Disclosed is droplet ejecting apparatus that ejects droplets of a functional liquid onto a workpiece to draw a pattern. The droplet ejecting apparatus includes: a workpiece table; a droplet ejecting head configured to eject the droplets onto the workpiece placed on the workpiece table; a movement mechanism configured to relatively move the workpiece table and the droplet ejecting head in a main scanning direction and a sub-scanning direction; and a control unit configured to: detect a position of the workpiece or a position of the workpiece table while relatively moving the workpiece table and the droplet ejecting head along a plurality of scanning lines extending in the main scanning direction and set side by side in the sub-scanning direction; and create, based on a detection result, a correction table that indicates a correlation between a position of the movement mechanism and a positional correction amount of the workpiece table.

Provided is a maintenance method of a heat treatment apparatus including a chamber having a box shape and provided with a heater and a receiving member that supports a cassette having a box shape including a space in which a workpiece is supported. The maintenance method includes: attaching a loading/unloading jig including a roller on an upper portion and capable of moving the roller upward and downward, to the receiving member; transmitting the cassette supported by the receiving member onto the roller by raising the loading/unloading jig; unloading the cassette to an outside of the chamber by moving the cassette on the roller; loading the cassette into the chamber by moving the cassette on the roller; transmitting the cassette to the receiving member by lowering the loading/unloading jig; and detaching the loading/unloading jig from the receiving member.

Provided is a maintenance method of a heat treatment apparatus including a chamber having a box shape and provided with a heater and a receiving member that supports a cassette having a box shape including a space in which a workpiece is supported. The maintenance method includes: attaching a loading/unloading jig including a roller on an upper portion and capable of moving the roller upward and downward, to the receiving member; transmitting the cassette supported by the receiving member onto the roller by raising the loading/unloading jig; unloading the cassette to an outside of the chamber by moving the cassette on the roller; loading the cassette into the chamber by moving the cassette on the roller; transmitting the cassette to the receiving member by lowering the loading/unloading jig; and detaching the loading/unloading jig from the receiving member.

An end effector, for adhesively attaching a first part to a second part, comprises a support and a first nozzle, coupled to the support and movable relative to the support, and a second nozzle, coupled to the support and movable relative to the support. The first nozzle comprises a first-nozzle body, comprising a first-nozzle-body outlet port and a first-nozzle separator plate, extending from the first-nozzle body. The second nozzle comprises a second-nozzle body, comprising a second-nozzle-body inlet port and a second-nozzle separator plate, extending from the second-nozzle body. The end effector further comprises a roller, coupled to the support, rotatable relative to the support about a roller axis, and located between the first nozzle and the second nozzle.

An end effector, for adhesively attaching a first part to a second part, comprises a support and a first nozzle, coupled to the support and movable relative to the support, and a second nozzle, coupled to the support and movable relative to the support. The first nozzle comprises a first-nozzle body, comprising a first-nozzle-body outlet port and a first-nozzle separator plate, extending from the first-nozzle body. The second nozzle comprises a second-nozzle body, comprising a second-nozzle-body inlet port and a second-nozzle separator plate, extending from the second-nozzle body. The end effector further comprises a roller, coupled to the support, rotatable relative to the support about a roller axis, and located between the first nozzle and the second nozzle.

In one or more embodiments, a project support system is provided having a base, a dial, a top cover, a moveable member, and a mechanical assembly. The dial is rotatably connected to the base. The top cover has an opening. The mechanical assembly is configured to extend the movable member upward through the opening to a fully extended position in response to the dial being rotated in a first direction relative to the base, thereby providing a smaller upper surface for support of a workpiece. The mechanical assembly is further configured to retract the movable member downward back through the opening to a fully retracted position in response to the dial being rotated in a second opposite direction relative the base, thereby providing a larger upper surface for support of the workpiece.

In one or more embodiments, a project support system is provided having a base, a dial, a top cover, a moveable member, and a mechanical assembly. The dial is rotatably connected to the base. The top cover has an opening. The mechanical assembly is configured to extend the movable member upward through the opening to a fully extended position in response to the dial being rotated in a first direction relative to the base, thereby providing a smaller upper surface for support of a workpiece. The mechanical assembly is further configured to retract the movable member downward back through the opening to a fully retracted position in response to the dial being rotated in a second opposite direction relative the base, thereby providing a larger upper surface for support of the workpiece.

A window coating jig includes: a base part and a stage which includes a support part, a first sidewall part surrounding the support part and defining an outer wall, and a second sidewall part disposed between the support part and the first sidewall part, and protrudes from the base part, wherein a blow groove is defined between the first sidewall part and the second sidewall part, a suction groove is defined between the second sidewall part and the support part, the base part has a blow hole and a suction hole passing through the base part, the blow hole and the suction hole being defined therein, the blow hole overlaps the blow groove, the suction hole overlaps the suction groove, and the first sidewall part has a vent opening passing therethrough in a direction crossing the direction in which the blow hole extends, the vent opening being defined therein.

A window coating jig includes: a base part and a stage which includes a support part, a first sidewall part surrounding the support part and defining an outer wall, and a second sidewall part disposed between the support part and the first sidewall part, and protrudes from the base part, wherein a blow groove is defined between the first sidewall part and the second sidewall part, a suction groove is defined between the second sidewall part and the support part, the base part has a blow hole and a suction hole passing through the base part, the blow hole and the suction hole being defined therein, the blow hole overlaps the blow groove, the suction hole overlaps the suction groove, and the first sidewall part has a vent opening passing therethrough in a direction crossing the direction in which the blow hole extends, the vent opening being defined therein.

An apparatus for processing a substrate is provided. The apparatus includes: a levitation stage transferring a substrate in a first direction and including first areas and second areas, which are arranged in a second direction that is different from the first direction; a plurality of rollers installed in the first areas and transferring the substrate; a plurality of first vacuum holes installed in the first areas and sucking the air at first pressure; and a plurality of second vacuum holes installed in the second areas and sucking the air at second pressure that is different from the first pressure.