A substrate processing apparatus includes: a chamber; a raw material tank in which a raw material of a processing gas is accommodated; a carrier gas supply unit that supplies a carrier gas to the raw material tank; a mixed gas flow path connected to the raw material tank, and through which a mixed gas of the processing gas obtained from the raw material of the processing gas and the carrier gas flows therethrough; a concentration tank connected to a downstream of the mixed gas flow path, accommodating a porous member including a metal-organic framework; a desorption mechanism that desorbs the processing gas adsorbed to the porous member; and a concentration gas flow path that allows the processing gas desorbed from the porous member to flow to the chamber.

A method for creating a metal-carbon composite. In one embodiment, the method includes the steps of providing a polymer Schiff base transition metal .[.film.]. .Iadd.complex .Iaddend.precursor .Iadd.film .Iaddend.having a chemical structure of the formula [M(Schiff)].sub.n and a recurring unit and a transition metal selected from the group consisting of nickel, palladium, platinum, cobalt, copper, iron; Schiff is a tetradentate Schiff base ligand selected from the group consisting of Salen (residue of bis(salicylaldehyde)-ethylenediamine), Saltmen (residue of bis(salicylaldehyde)-tetramethylethylenediamine, Salphen (residue of bis-(salicylaldehyde)-o-phenylenediamine), a substituent in a Schiff base is selected from the group consisting of H—, and carbon-containing substituents, preferably CH.sub.3—, C.sub.2H.sub.5—, CH.sub.3O—, C.sub.2H.sub.5O—, and Y is a bridge in a Schiff base depositing the polymer Schiff base transition metal precursor film onto a support substrate; and heating the polymer Schiff base transition metal .Iadd.complex .Iaddend.precursor film and support substrate in a furnace in an inert atmosphere.

Macroporous desiccant based honeycomb matrix containing the macroporous desiccant synthesized “in-situ”, the desiccant having a differential water adsorption. Process for the “in-situ” preparation of the macroporous desiccant based honeycomb matrix including the steps of soaking honeycomb substrate impregnated with water glass, in aqueous metal salt(s) solution or acid solution, or combination thereof, until such time that the hydrogel honeycomb matrix is obtained and thermally activating the hydrogel honeycomb matrix to produce macroporous desiccant based honeycomb matrix.

A process for removing Hg.sup.2+ toxins from bodily fluids is disclosed. The process involves contacting the bodily fluid with a titanium metallate ion exchanger to remove the metal toxins in the bodily fluid, including blood and gastrointestinal fluid. Alternatively, blood can be contacted with a dialysis solution which is then contacted with the ion exchanger. The titanium metallate ion exchangers are represented by the following empirical formula:
A.sub.mTiNb.sub.aSi.sub.xO.sub.y. A composition is provided with the combination of the titanium metallate ion exchanger and bodily fluids or dialysis solutions. Also, provided is an apparatus comprising a matrix and the titanium metallate ion exchanger.

A hybrid graphene material and a filter capable of retaining, in whole or in part, polyaromatic hydrocarbons, carbonyl and other smoke compounds from tobacco products or industrial processes, having as adsorbent substances activated carbon and graphene materials, both supported by the same matrix and in the same filter compartment, which may or may not be attached to another conventional filter compartment of cellulose acetate fibers or similar polymer, and a method for manufacturing such material.

A hybrid graphene material and a filter capable of retaining, in whole or in part, polyaromatic hydrocarbons, carbonyl and other smoke compounds from tobacco products or industrial processes, having as adsorbent substances activated carbon and graphene materials, both supported by the same matrix and in the same filter compartment, which may or may not be attached to another conventional filter compartment of cellulose acetate fibers or similar polymer, and a method for manufacturing such material.

Disclosed herein are compositions and methods for manufacturing composite paper-based sorbents configured for durability, and high surface area exposure to air. Composite paper-based sorbents can comprise fibers (e.g. natural and/or synthetic fibers), anion exchange resins, and additives. Composite paper-based sorbents can be configured for durability when used in various forming processes, e.g., corrugation, and when used under a variety of conditions, for example, in high and low humidity environments.

A miniature gas detection system includes a separation flow channel fabricated by semiconductor processes and a filling material disposed in the main flow channel of the separation flow channel to perform adsorption and separation on compositions of compounds contained in the gas introduced into the main flow channel. Each detection flow channel is formed with a monitoring chamber, and a micro-electromechanical systems pump is formed on the bottom portion of the monitoring chamber. In each monitoring chamber, a light emitted from the light emitting element is reflected by the two mirrors and received by the light detection element. Therefore, the light detection elements obtain and output spectra of the compositions of compounds contained in the gas according to the differences in optical adsorptions of the compositions of compounds for lights with different wavelengths, so as to analyze and determine the type of the gas contained in the compositions of compounds.

The invention relates to strong hydrogen-bond acidic sorbents. The sorbents may be provided in a form that limits or eliminates intramolecular bonding of the hydrogen-bond acidic site between neighboring sorbent molecules, for example, by providing steric groups adjacent to the hydrogen-bond acidic site. The hydrogen bond site may be a phenolic structure based on a bisphenol architecture. The sorbents of the invention may be used in methods for trapping or detecting hazardous chemicals or explosives.

This inorganic fiber sheet contains a glass fiber as a main component, while containing 3 to 20% by mass of an organic fiber having an aspect ratio of 300 to 2000 with respect to a total amount of the inorganic fiber sheet.