Pressure Sensor

Abstract

A pressure sensor comprising at least a pressure measuring cell, a pressure balancer, as well as at least one measurement line to transfer a pressure applied to the pressure means to the pressure measuring cell, wherein the pressure sensor comprises at least one compensation line showing the same features as the measurement line, which is arranged parallel in reference to the measurement line.

Claims

1. A pressure sensor with at least one pressure measuring cell, a pressure means, as well as at least one measurement line for transferring a pressure applied upon the pressure means to the pressure measuring cell, wherein the pressure sensor comprises at least one compensation line, arranged parallel in reference to the measurement line.

2. The pressure sensor according to claim 1, wherein the compensation line shows the same features as the measurement line.

3. The pressure sensor according to claim 1, wherein the compensation line is connected to a pressure-insensitive element that is formed like the pressure means, which is subjected to the process conditions in the same fashion as the pressure means.

4. The pressure sensor according to claim 3, wherein the pressure-insensitive element is integrated in a process connection jointly with the pressure means.

5. The pressure sensor according to claim 4, wherein the pressure-insensitive element is embodied surrounding the pressure means in an annular fashion.

6. The pressure sensor according to claim 5, wherein the pressure-insensitive element shows an area facing the process with a size, which is approximately equivalent to the size of an area of the pressure means facing the process, preferably is identical thereto.

7. The pressure sensor according to claim 1, wherein the measurement line and the compensation line are arranged in a common cover embodied as a mechanical protection means.

8. The pressure sensor according to claim 1, wherein the pressure measuring cell is embodied as a pressure difference measuring cell with two sides that can be impinged on with pressure, which cell is connected at the one side to the measurement line and at the other side to the compensation line.

9. The pressure sensor according to claim 8, wherein the pressure sensor comprises a first and a second pressure means and two compensation lines, wherein the pressure difference measuring cell is connected at one side to the measurement line of the first pressure means and the compensation line allocated to the second pressure means, and on the other side to the measuring line of the second pressure means and the compensation line allocated to the first pressure means.

10. The pressure sensor according to claim 1, wherein a first pressure measuring cell is connected to the measurement line, and renders available a measurement, a second pressure measuring cell, connected to the compensation line, and renders available a compensation value, as well as an electronic measuring system, with the measurement and the compensation value being fed to the input thereof and a compensated measurement value being provided at its output side.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0025] FIG. 1 is a line drawing evidencing a pressure sensor according to prior art.

[0026] FIG. 2 is a line drawing evidencing a first exemplary embodiment of a pressure sensor according to the present application.

[0027] FIG. 3 is a line drawing evidencing a second exemplary embodiment of a pressure sensor according to the present application.

[0028] FIG. 4 is a line drawing evidencing a third exemplary embodiment of a pressure sensor according to the present application

DETAILED DESCRIPTION OF THE INVENTION

[0029] The pressure sensor according to the invention, comprising at least one pressure measuring cell, a pressure balancer, as well as at least one measurement line for transferring a pressure applied upon the pressure means to a pressure measuring cell, is characterized in that the pressure sensor comprises at least one compensation line, which shows preferably the same features as the measurement line, wherein the compensation line is preferably arranged parallel in reference to the measurement line.

[0030] The present invention is based on the acknowledgment that precise and cost-effective compensation of thermally and mechanically induced measurement faults can occur particularly easily by compensating the measurement fault in a mechanical fashion, wherein preferably the following expensive electronic compensation devices can be waived or at least be embodied in a much less expensive fashion.

[0031] By the compensation line provided according to the invention, which preferably shows the same features as the measurement line and is preferably arranged parallel to the measurement line, it is achieved that a temperature applied upon the measurement line and/or a mechanical impact upon the measurement line equally influences the compensation line. Due to the fact that the measurement line and the compensation line show identical features, which include particularly identical thermal and mechanical features, external influences trigger identical effects in both lines so that a measurement fault occurring in the measurement line, particularly a change in pressure, triggers the same effect in the compensation line. A compensation of the measurement fault can then occur mechanically and/or electronically.

[0032] The measurement line and the compensation line shall further ideally be filled with the same transfer medium, preferably show the same cross-section, contain the same volume of transfer medium, and be arranged as closely as possible to each other.

[0033] The measurement line and the compensation line can here be embodied as so-called capillaries, i.e. as flexible lines, as pipelines, as bores in an element arranged between the pressure means and the pressure measuring cell, or combinations thereof.

[0034] The influence of the processing temperature upon the measurements can be compensated in a particularly simple fashion if the compensation line is connected to a pressure-insensitive element recreating the pressure balancer, which is subjected to the same processing conditions in the same fashion as the pressure balancer. With a respective pressure-insensitive element recreating the pressure means it is achieved that the processing temperature affects in the same fashion the transfer medium contained in the compensation line as that in the pressure balancer, so that in both lines, the compensation line and the measurement line, the same temperature impact is yielded and thus in both lines the same heating and thus expansion of the transfer medium occurs.

[0035] A particularly clever arrangement can be yielded by integrating the pressure means and the pressure-insensitive element recreating the pressure means when the pressure-insensitive element and the pressure means are jointly arranged in a processing connection for arranging the pressure means in a process environment.

[0036] A particularly space-saving arrangement, which also shows as homogenous as possible a temperature impact upon the pressure means and the pressure-insensitive element, is given when the pressure-insensitive element is embodied surrounding the pressure means in an annular fashion. Such an arrangement is suggested because the pressure means generally shows a circularly embodied membrane to compensate for the pressure in the process environment.

[0037] In order to yield a temperature impact upon the pressure means and the pressure-insensitive element as homogeneously as possible it is advantageous for the pressure-insensitive element to show an area facing the process with a size that is approximately equivalent to the area of the pressure means facing the process, preferably is identical thereto. In a concrete embodiment here the annular area of the pressure-insensitive element surrounding the pressure means is identical to the membrane area of the pressure balancer.

[0038] Influences of temperature and mechanical influences applied upon the transfer line arranged between the pressure means and the pressure measuring cell can be compensated in a particularly good fashion when the measurement line and the compensation line are arranged in a common cover embodied as a mechanically protective means. By an appropriately common cover any temperature influences are evenly distributed to the measurement line and the compensation line so that temperature influences affect both lines identically. By such mechanical protection, any mechanical influences, for example excessively tight radii or bends, particularly in case of capillaries, are also transferred to both lines such that measurement faults induced thereby also affect both lines simultaneously.

[0039] The pressure measuring cell can here be embodied as a conventional pressure measuring cell, with its measuring membrane being embodied that it is impinged from one side, particularly the front, with the pressure of the measurement line and from the other side, particularly the rear, with the pressure of the compensation line. This represents a more cost-effective solution.

[0040] Alternatively, the pressure measuring cell can be embodied to detect both positive as well as negative pressures.

[0041] Here, compensation of the measurement fault induced by temperature or mechanical influences can then occur for example such that the pressure measuring cell is embodied as a pressure cell with two sides that pressure may impinge upon, which on one side is connected to the measurement line and on the other side to the compensation line. This way on the one side the measuring pressure and the measurement fault are applied to the pressure measuring cell and on the other side only the measurement fault, which results in that a purely mechanical compensation of the measurement fault occurs in the pressure measuring cell.

[0042] The present invention can therefore also be used advantageously for pressure sensors used for measuring pressure differences.

[0043] Such a pressure sensor is characterized in that the sensor comprises a first and a second pressure means and two compensation lines, wherein the pressure difference measuring cell is connected on one side to the measurement line of the first pressure means and the compensation line allocated to the second pressure balancer, and on the other side to the measurement line of the second pressure means and the compensation line allocated to the first pressure balancer. This way temperature induced and mechanically induced measurement faults are compensated by purely mechanical means at both sides of the pressure means such that no additional electronic measuring system is required.

[0044] As an alternative to compensating measurement faults via a pressure difference measuring cell, the pressure sensor may also show two pressure measuring cells and subsequently here electronic compensation of measurement faults can occur. A respective sensor shows a first pressure measuring cell and a second pressure measuring cell as well as an electronic measuring system. The first pressure measuring cell is connected to the measurement line, wherein this allows the detection of a measurement at the first pressure measuring cell at the outlet side. The second pressure measuring cell is connected to the compensation line wherein this allows the detection of a compensation value at the second pressure measuring cell at the outlet side. The measurement and the compensation value are both fed to the electronic measuring system, wherein by forming a difference therefrom this yields a compensated measurement, which can be obtained at the outlet side.

DETAILED DESCRIPTION OF THE FIGURES

[0045] FIG. 1 illustrates the prior art.

[0046] FIG. 2 shows a first exemplary embodiment of a pressure sensor 1 according to the present application. The pressure sensor 1 essentially comprises a pressure measuring cell 5, which is arranged in a housing 11 of the pressure sensor 1. The pressure measuring cell 5 is embodied in the present exemplary embodiment as a pressure difference measuring cell and connected with one of its connections via a measurement line 13 to a pressure means 3. With its second connector the pressure difference measuring cell 5 is connected via a compensation line 15 to a pressure-insensitive element 4. The pressure means 3 and the pressure-insensitive element 4 are both arranged in a process connection 9 to fasten the pressure means 3 in a process environment.

[0047] Alternatively, the pressure measuring cell 5 can be embodied in the present design also as a conventional pressure measuring cell or as a Piezo-measuring cell.

[0048] Both the measurement line 13 and the compensation line 15 are filled with an incompressible transfer medium, for example oil. This way a measuring pressure p.sub.M, applied upon the pressure means 3, is transferred via the measurement line 13 to the first connection of the pressure difference -measuring cell 5. The compensation line is connected at the other connection of the pressure difference measuring cell 5, which is also filled with the transfer medium.

[0049] In the present exemplary embodiment the measurement line 13 and the compensation line 15 are arranged in a common cover 17, which acts as a mechanical protection for both lines 13, 15. With the cover 17 it is ensured that an interfering temperature T.sub.INTERFERE, acting in the area of the lines 13, 15 upon the pressure sensor 1, identically impacts the measurement line 13 and the compensation line 15. A change in volume of the transfer medium in the measurement line 13 and the compensation line 15, induced by temperature, is therefore triggered identically in both lines.

[0050] Further, the pressure-insensitive element 4 is integrated in the process connection 9, annularly surrounding the pressure means 3. The pressure means 3 and the pressure-insensitive element 4 show in the present exemplary embodiment areas of identical size facing the process environment such that any influence of the process temperature T.sub.P upon the pressure means 3 and the pressure-insensitive element 4 also occurs identically. Only the process pressure P.sub.M impacts exclusively the pressure means 3. With the present embodiment it is possible that any temperature-induced measurement faults caused by a volume change of the transfer medium, triggered by the process temperature T.sub.P or the interference temperature T.sub.INTERFERE, occur identically in the measurement line 13 as well as the compensation line 15. This effect is in particular also supported by the fact that in the measurement line 13 and in the compensation line 15 the same volume of transfer medium is filled and the measurement line 13 and the compensation line 15 are guided parallel in reference to each other in the cover 17.

[0051] Due to the fact that the pressure difference measuring cell 5 is connected at its first connection to the measurement line 13 and at its other connection to the compensation line 15, here a purely mechanical compensation of temperature-induced measurement faults is achieved. Here, in the measuring line 13 the measuring pressure P.sub.M is effective as well as a pressure P.sub.T induced by the process temperature T.sub.P and the interfering temperature T.sub.INTERFERE. Now only the temperature-induced pressure P.sub.T acts in the compensation line 15, because the pressure-insensitive element 4 prevents any impact of the measuring pressure P.sub.M. Due to the intrinsic features of the pressure difference measuring cell, here the pressure difference measuring cell 5 only detects the measuring pressure P.sub.M and renders it available via a suitable electronic system. The present embodiment of the pressure sensor 1 does not exclude the provision of any additional electronic devices for compensating measurement faults. Due to the very simple and direct compensation of temperature-induced measurement faults provided, these can be designed in a considerably less complex fashion than those of prior art.

[0052] Due to the fact that in the present exemplary embodiment the measurement line 13 and the compensation line 15 are guided in a common cover 17 and this common cover 17 simultaneously acts as a mechanical protection for the two lines 13, 15, additionally mechanically induced measurement faults are considerably reduced and further, due to the common guide in the cover 17, they also affect both lines 13, 15 identically, so that here too an automatic compensation of respective measurement faults occurs.

[0053] FIG. 3 shows another exemplary embodiment of a pressure sensor 1 according to the present application. Unlike the exemplary embodiment illustrated in FIG. 2 the exemplary embodiment according to FIG. 3 shows no pressure difference measuring cell but two separate measuring cells 5.1 and 5.2. The first of these two measuring cells 5.1 is connected via the measurement line 13 to the pressure means 3 and the second of the measuring cells 5.2 via the compensation line 15 to the pressure-insensitive element 4.

[0054] According to the present exemplary embodiment respectively here compensation of measurement faults occurs not in a mechanical fashion but rather such that the measurement fault is eliminated in an electronic measuring system 19, arranged downstream in reference to one of the pressure measuring cells 5.1, 5.2, by forming a difference. This can occur either in an analog or digital fashion.

[0055] FIG. 4 shows a third exemplary embodiment, in which pressure difference sensors can be used according to the present invention.

[0056] The pressure sensor 1 shown in FIG. 4 comprises a pressure difference measuring cell 5, wherein in the present exemplary embodiment two pressure balancers 3.1 and 3.2 being provided. The first pressure means 3.1 is here connected via a first measurement line 13.1 to one side of the pressure difference sensor 5. The compensation line 15.1 allocated to the first pressure means 3.1, as already discussed with reference to the exemplary embodiment shown in FIG. 2, is connected to the other side of the pressure difference sensor 5 such that compensation occurs of measurement faults induced in reference to the first pressure means 3.1. In order to allow measuring a pressure difference the second pressure means 3.2 is connected via a second measurement line 13.2 to the input of the pressure difference measuring cell 5 opposite the first measurement line 13.1. Accordingly, measurement faults induced in reference to the second pressure means 3.2 are coupled via a second compensation line 15.2 to the other input of the pressure difference measuring cell 5, i.e. the same input by which the first pressure means 3.1 is also connected. Both pressure balancers 3.1, 3.2 are therefore error compensated such that the pressure difference measuring cell 5 only detects the pressure difference between the two measurement pressures P1 and P2. As already described in connection with the previous exemplary embodiments the measurement lines and compensation lines 13.1, 15.1, 13.2, 15.2 are each arranged in common covers 17.1, 17.2 such that an even impact is ensured of temperature and mechanical influences.

[0057] LIST OF REFERENCE NUMBERS

[0058] 1 Pressure sensor

[0059] 3 Pressure means

[0060] 4 Pressure-insensitive element

[0061] 5 Pressure measuring cell

[0062] 7 Capillaries

[0063] 9 Process connection

[0064] 11 Housing

[0065] 13 Measurement line

[0066] 15 Compensation line

[0067] 17 Cover

[0068] 19 Electronic measuring system

[0069] P.sub.M Measuring pressure

[0070] T.sub.P Process temperature

[0071] P.sub.T Temperature-induced pressure

[0072] The references recited herein are incorporated herein in their entirety, particularly as they relate to teaching the level of ordinary skill in this art and for any disclosure necessary for the commoner understanding of the subject matter of the claimed invention. It will be clear to a person of ordinary skill in the art that the above embodiments may be altered or that insubstantial changes may be made without departing from the scope of the invention. Accordingly, the scope of the invention is determined by the scope of the following claims and their equitable equivalents.