Laser Ablation Probe
20170299522 · 2017-10-19
Inventors
Cpc classification
H01J49/105
ELECTRICITY
G01N21/718
PHYSICS
International classification
Abstract
A laser ablation probe comprises a tubular element adapted for conducting a carrier fluid in a substantially laminar flow. The tubular element comprises a fluid inlet and a fluid outlet arranged at opposite end portions of the tubular element for enabling the carrier fluid to flow through the tubular element. The tubular element further comprises a central portion having an aperture defined therein for admitting an aerosol generated by laser ablation from a material sample into the carrier fluid flow when this sample is positioned outside the tubular element at a distance in the range of 0 μm to 100 μm from the aperture.
Claims
1-15. (canceled)
16. An ablation probe comprising a tubular element adapted for conducting a carrier fluid in a substantially laminar flow, said tubular element comprising: a fluid inlet and a fluid outlet arranged at opposite end portions of the tubular element for enabling said carrier fluid to flow through the tubular element, a central portion having a transparent wall transparent for laser radiation used for laser ablating and an aperture defined in the central portion for admitting an aerosol generated by laser ablation from a material sample into the carrier fluid flow when said sample is positioned outside said tubular element at a distance in the range of 0 μm to 100 μm from said aperture, wherein the central portion is configured for generating, in the central portion, the carrier fluid flow substantially parallel to the sample and that said central portion curves or extends outward with respect to the tubular element in a direction substantially orthogonal to said aperture.
17. The laser ablation probe according to claim 16, wherein said central portion curves outward with respect to the tubular element in a direction substantially orthogonal to the aperture such as to form an acute angle at the central portion between the fluid inlet and a direction substantially parallel to the aperture in the range of 1° to 45°.
18. The laser ablation probe according to claim 16, wherein said central portion curves outward with respect to the tubular element in a direction substantially orthogonal to the aperture such as to form an acute angle at the central portion between the fluid outlet and a direction substantially parallel to the aperture in the range of 1° to 45°.
19. The laser ablation probe according to claim 16, wherein an exterior wall of the central portion of the tubular element is shaped so as to induce a local protruding portion around the aperture for contacting the sample.
20. The laser ablation probe according to claim 16, wherein said aperture encompasses a surface area less than or equal to a cross-sectional area spanning the opening of said tubular element in said central portion.
21. The laser ablation probe according to claim 20, wherein said cross-sectional area spanning the opening of said tubular element corresponds to a cross-section of the tubular element having a maximum inner diameter of 2 mm or less, and/or wherein said central portion is shaped so as to restrict the contact area between the tubular element and a flat sample to less than 2 mm.sup.2.
22. The laser ablation probe according to claim 20, wherein the distance between said aperture and the fluid outlet of tubular element ranges between 50 and 5000 mm.
23. The laser ablation probe according to claim 16, wherein said central portion is adapted for transmitting a laser radiation beam through the tubular element such as to generate said aerosol from said material sample by laser ablation.
24. The laser ablation probe according to claim 16, wherein said aperture has a substantially elliptical or circular shape and/or wherein said tubular element has a substantially circular or elliptical cross-sectional shape.
25. The laser ablation probe according to claim 16, wherein said fluid outlet is adapted for directly connecting to an injector of an inductively coupled plasma torch.
26. The laser ablation probe according to claim 16, furthermore comprising a sample platform for supporting the material sample, said sample platform being adapted for translating, flexing, rotating and/or tilting the material sample with respect to the aperture.
27. The laser ablation probe according to claim 16, furthermore comprising a housing enclosing said tubular element and adapted for containing the material sample in a controlled atmosphere.
28. The laser ablation probe according to claim 16, furthermore comprising a plurality of micro-jets adapted to provide a sheathing gas stream to prevent or reduce mixing of a gaseous environment external to the tubular element with the carrier fluid via the aperture.
29. A laser plasma spectrochemistry system comprising a laser ablation probe according to claim 16 and a spectrochemical analysis device, wherein the fluid outlet of the tubular element of said laser ablation probe is operably connected to a fluid sample input of the spectrochemical analysis device.
30. A method for aerosol collection from a material sample, the method comprising: providing a tubular element having an aperture defined in a central portion thereof, wherein the central portion curves or extends outward with respect to the tubular element in a direction substantially orthogonal to the aperture, generating a substantially laminar flow of a carrier fluid through the tubular element, positioning a material sample outside of said tubular element at a distance in the range of 0 μm to 100 μm from said aperture, impinging a laser beam on said material sample through a transparent wall of the tubular element, to generate an aerosol from said material sample by laser ablation, capturing said aerosol in the carrier fluid through said aperture the carrier fluid flow being substantially parallel to the sample and delivering the carrier fluid entraining the aerosol to an outlet of the tubular element.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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[0050] Any reference signs in the claims shall not be construed as limiting the scope.
[0051] In the different drawings, the same reference signs refer to the same or analogous elements.
DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS
[0052] The present invention will be described with respect to particular embodiments and with reference to certain drawings, but the invention is not limited thereto but only by the claims. The drawings described are only schematic and are non-limiting. In the drawings, the size and relative size of some of the elements may be exaggerated and not drawn on scale for illustrative purposes. The dimensions and the relative dimensions do not correspond to actual reductions to practice of the invention.
[0053] Furthermore, the terms first, second and the like in the description and in the claims, are used for distinguishing between similar elements and not necessarily for describing a sequence, either temporally, spatially, in ranking or in any other manner. It is to be understood that the terms so used are interchangeable under appropriate circumstances and that the embodiments of the invention described herein are capable of operation in other sequences than described or illustrated herein.
[0054] Moreover, the terms top, under and the like in the description and the claims are used for descriptive purposes and not necessarily for describing relative positions. It is to be understood that the terms so used are interchangeable under appropriate circumstances and that the embodiments of the invention described herein are capable of operation in other orientations than described or illustrated herein.
[0055] It is to be noticed that the term “comprising”, used in the claims, should not be interpreted as being restricted to the means listed thereafter; it does not exclude other elements or steps. It is thus to be interpreted as specifying the presence of the stated features, integers, steps or components as referred to, but does not preclude the presence or addition of one or more other features, integers, steps or components, or groups thereof. Thus, the scope of the expression “a device comprising means A and B” should not be limited to devices consisting only of components A and B. It means that with respect to the present invention, the only relevant components of the device are A and B.
[0056] Reference throughout this specification to “one embodiment” or “an embodiment” means that a particular feature, structure or characteristic described in connection with the embodiment is included in at least one embodiment of the present invention. Thus, appearances of the phrases “in one embodiment” or “in an embodiment” in various places throughout this specification are not necessarily all referring to the same embodiment, but may. Furthermore, the particular features, structures or characteristics may be combined in any suitable manner, as would be apparent to one of ordinary skill in the art from this disclosure, in one or more embodiments. Similarly it should be appreciated that in the description of exemplary embodiments of the invention, various features of the invention are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various inventive aspects. This method of disclosure, however, is not to be interpreted as reflecting an intention that the claimed invention requires more features than are expressly recited in each claim. Rather, as the following claims reflect, inventive aspects lie in less than all features of a single foregoing disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate embodiment of this invention.
[0057] The terms “substantially” or “approximately” may be applied in the context of any quantitative representation that could permissibly vary without changing the basic function or process to which it is related.
[0058] Furthermore, while some embodiments described herein include some, but not other features included in other embodiments, combinations of features of different embodiments are meant to be within the scope of the invention, and form different embodiments, as would be understood by those in the art. For example, in the following claims, any of the claimed embodiments can be used in any combination.
[0059] By way of illustration, embodiments of the present invention not being limited thereto, standard and optional features of the present invention will be illustrated hereinbelow.
[0060] In the description provided herein, numerous specific details are set forth. However, it is understood that embodiments of the invention may be practiced without these specific details. In other instances, well-known methods, structures and techniques have not been shown in detail in order not to obscure an understanding of this description.
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[0062] Furthermore, in embodiments of the present invention, the laser ablation probe may comprise a plurality of tubular elements arranged towards the central chamber, for providing fluid flow with a uniform substantially laminar flow pattern towards the outlet. Furthermore, it should be appreciated that more than one probe could be positioned onto a sample simultaneously, each of said probes provided with a laser beam for the purpose of ablation.
[0063] As detailed further herebelow, the fluid outlet 004 may be adapted for directly connecting to an injector 015 of an inductively coupled plasma torch assembly 014. The fluid outlet of the tubular element 004 may comprise a tube segment that may be inserted into an injector 015 of an inductively coupled plasma torch assembly 014 or that may even be integrated with such ICP torch inlet, as illustrated in
[0064] The aforementioned aperture 005 is adapted for admitting an aerosol generated from a material sample 007 into the carrier fluid flow when this material sample is positioned outside the tubular element at a distance 009 in the range of 0 μm to 100 μm from the aperture 005. Said aperture 005 may have a rectangular or circular shape, which may be advantageously easy to manufacture, but embodiments of the present invention may not be limited to these shapes and any suitable or beneficial shape is allowed. The aperture 005 may encompass a surface area 008, which may be defined as the minimum achievable area for a surface closing the aperture 005 in the tubular element 002, less than or equal to a cross-sectional area 010 spanning the opening of said tubular element in said central portion. For example, the aperture may be defined by a perimeter rim formed in the central portion 006 that circumscribes a surface segment having a surface area 008 which may be less than or equal to a cross-sectional area spanning the opening of the tubular element in the central portion 010, or less than or equal to all such cross-sectional areas. A characteristic distance (such as a diameter, a length or width, etc.) of the aperture area thus typically may be not larger than a characteristic distance of a cross-sectional cut of the tubular element 002. The cross-sectional area 010 of the tubular element 002 in the central portion may corresponds to a cross-section of the tubular element having a maximum inner diameter of 2.00 mm or less, for example an inner diameter in the range of 0.10 mm to 2.00 mm, for example 1.00 mm. Particularly, the tubular element may have a substantially uniform cross-section, e.g., a uniform cross-section or a cross-section that varies only slightly due to a bending of an initially straight tube having uniform cross-section during manufacture of the probe, and the maximum inner diameter of this substantially uniform cross-section may be 2.00 mm or less. It should be appreciated that a gradual narrowing and/or broadening, and/or piecewise construction of the tubular element may be allowed, whilst operating within the constraints of a substantially laminar flow, i.e. the minimization of features, e.g., tubing connectors, that could induce a turbulent flow. In embodiments according to the present invention, the central portion 006 furthermore is shaped so as to reduce the contact area 013 of the tubular element with a flat sample. The central portion 006 may for example curve or extend outward with respect to the tubular element in a direction substantially orthogonal to the aperture. The outer wall of the central portion also may be processed so as to create a local protrusion 012 for contacting or approaching the sample locally.
[0065] While a laser ablation probe according to embodiments may be classified as being of the tube cell type, in particular a tube cell with aerosol ejection occurring predominantly in a direction orthogonal to the carrier fluid stream, the central inner chamber 016 may be substantially smaller than the transport conduit diameter due to the relatively small aperture size. The probe 001 can be used in contact with or in very close proximity to the sample, e.g., hovering the probe at a distance 009 less than 100 μm. This close proximity allows an efficient capture of laser ablation aerosol, even for a small aperture 005 size. Furthermore, the small aperture may not substantially influence the fluid flow, such that an efficient laminar flow is maintained. The aperture 005 may for example have a diameter in the range of 0.01-1.00 mm. The diameter of the tubular element is also small when compared to prior art tube cells, e.g., the tubular element may have an internal diameter smaller than 2.00 mm. Thus, the central chamber 016, between both opposite end portions 017,018 for aerosol capture also has a small volume, e.g., in the range of 0.01 to 3 mm.sup.3. The central chamber 016 may be defined as the volume in which the aerosol plume expands, before the aerosol is displaced away from the aperture. It is illustrated as the region between reference point 017 and 018.
[0066] Unlike particular ablation probes known in the art, where aerosol extraction parallel to the direction of ejection may be assisted by a pressure gradient, e.g., caused by a He flow, to be collected in a carrier gas stream, e.g., an Ar stream, in embodiments according to the present invention the extracted aerosol may be directly captured in a high-velocity carrier fluid flow, in the direction orthogonal to the direction of particle ejection, e.g., without requiring an assistive pressure gradient. This mode of operation allows the setup to maintain relative higher carrier fluid velocities without transferring from the laminar flow regime into a turbulent flow regime. A turbulent flow regime would be highly detrimental to the aerosol washout.
[0067] According to embodiments of the present invention, the central portion 006 curves or extends outward with respect to the tubular element 002 in a direction substantially orthogonal to the aperture 005. Thus, when the probe is brought in close proximity to the material sample, a minimum distance 009 between the tubular element 002 and the material sample 007, e.g., when this sample is sufficiently flat and well-aligned, is reached in said central portion. Therefore, a funnel effect causes gas from an atmosphere external to the tubular element to be driven away, e.g., by the carrier fluid leaking from the tubular element 002 at the aperture. However, the tubular element 002 is adapted to provide a substantially laminar flow from inlet to outlet, e.g., the tubular element may be of substantially uniform diameter and/or may be straight, piecewise straight or only slightly and gradually curved, such that aerosol expelled by ablation is efficiently captured into the fluid flow. Furthermore, when the tubular element comprises a curvature or protrusion 010 of the central portion 006, e.g., at the aperture, this allows the aperture to approach or to contact the surface locally, e.g., without risking contacting the material sample over a large contact area. The latter advantageously results in reducing or avoiding damaging of the sample 007, e.g., when translating the cell relative to the sample in the plane substantially parallel to the sample surface 007.
[0068] For example, the cell bottom (the surface of the probe to generally face towards the target) 019 may have a conical shape allowing contact of the cell with the surface of the material sample on a local μm-scale. A flat bottom may be optimized for surface contact with polished, flat samples and samples of low local curvature surfaces.
[0069] In embodiments according to the present invention, the central portion 006 may curve outward with respect to the tubular element in a direction substantially orthogonal to the aperture 005 such as to form an acute angle 020 at the central portion between the fluid inlet and a direction substantially parallel to the aperture in the range of 1° to 45°, for example in the range of 1° to 30°, or preferably in the range of 1° to 10°. In embodiments according to the present invention, the central portion 006 may curve outward with respect to the tubular element in a direction substantially orthogonal to the aperture 005 such as to form an acute angle 021 at the central portion between the fluid outlet and a direction substantially parallel to the aperture in the range of 1° to 45°, for example in the range of 1° to 30°, or preferably in the range of 1° to 10°. For example, the tubular element 002 may comprise two straight segments extending from the fluid inlet 003 and the fluid outlet 004 respectively toward the central portion 006, where these segments are joined at angles as defined hereinabove. The aperture may thus be formed at the apex of the angles thus formed.
[0070] This specific non-axial orientation of the central portion, the inlet and the outlet has numerous advantages. For example, no restrictions on sample size are imposed by requiring the sample to be enclosed within the tubing. Furthermore, as the tubular element approaches the sample surface locally, the probe will not contact nor damage surface features in other parts of the sample whilst scanning the probe over the surface. The local fluid velocity, e.g., the He atom velocity when a helium carrier gas is used, in close proximity to the sampling surface, e.g., less than 0.1 mm, increases as a result of the fluid flow coming from the inlet being directed towards the surface. Particles deposited near the ablation zone are hence swept up more efficiently, increasing the transport efficiency of the transport system. Furthermore, since the probe can be moved across the surface, the laser can always ablate in the central part of the probe, ensuring reproducible fluid dynamics during the entire analysis, irrespective of the position on the sample. Also, when the tubular element is mounted in a bracket, e.g., such as displayed in
[0071] The central portion 006 may also be adapted for transmitting a laser radiation beam 023 through the tubular element such as to generate the aerosol from the material sample 007 by laser ablation. For example, the probe may comprise an optical transmitter to allow the laser to enter the probe internal volume, such as, for example, an optical fiber or an optical window 024. The laser beam 023 may thus enter through a window, e.g., a SiO.sub.2 or MgF.sub.2 window, mounted on top of the central chamber. The transparent window is positioned opposite in a wall of the tubular element opposite the aperture. The tubular element in the central portion 025 may itself be such optical transmitter, e.g., the tubular element may be manufactured from a material transparent to laser irradiation. Thus, the laser beam 023 may also enter through the walls of the capillary which constitutes the probe 001 itself, e.g., under a non-orthogonal angle relative to the sample surface.
[0072] In embodiments of the present invention, a cladding may be provided on the internal or external surface of the tubular element 002 or bracket 022 to increase the luminescence on the material sample by reflecting light back to the sample. Furthermore, in embodiments of the present invention, supportive material from a bracket 026 supporting the tubular element may be selectively removed to increase the luminescence on the sample from direct light.
[0073] The laser ablation probe according to embodiments of the present invention may also comprise a plurality of microjets, e.g., gas outlet nozzles, adapted to provide a sheathing gas stream to prevent or reduce mixing of a gaseous environment external to the tubular element with the carrier fluid via the aperture, e.g., micro-jets could be specifically positioned and directed to provide such sheathing gas stream.
[0074] A near-field spectroscopy probe, e.g., a cantilevered hollow optical fiber probe, or an atomic force microscopy probe may be positioned in the central chamber 016, or below the probe 001.
[0075] In embodiments according to the present invention, the laser ablation probe may also comprise a housing 028,029 enclosing part of the tubular element 002 and probe 001, and adapted for containing the material sample 007 in a controlled atmosphere 030, e.g., in an inert atmosphere, for example as illustrated in
[0076] The sample platform 011 may also comprise a sample holder for mounting the material sample 007, e.g., on a cryogenic cooling unit.
[0077] The washout performance of an external ablation cell according to embodiments of the present invention used in an LA-ICP-MS system, when expressed in terms of the peak width at 1%, 10% and 50% of the maximum, may be approximately one order of magnitude better than that which can be observed for a state-of-the-art cell, such as the cell disclosed by Wang et al. discussed hereinabove. The resulting sample throughput, sensitivity and spatial resolution may accordingly reach higher levels. Surprisingly, the cell may perform better than theoretical particle transfer models published in literature predict, considering the distance between the sample chamber and the torch inlet of the ICP-MS device. The inlet 003 and outlet conduits 004 may be positioned under an angle, providing a technical solution for the restrictions on sample size, currently imposed on designs of the tube cell type with inlet and outlet oriented on the same axis. The invention provides an elegant, straightforward answer to the increasing demand for performance of our analytical technique.
[0078] In a second aspect, the present invention also relates to a laser plasma spectrochemistry system. For example,
[0079] Computational fluid dynamics simulations predict the speed of a helium carrier gas in the central chamber 016, when supplied at a flow rate greater than 0.5 L/min, may vary among embodiments of the invention between sub-sonic speeds (with respect to helium gas at 293K and 1 bar of absolute pressure) of approximately 10 m/s, which is in the same order of magnitude as the speed of the ejected particles upon collision with the probe walls, and super-sonic speeds (with respect to helium gas at 293K and 1 bar of absolute pressure). The initial particle ejection speed may be about 10.sup.4-10.sup.6 m/s, but particle speed may quickly go down due to drag, e.g., due to dampening by collisions with the carrier gas flow, particularly in a relative higher pressure environment. Therefore, the flow may be capable of shielding the walls from high velocity particle impact via momentum transfer, i.e. inertial confinement.
[0080] In a third aspect, the present invention also relates to a method for aerosol collection from a material sample and enabling subsequent analysis of the aerosol, such as the method 071 according to embodiments of the present invention schematically illustrated in
[0081] Exemplary performance data are provided hereinbelow for a laser ablation-inductively coupled plasma-mass spectrometry (LA-ICP-MS) setup equipped with an ablation probe according to embodiments of the present invention. The probe was fixed within a purpose-build bracket attached to the bi-directional translation stage of an Analyte G2 (Photon Machines Inc., Bozeman, Mont., USA) 193 nm ArF* excimer laser system (pulse length<5 ns, approximately 1% energy stability, 5.45 J cm.sup.−2 energy density) coupled to an Agilent 7900 quadrupole-based ICP-MS instrument (Agilent Technologies Inc., Tokyo, Japan), and evaluated by repeated ablation at a single region of NIST SRM 612 in sequences of 50 pulses under optimized conditions. The ICP-MS unit was operated at an RF power of 1500 W, the flow rates tuned to 0.21 min.sup.−1 for the Ar auxiliary gas, 151 min.sup.−1 for the Ar plasma gas, and 1.65 1 min.sup.−1 for the He carrier gas. The read time was set to 200 μs. The central chamber was located about 400 mm away from the ICP torch. Aerosol washout of said low dispersion ablation probe and the connecting tubular element for .sup.27Al (NIST SRM 612, 5 μm square spot, 50 Hz, 5.45 J cm.sup.−2) was achieved in <4.7±0.4 ms (average full width of the pulse response at 1% of the maximum of said pulse response in a sequence of 20 pulses) under optimized conditions, enabling adequately separated pulse responses at frequencies up to 200-300 Hz. For setups such as exemplified here, in which the probe, in accordance with embodiments of the present invention, is mounted externally, the total contribution of radial (gas flow rotational motion) and co-axial mixing inside the conduit, between probe and ICP, to the dispersion increases with conduit length. The physical limits for the transfer-induced dispersion of any setup consisting of an external ablation cell a considerable distance away from the ICP 053 can be put into perspective by comparing it to the aerosol washout time of 1-3 ms for in-torch ablation, in which the sample is located in extremely close proximity to the ICP 053, or in which the cell is a part of the torch assembly 014. As the cell performs similarly to in-torch ablation with respect to the dispersion generated, the physical limits of LA-ICP-MS are nearly achieved in its current mode of operation. In