SUBSTRATE CONTAINER

Abstract

A front opening wafer container with a forward and rearward sets of stacked V-shaped wafer edge receiving portions, the rearward set part of a wafer shelf component and comprising a thin film of PBT preformed and overmolded with a polycarbonate. The sets of stacked V-shaped wafer edge receiving portions providing between-shelf seating positions above on-shelf seating positions. The PBT providing a low friction sliding engagement surface for the wafer edges thereby providing uniform and consistent dropping of wafers from the between shelf position to the on-shelf position when the door of the wafer container is removed.

Claims

1-23. (canceled)

24. A connector fitting for fluid handling comprising: a coupling leg defining a bore that extends therethrough, said coupling leg and said bore being concentric about a leg axis, said coupling leg including a neck portion, a shoulder portion extending distal to said neck portion, a threaded portion extending distal to said shoulder portion, and a nipple portion extending distal to said threaded portion, said neck portion including locking features extending radially outward therefrom; and a nut threadably engaged with said threaded portion of the coupling leg, wherein said coupling leg and said nut are made of a melt processible resin.

25. The connector fitting of claim 1, wherein said locking features include a plurality of protrusions that are distributed about said leg axis at uniform angular intervals.

26. The connector fitting of claim 2, wherein said locking features include a flange portion concentric about the respective leg axis and extending radially outward from the neck portion.

27. The connector fitting of claim 26, wherein each of said plurality of protrusions extend distally from said flange portion and proximally from said shoulder portion.

28. The connector fitting of claims 25, wherein each of said plurality of protrusions include opposing flat sides that face tangentially about said leg axis and a flat top that faces radially outward from said leg axis.

29. The connector fitting of claim 24, wherein said locking features include a flange extending radially outward from said neck portion and a plurality of partitions extending distally from said flange, said flange and said plurality of partitions cooperating to define a plurality of pockets.

30. The connector fitting of claim 29, comprising a locking ring that defines and is concentric about a locking ring axis, said locking ring including an inner surface that includes one or more tabs that project radially inward toward said locking ring axis, said one or more tabs being configured to mate within one or more of said plurality of pockets.

31. The connector fitting of claim 30, wherein said one or more tabs of said locking ring are disposed within said one or more of said plurality of pockets of said neck portion, said partitions contacting with said one or more tabs to limit said locking ring to a within a range of rotation about said locking ring axis relative to said neck portion.

32. The connector fitting of claim 31, wherein said range of rotation is less than 15 degrees.

33. The connector fitting of claim 24, wherein said locking features include a plurality of spacers on opposing sides of the neck portion, said spacers extending orthogonal to said leg axis and including first and second opposing ends, wherein said first opposing ends of said plurality of spacers define a first plane, and said second opposing ends of said plurality of spacers define a second plane, said first plane and said second plane being parallel to each other and on opposing sides of said coupling leg.

34. A wrench for tightening the connector fitting of claim 25, the wrench comprising: a first head having a body portion; a first leg and a second leg extending in opposing directions from said body portion; a first tooth that cooperates with the first leg to define a first notch on the first leg; a second tooth that cooperates with the body portion to define a second notch on said body portion; and an end boss defined at a distal end of said second leg, wherein said first notch, said second notch, and said end boss are centered about a rotation axis.

35. The wrench of claim 34, comprising a handle portion, wherein said first head is disposed at a first end of said handle portion, said handle portion defining a handle axis.

36. The wrench of claim 11, comprising a second head at a second end of said handle portion, said second head including an arcuate spanner portion having an inside surface, a plurality of teeth protruding from said inside surface.

37. A method of installing the connector fitting of claim 25, comprising: providing at least one wrench; providing a set of installation instructions, said installation instructions comprising: securing said connector fitting by bringing said first notch of the wrench into contact with a first of said plurality of protrusions, said second notch into contact with a second of said plurality of protrusions, and said boss end into contact with a third of said plurality of notches; and tightening said nut onto said threaded portion of said coupling leg.

38. The connector fitting of claim 24, wherein the connector fitting is molded.

39. The connector fitting of claim 24, wherein the connector fitting is machined.

40. The connector fitting of claim 24, wherein the connector fitting is made from at least one of perfluoroalkoxy alkane (PFA), ethylene tetrafluoroethylene (ETFE), and fluorinated ethylene propylene (FEP).

41. A wrench for use with fittings used in fluid handling systems comprising: a body, at least two pins extending perpendicularly from the body, the pins dimensioned and configured to mate with at least two tubular portions disposed on the body of a fluid handling fitting.

42. The wrench of claim 41, wherein the wrench has two opposing legs perpendicular to the body and the pins are opposingly distributed on the legs, dimensioned and configured to mate with at least one tubular portion on the fitting.

43. A wrench for use with fittings used in fluid handling systems comprising: a body, at least two opposing legs extending perpendicularly from the body, the legs comprising a first leg and a second leg dimensioned and configured such that the first leg is configured to engage a first end of a first spacer and the first end of a second spacer and the second leg is configured to engage the second end of the first spacer and the second end of the second spacer, said first spacer and said second spacer being disposed on the neck portion of a connector fitting.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0032] FIG. 1 is a perspective view of a front opening wafer container according to embodiments of the disclosure.

[0033] FIG. 2 is a front perspective view of a container portion of the wafer container of FIG. 1.

[0034] FIG. 3 is a partial exploded view of the container portion of FIG. 2 with the wafer shelf component removed.

[0035] FIG. 4 is a perspective view of the inside surface and side walls of the door of FIG. 1.

[0036] FIG. 5 is a side cross-sectional view of portions of a wafer container and illustrating the on-shelf seating position of a wafer with the door not in place according to an embodiment of the invention.

[0037] FIG. 6 is a side cross-sectional view of portions of the wafer container of FIG. 5 after the door has been placed and received by the container portion and illustrating the raising of the wafer to the between-shelf position with the door closed according to an embodiment of the invention.

[0038] FIG. 7 is a side cross-sectional view of portions of the wafer container of FIGS. 5 and 6 with the wafer container rotated whereby wafers in the container are oriented vertically for shipment according to an embodiment of the invention.

[0039] FIG. 8 is a perspective view of a polycarbonate wafer shelves with a pre-formed wafer engagement film overmolded with the polycarbonate according to an embodiment of the invention.

[0040] FIG. 9A is an elevational view of thin film strip suitable for a preform according to an embodiment of the invention.

[0041] FIG. 9B is an elevational view of a preformed thin film according to an embodiment of the invention.

[0042] FIG. 10 is an elevational view of a preformed thin film strip with taps extending from a functional portion of the strip for hold down purposes in the mold according to an embodiment of the invention.

[0043] FIG. 11 is a close up view of the wafer shelf component of FIG. 8 illustrating the insert strip (shown stippled) overmolded with polycarbonate according to an embodiment of the invention.

[0044] FIG. 12 is a close up view of the wafer shelf component of FIGS. 8 and 11 illustrating the V-shaped wafer receiving portions of the insert strip (shown stippled) overmolded with polycarbonate according to an embodiment of the invention.

[0045] FIG. 13 is a perspective view of a wafer receiving stacked ramp component suitable for attachment to a door or the back side of a wafer container according to an embodiment of the invention.

[0046] FIG. 14 is a cross-sectional view of a wafer shelf component mold piece illustrating a placement position for a preform according to an embodiment of the invention.

[0047] FIG. 15 is a cross-sectional view of a wafer shelf component mold having a clamping member according to an embodiment of the invention.

[0048] FIG. 16 is a cross-sectional view the mold of FIG. 15 with the clamping member securing the preform and with molten polymer being injected therein according to an embodiment of the invention.

[0049] FIG. 17 is a cross-sectional view the mold of FIG. 15 with the clamping member securing the preform and with molten polymer having been injected therein according to an embodiment of the invention.

[0050] FIG. 18 is a cross-sectional view the mold of FIG. 15 with the clamping member being retracted according to an embodiment of the invention.

[0051] FIG. 19 is a cross-sectional view the mold of FIG. 15 with the clamping member retracted and the polymer filing in the region previously displaced by the clamping member according to an embodiment of the invention.

[0052] FIG. 20 is a cross-sectional view of a wafer shelf component mold illustrating a placement position for a preform and an injection molding gate positioned in the cavity opposite from the placement position according to an embodiment of the invention.

[0053] FIG. 21 is a cross-sectional view of a wafer shelf component mold of FIG. 20 illustrating injection molding flow dynamics of the molten polymer according to an embodiment of the invention.

DETAILED DESCRIPTION

[0054] Referring to FIGS. 1-4, a front opening wafer container 20 comprises a container portion 22 and door 23 suitable for 300 mm 450 mm wafers 24. The container portion has left and right side walls 25, 26, a back wall 27, a bottom wall 28, a pair of wafer shelf components 30, a kinematic coupling 32 attached to the bottom wall, a robotic flange 34, and manual handle attachment structure 36. Wafers 24 are received through the open front 40 defined by the door frame 41 leading into the open interior 42.

[0055] Referring to FIGS. 1 and 4, the door 23 has a front side 43, a back side 44, a latch mechanism 45 accessible on the front side, and a wafer cushion component 46 attached at a recess 47 on the back side. The wafer engagement component has a plurality fingers 48, each with a V-shaped wafer edge receiving portion 49 with a ramp 53 for engaging a edge of a wafer, and a seating position 54 at the apex The fingers with the ramps form two sets of stacked ramps 55.

[0056] Referring to FIGS. 1-4 and 8-13, the wafer shelf component 30 may be attached to the sidewalls 25, 26 by way of connectors 50 and latches 52 that attach to features such as lugs 56 and nubs 57 on the sidewalls 25, 26 of the container portion (FIG. 3). The wafer shelf component 30 has a plurality of wafer shelves 60 with wafer seating ridges 62 extending transverse to the lengthwise dimension of the shelves 60. The wafer shelf component in embodiments has a plurality of. V-shaped wafer edge receiving portions 64 each with a ramp 65 (FIG. 12) forming a vertical set of stacked ramps 66. Each V-shaped wafer receiving portion 64 has a wafer edge seating position 67 at the apex of a V-shaped recess 68 (FIG. 11). Referring to FIG. 13, in some embodiments the set of stacked ramps 66 may be a stacked ramp component 70 separate from the shelves 60 and shelf component 30 may be attached to the back wall 27 such as at the location illustrated by the dashed lines 69 in FIG. 3. Alternatively, such a component may also be mounted on the inside or back side of the door 23 in lieu of the stacked ramps provided by the discrete wafer fingers 48 (FIG. 4). The component 70 may attach by conventional means such as press fitting tabs 71 with apertures onto nubs on the door or on the container portion or by means similar to the means for attaching the wafer shelf component described herein.

[0057] Referring to FIGS. 5, 6, and 7, when the door 23 closes the open front 40 with wafers 24 on the shelves 60, the wafers ride up the ramps 76 from a “on-shelf” seating position 75 to seat in the apex of the V-shaped recess 68 in a “ between-shelves” seating position 77. When the door 23 is removed the wafers slide down to again seat on the shelves. See U.S. Pat. No. 6,267,245, owned by the owner of the instant application and incorporated herein by reference for all purposes. The inventors have found that ramps formed of polycarbonate, a common material used in wafer containers, have a high coefficient of friction and the wafers may fail to fully drop to the shelf as the door is removed, as is illustrated by the dashed line 80 in FIG. 5. An effective solution has been to utilize PBT as the wafer edge contact surface which has been found to substantially eliminate the issue of wafers failing to fully drop to the shelves upon removal of the door. The stack of wafer edge receiving portions 64 as illustrated comprises a strip 84 of PBT that is provided by overmolding. The strip is bonded to a PC base portion 86. In other embodiments, the door 23 may include a non-PBT wafer cushion with a non-PBT wafer engagement surface. Where the set of stacked ramps is defined by discrete fingers 48 which deflect under loading (FIG. 4), the higher coefficient of friction of the polycarbonate or other polymers compared to PBT is not as much of a factor. Moreover, as the door is moved away, the wafer will necessarily fall from at least one of the front or back V-shaped wafer receiving portions and then engage the shelf. The shelf will then “grip” the wafer such that it will necessarily release from the door. Use of the PBT strip has been found to provide uniform and consistent release characteristics of the wafers from the between-shelves seating position to the on-shelf seating position. Notably, it is known that PBT can release contaminants, although it has been found that the quantities utilized in this application, do not appreciably increase contamination issues. So the thin file strips herein that are suitable for use are less than an inch in width and less than 14 inches in length.

[0058] In embodiments, the PBT thin film may be 0.254 mm thick or within a range of plus or minus 25%. In other embodiments, the PBT thin film may be 254 mm±0.050 mm thick. In other embodiments the PBT thin film may be 0.100 to 0.400 mm thick. In other embodiments the PBT thin film may be less than 0.300 mm. In other embodiments the PBT thin film may be less than 0.500 mm. In other embodiments the PBT thin film may be less than 1 mm. The above ranges also may be applicable for other thin films such as PEEK, PTFE, PFA, PC, amongst others. Such films may be formed of combinations of polymers and have additives.

[0059] Referring to FIGS. 9A-9B and 14-19, a sequence of overmolding is illustrated according to embodiments of the disclosure. The flat strip 90 of FIG. 9A is subjected to a preform such as by vacuum molding as illustrated by various known vacuum molding means, for example as described in U.S. Pat. No. 3,041,669. Said reference is incorporated by reference herein for all purposes. The preform is configured as a preformed strip 92, as illustrated in FIG. 9B. The preform has an approximation or better of the final mold shape and configuration such that it seats within a mold 94 (FIG. 14). The preform is placed in the appropriate placement position 97 in a mold 94 which reflects the location of the stacked ramps 66 of the wafer shelf component 30. The mold is closed as shown in FIG. 15 such that a cavity 91 reflecting the final part shape is defined by the respective first and second mold parts 95, 96.

[0060] Suitable texturing may be provided with the thin film before insertion in the component mold or the mold may have surface treatment to modify the thin film surface texture in the final molded component.

[0061] The preform 92 may have retention portions 93, such as tabs, that are displaced from the functional portion 98 of the preform, that is displaced from the ramps and V-shaped engagement portions. The retention portions may be gripped or clamped in the mold 94, see FIGS. 15 and 16, by a clamping member 104, configured as a pin, so that the preform is retained in place during the flow of the molten polymer 100 during the injection molding process. Several such clamping members may be used and are ideally positioned on the “upstream” side of the preform part as seen in FIG. 16. After the mold cavity is has been filled (FIG. 17), such that the molten polymer is not flowing, or has substantially stopped flowing, the clamping member 104 is retracted (FIG. 18) The polymer may then backfill into the region 107 previously displaced by the clamping member 104. Other configurations of clamping members may be utilized such as a hook piece 109 operative in the first mold piece 95 as illustrated by the dashed lines in FIGS. 18 and 19.

[0062] In addition to insert molding a single film, a plurality of films can be laminated to form a composite film structure for moldable bonding to the semiconductor component handling devices. For instance, various film layers can include differing performance or containment characteristics listed herein, or to provide a combination thereof. A myriad of film lamination techniques known to one skilled in the film lamination art are envisioned for use with embodiments of the disclosure. For instance, U.S. Pat. Nos. 3,660,200, 4,605,591, 5,194,327, 5,344,703, and 5,811,197 disclose thermoplastic lamination techniques and are incorporated herein by reference in their entireties for all purposes.

[0063] Referring to FIGS. 20 and 21, another molding methodology is illustrated for retention of the preform in place. The preform 92 is placed in the placement position 97 as in the above methodology. The second mold piece includes a gate 116 for injection of the molten polymer and the gate is positioned at the mold cavity directly opposite the preform placement position 97. The force of the moving molten polymer driving against the preform effectively secures the preform in place on the first mold piece. The arrows indicate the flow directions of the molten polymer. Other known techniques may also be utilized to secure the preform in place.

[0064] The above references in all sections of this application are herein incorporated by references in their entirety for all purposes.

[0065] All of the features disclosed in this specification (including the references incorporated by reference, including any accompanying claims, abstract and drawings), and/or all of the steps of any method or process so disclosed, may be combined in any combination, except combinations where at least some of such features and/or steps are mutually exclusive.

[0066] Each feature disclosed in this specification (including references incorporated by reference, any accompanying claims, abstract and drawings) may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. Thus, unless expressly stated otherwise, each feature disclosed is one example only of a generic series of equivalent or similar features.

[0067] The disclosure is not restricted to the details of the foregoing embodiment (s). The disclosure extends to any novel one, or any novel combination, of the features disclosed in this specification (including any incorporated by reference references, any accompanying claims, abstract and drawings), or to any novel one, or any novel combination, of the steps of any method or process so disclosed The above references in all sections of this application are herein incorporated by references in their entirety for all purposes.

[0068] Although specific examples have been illustrated and described herein, it will be appreciated by those of ordinary skill in the art that any arrangement calculated to achieve the same purpose could be substituted for the specific examples shown. This application is intended to cover adaptations or variations of the present subject matter. Therefore, it is intended that the disclosure be defined by the attached claims and their legal equivalents, as well as the following illustrative aspects. The above described aspects embodiments of the disclosure are merely descriptive of its principles and are not to be considered limiting. Further modifications of the disclosure herein disclosed will occur to those skilled in the respective arts and all such modifications are deemed to be within the scope of the disclosure.