PHOTOVOLTAIC DEVICE AND METHODS OF FORMING THE SAME
20170288073 · 2017-10-05
Assignee
Inventors
- Benyamin Buller (Perrysburg, OH, US)
- Markus Gloeckler (Perrysburg, OH, US)
- Akhlesh Gupta (Perrysburg, OH, US)
- Rick Powell (Perrysburg, OH, US)
- Rui Shao (Perrysburg, OH, US)
- Gang Xiong (Perrysburg, OH, US)
- Ming Lun Yu (Perrysburg, OH, US)
- Zhibo Zhao (Perrysburg, OH, US)
Cpc classification
H01L31/0749
ELECTRICITY
Y02P70/50
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y02E10/541
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
H01L31/073
ELECTRICITY
Y02E10/543
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
International classification
H01L31/073
ELECTRICITY
Abstract
Methods and devices are described for a photovoltaic device. The photovoltaic device includes a glass substrate, a semiconductor absorber layer formed over the glass substrate, a metal back contact layer formed over the semiconductor absorber layer, and a p-type back contact buffer layer formed from one of MnTe, Cd.sub.1-xMn.sub.xTe, and SnTe, the buffer layer disposed between the semiconductor absorber layer and the metal back contact layer.
Claims
1. A method of manufacturing a photovoltaic device comprising the steps of: depositing a semiconductor absorber layer on a substrate, wherein the semiconductor absorber layer is formed from CdTe; depositing a p-type back contact buffer layer on the semiconductor absorber layer, wherein the p-type back contact buffer layer is formed from MnTe, and wherein the depositing a p-type back contact buffer layer step is an evaporation step whereby the MnTe back contact buffer layer is deposited on the semiconductor absorber layer by impinging evaporated MnTe onto the semiconductor absorber layer, the evaporated MnTe generated by heating a source of MnTe; and depositing a back contact layer on the p-type back contact buffer layer.
2. The method of claim 1, wherein the evaporation step is performed at a temperature of up to about 1200° C.
3. The method of claim 1, wherein the MnTe is doped up to about 10.sup.19 cm.sup.−3.
4. A method of manufacturing a photovoltaic device comprising the steps of: depositing a semiconductor absorber layer on a substrate, wherein the semiconductor absorber layer is formed from CdTe; depositing a p-type back contact buffer layer on the semiconductor absorber layer, wherein the depositing a p-type back contact buffer layer step is a sputtering step whereby the MnTe back contact buffer layer is deposited on the semiconductor absorber layer by sputtering MnTe with a MnTe target onto the semiconductor absorber layer; and depositing a back contact layer on the p-type back contact buffer layer.
5. The method of claim 4, wherein the sputtering step is performed at a temperature of up to about 300° C.
6. The method of claim 4, wherein the MnTe is doped up to about 10.sup.19 cm.sup.−3.
7. A method of manufacturing a photovoltaic device comprising the steps of: depositing a semiconductor absorber layer on a substrate, wherein the semiconductor absorber layer is formed from CdTe; depositing a p-type back contact buffer layer on the semiconductor absorber layer, wherein the depositing a p-type back contact buffer layer step is a chemical reaction step involving: a. depositing MnI.sub.2 solution onto the semiconductor absorber layer by one of application of liquid MnI.sub.2 thereon and evaporating MnI.sub.2 onto thereon; and b. annealing the MnI.sub.2-coated semiconductor absorber layer to form the p-type back contact; and depositing a back contact layer on the p-type back contact buffer layer.
8. The method of claim 7, wherein the annealing step is conducted at a temperature of from about 400° C. to about 650° C. in an oxygen-deficient environment.
9. The method of claim 7, wherein the annealing step is conducted in the presence of a flow of an inert gas to remove annealing byproduct gases.
10. The method of claim 7, wherein the p-type back contact buffer layer is formed from SnTe.
11. The method of claim 10, wherein the depositing a p-type back contact buffer layer step is a sputtering step whereby the SnTe back contact buffer layer is deposited on the semiconductor absorber layer by sputtering SnTe with a SnTe target onto the semiconductor absorber layer.
12. The method of claim 10, wherein the depositing a p-type back contact buffer layer step is a vapor transport deposition step whereby SnTe is deposited on the semiconductor absorber layer.
13. The method of claim 10, wherein the SnTe back contact buffer layer has a thickness from about 10 nm to about 500 nm.
14. The method of claim 7, wherein the p-type back contact buffer layer is formed from Cd.sub.1-xMn.sub.xTe.
15. The method of claim 14, wherein the Cd.sub.1-xMn.sub.xTe comprises Cd.sub.0.5Mn.sub.0.5Te.
Description
DRAWINGS
[0011] The above, as well as other advantages of the present disclosure, will become readily apparent to those skilled in the art from the following detailed description, particularly when considered in the light of the drawings described hereafter.
[0012]
[0013]
[0014]
[0015]
[0016]
DETAILED DESCRIPTION OF THE INVENTION
[0017] The following description is merely exemplary in nature and is not intended to limit the present disclosure, application, or uses. It should also be understood that throughout the drawings, corresponding reference numerals indicate like or corresponding parts and features. In respect of the methods disclosed, the order of the steps presented is exemplary in nature, and thus, is not necessary or critical unless recited otherwise.
[0018]
[0019] An exemplary energy band diagram of the photovoltaic device of
[0020]
[0021] Similarly, Cd.sub.1-xMn.sub.x Te is a suitable back contact buffer layer 48 because the presence of
[0022] Mn with CdTe increases a room temperature band gap thereof linearly with a Mn faction x at the rate of about 13 mV/% Mn up to x=about 0.5. That is, a maximum band gap increase is obtainable for Cd.sub.0.5Mn.sub.0.5Te, though x may be between 0 and about 1, as desired. Furthermore, Cd.sub.1-xMn.sub.xTe has a very small mismatch, about 1%, with CdTe. Therefore, an amount of interface states at a junction between CdTe and Cd.sub.1-xMn.sub.xTe is minimized, thereby optimizing performance of the photovoltaic device. A Cd.sub.1-xMn.sub.xTe back contact buffer layer may be prepared using techniques such as metalorganic chemical vapor deposition (MOCVD), sputtering, and molecular beam epitaxy (MBE), for example.
[0023] Favorable results have been obtained using the back contact buffer layer 48 formed from MnTe for at least the following reasons: MnTe has low vapor pressure suitable for vapor transport deposition (VTD) processes; about 100% solubility in CdTe; a band gap of about 3.2 eV; and due to Mn vacancies, the MnTe may be doped up to about 10.sup.19 cm.sup.−3. The MnTe back contact buffer layer 48 may be deposited on the absorber layer 44 using known deposition processes, but positive results have been obtained using a high temperature evaporation process, a sputtering processing
[0024] For example, to form the device 34 having the MnTe back contact buffer layer 48 using high temperature evaporation or sputtering processes, the window layer 42 and absorber layer 44 are deposited using VTD processes on a TEC10 glass substrate 36. The window layer 42 and the absorber layer 44 are then treated with CdCl.sub.2, as known in the art. The surface of the CdCl.sub.2-treated absorber layer 44 is then cleaned with a dilute HCl solution. When using an evaporation process, a MnTe source is then heated to evaporate the MnTe. The evaporated MnTe is then impinged upon the absorber layer 44 to deposit the MnTe back contact buffer layer 48 thereon. Alternatively when using a sputtering process, MnTe may be sputtered onto the absorber layer 44 with a MnTe target with a temperature of the substrate layer 36 from about room temperature to about 300° C. The target thickness of the back contact buffer layer 48 is from about 10 nm to about 500 nm. Once the MnTe back contact buffer layer 48 is deposited, processing of the device 34 continues through to packaging.
[0025]
[0026] Using the back contact buffer layer 48 formed from SnTe may have favorable results for the following reasons: SnTe has a vapor pressure of about 0.03 atm at 1000° C., only slightly higher than that of CdS; a work function of about 5.1 eV; a band gap of from about 0.2 eV to about 0.3 eV; a melting point at about 795° C.; and due to Sn vacancies, the SnTe may be intrinsically doped up to about 1.5×10.sup.21 cm.sup.−3 at room temperature. The SnTe may be deposited on the absorber layer 44 using known deposition processes, but favorable results may be obtained using a VTD process and a sputtering process.
[0027] To form the device 34 having the SnTe back contact buffer layer using the VTD process, the window layer 42 and absorber layer 44 are deposited using VTD processes on the TEC10 glass substrate 36. The SnTe is deposited on the absorber layer 44 using a VTD process with the same or similar conditions as the VTD process to deposit the CdS since SnTe has a similar vapor pressure thereto. The target thickness of the SnTe back contact buffer layer 48 is from about 10 nm to about 500 nm. Prior to deposition of the SnTe back contact buffer layer 48, the window layer 42 and the absorber layer 44 are then treated with CdCl.sub.2, and the surface of the CdCl.sub.2-treated absorber layer may then be cleaned with a dilute HCl solution.
[0028] To form the device 34 having the SnTe back contact buffer layer 48 using the sputtering process, the window layer 42 and absorber layer 44 are deposited using VTD processes on the TEC10 glass substrate 36. The window layer 42 and the absorber layer 44 are then treated with CdCl.sub.2. The surface of the CdCl.sub.2-treated absorber layer is then cleaned with a dilute HCl solution. SnTe is sputtered onto the absorber layer 44 with a SnTe target at a temperature of from about room temperature to about 300° C. The target thickness of the back contact buffer layer 48 is from about 10 nm to about 500 nm. Once the SnTe back contact buffer layer 48 is deposited, processing of the device 34 continues through to packaging.
[0029]
[0030] While certain representative embodiments and details have been shown for purposes of illustrating the invention, it will be apparent to those skilled in the art that various changes may be made without departing from the scope of the disclosure, which is further described in the following appended claims.