SURFACE-COATED CUTTING TOOL IN WHICH HARD COATING LAYER EXHIBITS EXCELLENT CHIPPING RESISTANCE

20170298505 · 2017-10-19

Assignee

Inventors

Cpc classification

International classification

Abstract

Provided is a coated tool in which a hard coating layer has excellent hardness and toughness and exhibits chipping resistance and defect resistance during long-term use. The hard coating layer includes at least a layer of a complex nitride or complex carbonitride expressed by the composition formula: (Ti.sub.1-x-yAl.sub.xMe.sub.y) (C.sub.zN.sub.1-x) (here, Me is one element selected from among Si, Zr, B, V, and Cr), an average amount Xavg of Al, an average amount Yavg of Me, and an average amount Zavg of C satisfy 0.60≦Xavg, 0.005≦Yavg≦0.10, 0≦Zavg≦0.005, and 0.605≦Xavg+Yavg≦0.95, crystal grains having a cubic structure are present in crystal grains constituting the layer of a complex nitride or complex carbonitride, and in the crystal grains having a cubic structure, a predetermined periodic concentration variation of Ti, Al, and Me is present, whereby the problems are solved.

Claims

1. A surface-coated cutting tool comprises: a tool body made of any of tungsten carbide-based cemented carbide, titanium carbonitride-based cermet, and a cubic boron nitride-based ultrahigh-pressure sintered body; and a hard coating layer that is provided on a surface of the tool body, wherein (a) the hard coating layer includes at least a layer of a complex nitride or complex carbonitride of Ti, Al, and Me (here, Me is one element selected from among Si, Zr, B, V, and Cr), the layer being formed to an average layer thickness of 1 μm to 20 μm in a chemical vapor deposition method, and in a case where the layer is expressed by the composition formula: (Ti.sub.1-x-yAl.sub.xMe.sub.y) (C.sub.zN.sub.1-z), an average amount Xavg of Al of the layer of a complex nitride or complex carbonitride in a total amount of Ti, Al, and Me, an average amount Yavg of Me in the total amount of Ti, Al, and Me, and an average amount Zavg of C in a total amount of C and N (here, each of Xavg, Yavg, and Zavg is in atomic ratio) satisfy 0.60≦Xavg, 0.005≦S Yavg≦0.10, 0≦Zavg≦0.005, and 0.605≦Xavg+Yavg≦0.95, (b) the layer of a complex nitride or complex carbonitride includes at least a phase of a complex nitride or complex carbonitride of Ti, Al, and Me having an NaCl type face-centered cubic structure, (c) in a case where crystal orientations of crystal grains of the complex nitride or complex carbonitride of Ti, Al, and Me having an NaCl type face-centered cubic structure in the layer of a complex nitride or complex carbonitride are analyzed in a longitudinal sectional direction using an electron backscatter diffraction apparatus, when an inclined angle frequency distribution is obtained by measuring inclined angles of normal lines of {100} planes which are crystal planes of the crystal grains with respect to a normal direction of the surface of the tool body, dividing inclined angles in a range of 0 degrees to 45 degrees with respect to the normal direction among the inclined angles into intervals of 0.25 degrees, and aggregating frequencies present in the respective divisions, a highest peak is present in an inclined angle division in a range of 0 degrees to 12 degrees, and a sum of frequencies that are present in the range of 0 degrees to 12 degrees has a proportion of 35% or more in a total of the frequencies in the inclined angle frequency distribution, (d) in the crystal grains of the complex nitride or complex carbonitride of Ti, Al, and Me having an NaCl type face-centered cubic structure, a periodic concentration variation of Ti, Al, and Me in the composition formula: (Ti.sub.1-x-yAl.sub.xMe.sub.y) (C.sub.zN.sub.1-z) is present, and in a case where an average value of local maximum of values of periodically varying x of an amount x of Al is referred to as Xmax and an average value of local minimum of the values of periodically varying x of the amount x of Al is referred to as Xmin, a difference Ax between Xmax and Xmin is 0.03 to 0.25, and (e) in the crystal grains having an NaCl type face-centered cubic structure in which the periodic concentration variation of Ti, Al, and Me is present in the layer of a complex nitride or complex carbonitride, a period along the normal direction of the surface of the tool body is 3 nm to 100 nm.

2. The surface-coated cutting tool according to claim 1, wherein in the crystal grains having an NaCl type face-centered cubic structure in which the periodic concentration variation of Ti, Al, and Me is present in the layer of a complex nitride or complex carbonitride, the periodic concentration variation of Ti, Al, and Me is present along one orientation among equivalent crystal orientations expressed by <001> of the cubic crystal grains, a period along the orientation is 3 nm to 100 nm, and an maximum ΔXo of a change in the amount x of Al in a plane perpendicular to the orientation is 0.01 or less.

3. The surface-coated cutting tool according to claim 1, wherein in the crystal grains having an NaCl type face-centered cubic structure in which the periodic concentration variation of Ti, Al, and Me is present in the layer of a complex nitride or complex carbonitride, (a) an area in which the periodic concentration variation of Ti, Al, and Me is present along one orientation among equivalent crystal orientations expressed by <001> of the cubic crystal grains, and when the orientation is referred to as an orientation d.sub.A, a period along the orientation d.sub.A is 3 nm to 100 nm and an maximum ΔXod.sub.A of a change in the amount x of Al in a plane perpendicular to the orientation d.sub.A is 0.01 or less is provided, and (b) an area in which the periodic concentration variation of Ti, Al, and Me is present along one orientation among equivalent crystal orientations expressed by <001> of the cubic crystal grains perpendicular to the orientation d.sub.A, and when the orientation is referred to as an orientation d.sub.B, a period along the orientation d.sub.B is 3 nm to 100 nm and an maximum ΔXod.sub.B of a change in the amount x of Al in a plane perpendicular to the orientation d.sub.B is 0.01 or less is provided, the area A and the area B are present in the crystal grains, and a boundary between the area A and the area B is formed in one plane among equivalent crystal planes expressed by {110}.

4. The surface-coated cutting tool according to claim 1, wherein regarding the layer of a complex nitride or complex carbonitride, lattice constants a of the crystal grains having an NaCl type face-centered cubic structure are obtained from X-ray diffraction, and the lattice constants a of the crystal grains having an NaCl type face-centered cubic structure satisfy a relationship of 0.05a.sub.TiN+0.95a.sub.AlN≦a≦0.4a.sub.TiN+0.6a.sub.AlN for a lattice constant a.sub.TiN of cubic TiN and a lattice constant a.sub.AlN of cubic AlN.

5. The surface-coated cutting tool according to claim 1, wherein regarding the layer of a complex nitride or complex carbonitride, in a case where the layer is observed in the longitudinal sectional direction, a columnar structure in which the crystal grains of the complex nitride or complex carbonitride of Ti, Al, and Me having an NaCl type face-centered cubic structure in the layer have an average grain width W of 0.1 μm to 2.0 μm and an average aspect ratio A of 2 to 10 is included.

6. The surface-coated cutting tool according to claim 1, wherein in the layer of a complex nitride or complex carbonitride, an area ratio of the complex nitride or complex carbonitride of Ti, Al, and Me having an NaCl type face-centered cubic structure is 70% by area or more.

7. The surface-coated cutting tool according to claim 1, wherein a lower layer is provided between the tool body made of any of tungsten carbide-based cemented carbide, titanium carbonitride-based cermet, and a cubic boron nitride-based ultrahigh-pressure sintered body, and the layer of a complex nitride or complex carbonitride of Ti, Al, and Me, and the lower layer includes a Ti compound layer that is formed of one layer or two or more layers of a Ti carbide layer, a Ti nitride layer, a Ti carbonitride layer, a Ti oxycarbide layer, and a Ti oxycarbonitride layer and has an average total layer thickness of 0.1 μm to 20 μm.

8. The surface-coated cutting tool according to claim 1, wherein an upper layer which includes an aluminum oxide layer having an average layer thickness of at least 1μm to 25 μm is present in an upper portion of the layer of a complex nitride or complex carbonitride.

9. The surface-coated cutting tool according to claim 1, wherein the layer of a complex nitride or complex carbonitride is formed by a chemical vapor deposition method in which at least trimethylaluminum is contained as a reaction gas component.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0076] These and other features and advantages of the present invention will become more readily appreciated when considered in connection with the following detailed description and appended drawings, wherein like designations denote like elements in the various views, and wherein:

[0077] FIG. 1 is a film configuration schematic view schematically illustrating the section of a layer of a complex nitride or complex carbonitride of Ti, Al, and Me included in a hard coating layer of the present invention.

[0078] FIG. 2 is a schematic view illustrating a case where an inclined angle of a normal line of a {100} plane which is a crystal plane of crystal grains with respect to a normal line of the surface of a tool body (a direction perpendicular to the surface of the tool body in a polished section) is 0 degrees in FIGS. 2(a) and 45 degrees in FIG. 2(b).

[0079] FIG. 3(a) is a graph showing an example of an inclined angle frequency distribution obtained for crystal grains having a cubic structure in the section of a layer of a complex nitride or a layer of a complex carbonitride of Ti and Al included in the hard coating layer of the present invention, and FIG. 3(b) is a graph showing an example of an inclined angle frequency distribution obtained for crystal grains having a cubic structure in the section of a layer of a complex nitride or a layer of a complex carbonitride of Ti and Al included in a hard coating layer of an embodiment of a comparative example.

[0080] FIG. 4 is a schematic view schematically illustrating that, in crystal grains having a cubic crystal structure in which a periodic concentration variation of Ti, Al, and Me is present in the section of the layer of a complex nitride or the layer of a complex carbonitride of Ti, Al, and Me included in the hard coating layer corresponding to an embodiment of the present invention, the periodic concentration variation of Ti, Al, and Me is present along one orientation among equivalent crystal orientations expressed by <001> of the cubic crystal grains, and a change in the amount x of Al in a plane perpendicular to the orientation is small.

[0081] FIG. 5 shows an example of a graph of the periodic concentration variation x of Al with respect to the sum of Ti, Al, and Me as a result of line analysis performed by energy-dispersive X-ray spectroscopy (EDS) using a transmission electron microscope on the crystal grains having a cubic crystal structure in which the periodic concentration variation of Ti, Al, and Me is present in the section of the layer of a complex nitride or the layer of a complex carbonitride of Ti, Al, and Me included in the hard coating layer corresponding to the embodiment of the present invention.

[0082] FIG. 6 is a schematic view schematically illustrating that, regarding the crystal grains having a cubic crystal structure in which the periodic concentration variation of Ti, Al, and Me is present in the section of the layer of a complex nitride or the layer of a complex carbonitride of Ti, Al, and Me included in the hard coating layer corresponding to the embodiment of the present invention, an area A and an area B are present in the crystal grains.

DETAILED DESCRIPTION OF THE INVENTION

[0083] The present invention has a configuration in which, in a surface-coated cutting tool in which a hard coating layer is provided on a surface of a cemented carbide tool body, that is, a tool body made of any of tungsten carbide-based cemented carbide, titanium carbonitride-based cermet, and a cubic boron nitride-based ultrahigh-pressure sintered body, the hard coating layer includes at least a layer of a complex nitride or complex carbonitride of Ti, Al, and Me, the layer being formed to an average layer thickness of 1 μm to 20 μm in a chemical vapor deposition method, and in a case where the layer is expressed by the composition formula: (Ti.sub.1-x-yAl.sub.xMe.sub.y) (C.sub.zN.sub.1-z), an average amount Xavg of Al of the layer in a total amount of Ti, Al, and Me, an average amount Yavg of Me in the total amount of Ti, Al, and Me, and an average amount Zavg of C in a total amount of C and N (here, each of Xavg, Yavg, and Zavg is in atomic ratio) satisfy 0.60≦Xavg, 0.005≦Yavg≦0.10, 0≦Zavg≦0.005, and 0.605≦Xavg+Yavg≦0.95, crystal grains constituting the layer of a complex nitride or complex carbonitride include at least crystal grains having a cubic crystal structure, in a case where crystal orientations of the crystal grains of the complex nitride or complex carbonitride of Ti, Al, and Me having a cubic structure are analyzed in a longitudinal sectional direction using an electron backscatter diffraction apparatus, when an inclined angle frequency distribution is obtained by measuring inclined angles of normal lines of {100} planes which are crystal planes of the crystal grains with respect to a normal direction of the surface of the tool body, dividing inclined angles in a range of 0 degrees to 45 degrees with respect to the normal direction among the inclined angles into intervals of 0.25 degrees, and aggregating frequencies present in the respective divisions, a highest peak is present in an inclined angle division in a range of 0 degrees to 12 degrees, and a sum of frequencies that are present in the range of 0 degrees to 12 degrees has a proportion of 35% or more in a total of the frequencies in the inclined angle frequency distribution, in the crystal grains having a cubic crystal structure, a periodic concentration variation of Ti, Al, and Me in the composition formula: (Ti.sub.1-x-yAl.sub.xMe.sub.y) (C.sub.zN.sub.1-z) is present, in a case where an average value of local maximum of values of periodically varying x of an amount x of Al is referred to as Xmax and an average value of local minimum of the values of periodically varying x of the amount x of Al is referred to as Xmin, a difference Δx between Xmax and Xmin is 0.03 to 0.25, and in the crystal grains having an NaCl type face-centered cubic structure in which the periodic concentration variation of Ti, Al, and Me is present, a period along the normal direction of the surface of the tool body is 3 nm to 100 nm. As long as the chipping resistance is improved, excellent cutting performance is exhibited during long-term use compared to a hard coating layer in the related art, and an increase in the service life of the coated tool is achieved, the specific embodiment may be any embodiment.

[0084] Next, an embodiment of a coated tool of the present invention will be described in detail using examples.

EXAMPLE 1

[0085] As raw material powders, a WC powder, a TiC powder, a TaC powder, an NbC powder, a Cr.sub.3C.sub.2 powder, and a Co powder, all of which had an average grain size of 1 μm to 3 μm, were prepared, and the raw material powders were mixed in mixing compositions shown in Table 1. Wax was further added thereto, and the mixture was blended in acetone by a ball mill for 24 hours and was decompressed and dried. Thereafter, the resultant was press-formed into green compacts having predetermined shapes at a pressure of 98 MPa, and the compacts were sintered in a vacuum at 5 Pa under the condition that the green compacts were held at a predetermined temperature in a range of 1370° C. to 1470° C. for one hour. After the sintering, tool bodies A to C made of WC-based cemented carbide with insert shapes according to ISO standard SEEN1203AFSN were produced.

[0086] In addition, as raw material powders, a TiCN (TiC/TiN=50/50 in terms of mass ratio) powder, an Mo.sub.2C powder, a ZrC powder, an NbC powder, a WC powder, a Co powder, and an Ni powder, all of which had an average grain size of 0.5 μm to 2 μm, were prepared, and the raw material powders were mixed in mixing compositions shown in Table 2, were subjected to wet mixing by a ball mill for 24 hours, and were dried. Thereafter, the resultant was press-formed into green compacts at a pressure of 98 MPa, and the green compacts were sintered in a nitrogen atmosphere at 1.3 kPa under the condition that the green compacts were held at a temperature of 1500° C. for one hour. After the sintering, a tool body D made of TiCN-based cermet with insert shapes according to ISO standard SEEN1203AFSN was produced.

[0087] Next, present invention coated tools 1 to 15 were produced by forming hard coating layers formed of (Ti.sub.1-x-yAl.sub.xMe.sub.y) (C.sub.zN.sub.1-z) layers having target layer thicknesses shown in Table 7, on the surfaces of the tool bodies A to D through a thermal CVD method for a predetermined time using a chemical vapor deposition apparatus under forming conditions shown in Table 4 in which a gas group A of NH.sub.3 and H.sub.2 and a gas group B of TiCl.sub.4, Al(CH.sub.3).sub.3, AlCl.sub.3, MeCl.sub.n (here, any of SiCl.sub.4, ZrCl.sub.4, BCl.sub.3, VCl.sub.4, and CrCl.sub.2), NH.sub.3, N.sub.2, and H.sub.2 were used and in each gas supply method, a reaction gas composition (% by volume with respect to the total amount of the gas group A and the gas group B) included a gas group A of NH.sub.3: 3.5% to 4.0%, N.sub.2: 0% to 5%, H.sub.2: 55% to 60% and a gas group B of AlCl.sub.3: 0.6% to 0.9%, TiCl.sub.4: 0.2% to 0.3%, Al(CH.sub.3).sub.3: 0% to 0.5%, MeCl.sub.n (here, any of SiCl.sub.4, ZrCl.sub.4, BCl.sub.3, VCl.sub.4, and CrCl.sub.2): 0.1% to 0.2%, N.sub.2: 0.0% to 12.0%, H.sub.2: the remainder, a reaction atmosphere pressure was 4.5 kPa to 5.0 kPa, a reaction atmosphere temperature was 700° C. to 900° C., a supply period was 1 second to 5 seconds, a gas supply time per one period was 0.15 seconds to 0.25 seconds, and a phase difference in supply between gas group A and gas group B was 0.10 seconds to 0.20 seconds.

[0088] In addition, any of a lower layer and an upper layer shown in Table 6 was formed on the present invention coated tools 6 to 13 under forming conditions shown in Table 3.

[0089] In addition, for the purpose of comparison, hard coating layers including a layer of a complex nitride or complex carbonitride of Ti, Al, and Me were deposited on the surfaces of the tool bodies A to D to have target layer thicknesses (μm) shown in FIG. 8 under the conditions shown in Table 5. At this time, comparative coated tools 1 to 15 were produced by forming the hard coating layers so that the composition of the reaction gas on the surface of the tool body was not changed over time during a process of forming a (Ti.sub.1-x-yAl.sub.xMe.sub.y) (C.sub.zN.sub.1-z) layer.

[0090] In addition, like the present invention coated tools 6 to 13, any of a lower layer and an upper layer shown in Table 6 was formed on the comparative coated tools 6 to 13 under the forming conditions shown in Table 3.

[0091] Regarding the layer of a complex nitride or complex carbonitride of Ti, Al, and Me included in the hard coating layer of the present invention coated tools 1 to 15 and the comparative coated tools 1 to 15, in a state where the section of the hard coating layer in the direction perpendicular to the surface of the tool body was polished into a polished surface, the polished surface was set in the body tube of a field emission scanning electron microscope, and an electron beam was emitted toward each of the crystal grains having a cubic crystal lattice, which were present in a measurement range of the polished section at an incident angle of 70 degrees with respect to the polished surface at an acceleration voltage of 15 kV and an emission current of 1 nA. Regarding the hard coating layer in a measurement range of a length of 100 μm in the direction parallel to the surface of the tool body and a distance of equal to or less than the film thickness along the section in the direction perpendicular to the surface of the tool body, inclined angles of normal lines of {100} planes which were crystal planes of the crystal grains with respect to the normal line (the direction perpendicular to the surface of the body in the polished section) to the surface of the body were measured using an electron backscatter diffraction imaging device at an interval of 0.01 μm/step. On the basis of the measurement results, measured inclined angles in a range of 0 degrees to 45 degrees among the measured inclined angles were divided into intervals of 0.25 degrees, frequencies in the respective divisions were aggregated, and the presence of the peaks of the frequencies present in a range of 0 degrees to 12 degrees was checked. In addition, the proportion of the frequencies present in the range of 0 degrees to 12 degrees was obtained.

[0092] In addition, regarding a layer of a complex nitride or complex carbonitride of Ti, Al, and Me included in the hard coating layers of the present invention coated tools to 15 and the comparative coated tools 1 to 15, a plurality of visual fields were observed using a scanning electron microscope (at a magnification of 5,000× and 20,000×).

[0093] Regarding the present invention coated tools 1 to 15, as illustrated in a film configuration schematic view in FIG. 1, a (Ti.sub.1-x-yAl.sub.xMe.sub.y) (C.sub.zN.sub.1-z) layer having a columnar structure including cubic crystals or a mixed phase of cubic crystals and hexagonal crystals was confirmed. In addition, by performing surface analysis through energy-dispersive X-ray spectroscopy (EDS) using a transmission electron microscope, it was confirmed that a periodic distribution of Ti, Al, and Me was present in the cubic crystal grains.

[0094] Furthermore, by using the results of the surface analysis performed on the present invention coated tools 1 to 15 and the comparative coated tools 1 to 15 through EDS using the transmission electron microscope, the average value of local maximum of x in a period of x for five periods of the cubic crystal grains present in the layer of a complex nitride or complex carbonitride was referred to as Xmax and the average value of local minimum of x in the period of x for the same five periods was referred to as Xmin, the difference Δx (=Xmax−Xmin) therebetween was obtained.

[0095] Regarding the present invention coated tools 1 to 15, it was confirmed that the value of Δx was 0.03 to 0.25.

[0096] The section of each of constituent layers of the present invention coated tools 1 to 15 and the comparative coated tools 1 to 15 in the direction perpendicular to the tool body was measured using a scanning electron microscope (at a magnification of 5,000×). An average layer thickness was obtained by measuring and averaging the layer thicknesses of five points in an observation visual field. All of the results showed substantially the same average layer thicknesses as the target layer thicknesses shown in Tables 7 and 8.

[0097] In addition, regarding the average amount of Al and the average amount of Me of the layer of a complex nitride or complex carbonitride of the present invention coated tools 1 to 15 and the comparative coated tools 1 to 15, a sample, of which the surface was polished, was irradiated with electron beams from the sample surface side, and the average amount Xavg of Al and the average amount Yavg of Me were obtained by averaging 10 points of the analytic result of obtained characteristic X-rays, using an electron probe micro-analyzer (EPMA).

[0098] The average amount Zavg of C was obtained by secondary ion mass spectrometry (SIMS). Ion beams were emitted toward a range of 70 μm×70 μm from the sample surface side, and the concentration of components emitted by a sputtering action was measured in a depth direction. The average amount Zavg of C represents the average value of the layer of a complex nitride or complex carbonitride of Ti, Al, and Me in the depth direction. However, the amount of C excludes an unavoidable amount of C, which was included even though gas containing C was not intentionally used as a gas raw material. Specifically, the amount (atomic ratio) of the component C contained in the layer of a complex nitride or complex carbonitride in a case where the amount of supplied Al(CH.sub.3).sub.3 was set to 0 was obtained as the unavoidable amount of C, and a value obtained by subtracting the unavoidable amount of C from the amount (atomic ratio) of the component C contained in the layer of a complex nitride or complex carbonitride obtained in a case where Al(CH.sub.3).sub.3 was intentionally supplied was obtained as Zavg.

[0099] In addition, regarding the present invention coated tools 1 to 15 and the comparative coated tools 1 to 15, the individual crystal grains in the (Ti.sub.1-x-yAl.sub.xMe.sub.y) (C.sub.zN.sub.1-z) layer included in the layer of a complex nitride or complex carbonitride, which were present in a range of a length of 10 μm in a direction parallel to the surface of the tool body were observed from the film section side perpendicular to the surface of the tool body using a scanning electron microscope (at a magnification of 5,000× and 20,000×) in the sectional direction as the direction perpendicular to the tool body, grain widths w in the direction parallel to the surface of the body and grain lengths 1 in the direction perpendicular to the surface of the body were measured to calculate the aspect ratio a(=1/w) of each of the crystal grains. The average value of the aspect ratios a obtained for the individual crystal grains was calculated as an average aspect ratio A. In addition, the average value of the grain widths w obtained for the individual crystal grains was calculated as an average grain width W.

[0100] In addition, using an electron backscatter diffraction apparatus, in a state where the section of the hard coating layer including the layer of a complex nitride or complex carbonitride of Ti, Al, and Me in the direction perpendicular to the surface of the tool body was polished into a polished surface, the polished surface was set in the body tube of a field emission scanning electron microscope, an electron beam was emitted toward each of the crystal grains, which were present in a measurement range of the polished section, at an incident angle of 70 degrees with respect to the polished surface at an acceleration voltage of 15 kV and an emission current of 1 nA, and regarding the hard coating layer at a length of 100 μm in the direction parallel to the surface of the tool body, an electron backscatter diffraction image was measured at an interval of 0.01 μm/step. By analyzing the crystal structure of the individual crystal grains, a cubic crystal structure or a hexagonal crystal structure were classified to confirm that a cubic phase of the complex nitride or complex carbonitride was included in the layer of a complex nitride or complex carbonitride of Ti, Al, and Me. Furthermore, the area ratio of the cubic crystal phase included in the layer was obtained.

[0101] Moreover, a small area of the layer of a complex nitride or complex carbonitride was observed by using the transmission electron microscope, and surface analysis from the section side was performed using energy-dispersive X-ray spectroscopy (EDS). The presence or absence of a periodic concentration variation of Ti, Al, and Me in the composition formula: (Ti.sub.1-x-yAl.sub.xMe.sub.y) (C.sub.zN.sub.1-z) in the crystal grains having the cubic crystal structure was checked. In a case where the concentration variation was present, by performing electron beam diffraction on the crystal grains, it was confirmed that the periodic concentration variation of Ti, Al, and Me was present along one orientation among equivalent crystal orientations expressed by <001> of the cubic crystal grains. Line analysis through EDS along the orientation was performed on a section for five periods, the average value of local maximum of the periodic concentration variation of Al with respect to the sum of Ti, Al, and Me was obtained as Xmax, the average value of local minimum of the periodic concentration variation of Al with respect to the sum of Ti, Al, and Me in the same section was obtained as Xmin, and the difference Δx (=Xmax−Xmin) therebetween was obtained.

[0102] In addition, line analysis along the direction perpendicular to one orientation among the equivalent crystal orientations expressed by <001> of the cubic crystal grains, in which the periodic concentration variation of Ti, Al, and Me was present, was performed on a section corresponding to the distance for the five periods. The difference between the maximum and the minimum of the amount x of Al in the section was obtained as the maximum ΔXo of a change in a plane perpendicular to the one orientation among the equivalent crystal orientations expressed by <001> of the cubic crystal grains, in which the periodic concentration variation of Ti, Al, and Me was present.

[0103] Furthermore, regarding the crystal grains in which the area A and the area B were present in the crystal grains, for each of the area A and the area B, as described above, the maximum Δx (=Xmax−Xmin) of the difference between the average value Xmax of local maximum of the periodic concentration variation for the five periods of Al with respect to the sum of Ti, Al, and Me and the average value Xmin of local minimum thereof is obtained. In addition, the difference between the maximum and the minimum of the amount x of Al with respect to the sum of Ti, Al, and Me in the plane perpendicular to the one orientation among the equivalent crystal orientations expressed by <001> of the cubic crystal grains, in which the periodic concentration variation of Ti, Al, and Me was present, was obtained as the maximum of a change therein.

[0104] That is, in a case where the periodic concentration variation of Ti, Al, and Me of the area A was present along one orientation among the equivalent crystal orientations expressed by <001> of the cubic crystal grains, and the orientation is referred to as an orientation d.sub.A, the period of the concentration variation along the orientation d.sub.A was obtained. In addition, line analysis along the direction perpendicular to the orientation d.sub.A was performed on a section corresponding to the distance for the five periods, and the difference between the maximum and the minimum of the amount x of Al in the section was obtained as the maximum ΔXod.sub.A of a change in the plane perpendicular to the one orientation among the equivalent crystal orientations expressed by <001> of the cubic crystal grains, in which the periodic concentration variation of Ti, Al, and Me was present.

[0105] In addition, in a case where the periodic concentration variation of Ti, Al, and Me of the area B was present along one orientation among the equivalent crystal orientations expressed by <001> of the cubic crystal grains, and the orientation is referred to as an orientation d.sub.B, the period of the concentration variation along the orientation d.sub.B was obtained. In addition, line analysis along the direction perpendicular to the orientation d.sub.B was performed on the section corresponding to the distance for the five periods, and the difference between the maximum and the minimum of the amount x of Al in the section was obtained as the maximum ΔXod.sub.B of a change in the plane perpendicular to the one orientation among the equivalent crystal orientations expressed by <001> of the cubic crystal grains, in which the periodic concentration variation of Ti, Al, and Me was present.

[0106] In addition, regarding the present invention coated tools 1 to 15, it was confirmed that d.sub.A and d.sub.B were perpendicular to each other, and the boundary between the area A and the area B was formed in one plane among equivalent crystal planes expressed by {110}.

[0107] The period was checked with at least one crystal grain in the observation visual field of the small area of the layer of a complex nitride or complex carbonitride using the transmission electron microscope. In addition, regarding the crystal grains in which the area A and the area B were present in the crystal grains, the average of values evaluated for each of the area A and the area B of at least one crystal grain in the observation visual field of the small area of the layer of a complex nitride or complex carbonitride using the transmission electron microscope was calculated and obtained.

[0108] Tables 7 and 8 show the results of various measurements described above.

TABLE-US-00001 TABLE 1 Mixing composition (mass %) Type Co TiC TaC NbC Cr.sub.3C.sub.2 WC Tool body A 8.0 1.5 — 3.0 0.4 Remainder B 8.5 — 1.8 0.2 — Remainder C 7.0 — — — — Remainder

TABLE-US-00002 TABLE 2 Mixing composition (mass %) Type Co Ni ZrC NbC Mo.sub.2C WC TiCN Tool body D 8 5 1 6 6 10 Remainder

TABLE-US-00003 TABLE 3 Forming conditions (pressure of reaction atmosphere is expressed as kPa and temperature Constituent layers of hard is expressed as ° C.) coating layer Reaction gas Formation composition (% by Reaction atmosphere Type symbol volume) Pressure Temperature (Ti.sub.1−x−yAl.sub.xMe.sub.y)(C.sub.zN.sub.1−z) layer See Tables 4 and 5 Ti TiC TiC TiCl.sub.4: 2%, CH.sub.4: 10%, 7 850 compound H.sub.2: remainder layer TiN TiN TiCl.sub.4: 4.2%, N.sub.2: 30%, 30 780 H.sub.2: remainder TiCN TiCN TiCl.sub.4: 2%, CH.sub.3CN: 0.7%, 7 780 N.sub.2: 10%, H.sub.2: remainder TiCO TiCO TiCl.sub.4: 4.2%, CO: 4%, 7 850 H.sub.2: remainder TiCNO TiCNO TiCl.sub.4: 2%, CH.sub.3CN: 0.7%, 13 780 N.sub.2: 10%, CO.sub.2: 0.3%, H.sub.2: remainder Al.sub.2O.sub.3 Al.sub.2O.sub.3 Al.sub.2O.sub.3 AlCl.sub.3: 2.2%, CO.sub.2: 5.5%, 7 800 layer HCl: 2.2%, H.sub.2S: 0.8%, H.sub.2: remainder

TABLE-US-00004 TABLE 4 Forming conditions (reaction gas composition indicates proportion in total amount of gas group A and gas group B, and pressure of reaction atmosphere is expressed as kPa and temperature is expressed as ° C.) Formation of hard Gas group A Gas group B coating layer Reaction gas Supply Supply Phase difference Reaction For- group A Supply time per Reaction gas group B Supply time per in supply between atmosphere mation composition (% period one period composition (% by period one period gas group A and Tem- Process type symbol by volume) (sec) (sec) volume) (sec) (sec) gas group B Pressure perature Present Si-A NH.sub.3: 3.7%. N.sub.2: 2 0.25 AlCl.sub.3: 0.7%, TiCl.sub.4: 2 0.25 0.1 4.5 750 invention 0%. H.sub.2: 57%. 0.2%, SiCl.sub.4: 0.2%, N.sub.2: film forming 7%, Al(CH.sub.3).sub.3: 0%, H.sub.2 process as remainder Si-B NH.sub.3: 3.5%. N.sub.2: 3 0.15 AlCl.sub.3: 0.9%, TiCl.sub.4: 3 0.15 0.2 5.0 800 3%. H.sub.2: 55%. 0.3%, SiCl.sub.4: 0.1%, N.sub.2: 1%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder Si-C NH.sub.3: 3.6%. N.sub.2: 5 0.2 AlCl.sub.3: 0.6%, TiCl.sub.4: 5 0.2 0.15 4.7 800 0%. H.sub.2: 58%. 0.3%, SiCl.sub.4: 0.2%, N.sub.2: 10%, Al(CH.sub.3).sub.3: 0.5%, H.sub.2 as remainder Zr-A NH.sub.3: 3.9%. N.sub.2: 3 0.15 AlCl.sub.3: 0.8%, TiCl.sub.4: 3 0.15 0.1 5.0 850 2%. H.sub.2: 60%. 0.3%, ZrCl.sub.4: 0.1%, N.sub.2: 6%, Al(CH.sub.3).sub.3: 0.2%, H.sub.2 as remainder Zr-B NH.sub.3: 3.6%. N.sub.2: 4 0.15 AlCl.sub.3: 0.7%, TiCl.sub.4: 4 0.15 0.15 4.5 700 4%. H.sub.2: 56%. 0.2%, ZrCl.sub.4: 0.2%, N.sub.2: 2%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder Zr-C NH.sub.3: 4.0%. N.sub.2: 1 0.25 AlCl.sub.3: 0.8%, TiCl.sub.4: 1 0.25 0.2 4.5 800 0%. H.sub.2: 57%. 0.2%, ZrCl.sub.4: 0.1%, N.sub.2: 0%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder B-A NH.sub.3: 3.5%. N.sub.2: 2 0.2 AlCl.sub.3: 0.7%, TiCl.sub.4: 2 0.2 0.2 5.0 900 0%. H.sub.2: 56%. 0.3%, BCl.sub.3: 0.1%, N.sub.2: 0%, Al(CH.sub.3).sub.3: 0.5%, H.sub.2 as remainder B-B NH.sub.3: 3.7%. N.sub.2: 4 0.2 AlCl.sub.3: 0.6%, TiCl.sub.4: 4 0.2 0.15 4.5 800 2%. H.sub.2: 59%. 0.2%, BCl.sub.3: 0.1%, N.sub.2: 9%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder B-C NH.sub.3: 3.8%. N.sub.2: 5 0.15 AlCl.sub.3: 0.9%, TiCl.sub.4: 5 0.15 0.1 5.0 800 5%. H.sub.2: 55%. 0.3%, BCl.sub.3: 0.2%, N.sub.2: 4%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder V-A NH.sub.3: 4.0%. N.sub.2: 1 0.25 AlCl.sub.3: 0.9%, TiCl.sub.4: 1 0.25 0.2 4.8 850 1%. H.sub.2: 58%. 0.3%, VCl.sub.4: 0.2%, N.sub.2: 3%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder V-B NH.sub.3: 3.6%. N.sub.2: 3 0.2 AlCl.sub.3: 0.8%, TiCl.sub.4: 3 0.2 0.1 5.0 700 3%. H.sub.2: 60%. 0.3%, VCl.sub.4: 0.1%, N.sub.2: 7%, Al(CH.sub.3).sub.3: 0.5%, H.sub.2 as remainder V-C NH.sub.3: 3.5%. N.sub.2: 2 0.25 AlCl.sub.3: 0.7%, TiCl.sub.4: 2 0.25 0.15 4.5 800 0%. H.sub.2: 57%. 0.2%, VCl.sub.4: 0.2%, N.sub.2: 0%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder Cr-A NH.sub.3: 3.7%. N.sub.2: 4 0.15 AlCl.sub.3: 0.6%, TiCl.sub.4: 4 0.15 0.15 4.5 800 4%. H.sub.2: 56%. 0.2%, CrCl.sub.2: 0.1%, N.sub.2: 4%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder Cr-B NH.sub.3: 3.8%. N.sub.2: 3 0.2 AlCl.sub.3: 0.8%, TiCl.sub.4: 3 0.2 0.2 5.0 750 0%. H.sub.2: 55%. 0.3%, CrCl.sub.2: 0.2%, N.sub.2: 11%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder Cr-C NH.sub.3: 3.9%. N.sub.2: 5 0.25 AlCl.sub.3: 0.7%, TiCl.sub.4: 5 0.25 0.1 4.7 800 1%. H.sub.2: 58%. 0.2%, CrCl.sub.2: 0.1%, N.sub.2: 2%, Al(CH.sub.3).sub.3: 0.2%, H.sub.2 as remainder

TABLE-US-00005 TABLE 5 Forming conditions (reaction gas composition indicates proportion in total amount of gas group A and gas group B, and pressure of reaction atmosphere is expressed as kPa and temperature is expressed as ° C.) Formation of Phase hard coating Gas group A Gas group B difference layer Reaction gas Supply Supply in supply Reaction For- group A Supply time per Reaction gas group B Supply time per between gas atmosphere mation composition (% by period one period composition (% by period one period group A and Tem- Process type symbol volume) (sec) (sec) volume) (sec) (sec) gas group B Pressure perature Comparative Si-a NH.sub.3: 3.7%. N.sub.2: 0%. — — AlCl.sub.3: 0.7%, TiCl.sub.4: — — — 4.5 750 film forming H.sub.2: 57%. 0.2%, SiCl4: 0.4%, N.sub.2: process 7%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder Si-b NH.sub.3: 2.8%. N.sub.2: 3%. — — AlCl.sub.3: 0.9%, TiCl.sub.4: — — — 5.0 800 H.sub.2: 59%. 0.3%, SiCl.sub.4: 0.1%, N.sub.2: 1%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder Si-c NH.sub.3: 3.6%. N.sub.2: 0%. — — AlCl.sub.3: 1.2%, TiCl.sub.4: — — — 4.0 900 H.sub.2: 58%. 0.2%, SiCl.sub.4: 0.2%, N.sub.2: 10%, Al(CH.sub.3).sub.3: 0.5%, H.sub.2 as remainder Zr-a NH.sub.3: 3.9%. N.sub.2: 7%. — — AlCl.sub.3: 0.8%, TiCl.sub.4: — — — 4.5 650 H.sub.2: 51%. 0.3%, ZrCl.sub.4: 0.1%, N.sub.2: 6%, Al(CH.sub.3).sub.3: 0.2%, H.sub.2 as remainder Zr-b NH.sub.3: 3.6%. N.sub.2: 4%. — — AlCl.sub.3: 0.7%, TiCl.sub.4: — — — 5.0 800 H.sub.2: 56%. 0.4%, ZrCl.sub.4: 0.2%, N.sub.2: 2%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder Zr-c NH.sub.3: 4.5%. N.sub.2: 0%. — — AlCl.sub.3: 0.8%, TiCl.sub.4: — — — 4.5 800 H.sub.2: 55%. 0.2%, ZrCl.sub.4: 0.1%, N.sub.2: 15%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder B-a NH.sub.3: 3.6%. N.sub.2: 0%. — — AlCl.sub.3: 0.7%, TiCl.sub.4: — — — 5.0 900 H.sub.2: 48%. 0.2%, BCl.sub.3: 0.1%, N.sub.2: 0%, Al(CH.sub.3).sub.3: 1.0%, H.sub.2 as remainder B-b NH.sub.3: 3.7%. N.sub.2: 2%. — — AlCl.sub.3: 0.6%, TiCl.sub.4: — — — 6.0 800 H.sub.2: 59%. 0.2%, BCl.sub.3: 0.5%, N.sub.2: 9%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder B-c NH.sub.3: 3.5%. N.sub.2: — — AlCl.sub.3: 0.9%, TiCl.sub.4: — — — 5.0 750 10%. H.sub.2: 57%. 0.3%, BCl.sub.3: 0.2%, N.sub.2: 4%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder V-a NH.sub.3: 3.8%. N.sub.2: 2%. — — AlCl.sub.3: 1.2%, TiCl.sub.4: — — — 4.5 950 H.sub.2: 58%. 0.1%, VCl.sub.4: 0.2%, N.sub.2: 3%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder V-b NH.sub.3: 3.1%. N.sub.2: 1%. — — AlCl.sub.3: 0.8%, TiCl.sub.4: — — — 5.0 700 H.sub.2: 57%. 0.3%, VCl.sub.4: 0.4%, N.sub.2: 7%, Al(CH.sub.3).sub.3: 0.5%, H.sub.2 as remainder V-c NH.sub.3: 3.5%. N.sub.2: 0%. — — AlCl.sub.3: 0.7%, TiCl.sub.4: — — — 6.0 600 H.sub.2: 55%. 0.2%, VCl.sub.4: 0.1%, N.sub.2: 0%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder Cr-a NH.sub.3: 3.6%. N.sub.2: 4%. — — AlCl.sub.3: 0.6%, TiCl.sub.4: — — — 3.5 950 H.sub.2: 56%. 0.2%, CrCl.sub.2: 0.4%, N.sub.2: 4%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder Cr-b NH.sub.3: 3.8%. N.sub.2: 0%. — — AlCl.sub.3: 0.3%, TiCl.sub.4: — — — 5.0 750 H.sub.2: 65%. 0.3%, CrCl.sub.2: 0.1%, N.sub.2: 11%, Al(CH.sub.3).sub.3: 0%, H.sub.2 as remainder Cr-c NH.sub.3: 3.5%. N.sub.2: 1%. — — AlCl.sub.3: 0.9%, TiCl.sub.4: — — — 4.5 800 H.sub.2: 58%. 0.1%, CrCl.sub.2: 0.1%, N.sub.2: 2%, Al(CH.sub.3).sub.3: 1.0%, H.sub.2 as remainder

TABLE-US-00006 TABLE 6 Hard coating layer (numerical value at the bottom indicates the average target layer thickness of the layer (μm)) Lower layer Upper layer First Second First Second Type layer layer layer layer Present invention 1 — — — — coated tool and 2 — — — — comparative coated 3 — — — — tool 4 — — — — 5 — — — — 6 TiC — — — (0.5) 7 TiN — — — (0.3) 8 TiN TiCN — — (0.5) (4) 9 TiN TiCN — — (0.3) (2) 10 — — Al.sub.2O.sub.3 — (2.5) 11 TiN — TiCN Al.sub.2O.sub.3 (0.5) (0.5) (3) 12 TiC — TiCO Al.sub.2O.sub.3 (1)   (1)   (2) 13 TiN — TiCNO Al.sub.2O.sub.3 (0.1) (0.3) (1) 14 — — — — 15 — — — —

TABLE-US-00007 TABLE 7 Hard coating layer Layer of complex carbonitride of Ti, Al, and Me (Ti.sub.1−x−yAl.sub.xMe.sub.y)(C.sub.zN.sub.1−z) Inclined angle frequency distribution Average value Division of periods of Formation of concentration symbol of Sum inclined Proportion variation of TiAlMeCN Xavg + angles in of Ti, Al, and film Yavg of which frequencies Difference Me along forming Average Average average highest of 0 Δx normal line Tool Type process amount amount amounts Average peak is degrees to between of surface of body of (see Xavg of Yavg of of Al amount present 12 degrees Xmax and body Type symbol Me Table 4) Al Me and Me Zavg of C (degrees) (%) Xmin (nm) Present 1 A Si Si-1 0.82 0.075 0.895 0.0001 3.25-3.5 49 0.12 55 invention or less coated 2 B Si Si-2 0.77 0.012 0.782 0.0001  7.0-7.25 55 0.17 31 tool or less 3 C Si Si-3 0.80 0.087 0.887 0.0038 4.75-5.0 51 0.07 12 4 A Zr Zr-1 0.62 0.022 0.642 0.0015 1.25-1.5 71 0.05 26 5 D Zr Zr-2 0.84 0.079 0.919 0.0001 6.25-6.5 38 0.14 47 or less 6 B Zr Zr-3 0.91 0.027 0.937 0.0001  3.5-3.75 41 0.21 84 or less 7 C B B-1 0.87 0.032 0.902 0.0043  8.0-8.25 47 0.15 25 8 D B B-2 0.74 0.041 0.781 0.0001 10.75-11.0 63 0.09 17 or less 9 A B B-3 0.76 0.061 0.821 0.0001 2.75-3.0 54 0.11 37 or less 10 B V V-1 0.72 0.057 0.777 0.0001  2.0-2.25 67 0.08 6 or less 11 C V V-2 0.90 0.008 0.908 0.0035  9.5-9.75 44 0.19 58 12 A V V-3 0.83 0.081 0.911 0.0001  4.0-4.25 59 0.14 37 or less 13 D Cr Cr-1 0.75 0.044 0.794 0.0001  1.0-1.25 62 0.11 62 or less 14 B Cr Cr-2 0.66 0.069 0.729 0.0001  0.5-0.75 79 0.07 20 or less 15 C Cr Cr-3 0.94 0.007 0.947 0.0018 9.75-10 40 0.22 96 Hard coating layer Layer of complex carbonitride of Ti, Al, and Me (Ti.sub.1−x−yAl.sub.xMe.sub.y)(C.sub.zN.sub.1−z) Presence or absence of area A and area B in which orientations in directions of periods of concentration variations Average value with {110} of periods of boundary in concentration cubic crystal Area variation of grains ratio Ti, Al, and interposed Change of Average of Me along therebetween ΔXodA and crystal cubic Target <001> Change are ΔXodB in Lattice grain Average crystal layer orientation expressed perpendicular area A and constant width W aspect phase thickness Type (nm) by ΔXo to each other area B a (Å) (μm) ratio A (%) (μm) Present 1 49 0.01 Absent — 4.089 1.5 2.3 84 4 invention or less coated 2 — — Absent — 4.093 0.7 6.6 97 7 tool 3 10 0.04 Present ΔXodA: 4.092 0.3 8.7 92 5 0.05 ΔXodB: 0.04 4 23 0.01 or Present ΔXodA: 4.133 1.4 4.1 100 6 less 0.01 or less ΔXodB: 0.01 or less 5 — — Absent — 4.087 0.5 5.7 88 3 6 76 0.01 or Present ΔXodA: 4.053 2.8 1.4 72 4 less 0.01 or less ΔXodB: 0.01 or less 7 — — Absent — 4.063 1.7 3.7 81 6 8 — — Absent — 4.081 1.2 3.3 98 4 9 34 0.01 or Absent — 4.078 0.9 5.6 95 5 less 10  4 0.06 Present ΔXodA: 0.07 4.116 1.0 3.0 100 3 ΔXodB: 0.05 11 — — Absent — 4.069 1.5 2.0 65 3 12 35 0.01 or Present ΔXodA: 4.086 0.2 14.0 82 5 less 0.01 or less ΔXodB: 0.01 or less 13 57 0.03 Present ΔXodA: 0.03 4.102 0.6 6.7 96 4 ΔXodB: 0.03 14 16 0.01 or Absent — 4.128 0.8 8.8 100 7 less 15 93 0.01 or Present ΔXodA: 4.058 3.4 1.7 58 5 less 0.01 or less ΔXodB: 0.01 or less

TABLE-US-00008 TABLE 8 Hard coating layer Layer of complex carbonitride of Ti, Al, and Me (Ti.sub.1−x−yAl.sub.xMe.sub.y)(C.sub.zN.sub.1−z) Inclined angle frequency distribution Average value Division of periods of Formation of concentration symbol of Sum inclined Proportion variation of TiAlMeCN Xavg + angles in of Ti, Al, and film Yavg of which frequencies Difference Me along forming Average Average average highest of 0 Δx normal line Tool Type process amount amount amounts Average peak is degrees to between of surface of body of (see Xavg of Yavg of of Al amount present 12 degrees Xmax and body symbol Me Table 5) Al Me and Me Zavg of C (degrees) (%) Xmin (nm) A Si Si-1 0.84 0.125* 0.965* 0.0001  12.75-13.0* 29* — — or less B Si Si-2 0.76 0.011 0.771 0.0001   30.5-30.75* 16* — — or less C Si Si-3 0.97 0.021 0.991* 0.0036   25.5-25.75* 11* — — D Zr Zr-1 0.82 0.018 0.838 0.0013 5.75-6.0 30* — — A Zr Zr-2 0.58* 0.047 0.627 0.0001 1.25-1.5 54  — — or less B Zr Zr-3 0.91 0.039 0.949 0.0001   14.5-14.75* 27* — — or less C B B-1 0.97 0.003* 0.973* 0.0089*   29.5-29.75* 17* — — D B B-2 0.72 0.165* 0.885 0.0001 4.25-4.5 47  — — or less A B B-3 0.74 0.077 0.917 0.0001  10.5-10.75 31* — — or less B V V-1 0.99 0.002* 0.992* 0.0001  41.75-42.0*  4* — — or less C V V-2 0.83 0.127* 0.957* 0.0046 2.25-2.5 53  — — A V V-3 0.88 0.045 0.925 0.0001   31.5-31.75* 15* — — or less D Cr Cr-1 0.80 0.144* 0.944 0.0001  7.0-7.25 40  — — or less B Cr Cr-2 0.46* 0.081 0.541* 0.0001 0.25-0.5 74  — — or less C Cr Cr-3 0.99 0.001* 0.991* 0.0071*   35.0-35.25*  8* — — Hard coating layer Layer of complex carbonitride of Ti, Al, and Me (Ti.sub.1−x−yAl.sub.xMe.sub.y)(C.sub.zN.sub.1−z) Presence or absence of area A and area B in which orientations in directions of periods of concentration variations Average value with {110} Change of periods of boundary in of concentration cubic crystal ΔXodA Area variation of grains and ratio Ti, Al, and interposed ΔXodB Average of Me along therebetween in crystal cubic Target Tool <001> Change are area A Lattice grain Average crystal layer body orientation expressed perpendicular and constant width W aspect phase thickness symbol (nm) by ΔXo to each other area B a (Å) (μm) ratio A (%) (μm) A — — Absent — 4.097 1.1 3.5 82 4 B — — Absent — 4.098 0.7 8.7 91 7 C — — Absent — 4.061 3.2 0.6 11 5 D — — Absent — 4.087 0.2 27.4 86 6 A — — Absent — 4.143 0.07 38.5 96 3 B — — Absent — 4.096 1.8 1.2 58 4 C — — Absent — 4.048 2.7 0.8 8 6 D — — Absent — 4.086 1.3 2.7 94 4 A — — Absent — 4.080 0.9 5.1 77 5 B — — Absent — 4.049 2.3 0.4 2 3 C — — Absent — 4.094 1.0 2.4 84 3 A — — Absent — 4.078 2.4 1.7 67 5 D — — Absent — 4.097 0.4 9.2 88 4 B — — Absent — 4.167 0.3 21.6 100 7 C — — Absent — 4.050 1.5 0.8 3 5 (Note) Mark * in boxes indicate outside of the range of the present invention.

[0109] Next, in a state in which each of the various coated tools was clamped to a cutter tip end portion made of tool steel with a cutter diameter of 125 mm by a fixing tool, the present invention coated tools 1 to 15 and the comparative coated tools 1 to 15 were subjected to dry high-speed face milling, which is a type of high-speed intermittent cutting of alloy steel, and a center-cut cutting test, which will be described below, and the flank wear width of a cutting edge was measured.

[0110] Tool body: tungsten carbide-based cemented carbide, titanium carbonitride-based cermet

[0111] Cutting test: dry high-speed face milling, center-cut cutting work

[0112] Work material: a block material with a width of 100 mm and a length of 400 mm of JIS SCM440

[0113] Rotational speed: 980 min.sup.−

[0114] Cutting speed: 385 m/min

[0115] Cutting depth: 1.2 mm

[0116] Feed per edge: 0.15 mm/edge

[0117] Cutting time: 8 minutes.

[0118] The cutting work test results are shown in Table 9.

TABLE-US-00009 TABLE 9 Flank wear width Cutting test Type (mm) Type results (min) Present invention 1 0.15 Comparative 1 5.8* coated tool 2 0.19 coated tool 2 5.7* 3 0.14 3 5.5* 4 0.13 4 6.4* 5 0.18 5 6.5* 6 0.13 6 6.0* 7 0.15 7 5.4* 8 0.14 8 7.3* 9 0.12 9 7.1* 10 0.11 10 5.7* 11 0.13 11 6.9* 12 0.10 12 7.0* 13 0.15 13 6.8* 14 0.14 14 5.6* 15 0.14 15 4.7* Mark * in boxes of comparative coated tools indicates a cutting time (min) until the end of a service life caused by the occurrence of chipping.

EXAMPLE 2

[0119] As raw material powders, a WC powder, a TiC powder, a ZrC powder, a TaC powder, an NbC powder, a Cr.sub.3C.sub.2 powder, a TiN powder, and a Co powder, all of which had an average grain size of 1 μm to 3 μm, were prepared, and the raw material powders were mixed in mixing compositions shown in Table 10. Wax was further added thereto, and the mixture was blended in acetone by a ball mill for 24 hours and was decompressed and dried. Thereafter, the resultant was press-formed into green compacts having predetermined shapes at a pressure of 98 MPa, and the green compacts were sintered in a vacuum at 5 Pa under the condition that the green compacts were held at a predetermined temperature in a range of 1370° C. to 1470° C. for one hour. After the sintering, each of tool bodies a to y made of WC-based cemented carbide with insert shapes according to ISO standard CNMG120412 was produced by performing honing with R: 0.07 mm on a cutting edge portion.

[0120] In addition, as raw material powders, a TiCN (TiC/TiN=50/50 in terms of mass ratio) powder, an NbC powder, a WC powder, a Co powder, and an Ni powder, all of which had an average grain size of 0.5 μm to 2 μm, were prepared, and the raw material powders were mixed in mixing compositions shown in Table 11, were subjected to wet mixing by a ball mill for 24 hours, and were dried. Thereafter, the resultant was press-formed into a green compacts at a pressure of 98 MPa, and the green compacts was sintered in a nitrogen atmosphere at 1.3 kPa under the condition that the green compacts was held at a temperature of 1500° C. for one hour. After the sintering, a tool body δ made of TiCN-based cermet with an insert shape according to ISO standard CNMG120412 was produced by performing honing with R: 0.09 mm on a cutting edge portion. Subsequently, present invention coated tools 16 to were produced by forming (Ti.sub.1-x-yAl.sub.xMe.sub.y) (C.sub.zN.sub.1-z) layers shown in Table 13 on the surfaces of the tool bodies a to y and the tool body δ through a thermal CVD method for a predetermined time using a chemical vapor deposition apparatus under the conditions shown in Table 4 in the same method as that in Example 1.

[0121] In addition, a lower layer and an upper layer shown in Table 12 were formed in the present invention coated tools 19 to 28 under the forming conditions shown in Table 3.

[0122] In addition, for the purpose of comparison, comparative coated tools 16 to 30 shown in Table 14 were produced by depositing a hard coating layer on the surfaces of the same tool bodies a to y and the tool body δ to have target layer thicknesses shown in Table 14 under the conditions shown in Table 5 using a chemical vapor deposition apparatus, like the present invention coated tools.

[0123] In addition, like the present invention coated tools 19 to 28, a lower layer and an upper layer shown in Table 12 was formed in the comparative coated tools 19 to 28 under the forming conditions shown in Table 3.

[0124] The section of each of constituent layers of the present invention coated tools 16 to 30 and the comparative coated tools 16 to 30 was measured using a scanning electron microscope (at a magnification of 5,000×). An average layer thickness was obtained by measuring and averaging the layer thicknesses of five points in an observation visual field. All of the results showed substantially the same average layer thicknesses as the target layer thicknesses shown in Tables 13 and 14.

[0125] In addition, regarding the hard coating layers of the present invention coated tools 16 to 30 and the comparative coated tools 16 to 30, using the same method as that described in Example 1, the average amount Xavg of Al, the average amount Yavg of Me, the average amount Zavg of C, the inclined angle frequency distribution, the difference Δx (=Xmax−Xmin) and period of the periodic concentration variation, the lattice constant a, the average grain width W and average aspect ratio A of crystal grains, and the area ratio of the cubic crystal phase to the crystal grains were obtained.

[0126] The results are shown in Tables 13 and 14.

TABLE-US-00010 TABLE 10 Mixing composition (mass %) Type Co TiC ZrC TaC NbC Cr.sub.3C.sub.2 TiN WC Tool α 6.5 — 1.5 — 2.9 0.1 1.5 Remainder body β 7.6 2.6 — 4.0 0.5 — 1.1 Remainder γ 6.0 — — — — — — Remainder

TABLE-US-00011 TABLE 11 Mixing composition (mass %) Type Co Ni NbC WC TiCN Tool body δ 11 4 6 15 Remainder

TABLE-US-00012 TABLE 12 Lower layer (numerical value Upper layer (numerical value at the bottom indicates the at the bottom indicates the average target layer average target layer thickness of the layer (μm)) thickness of the layer (μm)) First Second Third Fourth First Second Third Fourth Type layer layer layer layer layer layer layer layer Present 16 — — — — — — — — invention 17 — — — — — — — — coated tool 18 — — — — — — — — and 19 TiC — — — — — — — comparative (0.5) coated tool 20 TiN — — — — — — — (0.1) 21 TiN TiCN — — — — — — (0.5) (7) 22 TiN TiCN TiN — TiN — — — (0.3) (10)  (0.7) (0.7) 23 TiN TiCN TiCN TiN TiCN TiN — — (0.3) (4) (0.4) (0.3) (0.4)   (0.3) 24 — — — — Al.sub.2O.sub.3 — — — (4)   25 TiN — — — TiCN Al.sub.2O.sub.3 — — (0.5) (0.5) (5) 26 TiC — — — TiCO Al.sub.2O.sub.3 — — (1)   (1)   (2) 27 TiN — — — TiCNO Al.sub.2O.sub.3 — — (0.1) (0.3) (1) 28 TiN — — — TiN TiCN TiCNO Al.sub.2O.sub.3 (0.1) (0.3)   (0.8) (0.3) (5) 29 — — — — — — — — 30 — — — — — — — —

TABLE-US-00013 TABLE 13 Hard coating layer Layer of complex carbonitride of Ti, Al, and Me (Ti.sub.1−x−yAl.sub.xMe.sub.y) (C.sub.zN.sub.1−z) Inclined angle frequency Average distribution value of Formation Division period of symbol of concentration of inclined Proportion variation TiAlMeCN Sum angles of of Ti, Al, film Xavg + in frequencies and Me forming Yavg of which of 0 along process Average Average average highest degrees Difference normal line Tool Type (see amount amount amounts Average peak is to 12 Δx between of surface body of Table Xavg of Yavg of of Al amount present degrees Xmax and of body Type symbol Me 4) Al Me and Me Zavg of C (degrees) (%) Xmin (nm) Present 16 α Si Si-1 0.83 0.077 0.907 0.0001 2.75-3.0 52 0.10 60 invention or less coated 17 β Si Si-2 0.75 0.009 0.759 0.0001 7.25-7.5 53 0.18 30 tool or less 18 γ Si Si-3 0.82 0.091 0.911 0.0040 5.25-5.5 46 0.07 10 19 α Zr Zr-1 0.60 0.026 0.626 0.0010 1.25-1.5 74 0.06 23 20 δ Zr Zr-2 0.86 0.078 0.938 0.0001 5.75-6.0 40 0.13 46 or less 21 β Zr Zr-3 0.90 0.025 0.925 0.0001 3.75-4.0 44 0.20 89 or less 22 γ B B-1 0.85 0.041 0.891 0.0038  8.5-8.75 50 0.17 27 23 δ B B-2 0.73 0.036 0.766 0.0001  11.5-11.75 64 0.08 15 or less 24 α B B-3 0.78 0.067 0.847 0.0001 2.75-3.0 58 0.10 42 or less 25 β V V-1 0.70 0.054 0.754 0.0001 2.25-2.5 70 0.06 3 or less 26 γ V V-2 0.92 0.006 0.926 0.0046  9.0-9.25 43 0.18 54 27 δ V V-3 0.85 0.081 0.931 0.0001 4.25-4.5 62 0.15 34 or less 28 α Cr Cr-1 0.74 0.040 0.780 0.0001 0.75-1.0 58 0.13 66 or less 29 β Cr Cr-2 0.68 0.073 0.753 0.0001 0.25-0.5 77 0.04 21 or less 30 γ Cr Cr-3 0.94 0.005 0.945 0.0020    10-10.25 37 0.25 100 Hard coating layer Layer of complex carbonitride of Ti, Al, and Me (Ti.sub.1−x−yAl.sub.xMe.sub.y) (C.sub.zN.sub.1−z) Presence or absence of area A and area B in which orientations in directions Average of periods of value of concentration periods variations of with {110} concentration boundary in variation cubic crystal Area of Ti, grains ratio Al, and interposed Change of Average of Me along Change therebetween ΔXodA and crystal cubic Target <001> expressed are ΔXodB in Lattice grain Average crystal layer orientation by perpendicular area A and constant width W aspect phase thickness Type (nm) ΔXo to each other area B a (Å) (μm) ratio A (%) (μm) Present 16 56 0.01 or Absent — 4.083 1.3 3.0 89 9 invention less coated 17 — — Absent — 4.098 0.8 5.9 95 12 tool 18  8 0.03 Present ΔXodA: 0.03 4.085 0.2 9.6 90 10 ΔXodB: 0.04 19 19 0.01 or Present ΔXodA: 0.01 4.137 1.2 3.7 100 6 less or less ΔXodB: 0.01 or less 20 — — Absent — 4.082 0.4 7.0 87 16 21 84 0.01 or Present ΔXodA: 0.01 4.059 2.5 1.7 74 11 less or less ΔXodB: 0.01 or less 22 — — Absent — 4.051 1.8 3.4 84 8 23 — — Absent — 4.086 1.4 3.1 96 13 24 40 0.01 or Absent — 4.068 1.0 5.7 92 10 less 25  3 0.07 Present ΔXodA: 0.07 4.117 0.8 3.4 100 7 ΔXodB: 0.07 26 — — Absent — 4.063 1.6 2.4 67 11 27 31 0.01 or Present ΔXodA: 0.01 4.084 0.1 17.3 81 15 less or less ΔXodB: 0.01 or less 28 61 0.02 Present ΔXodA: 0.03 4.100 0.5 6.9 97 9 ΔXodB: 0.02 29 19 0.01 or Absent — 4.167 0.9 9.2 100 17 less 30 98 0.01 or Present ΔXodA: 0.01 4.053 3.1 2.4 55 14 less or less ΔXodB: 0.01 or less

TABLE-US-00014 TABLE 14 Hard coating layer Layer of complex carbonitride of Ti, Al, and Me (Ti.sub.1−x−yAl.sub.xMe.sub.y)(C.sub.zN.sub.1−z) Inclined angle frequency Average distribution value of Formation Sum Division period of symbol Xavg + of concentration of Yavg inclined Proportion variation TiAlMeCN of angles of of Ti, Al, film average in which frequencies Difference and Me along forming Average Average amounts Average highest of 0 Δx normal line Tool Type process amount amount of amount peak is degrees to between of surface body of (see Xavg Yavg Al and Zavg present 12 degrees Xmax and of body Type symbol Me Table 5) of Al of Me Me of C (degrees) (%) Xmin (nm) Comparative 16 α Si Si-1 0.83 0.121* 0.951* 0.0001  12.0-12.25* 32* — — coated or tool less 17 β Si Si-2 0.78 0.017 0.797 0.0001  33.5-33.75* 13* — — or less 18 γ Si Si-3 0.96* 0.022 0.982* 0.0032  27.5-27.75*  9* — — 19 α Zr Zr-1 0.80 0.014 0.814 0.0017 5.25-5.5  33* — — 20 δ Zr Zr-2 0.57* 0.052 0.622 0.0001  1.0-1.25 58  — — or less 21 β Zr Zr-3 0.89 0.036 0.926 0.0001 13.75-14.0* 26* — — or less 22 γ B B-1 0.98* 0.007 0.987* 0.0092* 28.25-28.5* 15* — — 23 δ B B-2 0.68 0.171* 0.851 0.0001 3.75-4.0  50  — — or less 24 α B B-3 0.75 0.083 0.833 0.0001  11.0-11.25 29* — — or less 25 β V V-1 0.99* 0.001* 0.991* 0.0001  43.0-43.25*  7* — — or less 26 γ V V-2 0.85 0.118* 0.968* 0.0041  2.5-2.75 49  — — 27 δ V V-3 0.87 0.047 0.917 0.0001 32.75-33.0* 13* — — or less 28 α Cr Cr-1 0.81 0.152* 0.962* 0.0001  6.5-6.75 46  — — or less 29 β Cr Cr-2 0.47* 0.076 0.546* 0.0001 0.75-1.0  68  — — or less 30 γ Cr Cr-3 0.99* 0.002* 0.992* 0.0075* 35.75-36.0*  7* — — Hard coating layer Layer of complex carbonitride of Ti, Al, and Me (Ti.sub.1−x−yAl.sub.xMe.sub.y)(C.sub.zN.sub.1−z) Presence or absence of area A and area B in which orientations in directions of periods of concentration Average variations value of with {110} Change periods of boundary in of concentration cubic crystal ΔXod A Area variation grains and ratio of Ti, Al, interposed ΔXod Average of and Me along therebetween B in crystal cubic Target <001> Change are area A Lattice grain Average crystal layer orientation expressed perpendicular and constant width aspect phase thickness Type (nm) by ΔXo to each other area B a (Å) W (μm) ratio A (%) (μm) Comparative 16 — — Absent — 4.104 1.0 5.3 85 9 coated 17 — — Absent — 4.091 0.9 9.2 90 12 tool 18 — — Absent — 4.060 3.6 0.4 13 10 19 — — Absent — 4.085 0.3 30.1 83 6 20 — — Absent — 4.149 0.09 37.3 94 16 21 — — Absent — 4.092 1.6 1.0 55 11 22 — — Absent — 4.041 2.4 0.9 10 8 23 — — Absent — 4.083 1.4 2.2 92 13 24 — — Absent — 4.073 0.8 4.8 75 10 25 — — Absent — 4.047 2.0 0.3 4 7 26 — — Absent — 4.089 1.2 2.1 86 11 27 — — Absent — 4.080 2.5 1.6 63 15 28 — — Absent — 4.102 0.6 9.7 85 9 29 — — Absent — 4.159 0.2 22.3 100 17 30 — — Absent — 4.052 1.7 0.6 2 14 (Note) Mark * in boxes indicate outside of the range of the present invention.

[0127] Next, in a state in which each of the various coated tools was screwed to a tip end portion of an insert holder made of tool steel by a fixing tool, the present invention coated tools 16 to 30 and the comparative coated tools 16 to 30 were subjected to a dry high-speed intermittent cutting test for alloy steel, and a wet high-speed intermittent cutting test for cast iron, which will be described below, and the flank wear width of a cutting edge was measured in either case.

[0128] Cutting conditions 1:

[0129] Work material: a round bar with four longitudinal grooves formed at equal intervals in the longitudinal direction of JIS S45C

[0130] Cutting speed: 380 m/min

[0131] Cutting depth: 1.5 mm

[0132] Feed: 0.1 mm/rev

[0133] Cutting time: 5 minutes,

[0134] (a typical cutting speed is 220 m/min)

[0135] Cutting conditions 2:

[0136] Work material: a round bar with four longitudinal grooves formed at equal intervals in the longitudinal direction of JIS FCD700

[0137] Cutting speed: 320 m/min

[0138] Cutting depth: 1.5 mm

[0139] Feed: 0.3 mm/rev

[0140] Cutting time: 5 minutes,

[0141] (a typical cutting speed is 200 m/min)

[0142] The results of the cutting test are shown in Table 15.

TABLE-US-00015 TABLE 15 Flank wear width Cutting test results (mm) (min) Cutting Cutting Cutting Cutting Type conditions 1 conditions 2 Type conditions 1 conditions 2 Present 16 0.15 0.16 Comparative 16 3.5* 3.2* invention 17 0.19 0.18 coated tool 17 3.5* 3.3* coated 18 0.15 0.14 18 3.3* 3.5* tool 19 0.14 0.12 19 4.0* 3.9* 20 0.17 0.18 20 3.9* 3.7* 21 0.13 0.12 21 3.7* 3.6* 22 0.14 0.13 22 3.6* 3.8* 23 0.15 0.14 23 4.3* 4.1* 24 0.11 0.12 24 4.0* 4.1* 25 0.12 0.11 25 3.5* 3.6* 26 0.13 0.12 26 4.1* 4.2* 27 0.10 0.09 27 3.9* 4.0* 28 0.17 0.16 28 3.0* 2.8* 29 0.14 0.15 29 3.4* 3.1* 30 0.13 0.14 30 2.7* 2.9* Mark * in boxes of comparative coated tools indicates a cutting time (min) until the end of a service life caused by the occurrence of chipping.

EXAMPLE 3

[0143] As raw material powders, a cBN powder, a TiN powder, a TiCN powder, a TiC powder, an Al powder, and an Al.sub.2O.sub.3 powder, all of which had an average grain size of 0.5 μm to 4 μm, were prepared, and the raw material powders were mixed in mixing compositions shown in Table 16. The mixture was subjected to wet mixing by a ball mill for 80 hours and was dried. Thereafter, the resultant was press-formed into green compacts having dimensions with a diameter of 50 mm and a thickness of 1.5 mm at a pressure of 120 MPa, and the green compacts were then sintered in a vacuum at a pressure of 1 Pa under the condition that the green compacts were held at a predetermined temperature in a range of 900° C. to 1300° C. for 60 minutes, thereby producing cutting edge preliminary sintered bodies. In a state in which the preliminary sintered body was superimposed on a support piece made of WC-based cemented carbide, which was additionally prepared to contain Co: 8 mass % and WC: the remainder and have dimensions with a diameter of 50 mm and a thickness of 2 mm, the resultant was loaded in a typical ultrahigh-pressure sintering apparatus, and was subjected to ultrahigh-pressure sintering under typical conditions including a pressure of 4 GPa and a holding time of 0.8 hours at a predetermined temperature in a range of 1200° C. to 1400° C. After the sintering, upper and lower surfaces were polished using a diamond grinding wheel, and were split into predetermined dimensions by a wire electric discharge machining apparatus. Furthermore, the resultant was brazed to a brazing portion (corner portion) of an insert body made of WC-based cemented carbide having a composition including Co: 5 mass %, TaC: 5 mass %, and WC: the remainder and a shape (a 80° rhombic shape with a thickness of 4.76 mm and an inscribed circle diameter of 12.7 mm) of ISO standard CNGA120412 using a brazing filler metal made of a Ti-Zr-Cu alloy having a composition including Zr: 37.5%, Cu: 25%, and Ti: the remainder in terms of mass%, and the outer circumference thereof was machined into predetermined dimensions. Thereafter, each of tool bodies a and b with an insert shape according to ISO standard CNGA120412 was produced by performing honing with a width of 0.13 mm and an angle of 25° on a cutting edge portion and performing finish polishing on the resultant.

TABLE-US-00016 TABLE 16 Mixing composition (mass %) Type TiN TiC Al Al.sub.2O.sub.3 cBN Tool body a 50 — 5 3 Remainder b — 50 4 3 Remainder

[0144] Subsequently, present invention coated tools 31 to 40 shown in Table 18 were produced by depositing hard coating layers including a (Ti.sub.1-x-yAl.sub.xMe.sub.y) (C.sub.zN.sub.1-z) layer on the surfaces of the tool bodies a and b using a chemical vapor deposition apparatus to have target layer thicknesses under the conditions shown in Table 4 in the same method as that in Example 1.

[0145] In addition, a lower layer and an upper layer shown in Table 17 were formed in the present invention coated tools 34 to 39 under the forming conditions shown in Table 3.

[0146] In addition, for the purpose of comparison, comparative coated tools 31 to 40 shown in Table 19 were produced by depositing hard coating layers including a (Ti.sub.1-x-yAl.sub.xMe.sub.y) (C.sub.zN.sub.1-z) layer on the surfaces of the same tool bodies a and b to have target layer thicknesses under the conditions shown in Table 5 using a chemical vapor deposition apparatus.

[0147] In addition, like the present invention coated tools 34 to 39, a lower layer and an upper layer shown in Table 17 were formed in the comparative coated tools 34 to 39 under the forming conditions shown in Table 3.

[0148] The section of each of constituent layers of the present invention coated tools 31 to 40 and the comparative coated tools 31 to 40 was measured using a scanning electron microscope (at a magnification of 5,000×). An average layer thickness was obtained by measuring and averaging the layer thicknesses of five points in an observation visual field. All of the results showed substantially the same average layer thicknesses as the target layer thicknesses shown in Tables 18 and 19.

[0149] In addition, regarding the hard coating layers of the present invention coated tools 31 to 40 and the comparative coated tools 31 to 40, using the same method as that described in Example 1, the average layer thickness, the average amount Xavg of Al, the average amount Yavg of Me, the average amount Zavg of C, the inclined angle frequency distribution, the difference Δx (=Xmax−Xmin) and period of the periodic concentration variation, the lattice constant a, the average grain width W and average aspect ratio A of crystal grains, and the area ratio of the cubic crystal phase to the crystal grains were obtained.

[0150] The results are shown in Tables 18 and 19.

TABLE-US-00017 TABLE 17 Upper layer Lower layer (numerical (numerical value value at the bottom at the bottom indicates the average indicates the target layer thickness of average target Tool the layer (μm)) layer thickness of body First Second Third the layer (μm)) Type symbol layer layer layer First layer Present 31 a — — — — invention 32 b — — — — coated tool 33 a — — — — and 34 b — — — TiN comparative (0.5) coated tool 35 a TiN — — — (0.5) 36 b TiN — — — (0.3) 37 a TiN TiCN — — (0.5) (1) 38 b TiN TiCN TiN — (0.3) (2) (0.5) 39 a — — — TiN (0.5) 40 b — — — —

TABLE-US-00018 TABLE 18 Hard coating layer Layer of complex carbonitride of Ti, Al, and Me (Ti.sub.1−x−yAl.sub.xMe.sub.y) (C.sub.zN.sub.1−z) Average value of Inclined angle period of frequency concen- distribution tration Formation Sum Division variation symbol Xavg + of of Ti, Al, of Yavg inclined Proportion and Me TiAlMeCN of angles of along film average in which frequencies Difference normal forming Average Average amounts Average highest of 0 Δx line Tool Type process amount amount of amount peak is degrees to between of surface body of (see Xavg Yavg Al and Zavg present 12 degrees Xmax and of body Type symbol Me Table 4) of Al of Me Me of C (degrees) (%) Xmin (nm) Present 31 a Si Si-1 0.80 0.071 0.871 0.0001 3.5-3.75 45 0.13 55 invention or coated less tool 32 b Si Si-2 0.74 0.011 0.751 0.0001 6.5-6.75 59 0.15 31 or less 33 a Zr Zr-2 0.87 0.076 0.946 0.0001 6.25-6.5  41 0.14 51 or less 34 b Zr Zr-3 0.92 0.030 0.950 0.0001 4.25-4.5  40 0.21 86 or less 35 a B B-2 0.76 0.038 0.798 0.0001 11.0-11.25 67 0.09 21 or less 36 b B B-3 0.79 0.065 0.855 0.0001 2.25-2.5  60 0.11 45 or less 37 a V V-2 0.92 0.007 0.927 0.0039 9.5-9.75 47 0.19 57 38 b V V-3 0.84 0.083 0.923 0.0001 3.5-3.75 64 0.14 38 or less 39 a Cr Cr-1 0.77 0.041 0.811 0.0001 0.75-1.0  63 0.11 60 or less 40 b Cr Cr-2 0.64 0.070 0.710 0.0001 0.25-0.5  71 0.07 24 or less Hard coating layer Layer of complex carbonitride of Ti, Al, and Me (Ti.sub.1−x−yAl.sub.xMe.sub.y) (C.sub.zN.sub.1−z) Presence or absence of area A and area B in which orientations in directions of periods of concentration Average variations value of with {110} periods of boundary in concentration cubic crystal Area variation grains Change ratio of Ti, Al interposed of ΔXodA Average of and Me along therebetween and crystal cubic Target <001> Change are ΔXodB in Lattice grain Average crystal layer orientation expressed perpendicular area A constant width aspect phase thickness Type (nm) by ΔXo to each other and area B a (Å) W (μm) ratio A (%) (μm) Present 31 56 0.01 or Absent — 4.094 1.2 2.5 85 3 invention less coated tool 32 — — Absent — 4.097 0.8 1.3 94 1 33 — — Absent 4.081 0.6 3.3 90 2 34 81 0.01 or Present ΔXodA: 4.058 2.7 1.1 75 3 less 0.01 or less ΔXodB: 0.01 or less 35 — — Absent — 4.073 1.4 2.9 95 4 36 42 0.01 or Absent — 4.074 0.7 2.8 93 2 less 37 — — Absent — 4.067 1.3 1.5 68 2 38 31 0.01 or Present ΔXodA: 4.088 0.08 15.2 81 3 less 0.01 or less ΔXodB: 0.01 or less 39 55 0.04 Present ΔXodA: 0.04 4.099 0.4 5.0 93 2 ΔXodB: 0.04 40 22 0.01 or Absent — 4.147 0.8 4.8 100 3 less

TABLE-US-00019 TABLE 19 Hard coating layer Layer of complex carbonitride of Ti, Al, and Me (Ti.sub.1−x−yAl.sub.xMe.sub.y) (C.sub.zN.sub.1−z) Inclined angle frequency distribution Average value Division of period of Formation of concentration symbol of Sum inclined Proportion variation of TiAlMeCN Xavg + angles in of Ti, Al, and film Yavg of which frequencies Difference Me along forming Average Average average highest of 0 Δx normal line Tool Type process amount amount amounts Average peak is degrees to between of surface of body of (see Xavg of Yavg of of Al amount present 12 degrees Xmax and body Type symbol Me Table 5) Al Me and Me Zavg of C (degrees) (%) Xmin (nm) Comparative 31 a Si Si-1 0.82 0.118* 0.938 0.0001 13.25-13.5* 26* — — coated tool or less 32 b Si Si-2 0.77 0.015 0.785 0.0001  32.0-32.25* 11* — — or less 33 a Zr Zr-1 0.80 0.018 0.818 0.0009  5.5-5.75 28* — — 34 b Zr Zr-2 0.56* 0.050 0.610 0.0001 1.25-1.5  59  — — or less 35 a B B-2 0.70 0.163* 0.863 0.0001  3.5-3.75 49  — — or less 36 b B B-3 0.72 0.081 0.801 0.0001  11.0-11.25 32* — — or less 37 a V V-2 0.84 0.122* 0.962* 0.0044 1.75-2.0  56  — — 38 b V V-3 0.85 0.052 0.902 0.0001 32.25-32.5* 13* — — or less 39 a Cr Cr-2 0.47* 0.074 0.544* 0.0001  0.5-0.75 70  — — or less 40 b Cr Cr-3 0.99* 0.001* 0.991* 0.0069* 35.25-35.5*  5* — — Hard coating layer Layer of complex carbonitride of Ti, Al, and Me (Ti.sub.1−x−yAl.sub.xMe.sub.y) (C.sub.zN.sub.1−z) Presence or absence of area A and area B in which orientations in directions of periods of concentration variations Average value with {110} Change of periods of boundary in of concentration cubic crystal ΔXodA Area variation of grains and ratio Ti, Al and interposed ΔXodB Average of Me along therebetween in crystal cubic Target <001> Change are area A Lattice grain Average crystal layer orientation expressed perpendicular and constant width W aspect phase thickness Type (nm) by ΔXo to each other area B a (Å) (μm) ratio A (%) (μm) Comparative 31 — — Absent — 4.111 0.9 3.3 78 3 coated tool 32 — — Absent — 4.094 0.6 1.7 87 1 33 — — Absent — 4.090 0.1 20.0 85 2 34 — — Absent — 4.147 0.06 39.2 93 3 35 — — Absent — 4.088 1.1 2.3 90 4 36 — — Absent — 4.086 0.7 2.8 79 2 37 — — Absent — 4.091 1.1 1.8 85 2 38 — — Absent — 4.087 2.5 1.2 66 3 39 — — Absent — 4.163 0.2 10.0 100 2 40 — — Absent — 4.046 1.8 0.5 4 4 (Note) Mark * in boxes indicate outside of the range of the present invention.

[0151] Next, in a state in which each of the various coated tools was screwed to a tip end portion of an insert holder made of tool steel by a fixing tool, the present invention coated tools 31 to 40 and the comparative coated tools 31 to 40 were subjected to a dry high-speed intermittent cutting work test for carburized alloy steel, which will be described below, and the flank wear width of a cutting edge was measured.

[0152] Cutting test: dry high-speed intermittent cutting work for carburized alloy steel

[0153] Work material: a round bar with four longitudinal grooves formed at equal intervals in the longitudinal direction according to JIS SCr420 (hardness: HRC62)

[0154] Cutting speed: 250 m/min

[0155] Cutting depth: 0.1 mm

[0156] Feed: 0.12 mm/rev

[0157] Cutting time: 4 minutes

[0158] The results of the cutting test are shown in Table 20.

TABLE-US-00020 TABLE 20 Flank wear width Cutting test Type (mm) Type results (min) Present invention 31 0.09 Comparative 31 2.7* coated tool 32 0.14 coated tool 32 2.2* 33 0.13 33 3.5* 34 0.07 34 3.0* 35 0.13 35 2.8* 36 0.08 36 3.2* 37 0.11 37 3.3* 38 0.07 38 2.5* 39 0.10 39 2.3* 40 0.09 40 2.0* Mark * in boxes of comparative coated tools indicates a cutting time (min) until the end of a service life caused by the occurrence of chipping.

[0159] From the results shown in Tables 9, 15, and 20, regarding the coated tools of the present invention, in the hard coating layer including at least the cubic crystal grains of the complex nitride or complex carbonitride of Ti, Al, and Me, the cubic crystal grains were aligned with {100} planes and had a columnar structure, and a concentration variation of Ti, Al, and Me was present in the crystal grains. Accordingly, due to the strain in the crystal grains, hardness was improved and toughness was improved while high wear resistance was maintained. Furthermore, it was apparent that even in a case of being used for high-speed intermittent cutting work during which intermittent and impact loads were exerted on a cutting edge, chipping resistance and defect resistance were excellent, and as a result, excellent wear resistance was exhibited during long-term use.

[0160] Contrary to this, it was apparent that since the hard coating layer including at least the cubic crystal grains of the complex nitride or complex carbonitride of Ti, Al, and Me included in the hard coating layer did not satisfy requirements specified in the present invention, in a case of being used for high-speed intermittent cutting work during which high-temperature heat is generated and intermittent and impact loads are exerted on a cutting edge, the end of the service life thereof was reached within a short time due to the occurrence of chipping, defects, and the like.

INDUSTRIAL APPLICABILITY

[0161] As described above, the coated tool of the present invention can be used as a coated tool for various work materials as well as for high-speed intermittent cutting work of alloy steel and further exhibits excellent chipping resistance and wear resistance during long-term use, thereby sufficiently satisfying an improvement in performance of a cutting device, power saving and energy saving during cutting work, and a further reduction in costs.