Various examples of a substrate cleaning apparatus and a substrate processing apparatus are described in the present disclosure. One example of the present invention is a substrate cleaning apparatus including a roll cleaning member cleaning a substrate, an inclination sensor detecting an inclination of the roll cleaning member, and an output device outputting a detection result of the inclination sensor.

The present invention relates to a dry cleaning technology for a cleaning a surface of an object to be cleaned by adiabatically expanding liquid carbon dioxide to generate sublimable dry ice particles and carrying the dry ice particles on high-speed carrier gas to be sprayed onto the surface of the object to be cleaned, wherein an end of a liquid carbon dioxide nozzle further protrudes to the outside relative to an end of a carrier gas nozzle to prevent a growth of dry ice particles in the carrier gas nozzle, a hydrophobic coating is formed on a surface of the liquid carbon dioxide nozzle to prevent a formation of water droplets and to prevent an occurrence of irregular dry ice particles, thereby effectively preventing damage to a surface of an object to be cleaned and being advantageous in an economical aspect by significantly reducing consumption of liquid carbon dioxide.

The present invention relates to a dry cleaning technology for a cleaning a surface of an object to be cleaned by adiabatically expanding liquid carbon dioxide to generate sublimable dry ice particles and carrying the dry ice particles on high-speed carrier gas to be sprayed onto the surface of the object to be cleaned, wherein an end of a liquid carbon dioxide nozzle further protrudes to the outside relative to an end of a carrier gas nozzle to prevent a growth of dry ice particles in the carrier gas nozzle, a hydrophobic coating is formed on a surface of the liquid carbon dioxide nozzle to prevent a formation of water droplets and to prevent an occurrence of irregular dry ice particles, thereby effectively preventing damage to a surface of an object to be cleaned and being advantageous in an economical aspect by significantly reducing consumption of liquid carbon dioxide.

A drive system for a net cleaner to produce efficient propulsion without damage to the cage net. The drive system includes flexible engagement stumps protruding from a base of a driving belt with tips or studs mounted on an end of the stumps. The tips or studs engage the net and propel the net cleaner. The stumps flex to insure that. if excessive pressure is applied to a stud, the stump will bend and the net will release without damage. A guard prevents the stump from directly engaging a cage net. A track belt produces efficient propulsion without damage to the cage net. The track belt includes flexible engagement stumps protruding from a base of a driving belt with tips or studs mounted on an end of the stumps.

A sponge cleaning device has a lid for enclosing and hiding a sponge when not in use. The sponge cleaning device has a bottom shelf that can be raised and lowered into a cleaning solution disposed in a base of the device. When the lid is closed, the bottom shelf lowers toward the base, causing a sponge resting on the bottom shelf to be lowered into the cleaning solution. When the lid is opened, the bottom shelf raised out of the cleaning solution and toward a top shelf. The top shelf can be movably disposed to compress the sponge when the sponge is on the bottom shelf and the lid is opened, thus squeezing out cleaning solution from the sponge. The top shelf can be movably disposed to permit the user to access the sponge and remove it from the bottom shelf for use.

An apparatus and a method for cleaning glass used in cars or cameras are disclosed. Said cleaning apparatus comprises glass, multiple electrodes placed in series on top of said glass, a dielectric layer stacked on top of said electrodes, and a hydrophobic layer stacked on top of said dielectric layer and on whose surface a droplet forms. Here, said droplet moves towards the outer edge of said glass by application of differing direct current voltages to several of said electrodes.

An apparatus and a method for cleaning glass used in cars or cameras are disclosed. Said cleaning apparatus comprises glass, multiple electrodes placed in series on top of said glass, a dielectric layer stacked on top of said electrodes, and a hydrophobic layer stacked on top of said dielectric layer and on whose surface a droplet forms. Here, said droplet moves towards the outer edge of said glass by application of differing direct current voltages to several of said electrodes.

A method for the automated cleaning of lamellar heat exchangers and other sensitive surfaces, a moving apparatus, preferably moved on rollers or skids, being moved up and down on a guide unit made up of one and preferably two guide rails, on which a support arm is mounted, on which at least one and preferably multiple spray nozzles are mounted in such a way that they are moved along with the guide unit via the moving apparatus with the aid of an additional drive unit via a roller or toothed wheel mounted on another end, a carrier gas, preferably compressed air, and a liquid, preferably water, as the spray agent being supplied through feed hoses at a pressure of at least 2 bar, the supplied water quantity being less than 1%, preferably less than 0.30%, of the supplied air quantity.

A method for the automated cleaning of lamellar heat exchangers and other sensitive surfaces, a moving apparatus, preferably moved on rollers or skids, being moved up and down on a guide unit made up of one and preferably two guide rails, on which a support arm is mounted, on which at least one and preferably multiple spray nozzles are mounted in such a way that they are moved along with the guide unit via the moving apparatus with the aid of an additional drive unit via a roller or toothed wheel mounted on another end, a carrier gas, preferably compressed air, and a liquid, preferably water, as the spray agent being supplied through feed hoses at a pressure of at least 2 bar, the supplied water quantity being less than 1%, preferably less than 0.30%, of the supplied air quantity.

This invention relates to systems and methods that produce a treatment beam with a controllable beam size. This is accomplished by providing an auxiliary chamber in open fluid communication with the main process chamber. A nozzle is mounted in a recessed manner in the auxiliary chamber. The nozzle dispenses a treatment spray into the auxiliary chamber. The auxiliary chamber shapes and dispenses the treatment material as a treatment beam into the process chamber. In illustrative embodiments, control of process chamber pressure adjusts the beam size of a treatment beam used to treat the surface of one or more microelectronic substrates.