Highly ordered arrays of micelles or nanoparticles on a substrate surface and methods for producing the same
09789458 · 2017-10-17
Assignee
Inventors
- Christian Williges (Berlin, DE)
- Christoph Morhard (Ludwigsburg, DE)
- Joachim P. Spatz (Stuttgart, DE)
- Robert Brunner (Jena, DE)
Cpc classification
B05D3/068
PERFORMING OPERATIONS; TRANSPORTING
C23C18/06
CHEMISTRY; METALLURGY
B82Y40/00
PERFORMING OPERATIONS; TRANSPORTING
G03F1/68
PHYSICS
C23C18/08
CHEMISTRY; METALLURGY
B81C2201/0149
PERFORMING OPERATIONS; TRANSPORTING
B01J19/0046
PERFORMING OPERATIONS; TRANSPORTING
B81C2201/0198
PERFORMING OPERATIONS; TRANSPORTING
B82Y30/00
PERFORMING OPERATIONS; TRANSPORTING
B81C1/00031
PERFORMING OPERATIONS; TRANSPORTING
Y10T428/24893
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
International classification
B01J19/00
PERFORMING OPERATIONS; TRANSPORTING
G03F1/68
PHYSICS
C23C18/08
CHEMISTRY; METALLURGY
C23C18/06
CHEMISTRY; METALLURGY
Abstract
The invention provides a method for increasing the order of an array of polymeric micelles or of nanoparticles on a substrate surface comprising a) providing an ordered array of micelles or nanoparticles coated with a polymer shell on a substrate surface and b) annealing the array of micelles or nanoparticles by ultrasonication in a liquid medium which is selected from the group comprising H.sub.2O, a polar organic solvent and a mixture of H.sub.2O and a polar organic solvent. In a related aspect, the invention provides the highly ordered arrays of micelles or nanoparticles obtainable by the methods of the invention.
Claims
1. A method for increasing an order of an array of polymeric micelles or of nanoparticles on a substrate surface comprising: a) providing an ordered array of micelles or nanoparticles coated with a polymer shell on a substrate surface, and b) annealing the array of micelles or nanoparticles by ultrasonication in a liquid medium which comprises a C.sub.1-C.sub.10 alkanol or a mixture of H.sub.2O and the C.sub.1-C.sub.10 alkanol, wherein the ultrasonication is effected at a frequency in a range of 20 kHz to 2 MHz, a power input in a range of 5 W/l to 50 W/l, and a temperature in a range from 15° C. to 70° C.
2. The method according to claim 1, wherein the liquid medium consists of ethanol or of a mixture of H.sub.2O and ethanol in a ratio in a range from 2:1 to 0.01:1.
3. The method according to claim 1, wherein the ultrasonication is effected for a time period in a range of 10 to 500 s.
4. The method according to claim 1, wherein the ordered array of micelles is a hexagonal array produced by a block copolymer micellar nanolithography (BCML) technique.
5. The method according to claim 1, wherein the substrate is a member selected from the group consisting of glasses, Si, SiO.sub.2, ZnO, TiO.sub.2, Al.sub.2O.sub.3, C, InP, GaAs, GaP, GaInP, and AlGaAs.
6. The method according to claim 1, wherein the micelles are micelles of a two-block- or multi-block copolymer selected from the group consisting of polystyrene (n)-b-poly (2-vinylpyridine (m), polystyrene (n)-b-poly (4-vinylpyridine (m), and polystyrene (n)-b-poly (ethylene oxide) (m), in which n and m indicate a number of repetition units and are, independently of one another, integers in a range of 10-10,000.
7. The method according to claim 1, wherein the nanoparticles coated with a polymer shell are metals, metal oxides or semiconductors.
8. The method according to claim 1, wherein the micelles are loaded with at least one metal salt.
9. The method according to claim 8, wherein the at least one metal salt is a member selected from the group consisting of salts of Au, Ag, Pd, Pt, In, Fe, Zr, Al, Co, Ni, Ga, Sn, Zn, Ti, Si and Ge.
10. The method according to claim 8, further comprising the following step: c) converting the at least one metal salt in said micelles by an oxidation or reduction treatment into inorganic nanoparticles and optionally partial or complete removal of an organic copolymer of the micelles by a plasma treatment.
11. The method according to claim 1, wherein the ultrasonication treatment results in an at least 10% increase of an order of the array of micelles or nanoparticles as indicated by a corresponding decrease of a standard deviation of a mean intermicelle or interparticle distance.
12. The method according to claim 1, wherein the substrate surface is prestructured with primary structures having mean distances in a range from to 25 nm to 10 μm, and the ordered array of micelles or inorganic nanoparticles is provided in an interspace between the primary structures.
13. The method according to claim 12, wherein the primary structures having mean distances in the range from to 25 nm to 10 μm are formed on the substrate surface by optical lithography, UV lithography, deep-UV lithography, laser lithography, electron-beam lithography or nano-Imprint techniques.
Description
BRIEF DESCRIPTION OF THE FIGURES
(1)
(2)
(3)
(4)
(5)
(6) The present invention is illustrated in more detail in the following non-limiting examples.
EXAMPLE 1
Preparation of Highly Ordered Arrays of Micelles on a Substrate Surface
(7) Arrays of gold-salt loaded micelles on a glass substrate were prepared by micellar block copolymer nanolithography essentially according to published methods (e.g. EP 1 027 157).
(8) As an initial step, a 5 mg/ml toluene solution of micelles of the diblock copolymer polystyrene-block-polyvinylpyridine (PS-b-P2VP; Mn(PS) 190.000; Mn (P2VP) 55.000; Mw/Mn=1.10) loaded with HAuCl.sub.4 was prepared and stored in a sealed glass vial.
(9) This micellar solution was applied on a glass substrate (24 mm×24 mm) by spin coating (6000 rpm, 1 min) in a spin coater (WS-400B, Laurell Technologies, North Wales, USA) and left drying.
(10) The conditions were adjusted so that a sample with a mean micelle distance of 68-72 nm and a standard deviation of the mean distance value in range of 9-13 nm was obtained. If desired, it is possible to decrease the initial degree of order by adding ultra pure H.sub.2O to the above polymer solution (e.g. 1 vol. %).
(11) The resulting nanostructured sample was placed in a commercial sonifier (Sanorex, Bandelion electronic, Berlin) and immersed in a liquid medium consisting of a mixture of ethanol:H.sub.2O in different ratios at room temperature and sonicated at a frequency of 35 kHz and a power input in the range of 5-50 W/l, preferably 15-30 W/l, for 120 s.
(12)
(13) The degree of order as used herein is indicated by the “sixfold bond-orientational order parameter” ψ.sub.6 as defined by D. Nelson and B. I. Halperin in Physical Review B 19.5 (1979), 2457-2484, for a hexagonal array.
(14)
with N.sub.bonds=number of connections between the central particle of a hexagon and its next neighbors; θ.sub.jk=angle between a central particle and 2 next neighbors in juxtaposition, k=central particle and j=neighbor.
(15) For an ideal structure exclusively consisting of perfect hexagons, the order parameter ψ.sub.6=1.
(16) A high order parameter corresponds to a low standard deviation of the interparticle distance, both values are largely inverse proportional to each other. Thus, for a more simple indication of the order of a nanostructured array, often the standard deviation of the interparticle or intermicelle distance is used herein.
(17) As evident from
(18) In order to assess the influence of the duration of the annealing treatment, a micellar array was prepared as indicated above and ultrasonicated for different time periods with an ethanol: H.sub.2O ratio of 2:1.
(19)
EXAMPLE 2
Preparation of Highly Ordered Arrays of Nanoparticles on a Substrate Surface
(20) A micellar array was prepared on a glass substrate and subjected to an ultrasound annealing treatment with varying solvent ratios analogous to Example 1.
(21) The resulting micellar array was subjected to a plasma treatment essentially according to published methods (e.g. EP 027 157). Typically, the substrate was treated with W10 plasma (90 vol. % argon and 10 vol. % hydrogen) at a pressure of 0.4 mbar for 45 minutes and 150 W power input in a PlasmaSystem 100 (PVA TePla, Wettenberg, Germany) device.
(22) In the course of this process, the polymer shell of said micelles was removed and the gold salt contained therein was reduced to elemental gold, whereby a highly ordered array of gold nanoparticles was obtained.
(23)
(24) The plasma treatment results in a slightly lower degree of order as compared with the initial micellar array and a corresponding increase of the standard deviation of the mean interparticle distance to about 14.5 nm for the non-annealed sample.
(25) A considerable increase of the degree of order of the nanoparticle array and a corresponding decrease of the standard deviation of the mean distance of the nanoparticle array was observed for each solvent ratio. In this case, however, a strong influence of the specific solvent ratio is evident. Best results were obtained with an ethanol:H.sub.2O ratio of 2:1.