 in the manner of the quantum Zeno effect with only minimal interaction between the electron beam 10 and the microscopy object 520. In this respect, the measurement method is based on the fact that the presence of the microscopy object 520 prevents a propagation of the electrons in the second partial path 22. Due to the coherence of the wave functions, this can be detected in that a higher proportion of the electron beam 10 is reflected back from the electron mirror 513 into the first partial path 21 than would be the case if the microscopy object 520 were absent.

[0168] The foregoing description of the embodiment has been provided for purposes of illustration and description. It is not intended to be exhaustive or to limit the disclosure. Individual elements or features of a particular embodiment are generally not limited to that particular embodiment, but, where applicable, are inter-changeable and can be used in a selected embodiment, even if not specifically shown or described. The same may also be varied in many ways. Such variations are to be regarded as a departure from the disclosure, and all such modifications are intended to be included within the scope of the disclosure.