An air shower device with a non-defeatable function of removing contaminants from objects within a receiving space includes a room, a first barrier, a second barrier, and two revolving doors. The room defines the receiving space. The first barrier is disposed in the receiving space. The second barrier is disposed in the receiving space. The first barrier and the second barrier are misaligned with each other. The first barrier and the second barrier divide the receiving space into a plurality of channels connected to each other. The channels are arranged in a zigzag manner. The two revolving doors are installed at two ends of the channels.

A substrate cleaning apparatus that cleans a processing target substrate by blasting the gas clusters to the processing target substrate. The apparatus includes: a chamber configured to accommodate the processing target substrate; a rotary stage configured to rotatably support the processing target substrate in the chamber; an blasting unit configured to blast the gas clusters to the processing target substrate supported by the rotary stage; a driving unit configured to scan a gas cluster-blasted position on the processing target substrate; an exhaust port configured to evacuate the chamber; and a control mechanism configured to control a scattering direction of particles by controlling a rotation direction of the processing target substrate by the rotary stage and a scanning direction of the gas cluster-blasted position, thereby suppressing re-adhesion of the particles to the processing target substrate.

A pipe snow removal device is supported for movement longitudinally along a pipe to clear snow and/or ice from the pipe. A main housing has boundary walls defining an outer boundary of a bounded space within a hollow interior of the main housing. An inner boundary of the bounded space is open to the pipe upon which the main housing is supported. A mounting arrangement supports the main housing relative to a work vehicle that is movable alongside the pipe to displace the main housing along the pipe. A heater heats the bounded space to melt the snow/ice on the pipe. A scraper assembly supported in leading relationship to the main housing clears loose snow before melting remaining snow and ice on the pipe as the housing passes.

The present disclosure provides embodiments of a system and method for detecting processing chamber condition. The embodiments include performing a wafer-less processing step in a processing chamber to determine the condition of the chamber walls. Based on an analysis of the residual gas resulting from the wafer-less processing step, an operator or a process controller can determine whether the chamber walls have deteriorated to such an extent as to be cleaned.

A substrate processing system capable of supplying a processing liquid containing fine bubbles at a high concentration without generating large sized bubbles in a middle of a supply line of the processing liquid is disclosed. There is provided a substrate processing system comprising: a gas dissolved water generation tank; a chemical liquid dilution module; and a substrate processing module. The substrate processing module comprises a processing liquid supply nozzle configured to supply the processing liquid onto a substrate. The processing liquid supply nozzle has a decompression release portion configured to generate fine bubbles of a gas from a diluted chemical liquid. The processing liquid supply nozzle is configured to supply the diluted chemical liquid containing fine bubbles in a process scrubbing the substrate.

A furnace system includes at least one wall that defines a workspace. The workspace includes an aircraft part to be cleaned. One or more vacuum pumps are configured to achieve a predetermined vacuum level in the workspace. A gas purifier is configured to remove impurities in a gas to create a purified gas, the purified gas being directed from the gas purifier into the workspace, the purified gas being of a purity and composition that is effective to disassociate oxides on a surface or in a crack of the aircraft part to be cleaned when the workspace is heated to a predetermined temperature and the predetermined vacuum level is achieved in the workspace.

There is provided a maintenance device comprising: a case having an opening whose size corresponds to a second gate of a vacuum processing device disposed in a processing chamber having a first gate and the second gate different from the first gate, the first gate and the second gate being used for loading and unloading substrates, the opening being capable of being attached to the second gate in a detachable manner and an airtight manner; a depressurization mechanism configured to reduce a pressure in the case; and a suction mechanism disposed in the case and configured to enter the processing chamber through the opening and conduct suction of deposits on an object in the processing chamber.

The present disclosure generally relates to an electronic device peripheral cleaning cabinet and a method for cleaning such peripherals. In an example, a peripheral cleaning cabinet includes a cabinet body, a door, a cabinet gas line, and a support shelf. The cabinet body includes an exhaust port. The door is mechanically coupled to the cabinet body. The cabinet gas line includes a gas valve and a nozzle. The gas valve is fluidly coupled to the nozzle. The nozzle is disposed in the cabinet body. The cabinet gas line is configured to supply a gas to flow into the cabinet body. The support shelf is disposed in the cabinet body and is configured to support a peripheral. The support shelf is configured to allow the gas to flow from the nozzle, through the support shelf, and to the exhaust port.

In order to obtain a contaminant removal device capable of improving contaminant removal performance regardless of a structure formed on a surface of an object, in the contaminant removal device, contaminant attached to the object is removed by a gas sprayed out of a nozzle having a gas outlet, and an aperture ratio of opposing end portions of the gas outlet is set smaller than an aperture ratio of a central portion of the gas outlet.

A pipe snow removal device is supported for movement longitudinally along a pipe to clear snow and/or ice from the pipe. A main housing has boundary walls defining an outer boundary of a bounded space within a hollow interior of the main housing. An inner boundary of the bounded space is open to the pipe upon which the main housing is supported. A mounting arrangement supports the main housing relative to a work vehicle that is movable alongside the pipe to displace the main housing along the pipe. A heater heats the bounded space to melt the snow/ice on the pipe. A scraper assembly supported in leading relationship to the main housing clears loose snow before melting remaining snow and ice on the pipe as the housing passes.