Layout Structure of eFuse Unit

Abstract

The disclosure discloses a layout structure of an eFuse unit, comprising pad, link, and shield, wherein: a pad is respectively disposed on both ends of the link in a length direction; the shield and the link are at the same metal layer; the shield comprises a plurality of independent metal wires; the plurality of independent metal wires are arranged on both sides of the link; the length of each independent metal wire is greater than the width thereof; and a length direction of each independent metal wire is perpendicular to the length direction of the link. The disclosure not only forms a barrier protection layer for preventing burst metal spraying from affecting other circuits, but also can prevent spayed metal from reflecting back and connecting to a broken link, so as to improve the programming reliability of the eFuse unit.

Claims

1. A layout structure of an eFuse unit, comprising pad, link, and shield, wherein: a pad is respectively disposed on both ends of the link in a length direction; the shield and the link are at the same metal layer; the shield comprises a plurality of independent metal wires; the plurality of independent metal wires are arranged on both sides of the link and arranged between the pads at both ends of the link; the length of each independent metal wire is greater than the width thereof; and a length direction of each independent metal wire is perpendicular to the length direction of the link.

2. The layout structure of an eFuse unit according to claim 1, wherein minimum distances from the independent metal wires at the same side of the link to the link are same.

3. The layout structure of an eFuse unit according to claim 1, wherein intervals between the adjacent independent metal wires at the same side of the link are same.

4. The layout structure of an eFuse unit according to claim 1, wherein the width of each metal wire of the shield is the same as the width of the link.

5. The layout structure of an eFuse unit according to claim 1, wherein the lengths of all the metal wires of the shield are same.

6. The layout structure of an eFuse unit according to claim 1, wherein an interval d between the adjacent independent metal wires at the same side of the link is 1/7-⅕ of the length b of the link.

7. The layout structure of an eFuse unit according to claim 1, wherein an interval d between the adjacent independent metal wires at the same side of the link is ⅙ of the length b of the link.

8. The layout structure of an eFuse unit according to claim 1, wherein a minimum distance c from the independent metal wire to the link is 1.5-2.5 times of the width a of the link.

9. The layout structure of an eFuse unit according to claim 1, wherein a minimum distance c from the independent metal wire to the link is 2 times of the width a of the link.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly explain the technical solution of the present application or, the drawings required in the present application will be briefly described below. It is obvious that the drawings described below are merely some embodiments of the present application, and those skilled in the art could also obtain other drawings on the basis of these drawings without contributing any inventive labor.

[0024] FIG. 1 is a conventional layout structure of an eFuse unit.

[0025] FIG. 2 is another conventional layout structure of an eFuse unit.

[0026] FIG. 3 is a schematic structural diagram of a layout structure of an eFuse unit according to an embodiment of the disclosure.

[0027] FIG. 4 is a block effect diagram of a shield of the layout structure of an eFuse unit according to an embodiment of the disclosure.

DETAILED DESCRIPTION OF THE DISCLOSURE

[0028] The technical solution of the disclosure will be clearly and completely described below with reference to the drawings. Obviously, the described embodiments are part of the embodiments of the disclosure, instead of all of them. Based on the embodiments in the disclosure, all other embodiments obtained by those skilled in the art without contributing any inventive labor shall fall into the protection scope of the disclosure.

Embodiment 1

[0029] Referring to FIG. 3, a layout structure of an eFuse unit includes pad, link, and shield.

[0030] A pad is respectively disposed on both ends of the link in a length direction.

[0031] The shield and the link are at the same metal layer.

[0032] The shield includes a plurality of independent metal wires.

[0033] The plurality of independent metal wires are arranged on both sides of the link and arranged between the pads at both ends of the link.

[0034] The length of each independent metal wire is greater than the width thereof.

[0035] A length direction of each independent metal wire is perpendicular to the length direction of the link.

[0036] In the layout structure of an eFuse unit of embodiment 1, a shield portion thereof adopts a layout form perpendicular to the direction of the link, and two rows of uniformly-spaced independent metal wires which are perpendicular to the link are separately arranged at two sides of the link, not only forming a barrier protection layer for preventing burst metal spraying from affecting other circuits, but also preventing spayed metal from reflecting back and connecting to a broken link (referring to FIG. 4) and thereby causing a programming failure of the eFuse unit, so as to improve the programming reliability of the eFuse unit.

Embodiment 2

[0037] In the layout structure of an eFuse unit of embodiment 1, minimum distances from the independent metal wires at the same side of the link to the link are same.

[0038] In an example, a minimum distance c from the independent metal wire to the link is 1.5-2.5 times (e.g., 2 times) of the width a of the link.

Embodiment 3

[0039] In the layout structure of an eFuse unit of embodiment 1, intervals between the adjacent independent metal wires at the same side of the link are same.

[0040] In an example, an interval d between the adjacent independent metal wires at the same side of the link is 1/7-⅕ (e.g., ⅙) of the length b of the link.

Embodiment 4

[0041] In the layout structure of an eFuse unit of embodiment 1, the width of each metal wire of the shield is the same as the width of the link.

[0042] In an example, the lengths of all the metal wires of the shield are same.

[0043] The above embodiments are merely preferred embodiments of the disclosure and are not intended for limiting the disclosure. Any changes, equivalent replacements, or improvements made within the spirit and principle of the disclosure shall fall within the protection scope of the disclosure.