LIQUID SUPPLY SYSTEM

Abstract

A liquid supply system providing a stable pump operation even when ultra-low temperature liquid including slurry is set as a liquid feed target. The liquid supply system that supplies ultra-low temperature liquid including a slurry component by expansion and contraction of bellows 41 and 42. At least a region in the bellows 41 and 42 that is in contact with the liquid is coated with resin having a low temperature brittle temperature that is equal to or lower than an operating temperature of the liquid supply system.

Claims

1. A liquid supply system that supplies ultra-low temperature liquid including a slurry component by expansion and contraction of a bellows, wherein at least a region in the bellows that is in contact with the liquid is coated with resin having a low temperature brittle temperature that is equal to or lower than an operating temperature of the liquid supply system.

2. The liquid supply system according to claim 1, wherein the ultra-low temperature liquid is liquid nitrogen or liquid helium.

3. The liquid supply system according to claim 1, comprising: a container configured to suck liquid from a first passage communicating with an outside of the system and deliver the sucked liquid to a second passage communicating with the outside of the system; a first bellows and a second bellows disposed in series in an expanding and contracting direction in the container, respective first end portions which are on sides of the first bellows and the second bellows close to each other are respectively fixed to inner walls of the container, and respective second end portions which are on sides of the first bellows and the second bellows far from each other are respectively configured to be movable in the expanding and contracting direction; and a shaft which is inserted through the inside of the container such that the second end portions of the first bellows and the second bellows are respectively fixed to the shaft, and which expands and contracts the first bellows and the second bellows by reciprocatingly moving in the expanding and contracting direction with a driving source, wherein an outer side of the first bellows in the container serves as a first pump chamber, and the first pump chamber is provided with a first suction port for sucking the liquid into the first pump chamber from the first passage and a first deliver port for delivering the sucked liquid from the first pump chamber to the second passage, an outer side of the second bellows in the container serves as a second pump chamber, and the second pump chamber is provided with a second suction port for sucking the liquid into the second pump chamber from the first passage and a second delivery port for delivering the sucked liquid from the second pump chamber to the second passage, a closed space is formed inside the first bellows and the second bellows, and at least a region in the first bellows that faces the first pump chamber and a region in the second bellows that faces the second pump chamber are coated with resin having a low temperature brittle temperature that is equal to or lower than an operating temperature of the liquid supply system.

4. The liquid supply system according to claim 3, wherein at least the regions facing the first pump chamber and the second pump chamber in the container are also coated with the resin.

5. The liquid supply system according to claim 3, further comprising a third bellows disposed in series to the second bellows in the expanding and contracting direction, and having one end portion fixed to the container and the other end portion connected to the second end portion of the second bellows such that an outer side of the third bellows serves as the second pump chamber and an inner side thereof is opened to an outside of the container, the third bellows expanding and contracting according to the expansion and the contraction of the second bellows, wherein the shaft is inserted through the inner side of the third bellows and connected to the second end portion, and a region in the third bellows that faces the second pump chamber is also coated with the resin.

6. The liquid supply system according to claim 2, comprising: a container configured to suck liquid from a first passage communicating with an outside of the system and deliver the sucked liquid to a second passage communicating with the outside of the system; a first bellows and a second bellows disposed in series in an expanding and contracting direction in the container, respective first end portions which are on sides of the first bellows and the second bellows close to each other are respectively fixed to inner walls of the container, and respective second end portions which are on sides of the first bellows and the second bellows far from each other are respectively configured to be movable in the expanding and contracting direction; and a shaft which is inserted through the inside of the container such that the second end portions of the first bellows and the second bellows are respectively fixed to the shaft, and which expands and contracts the first bellows and the second bellows by reciprocatingly moving in the expanding and contracting direction with a driving source, wherein an outer side of the first bellows in the container serves as a first pump chamber, and the first pump chamber is provided with a first suction port for sucking the liquid into the first pump chamber from the first passage and a first deliver port for delivering the sucked liquid from the first pump chamber to the second passage, an outer side of the second bellows in the container serves as a second pump chamber, and the second pump chamber is provided with a second suction port for sucking the liquid into the second pump chamber from the first passage and a second delivery port for delivering the sucked liquid from the second pump chamber to the second passage, a closed space is formed inside the first bellows and the second bellows, and at least a region in the first bellows that faces the first pump chamber and a region in the second bellows that faces the second pump chamber are coated with resin having a low temperature brittle temperature that is equal to or lower than an operating temperature of the liquid supply system.

7. The liquid supply system according to claim 6, wherein at least the regions facing the first pump chamber and the second pump chamber in the container are also coated with the resin.

8. The liquid supply system according to claim 4, further comprising a third bellows disposed in series to the second bellows in the expanding and contracting direction, and having one end portion fixed to the container and the other end portion connected to the second end portion of the second bellows such that an outer side of the third bellows serves as the second pump chamber and an inner side thereof is opened to an outside of the container, the third bellows expanding and contracting according to the expansion and the contraction of the second bellows, wherein the shaft is inserted through the inner side of the third bellows and connected to the second end portion, and a region in the third bellows that faces the second pump chamber is also coated with the resin.

Description

DRAWINGS

[0023] FIG. 1 is a schematic diagram showing the configuration of a liquid supply system according to an embodiment of the present disclosure.

[0024] FIG. 2 is a schematic diagram for explaining the operation of the liquid supply system according to the embodiment of the present disclosure.

[0025] FIG. 3 is a diagram showing fluctuation in a discharge pressure of the liquid supply system according to the embodiment of the present disclosure.

[0026] FIG. 4 is a diagram showing fluctuation in a discharge pressure of a liquid supply system according to a modification of the embodiment of the present disclosure.

[0027] FIG. 5 is a schematic diagram for explaining the operation of a liquid supply system according to a conventional example.

[0028] FIG. 6 is a diagram showing fluctuation in a discharge pressure of the liquid supply system according to the conventional example.

[0029] FIG. 7 is a schematic diagram showing a liquid contact region in the liquid supply system according to the embodiment of the present disclosure.

[0030] FIG. 8 is a schematic diagram showing a resin coating region in the liquid supply system according to the embodiment of the present disclosure.

DETAILED DESCRIPTION

[0031] Modes for carrying out the present disclosure are illustratively explained in detail below on the basis of embodiments with reference to the drawings. However, dimensions, materials, shapes, relative dispositions, and the like of constituent components described in the embodiments are not meant to limit the scope of the present disclosure only thereto unless specifically described otherwise.

First Embodiment

[0032] A liquid supply system according to an embodiment of the present disclosure is explained with reference to FIG. 1. FIG. 1 is a schematic configuration diagram of the liquid supply system according to the embodiment of the present disclosure.

[0033] A liquid supply system 10 is a pump apparatus for low-temperature fluid. The liquid supply system 10 constantly supplies ultra-low temperature liquid L into a container 31 made of resin in order to maintain the superconductive cable 32 in a superconductive state in an apparatus to be cooled 30, in which a superconductive cable 32 is provided in the container 31. Specific examples of the ultra-low temperature liquid L include liquid nitrogen and liquid helium and also include liquid having temperature equal to or lower than temperature at which the liquid nitrogen and the liquid helium change to liquid.

[0034] The liquid supply system 10 generally includes a first container (an outer side container) 11 evacuated on the inside and a second container 12 disposed to be surrounded by a vacuum space on the inside of the first container 11. Three bellows 41, 42, and 43 are generally disposed in series in respective expanding and contracting directions in the second container 12. A container inside is partitioned into three closed spaces by the bellows 41 to 43. The second container 12 is supported on the inside of the first container 11 by a supporting member 51 inserted through the inside of the first container 11 from the outside of the first container 11.

[0035] The first bellows 41 and the second bellows 42 have the same diameter and are disposed side by side in series to each other in the respective expanding and contracting directions with axis centers there of matched. Respective end portions (first end portions) 41b and 42b on sides close to each other of the first bellows 41 and the second bellows 42 are fixed to the inner wall of the second container 12. Respective end portions (second end portions) 41a and 42a on sides far from each other in the first bellows 41 and the second bellows 42 are integrated by fixing a shaft 15 explained below and configured to be movable in the respective expanding and contracting directions.

[0036] The third bellows 43 is disposed side by side in series to the second bellows 42 on the opposite side of the first bellows 41. The third bellows 43 has an outer diameter smaller than the inner diameter of the second bellows 42 and is disposed such that a part thereof enters the inner side of the second bellows 42 in the expanding and contracting direction. One end portion 43b of the third bellows 43 is fixed to the inner wall of the second container 12 such that the inner side of the third bellows 43 is opened to the outside of the second container 12. The other end portion 43a of the third bellows 43 is coupled to the end portion 42a of the second bellows 42. The third bellows 43 expands and contracts according to expansion and contraction of the second bellows 42.

[0037] The end portion 41a of the first bellows 41 is closed. A closed space formed by a region on the outer side of the first bellows 41 in the second container 12 configures a first pump chamber P1. A closed space formed by a region on the outer side of the second bellows 42 and the third bellows 43 in the second container 12 configures a second pump chamber P2. A space between the end portion 42a of the second bellows 42 and the end portion 43a of the third bellows 43 is closed. A space between the end portion 41b of the first bellows 41 and the end portion 42b of the second bellows 42 is opened. In the second container 12, a region on the inner side of the first bellows 41 and a region on the inner side of the second bellows 42 configure one closed space R1.

[0038] In the second container 12, a first suction port 21 for sucking the liquid L from a return passage (a return pipe) K2 communicating with the outside of the system into the first pump chamber P1 and a first delivery port 22 for delivering the sucked liquid L from the first pump chamber P1 to a supply passage (a supply pipe) K1 communicating with the outside of the system are provided. In the second container 12, a second suction port 23 for sucking the liquid L from the return passage K2 into the second pump chamber P2 and a second delivery port 24 for delivering the sucked liquid L from the second pump chamber P2 to the supply passage K1 are also provided. Check valves 100a and 100c are respectively provided in the first suction port 21 and the second suction port 23. Check valves 100b and 100d are respectively provided in the first delivery port 22 and the second delivery port 24 as well.

[0039] The shaft 15 configured to reciprocatingly move by a linear actuator 14 functioning as a driving source enters the inside of the closed space R1 of the second container 12 from the outside of the first container 11 through the inner side of the third bellows 43. The end portion 41a of the first bellows 41 and the end portion 42a of the second bellows 42 are respectively fixed. Consequently, the shaft 15 reciprocatingly moves, whereby the respective bellows expand and contract.

[0040] The shaft 15 is inserted through the inside from the outside of the first container 11 via a bellows 52 provided in the first container 11. One end of the bellows 52 is fixed to the first container 11. The other end of the bellows 52 is fixed to the shaft 15. The bellows 52 is configured to expand and contract according to the reciprocating movement of the shaft 15.

[0041] The operation of the liquid supply system 10 is explained with reference to FIG. 2. FIG. 2 is a schematic diagram for explaining the operation of the liquid supply system according to the embodiment of the present disclosure. FIG. 2(a) is a diagram showing the inside of the second container 12 in a state in which the bellows 41 and 42 are not displaced neither in an expanding direction nor in the contracting direction. FIG. 2(b) is a diagram showing the inside of the second container 12 in a state at the time when the liquid L is sucked into the first pump chamber P1 from the return passage (a first passage) K2 and the liquid L is delivered from the second pump chamber P2 to the supply passage (a second passage) K1, that is, a state in which the first bellows 41 contracts to the maximum and a state in which the second bellows 42 expands to the maximum. FIG. 2(c) is a diagram showing the inside of the second container 12 in a state in which the liquid L is sucked into the second pump chamber P2 from the return passage (the first passage) K2 and the liquid L is delivered from the first pump chamber P1 to the supply passage (the second passage) K1, that is, a state in which the first bellows 41 expands to the maximum and a state in which the second bellows 42 contracts to the maximum.

[0042] When the shaft 15 moves (FIG. 2(a) to FIG. 2(b) such that the first bellows 41 contracts and the second bellows 42 expands, the liquid L is delivered from the second pump chamber P2 to the supply passage K1 via the second delivery port 24 and the liquid L is sucked into the first pump chamber P1 via the first suction port 21. When the shaft 15 moves (FIG. 2(b) to FIG. 2(a) to FIG. 2(c)) such that the first bellows 41 expands and the second bellows 42 contracts, the liquid L is sucked into the second pump chamber P2 via the second suction port 23 and the liquid L is delivered from the first pump chamber P1 to the supply passage K1 via the first delivery port 22. In this way, the liquid L is delivered to the supply passage K1 in both the directions at the time when the shaft 15 reciprocatingly moves.

[0043] The upper side of FIG. 3 is a diagram schematically showing fluctuation in pressure applied to the second bellows 42 of the liquid supply system according to the first embodiment. The lower side of FIG. 3 is a diagram schematically showing fluctuation in pressure applied to the first bellows 41 (pressure at the time when the liquid is not discharged from the pump chamber is neglected for convenience). In this embodiment, the closed space R1 is a vacuum space. Therefore, the pressure applied to the second bellows 42 of the liquid supply system 10 according to this embodiment fluctuates to alternately change between zero and a maximum discharge pressure (P discharge) as shown in FIG. 3 according to the expansion and the contraction of the respective bellows by the reciprocating movement of the shaft 15. FIG. 3 shows pressure fluctuation at the time when the maximum discharge pressure (P discharge) is 1 MPa. In FIG. 3, (a) corresponds to a displacement position of the shaft 15 in FIG. 2(a), (b) corresponds to a displacement position of the shaft 15 in FIGS. 2(b), and (c) corresponds to a displacement position of the shaft 15 in FIG. 2(c). The pressure applied to the bellows 41 and 42 is a differential pressure between the pressure outsides the bellows and the pressure inside the bellows. In a state without displacement of the shaft 15 before the start of the apparatus, the liquid is not sucked into and discharged from the pump chambers. There is no difference between the external pressure and the internal pressure of the bellows 41 and 42. Therefore, the pressure applied to the bellows is 0. As the state is closer to (b) (the first pump chamber P1 discharges the liquid and the second pump chamber P2 sucks the liquid), the pressure applied to the second bellows 42 increases. When the outside of the bellows has the maximum discharge pressure (P discharge), the pressure applied to the second bellows 42 increases to the maximum (P discharge). As the state is closer to (c) (the first pump chamber P1 sucks the liquid and the second pump chamber P2 discharges the liquid), the pressure applied to the second bellows 42 decreases. Since the suction pressure is 0, the pressure applied to the second bellows 42 decreases to 0. Note that the pressure fluctuation shows the same behavior in the first bellows 41 except that only a phase is different.

[0044] As explained above, in the liquid supply system 10, the liquid L is supplied to the apparatus to be cooled 30 through the supply passage K1 according to the repetition of the reciprocating movement of the shaft 15 and the expanding and contracting motion of the bellows. The liquid L returns to the liquid supply system 10 by an amount supplied to the apparatus to be cooled 30 through the return passage K2 that connects the liquid supply system 10 and the apparatus to be cooled 30. A cooler 20 that cools the liquid L to an ultra-low temperature state is provided halfway in the supply passage K1. With this configuration, the liquid L cooled to the ultra-low temperature by the cooler 20 circulates between the liquid supply system 10 and the apparatus to be cooled 30.

[0045] As explained above, the liquid supply system 10 includes the two pump chambers and the fluid is alternately supplied from the two pump chambers. Therefore, the liquid L is delivered to the supply passage K1 in both of the contraction and the expansion of the respective bellows. A liquid supply amount by the expanding and contracting motion of the respective bellows can be increased to a double compared with, for example, when the pump function is exhibited by only the first pump chamber P1. Therefore, a supply amount for one time can be reduced to a half with respect to a desired supply amount compared with when the pump function is exhibited by only the first pump chamber P1. The maximum pressure of the liquid in the supply passage K1 can be reduced to approximately a half. Therefore, it is possible to suppress an adverse effect due to pressure fluctuation (pulsation) of the supplied liquid.

[0046] The capacity of the closed space R1 formed on the inner side of the first bellows 41 and the second bellows 42 does not change even if the first bellows 41 and the second bellows 42 expand and contract (because the sectional areas of the internal spaces of expanding and contracting portions of both the bellows are equal). Internal pressure acting on the first bellows 41 and the second bellows 42 (pressure acting on the inner circumferential surfaces of the respective bellows) does not change in the space. That is, in the liquid supply system 10 according to this embodiment, the pump chambers are disposed on the outer side of the respective bellows and buckling due to internal pressure fluctuation of the bellows does not occur. Therefore, in withstanding pressure design of the bellows, since it is unnecessary to take into account internal pressure buckling, design flexibility is improved and an increase in a discharge pressure can be achieved. This advantage of this embodiment is explained in comparison with a conventional example with reference to FIG. 5 and FIG. 6.

[0047] FIG. 5 is a schematic diagram for explaining the operation of a liquid supply system according to the conventional example. As shown in FIG. 5, in the liquid supply system according to the conventional example, two pump chambers P1 and P2 are respectively formed on the inner side and the outer side of a bellows 61. That is, when bellows 61 and 62 contract according to the movement of the shaft 15 (FIG. 5(a) to FIG. 5(b)), the liquid L is delivered from the second pump chamber P2 to the supply passage K1 via the second delivery port 24 and the liquid L is sucked into the first pump chamber P1 via the first suction port 21. When the bellows 61 and 62 expand according to the movement of the shaft 15 (FIG. 5(b) to FIG. 5(a) to FIG. 5(c)), the liquid L is sucked into the second pump chamber P2 via the second suction port 23 and the liquid L is delivered from the first pump chamber P1 to the supply passage K1 via the first delivery port 22.

[0048] FIG. 6 is a diagram showing fluctuation in a discharge pressure of the liquid supply system according to the conventional example. Note that, in the figure, pressure applied in an outward direction of the bellow 61 is positive and pressure applied in an inward direction of the bellows 61 is negative (pressure at the time when the liquid is not discharged from the pump chambers is neglected for convenience of explanation). As shown in FIG. 6, in the configuration of the conventional example, when the liquid L is alternately discharged from the first pump chamber P1 and the second pump chamber P2, a discharge pressure (P discharge) of the same magnitude alternately acts respectively on the inner side and the outer side of the bellows 61. That is, the discharge pressure (P discharge) is applied in the inward direction and the outward direction of the bellows. Therefore, when a configuration for obtaining the maximum discharge pressure (1 MPa) same as the maximum pressure in this embodiment is considered, pressure fluctuation of the discharge pressure is a double of the pressure fluctuation in the configuration of this embodiment (FIG. 3 and FIG. 6). Therefore, withstanding pressure performance requested of the bellows 61 is also a double of the withstanding pressure performance of the bellows in this embodiment. In the conventional example, since the internal pressure acts on the bellows 61, if it is attempted to increase the discharge pressure, the internal pressure acting on the bellows 61 also increases. Buckling easily occurs in the bellows 61. In general, the bellows is robust against external pressure but is susceptible to internal pressure. Buckling easily occurs if high internal pressure acts.

[0049] In this way, according to this embodiment, since the pressure acting on the respective bellows is only the external pressure, compared with the configuration of the conventional example in which the internal pressure acts on the bellows, it is possible to achieve an increase in the pump discharge pressure and it is possible to improve stability of the expanding and contracting motion of the bellows. Therefore, it is possible to reduce the number of circulators disposed on a cable. Since the liquid can be supplied even if there is a difference of elevation in geographical features, flexibility of cable laying is improved.

[0050] Further, in this embodiment, the structure is adopted in which the second container 12 is surrounded by the vacuum space in the first container 11. Therefore, since the vacuum space surrounding the second container 12 exhibits a function of preventing heat transfer, it is possible to suppress heat generated by the linear actuator 14 and the atmospheric heat from being transferred to the liquid L. That is, heat exchange of the liquid L is limited to radiant heat from the wall surface of the first container 11 and heat transfer via the supporting member 51 of the second container 12 and the passages. It is possible to reduce intrusion heat into the liquid L. Even if the heat is transferred to the liquid L and the liquid L is vaporized, since new liquid L is constantly supplied and a cooling effect is obtained, it is possible to suppress the temperature of the liquid L from rising to the vaporizing temperature inside the pump chambers. Therefore, the pump performance is not deteriorated.

[0051] In this embodiment, the shaft 15 is inserted through the inside of the second container 12 and coupled to the respective bellows via the end portion 43a on the opposite side of the end portion 43b fixed to the second container 12 in the third bellows 43. The third bellows 43 is configured to expand and contract according to the reciprocating movement of the shaft 15. Therefore, the pump chambers P1 and P2 and the closed space R1 are formed without a sliding part being formed between the shaft 15 and the second container 12. Therefore, heat is not generated according to frictional resistance due to sliding.

[0052] In this embodiment, the outer diameter of the third bellows 43 is smaller than the inner diameter of the second bellows 42. The third bellows 43 is disposed such that at least a part thereof enters the inner side of the second bellows 42. The entering portion can also be used as a pump space. Therefore, it is unnecessary to increase a space. It is possible to reduce the size of the second container 12.

[0053] In this embodiment, since the closed space R1 is the vacuum space, the closed space R1 may be configured to communicate with the vacuum space around the second container 12.

[0054] In this embodiment, the closed space R1 is the vacuum space. However, a configuration may be adopted in which the closed space R1 is filled with gas.

[0055] As the gas encapsulated in the closed space R1, for example, gas less easily causing a state change such as liquidation and freezing in an environment of use of this system such as neon gas and helium gas is used. The pressure of the gas encapsulated in the closed space R1 is set in a range of pressure from a vacuum (−100 kPa) to a desired discharge pressure (desirably, a half of the discharge pressure).

[0056] FIG. 4 is a diagram schematically showing fluctuation in a discharge pressure of a liquid supply system according to a modification. The upper side shows pressure fluctuation applied to the second bellows 42 and the lower side shows pressure fluctuation applied to the first bellows 41. FIG. 4 shows fluctuation in a discharge pressure in the case in which gas having half pressure of the discharge pressure (P discharge) is encapsulated in the closed space R1 (pressure at the time when the liquid is not discharged from the pump chambers is neglected for convenience of explanation). Fluctuation width of the discharge pressure is 1 MPa same as the fluctuation width in the first embodiment. However, a peak value is a half of the peak value in the first embodiment. The pressure applied to the bellows is a pressure difference between the internal pressure of the closed space R1 and the pressure of the spaces of the respective pump chambers P1 and P2. Therefore, when the gas having the half pressure of the discharge pressure is encapsulated in the closed space R1, the pressure applied to the bellows is calculated as (½) P discharge from P discharge−(½) P discharge because the maximum pressure of the pump chambers is the P discharge. The pressure in the closed space R1 is not limited to the (½) P discharge and can be set as appropriate according to specifications such as the sizes of the two bellows and the sizes of the two pump chambers. By pressurizing the inner side of the bellows 41 and 42 with the encapsulated gas in this way, it is possible to reduce the peak value of the pressure acting on the bellows 41 and 42. Therefore, it is possible to improve design flexibility in high-pressure design for increasing the pump discharge pressure.

[0057] A characteristic configuration of this embodiment is explained with reference to FIG. 7 and FIG. 8. FIG. 7 is a schematic diagram showing a liquid contact region in the liquid supply system according to the embodiment of the present disclosure. FIG. 8 is a schematic diagram showing a resin coating region in the liquid supply system according to the embodiment of the present disclosure. In FIG. 7, a region indicated by hatching is a circulation region of the liquid L in the liquid supply system 10 according to this embodiment. In FIG. 8, a region indicated by a thick line is a liquid contact region (a resin coating region C) with the liquid L in the liquid supply system 10 according to this embodiment.

[0058] The liquid supply system 10 according to this embodiment is characterized in that liquid contact parts in the components of the system are coated with resin. As the resin to be coated, resin that can exhibit abrasion resistance even under an ultra-low temperature environment, that is, resin having a low temperature brittle temperature lower than a system operating temperature is adopted. Examples of the resin include PTFE (polytetrafluoroethylene) and polyimide.

[0059] The parts coated with the resin are, for example, the outer circumferential surfaces of the respective bellows sections of the first to third bellows 41 to 43, liquid contact surfaces in the supply passage K1, the return passage K2, and the check valves 100a to 100d from the inner wall surface entire region of the second container 12 via the suction ports 21 and 23 and the delivery ports 22 and 24, and liquid contact surfaces in the first flange section 15a to which the end portion 41a of the first bellows 41 is fixed, the second flange section 15b to which the end portion 42a of the second bellows 42 is fixed, and the third flange section 15c to which the end portion 43a of the third bellows 43 is fixed in the shaft 15. Coating is applied by the conventional method for, for example, spraying and applying a resin material to a coating region.

[0060] The coating region is desirably regions of all parts that are likely to come into contact with the liquid L. However, at least movable parts in the system, that is, parts where relative movement with the liquid L including the slurry actively occurs in the system are desirably covered.

[0061] According to this embodiment, the low temperature brittle temperature of the resin for coating the liquid contact region of the system is lower than the system operating temperature. Therefore, it is possible to maintain elasticity during use. It is possible to suppress the components of the system from being damaged because the components are deformed with respect to the slurry that, for example, collides according to the relative movement with the liquid L. In particular, when the respective bellows expand and contract in the pump operation, collision of the slurry included in the liquid L and the bellows surfaces and damage to the bellows due to biting of the slurry in the bellows sections are suppressed.

[0062] When the bellows is made of metal, heat is less easily transferred to the liquid L when the coating resin is in contact with the liquid L than when the bellows made of metal is directly in contact with the liquid. When a liquid feed target is ultra-low temperature liquid, it is possible to suppress a temperature rise of the liquid L and maintain the liquid L in a low-temperature state.

[0063] Note that a resin coating layer does not need to adhere to the coated parts. In particular, a void may be present between the resin coating layer and the metal surface of the bellows. That is, damage to the system components due to contact and collision with the slurry only has to be reduced. Therefore, when all the liquid contact regions in the system are coated with the resin, the liquid L circulates in a bag of the resin.

[0064] In the conventional pump configuration shown in FIG. 5, resin coating is also necessary on the inner circumferential sides of the bellows sections. On the other hand, in the pump configuration in this embodiment, the liquid contact parts of the bellows are only the outer circumferential surfaces of the bellows sections. Therefore, the resin coating has to be applied to only the bellows section outer circumferential surfaces.

REFERENCE SIGNS LIST

[0065] 10 Liquid supply system [0066] 11 First container [0067] 12 Second container [0068] 21 First suction port [0069] 22 First delivery port [0070] 23 Second suction port [0071] 24 Second delivery port [0072] 14 Linear actuator [0073] 15 Shaft [0074] 41 First bellows [0075] 42 Second bellows [0076] 43 Third bellows [0077] 51 Supporting member [0078] 52 Bellows [0079] 20 Cooler [0080] 30 Apparatus to be cooled [0081] 31 Container [0082] 32 Superconductive cable [0083] K1 Supply passage [0084] K2 Return passage [0085] L Liquid [0086] P1 First pump chamber [0087] P2 Second pump chamber [0088] R1 Closed space [0089] C Resin coating region