An oscillating power tool includes a housing and a motor at least partially disposed within the housing and having a rotational output shaft. An eccentric bearing is attached to the output shaft. An oscillating member is coupled to the eccentric bearing to convert rotational movement of the eccentric bearing into oscillating movement. A pivot shaft has an oscillating axis and the oscillating member is arranged on it. A tool engagement area is disposed on the oscillating member for engaging a detachable tool. The tool engagement area substantially surrounds the oscillating axis and has protruding tool connecting members extending parallel to the oscillating axis for axial mounting of the detachable tool to the tool engagement area.

A retaining ring for a chemical mechanical polishing carrier head having a mounting surface for a substrate is provided herein. In some embodiments, the retaining ring may include an annular body have a central opening, a channel formed in the body, wherein a first end of the channel is proximate the central opening, and a sensor disposed within the channel and proximate the first end, wherein the sensor is configured to detect acoustic and/or vibration emissions from processes performed on the substrate.

The invention relates to a method for the automated grinding of surfaces and to a corresponding device. According to one exemplary embodiment, the method comprises the robot-assisted positioning of a grinding machine with a grinding tool, so that the grinding tool contacts the surface when the grinding machine is operated at a first rotational speed, and the detection of the contact between the grinding tool and the surface. The method further comprises, as a result of detecting the contact, the increase in the rotational speed of the grinding tool from the first rotational speed to a second rotational speed.

A method for repairing a polishing pad in real time includes a trimming step, a detection step, and a reconstruction and analysis step. A surface morphology of the polishing pad is reconstructed through detection, and analysis is performed according to the reconstruction, to ensure that a surface of the polishing pad can recover its function after the surface of the polishing pad is trimmed, so that the polishing pad can be used effectively to reduce costs.

A method for repairing a polishing pad in real time includes a trimming step, a detection step, and a reconstruction and analysis step. A surface morphology of the polishing pad is reconstructed through detection, and analysis is performed according to the reconstruction, to ensure that a surface of the polishing pad can recover its function after the surface of the polishing pad is trimmed, so that the polishing pad can be used effectively to reduce costs.

A method includes placing a polisher head on platen, the polisher head including a set of first magnets, and controlling a set of second magnets to rotate the polisher head on the platen, wherein controlling the set of second magnets includes reversing the polarity of at least one second magnet of the set of second magnets to produce a magnetic force on at least one first magnet of the set of first magnets, wherein the set of second magnets are external to the polisher head.

A method includes placing a polisher head on platen, the polisher head including a set of first magnets, and controlling a set of second magnets to rotate the polisher head on the platen, wherein controlling the set of second magnets includes reversing the polarity of at least one second magnet of the set of second magnets to produce a magnetic force on at least one first magnet of the set of first magnets, wherein the set of second magnets are external to the polisher head.

A grinding machine tool with random eccentric orbital motion speed detection, the grinding machine tool comprises a body and a grinding disc, the body comprises a driving shaft and a tool holder connecting the grinding disc and having an eccentric distance relative to the driving shaft, and the grinding disc performs grinding in a random eccentric orbital motion when the driving shaft rotates. The grinding disc comprises at least one detected member on a side of the grinding disc facing the body for detecting a speed of the random eccentric orbital motion, and the at least one detected member defines a detection area with a range greater than or equal to twice the eccentric distance. Thereby, an accurate speed of the grinding disc performing the random eccentric orbital motion is obtained, so that the grinding operation of precision grinding which is gradually performed by automation is more precisely controlled.

The blade holder has a movable plate and a fixture. A rotatable bolt in operative engagement with a block attached to the plate. A motor is in operative engagement with the bolt. The motor rotates the bolt to move the plate towards the fixture to grip a first set of blades until a torque threshold value is reached. The processor determines a number of blades included in the set of blades based on the number of rotations of the bolt. A first grinding portion of a rotating abrasive belt is applied against the set of blades (having width (W1)) to sharpen the set of blades. Sliding a vise sideways a distance (W1) until a second grinding portion is aligned on top of the second set of blades.

The blade holder has a movable plate and a fixture. A rotatable bolt in operative engagement with a block attached to the plate. A motor is in operative engagement with the bolt. The motor rotates the bolt to move the plate towards the fixture to grip a first set of blades until a torque threshold value is reached. The processor determines a number of blades included in the set of blades based on the number of rotations of the bolt. A first grinding portion of a rotating abrasive belt is applied against the set of blades (having width (W1)) to sharpen the set of blades. Sliding a vise sideways a distance (W1) until a second grinding portion is aligned on top of the second set of blades.