Patent classifications
B25B11/00
Movable wafer holder for film deposition chamber having six degrees of freedom
The present disclosure provides a flexible workpiece pedestal capable of tilting a workpiece support surface. The workpiece pedestal further includes a heater mounted on the workpiece support surface. The heater includes a plurality of heating sources such as heating coils. The plurality of heating sources in the heater allows heating the workpiece at different temperatures for different zones of the workpiece. For example, the workpiece can have a central zone heated by a first heating coil, a first outer ring zone that is outside of the central zone heated by a second heating coil, a second outer ring zone that is outside of the first outer ring zone heated by a third heating coil. By using the tunable heating feature and the tilting feature of the workpiece pedestal, the present disclosure can reduce or eliminate the shadowing effect problem of the related workpiece pedestal in the art.
Movable wafer holder for film deposition chamber having six degrees of freedom
The present disclosure provides a flexible workpiece pedestal capable of tilting a workpiece support surface. The workpiece pedestal further includes a heater mounted on the workpiece support surface. The heater includes a plurality of heating sources such as heating coils. The plurality of heating sources in the heater allows heating the workpiece at different temperatures for different zones of the workpiece. For example, the workpiece can have a central zone heated by a first heating coil, a first outer ring zone that is outside of the central zone heated by a second heating coil, a second outer ring zone that is outside of the first outer ring zone heated by a third heating coil. By using the tunable heating feature and the tilting feature of the workpiece pedestal, the present disclosure can reduce or eliminate the shadowing effect problem of the related workpiece pedestal in the art.
Adaptive tooling assembly
A fixture and a method of operating the fixture are disclosed for repositioning a workpiece disposed on the fixture to correct an offset between the centerline of the workpiece and an indexing position on the fixture. The fixture includes one or more linear actuators that linearly move vacuum grippers on their outboard ends into contact with surfaces of the workpiece. Vacuum is applied to the vacuum grippers, which enables the vacuum grippers to grip the surfaces of the workpiece. The linear actuators are driven to reposition the workpiece on the fixture to reduce the offset between the two below a threshold value. When in position, the fixture secures the workpiece in place for subsequent machining operations that may be performed on the workpiece.
WORK TABLE FOR LASER PROCESSING AND METHOD OF OPERATING THE SAME
A work table for laser processing includes an upper plate including a plurality of cell regions and at least one groove region that divides the plurality of cell regions. The upper plate includes a plurality of absorption holes that fix a substrate in the plurality of cell regions. A plurality of suction holes collect particles generated during a cutting process performed on the substrate. A lower plate is disposed under the upper plate. The lower plate forms an absorption path that is coupled to the plurality of absorption holes. A suction path is coupled to the plurality of suction holes by combining the lower plate with the upper plate.
WAFER LOADING BRACKET, WAFER LOADING SYSTEM, AND WAFER MOUNTING METHOD FOR CMP PROCESS
Disclosed are a wafer loading bracket, a wafer loading system and a wafer mounting method. The wafer loading bracket, which can lift, and a polishing head including a plurality of pressure medium cavities are used. In a wafer loading process, arc-shaped deformation occurs, under pressure, on an attachment film of the polishing head; a wafer on a wafer-bearing base of the wafer loading bracket is lifted to a loading position, and comes into contact with the attachment film, a pressure medium cavity which is in contact with the attachment film is vacuumized; and the wafer and the attachment film, under vacuum conditions, are attached to the polishing head, and the wafer is transferred to the polishing head to complete loading.
Vehicle window installation tool
In at least some implementations, a vehicle window installation tool includes a front face defined at least in part by a first engagement surface, the front face extending from a first end to a second end, and from a left side to a right side, and a rear face defined at least in part by a second engagement surface, the rear face extending from the first end to the second end, and from the left side to the right side. The first end is wedge shaped, and a support portion is defined in part by the front face and in part by the rear face. The support portion has a void, the void is open to a second end that is opposite to the first end. The tool can be arranged in multiple positions relative to a window being assembled into the door, to protect and position the window.
Vehicle window installation tool
In at least some implementations, a vehicle window installation tool includes a front face defined at least in part by a first engagement surface, the front face extending from a first end to a second end, and from a left side to a right side, and a rear face defined at least in part by a second engagement surface, the rear face extending from the first end to the second end, and from the left side to the right side. The first end is wedge shaped, and a support portion is defined in part by the front face and in part by the rear face. The support portion has a void, the void is open to a second end that is opposite to the first end. The tool can be arranged in multiple positions relative to a window being assembled into the door, to protect and position the window.
COMPLEX LOCATING FIXTURE SYSTEM AND METHOD
Systems and methods are provided for locating a pair of components relative to one another using complex surfaces. One component has a complex surface, where the complex surface is smoothly contoured. Another component is shaped to be connected with the first component. A fixture locates the first component relative to the second component. The fixture includes a locator with a complex surface region shaped to mate with the complex surface of the one component to locate the fixture relative to that component. The fixture includes another locator to locate the fixture relative to the second component.
PROCESSING APPARATUS
A processing apparatus includes a chuck table, a processing unit that has a spindle, a spindle housing, and a mount section fixed to a lower end portion of the spindle, a processing feeding mechanism that puts the processing unit into processing feeding, a processing chamber cover that has an opening penetrable by the mount section and that is able to cover the chuck table and the mount section, an extendable cover section having an annular lower connection section detachably connected to a peripheral portion of the opening, an annular upper connection section fixed to the spindle housing, and a tubular bellows section that connects the upper and lower connection sections and that is able to shrink and extend following movement of the processing unit, and a gas flow forming unit that forms a flow of gas from the upper connection section toward the lower connection section inside the bellows section.
SAWHORSE SUPPORT ATTACHMENT DEVICE
A sawhorse support attachment device for attaching supports for construction use includes a stand unit. The stand unit comprises a pair of bases, a plurality of stands, and a pair of chains. Each of the bases has a hollow interior that defines a space for an insert to be nested within. A pair of stands is attached to each of the bases at an angle to create a sawhorse assembly when in an open position. A pair of chains connects each of the pair of stands to each other. The chains provide supplemental stability to the stand unit when attaching elements. A support has a bracket with a pair of inserts. The pair of inserts is nested into the hollow interior of the pair of bases when attaching to the stand unit. A platform having the bracket and pair of inserts can attach to the stand unit.