Photosensitive resin composition, color filter and liquid crystal display device

Abstract

The present invention relates to a photosensitive resin composition for black matrix, as well as a color filter and a liquid crystal display (LCD) device formed by the composition. The aforementioned photosensitive resin composition comprises an alkali-soluble resin (A), a compound containing vinyl unsaturated group(s) (B), a photo initiator (C), quinonediazide sulfonic acid ester (D), a solvent (E) and black pigment (F). The alkali-soluble resin (A) includes epoxy resin having unsaturated group(s) (A-1), which is obtained by reacting an epoxy resin (i) having at least two epoxy groups with a compound (ii) having at least one vinyl unsaturated group and carboxyl group. The aforementioned photo initiator (C) includes an O-acyloxime compound (C-1).

Claims

1. A photosensitive resin composition, comprising: an alkaline-soluble resin (A), wherein the alkaline-soluble resin (A) comprises a resin having unsaturated group(s) (A-1), the resin having unsaturated groups (A-1) is synthesized by subjecting a mixture to a polymerization, and the mixture comprises an epoxy compound having at least two epoxy groups (i) and a compound having at least a carboxyl group and at least a vinyl unsaturated group (ii); a compound containing vinyl unsaturated group(s) (B); a photo initiator (C); quinonediazide sulfonic acid ester (D) synthesized by an ortho-naphthoquinone diazide sulfonic acid and a hydroxyl compound or a salt of the ortho-naphthoquinone diazide sulfonic acid and the hydroxyl compound, wherein the hydroxyl compound includes a hydroxyl aryl compound having a structure of Formula (III): ##STR00007## wherein, R.sub.21 to R.sub.23 are the same or different from each other, each of which independently represents a hydrogen atom or a C.sub.1 to C.sub.6 alkyl group; R.sub.24-R.sub.29 are the same or different from each other, each of which independently represents a hydrogen atom, a halogen atom, a C.sub.1 to C.sub.6 alkyl group, a C.sub.1 to C.sub.6 alkoxy group, a C.sub.1 to C.sub.6 alkenyl group and a cycloalkyl group; R.sub.30 and R.sub.31 are the same or different from each other, each of which independently represents a hydrogen atom, a halogen atom and a C.sub.1 to C.sub.6 alkyl group; x, y and z each independently represents an integer of 1 to 3; and k is 0 or 1; a solvent (E), and a black pigment (F), wherein the photo initiator (C) includes an O-acyloxime compound (C-1).

2. The photosensitive resin composition of claim 1, wherein the epoxy compound having at least two epoxy groups (i) includes a structure having Formula (I) or Formula (II): ##STR00008## wherein the R.sup.1, the R.sup.2, the R.sup.3 and the R.sup.4 are the same or different from each other, each of which independently represents a hydrogen atom, a halogen atom, an alkyl group with one to five carbon atoms, an alkoxy group with one to five carbon atoms, an aryl group with six to twelve carbon atoms or an aromatic alkyl group with six to twelve carbon atoms; ##STR00009## wherein the R.sup.5 to the R.sup.18 are the same or different from each other, each of which independently represents a hydrogen atom, a halogen atom, an alkyl group with one to eight carbon atoms or an aromatic group with six to fifteen carbon atoms, and the n represents an integer of zero to ten.

3. The photosensitive resin composition of claim 1, wherein the epoxy compound having at least two epoxy groups (i) includes a structure having Formula (I): ##STR00010## wherein the R.sup.1, the R.sup.2, the R.sup.3 and the R.sup.4 are the same or different from each other, each of which independently represents a hydrogen atom, a halogen atom, an alkyl group with one to five carbon atoms, an alkoxy group with one to five carbon atoms, an aryl group with six to twelve carbon atoms or an aromatic alkyl group with six to twelve carbon atoms.

4. The photosensitive resin composition of claim 1, wherein the epoxy compound having at least two epoxy groups (i) includes a structure having Formula (II): ##STR00011## wherein the R.sup.5 to the R.sup.18 are the same or different from each other, each of which independently represents a hydrogen atom, a halogen atom, an alkyl group with one to eight carbon atoms or an aromatic group with six to fifteen carbon atoms, and the n represents an integer of zero to ten.

5. The photosensitive resin composition of claim 1, wherein based on an amount of the alkali-soluble resin (A) as 100 parts by weight, an amount of the resin having unsaturated group(s) (A-1) is 30 to 100 parts by weight, an amount of the compound containing vinyl unsaturated group(s) (B) is 20 to 180 parts by weight, an amount of the quinonediazide sulfonic acid ester (D) is 3 to 40 parts by weight, an amount of the solvent (E) is 500 to 5000 parts by weight, and an amount of the black pigment (F) is 100 to 1,000 parts by weight.

6. The photosensitive resin composition of claim 1, wherein based on an amount of the compound containing vinyl unsaturated group(s) (B) as 100 parts by weight, an amount of the photo initiator (C) is 20 to 100 parts by weight.

7. The photosensitive resin composition of claim 1, wherein based on an amount of the compound containing vinyl unsaturated group(s) (B) as 100 parts by weight, an amount of the O-acyloxime compound (C-1) is 10 to 90 parts by weight.

8. A black matrix formed by a photosensitive resin, wherein the photosensitive resin composition comprises: an alkaline-soluble resin (A), wherein the alkaline-soluble resin (A) comprises a resin having unsaturated group(s) (A-1), the resin having unsaturated groups (A-1) is synthesized by subjecting a mixture to a polymerization, and the mixture comprises an epoxy compound having at least two epoxy groups (i) and a compound having at least a carboxyl group and at least a vinyl unsaturated group (ii); a compound containing vinyl unsaturated group(s) (B); a photo initiator (C); quinonediazide sulfonic acid ester (D) synthesized by an ortho-naphthoquinone diazide sulfonic acid and a hydroxyl compound or a salt of the ortho-naphthoquinone diazide sulfonic acid and the hydroxyl compound, wherein the hydroxyl compound includes a hydroxyl aryl compound having a structure of Formula (III): ##STR00012## wherein R.sub.21 to R.sub.23 are the same or different from each other, each of which independently represents a hydrogen atom or a C.sub.1 to C.sub.6 alkyl group; R.sub.24-R.sub.29 are the same or different from each other, each of which independently represents hydrogen atom, a halogen atom, a C.sub.1 to C.sub.6 alkyl group, a C.sub.1 to C.sub.6 alkoxy group, a C.sub.1 to C.sub.6 alkenyl group and a cycloalkyl group; R.sub.30 and R.sub.31 are the same or different from each other, each of which independently represents a hydrogen atom, a halogen atom and a C.sub.1 to C.sub.6 alkyl group; x, y and z each independently represents an integer of 1 to 3; and k is 0 or 1; a solvent (E), and a black pigment (F), wherein the photo initiator (C) includes an O-acyloxime compound (C-1).

9. The black matrix of claim 8, wherein the epoxy compound having at least two epoxy groups (i) includes a structure having Formula (I) or Formula (II): ##STR00013## wherein the R.sup.1, the R.sup.2, the R.sup.3 and the R.sup.4 are the same or different from each other, each of which independently represents a hydrogen atom, a halogen atom, an alkyl group with one to five carbon atoms, an alkoxy group with one to five carbon atoms, an aryl group with six to twelve carbon atoms or an aromatic alkyl group with six to twelve carbon atoms; ##STR00014## wherein the R.sup.5 to the R.sup.18 are the same or different from each other, each of which independently represents a hydrogen atom, a halogen atom, an alkyl group with one to eight carbon atoms or an aromatic group with six to fifteen carbon atoms, and the n represents an integer of zero to ten.

10. The black matrix of claim 8, wherein the epoxy compound having at least two epoxy groups (i) includes a structure having Formula (I): ##STR00015## wherein the R.sup.1, the R.sup.2, the R.sup.3 and the R.sup.4 are the same or different from each other, each of which independently represents a hydrogen atom, a halogen atom, an alkyl group with one to five carbon atoms, an alkoxy group with one to five carbon atoms, an aryl group with six to twelve carbon atoms or an aromatic alkyl group with six to twelve carbon atoms.

11. The black matrix of claim 8, wherein the epoxy compound having at least two epoxy groups (i) includes a structure having Formula (II): ##STR00016## wherein the R.sup.5 to the R.sup.18 are the same or different from each other, each of which independently represents a hydrogen atom, a halogen atom, an alkyl group with one to eight carbon atoms or an aromatic group with six to fifteen carbon atoms, and the n represents an integer of zero to ten.

12. The black matrix of claim 8, wherein based on an amount of the alkali-soluble resin (A) as 100 parts by weight, an amount of the resin having unsaturated group(s) (A-1) is 30 to 100 parts by weight, an amount of the compound containing vinyl unsaturated group(s) (B) is 20 to 180 parts by weight, an amount of the quinonediazido sulfonic acid ester (D) is 3 to 40 parts by weight, an amount of the solvent (E) is 500 to 5000 parts by weight, and an amount of the black pigment (F) is 100 to 1,000 parts by weight.

13. The black matrix of claim 8, wherein based on an amount of the compound containing vinyl unsaturated group(s) (B) as 100 parts by weight, an amount of the photo initiator (C) is 20 to 100 parts by weight.

14. The black matrix of claim 8, wherein based on an amount of the compound containing vinyl unsaturated group(s) (B) as 100 parts by weight, an amount of the O-acyloxime compound (C-1) is 10 to 90 parts by weight.

15. A color filter characterized by including the black matrix of claim 8.

16. A liquid crystal display (LCD) device characterized by including the color filter of claim 15.

Description

DETAILED DESCRIPTION

(1) Reference will now be made in detail to the present embodiments of the invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers are used in the drawings and the description to refer to the same or like parts.

EXAMPLES

Synthesis Example 1L Method of Synthesizing Resin Having Unsaturated Group(s) (A-1-1)

(2) The components comprising 100 parts by weight of the fluorine compound containing epoxy group(s) (trade name ESF-300, manufactured by NIPPON STEEL CHEMICAL Co., Ltd.; epoxy equivalent per weight: 231), 30 parts by weight of the acrylic acid, 0.3 parts by weight of the benzyltriethylammonium chloride, 0.1 parts by weight of the 2,6-di-t-butyl-p-cresol and 130 parts by weight of the propylene glycol methyl ether acetate were continuously charged to a 500 mL four-necked conical flask, in a feeding speed of 25 parts by weight per minute under 100° C. to 110° C. to polymerize for 15 hours. After the reaction was completed, a yellowish clear mixed solution with 50 wt % of solid content was obtained.

(3) Next, 100 parts by weight of the resulted yellowish clear mixed solution was dissolved in 25 parts by weight of ethylene glycol monoethyl ether acetate, where 6 parts by weight of tetrahydrophthalic anhydride and 13 parts by weight of benzophenone tetracarboxylic dianhydride (BTDA) were also added thereto, followed by heating the reaction to 110° C. to 115° C. for 2 hours, thereby obtaining the resin having unsaturated group(s) (A-1-1) with acid value of 98.0 mg KOH/g.

Synthesis Example 2: Method of Synthesizing Resin Having Unsaturated Group(s) (A-1-2)

(4) The components comprising 100 parts by weight of the fluorine compound containing epoxy group(s) (trade name ESF-300, manufactured by NIPPON STEEL CHEMICAL Co., Ltd.; epoxy equivalent per weight: 231), 30 parts by weight of the acrylic acid, 0.3 parts by weight of the benzyltriethylammonium chloride, 0.1 parts by weight of the 2,6-di-t-butyl-p-cresol and 130 parts by weight of the propylene glycol methyl ether acetate were continuously charged to a 500 mL four-necked conical flask, in a feeding speed of 25 parts by weight per minute under 100° C. to 110° C. to polymerize for 15 hours. After the reaction was completed, a yellowish clear mixed solution with 50 wt % of solid content was obtained.

(5) Next, 100 parts by weight of the resulted yellowish clear mixed solution was dissolved in 25 parts by weight of ethylene glycol monoethyl ether acetate, where 13 parts by weight of tetrahydrophthalic anhydride, for reacting under 90° C. to 95° C. for 2 hours. And then, and 6 parts by weight of tetrahydrophthalic anhydride were added to the above-mentioned reactant, followed by heating the reaction to 90° C. to 95° C. for 4 hours, thereby obtaining the resin having unsaturated group(s) (A-1-2) with acid value of 99.0 mg KOH/g.

Synthesis Example 3: Method of Synthesizing Resin Having Unsaturated Group(s) (A-1-3)

(6) The components comprising 400 parts by weight of the epoxy compound (trade name NC-3000, manufactured by NIPPON KAYAKU Co., Ltd.; epoxy equivalent per weight: 228), 102 parts by weight of the acrylic acid, 0.3 parts by weight of the methoxyphenol, 5 parts by weight of the triphenyl phosphine and 264 parts by weight of the propylene glycol methyl ether acetate were continuously charged to the flask as above-mentioned, for reacting under 95° C. to polymerize for 9 hours. After the reaction was completed, an intermediate product with acid value of 2.2 mg KOH/g was obtained. Next, the resulted intermediate product was added with 151 parts by weight of tetrahydrophthalic anhydride, for reacting under 95° C. for 4 hours, thereby obtaining the resin having unsaturated group(s) (A-1-3) with acid value of 102 mg KOH/g and averaged molecular weight of 3,200.

Synthesis Example 4: Method of Synthesizing Other Alkali-Soluble Resin (A-2-1)

(7) The components comprising 1 parts by weight of 2,2′-azobis (isobutyronitrile), 240 parts by weight of the propylene glycol monomethyl ether acetate, 20 parts by weight of the methacrylic acid, 15 parts by weight of the styrene, 35 parts by weight of methyl methacrylate, 10 parts by weight of glycerol monomethacrylate and 20 parts by weight of N-phenyl maleimide were continuously charged to a round-bottom flask that was equipped with a stirrer and a condenser and purged with nitrogen gas. Next, the reaction solution was slowly stirred and heated to 80° C. to polymerize for 4 hours. Afterward, the reaction solution was further heated to 100° C. and added with 0.5 parts by weight of 2,2′-azobis (isobutyronitrile) to polymerize for 1 hour, thereby obtaining the other alkali-soluble resin (A-2-1).

Synthesis Example 5: Method of Synthesizing Other Alkali-Soluble Resin (A-2-2)

(8) The components comprising 2 parts by weight of 2,2′-azobis (isobutyronitrile), 300 parts by weight of the propylene glycol monomethyl ether, 15 parts by weight of the methacrylic acid, 15 parts by weight of ethyl 2-hydroxyacrylate and 70 parts by weight of benzyl methacrylate were continuously charged to a round-bottom flask that was equipped with a stirrer and a condenser and purged with nitrogen gas. Next, the reaction solution was slowly stirred and heated to 80° C. to polymerize for 3 hours. Afterward, the reaction solution was further heated to 100° C. and added with 0.5 parts by weight of 2,2′-azobis(isobutyronitrile) to polymerize for 1 hour, thereby obtaining the other alkali-soluble resin (A-2-2).

(9) Method of Manufacturing Photosensitive Resin Composition

(10) The following examples are directed to the preparation of the photosensitive resin composition of Examples 1 to 7 and Comparative Examples 1 to 7 according to TABLE 1.

Example 1

(11) 100 parts by weight of the resin having unsaturated group(s) (A-1-1) of Synthesis Example 1, 60 parts by weight of the dipentaerythritol hexaacrylate (B-1), 30 parts by weight of ethanone, 1-[9-ethyl-6-(2-methylbezoyl)-9H-carbozole-3-yl]-1-(O-acetyl oxime) (the trade name OXE02, manufactured by Ciba Specialty Chemicals Co.; C-1-1), 20 parts by weight of the ortho-naphthoquinone diazide sulfonic acid ester of 4,4′-[1-[4-[-1-(4-hydroxyphenyl)-1-methylethyl]phenyl]ethylidene]bisphenol and ortho-naphthoquinone diazide-5-sulfonic acid (D-1), 300 parts by weight of the black pigment of the C.I. pigment black 7 (the trade name MA100, manufactured by Mitsubishi Chemical Co.; F-1), 100 parts by weight of another black pigment of the C.I. pigment black 7 (the trade name MA230, manufactured by Mitsubishi Chemical Co.; F-2), 2,000 parts by weight of propylene glycol monomethyl ether acetate (E-1) and 500 parts by weight of ethyl 3-ethoxypropanoate (E-2) were stirred and mixed well in a shaking mixer, so as to form a solution state of a photosensitive resin composition of Example 1. And then, the properties of the photosensitive resin composition were determined by using the following evaluation methods and resulted in TABLE 1. The detection methods were described as follows.

Examples 2 to 7 and Comparative Examples 1 to 7

(12) Examples 2 to 7 and Comparative Examples 1 to 7 were practiced with the same method as in Example 1 by using various kinds or usage of the components. The formulation, the details and the evaluation results were listed in TABLE 1 (Examples 1 to 7 and Comparative Examples 1 to 7) rather than focusing or mentioning them in details.

Method of Manufacturing Black Matrix

Application Example 1

(13) The photosensitive resin composition of Example 1 was coated unto a glass substrate (100 mm×100 mm) by a spin-coater (Opticoat MS-A150, MIKASA. Co., Tokyo, Japan). And then, the coated resin composition was dehydration under reduced pressure of 100 mmHg for 5 seconds and prebaked in an oven at 85° C. for 3 minutes, so as to form a prebaked and coated film with a thickness of about 1.2 μm.

(14) Next, the prebaked and coated film was exposed under a given mask by using UV light (AG500-4N; manufactured by M&R Nano Technology) in 200 mJ/cm.sup.2, immersed in a developing solution (0.04% potassium hydroxide) at 23° C. for 2 minutes, washed by water, and then postbaked at 230° C. for 60 minutes, thereby forming a black matrix (or called as a shielding layer) with a thickness of 1.0 μm. The resulted black matrix was evaluated by the following methods and the results were listed as TABLE 1.

Application Examples 2 to 7 and Comparative Application Examples 1 to 7

(15) The black matrixes (or called as the shielding layers) of Application Examples 2 to 7 and Comparative Application Examples 1 to 7 were practiced with the same method as in Application Example 1 by using various kinds or usage of the components. The formulation, the amount of the components and the evaluation results were listed in TABLE 1 (Application Examples 1 to 7) and TABLE 2 (Comparative Application Examples 1 to 7) rather than focusing or mentioning them in details.

(16) Evaluation Methods

(17) The adhesiveness and residue after being developed of the above-mentioned photosensitive resin compositions and the black matrixes (or called as the shielding layers) by using the same were assessed by using the following evaluation methods under low-luminance of the exposure condition.

(18) 1. Adhesiveness after being Developed

(19) The prebaked and coated films having 1.2 μm of thickness of EXAMPLES 1 to 7 and COMPARATIVE EXAMPLES 1 to 7 were exposed under a given mask by using UV light (provided by a exposure machine, for example, Model No. AG500-4N, manufactured by M&R Nano Technology Co. Ltd.) in 100 mJ/cm.sup.2, immersed in a developing solution (0.04% potassium hydroxide) at 23° C. for 2 minutes. After removing the unexposed portion, 100 columns with a diameter of 20 μm were developed, washed by water, observed by a microscope (Eclipse 50i, manufactured by Nikon) for counting the number of developable columns, thereby evaluating the adhesiveness after being developed according to the following criteria:

(20) ◯: 0≦Numbers of Damaged Columns per 100 Columns <5

(21) Δ: 5≦Numbers of Damaged Columns per 100 Columns <10

(22) x: 10≦Numbers of Damaged Columns per 100 Columns

(23) 2. Residue after being Developed

(24) Those prebaked and coated films having 1.2 μm of thickness were exposed under a given mask by using UV light (provided by a exposure machine, for example, Model No. PLA-501F, manufactured by Canon Co. Ltd.) in 100 mJ/cm.sup.2, immersed in a developing solution (0.04% potassium hydroxide) at 23° C. for 1 minute. And then, the unexposed portion was removed, washed by water and postbaked at 235° C. for 30 minutes, so that a desired photosensitive resin pattern was formed on a glass substrate. The residue from the unexposed portion was observed and determined by a microscope, thereby evaluating the residue after being developed according to the following criteria:

(25) ◯: No residue

(26) Δ: A little residue

(27) x: Many residues

(28) According to the results of Examples 1 to 7 listed in TABLE 1, the resulted photosensitive resin compositions will exhibit excellent adhesiveness after being developed if such resin compositions include specific amounts of the alkali-soluble resin (A), the compound containing vinyl unsaturated group(s) (B), the photo initiator (C), the quinonediazide sulfonic acid ester (D), the solvent (E) and the black pigment (F), and the patterns formed by such prebaked and coated films has no residue from the unexposed portion after being developed, thereby achieving the purpose of the present invention. In comparison, the adhesiveness of the resin layer of Comparative Examples 1 to 7 as listed in TABLE 1 are worse after being developed, and some residues from the unexposed portion often occurs after being developed.

(29) It is necessarily supplemented that, specific compounds, specific compositions, specific reaction conditions, specific processes, specific evaluation methods or specific instruments are employed as exemplary embodiments in the present invention, for illustrating the photosensitive resin composition and the color filter by using the same in the present invention. However, as is understood by a person skilled in the art, the photosensitive resin composition and the method for forming patterns by using the same in the present invention can include other compounds, other compositions, other reaction conditions, other processes, other evaluation methods or other instruments rather than limiting to the aforementioned examples.

(30) Although the present invention has been described in considerable detail with reference to certain embodiments thereof, other embodiments are possible. Therefore, the spirit and scope of the appended claims should not be limited to the description of the embodiments contained herein.

(31) It will be apparent to those skilled in the art that various modifications and variations can be made to the structure of the present invention without departing from the scope or spirit of the invention. In view of the foregoing, it is intended that the present invention cover modifications and variations of this invention provided they fall within the scope of the following claims.

(32) TABLE-US-00001 TABLE 1 Examples Comparative Examples Composition 1 2 3 4 5 6 7 1 2 3 4 5 6 7 Alkaline-soluble resin (A) A-1 A-1-1 100 70 80 50 (parts by weight) A-1-2 100 50 100 A-1-3 100 30 20 100 A-2 A-2-1 30 100 100 50 A-2-2 50 70 100 100 Compound containing B-1 60 50 20 40 40 60 50 40 20 80 vinyl unsaturated group(s) B-2 30 50 60 100 180 30 50 100 180 60 (B) (parts by Photo initiator (C) C-1 C-1-1 30 10 20 30 20 (parts by weight) C-1-2 25 10 C-1-3 90 30 40 C-2 C-2-1 10 10 20 30 10 C-2-2 10 25 25 10 Quinonediazido sulfonic D-1 20 10 30 3 20 10 4 acid ester (D) D-2 20 40 (parts by weight) D-3 20 Solvent (E) E-1 2000 3000 2000 2000 1000 4000 2000 3000 1000 4000 2000 2000 (parts by weight) E-2 500 3500 1000 2000 500 500 3500 500 1000 2000 Black pigment (F) F-1 300 300 800 500 300 300 450 800 (parts by weight) F-2 100 300 100 500 500 100 300 500 450 100 Evaluation items Adhesiveness after ◯ ◯ ◯ ◯ ◯ ◯ ◯ X X ◯ X X X X being developed Residue ◯ ◯ ◯ ◯ ◯ ◯ ◯ ◯ ◯ X ◯ X X X B-1 dipentaerythritol hexaacrylate B-2 dipentaerythritol tetraacrylate C-1-1 ethanone, 1-[9-ethyl-6-(2-methylbezoyl)-9H-carbozole-3-yl]-1-(O-acetyl oxime) (the trade name OXE02, manufactured by Ciba Specialty Chemicals Co.) C-1-2 1-[4-(phenylthio)phenyl]-octane-1,2-dione 2-(O-benzoyloxime) (the trade name OXE01 manufactured by CIBA SPECIALTY CHEMICALS Corporation) C-1-3 ethanone-1-[9-ethyl-6-(2-methyl-4-tetrahydrofuranlymethoxybenzoyl)-9H-carbazole-3-yl[-1-(O-acetyloxime) C-2-1 2-benzyl-2-N,N-dimethylamino-1-(4-morpholinophenyl)-1-butanone (the trade name of IRGACURE 369, manufactured by Ciba Specialty Chemicals Corporation) C-2-2 2-methyl-1-(4-methylthiophenyl)-2-morpholino-1-propanone (the trade name of IRGACURE 907, manufactured by Ciba Specialty Chemicals Corporation) D-1 ortho-naphthoquinone diazide sulfonic acid ester of 4,4′-[1-[4[-1-(4-hydroxyphenyl)-1-methylethyl]phenyl]ethylidene]bisphenol and ortho-naphthoquinone diazide-5-sulfonic acid D-2 ortho-naphthoquinone diazide sulfonic acid ester of 2,3,4-trihydroxybenzophenone and ortho-naphthoquinone diazide-5-sulfonic acid D-3 ortho-naphthoquinone diazide sulfonic acid ester of 2-(2,3,4-trihydroxylphenyl)-2-(2′,3′,4′-trihydroxylphenyl) propane and ortho-naphthoquinone diazide-5-sulfonic acid E-1 propylene glycol monomethyl ether acetate E-2 ethyl 3-ethoxypropanoate F-1 Trade name MA100 (manufactured by Mitsubishi Chemical Co.) F-2 Trade name MA230 (manufactured by Mitsubishi Chemical Co.)