The present disclosure provides cryogenic storage systems and methods of using the cryogenic storage systems. A cryogenic storage system of the present disclosure may comprise a cryogenic tank with an inner door and an outer door, and a robot apparatus located adjacent to the cryogenic tank. The cryogenic tank may store multiple racks such that at most a single rack is removable through the inner door or the outer door. The cryogenic tank may store the multiple racks in multiple groups of racks comprising a first group of racks located at a first radial distance and a second group of racks located at a second radial distance that is greater than the first radial distance. The robot apparatus may selectively open and close the inner or outer doors, and insert or withdraw the single rack into or out of the cryogenic tank through the inner door or the outer door.

The present disclosure provides cryogenic storage systems and methods of using the cryogenic storage systems. A cryogenic storage system of the present disclosure may comprise a cryogenic tank with an inner door and an outer door, and a robot apparatus located adjacent to the cryogenic tank. The cryogenic tank may store multiple racks such that at most a single rack is removable through the inner door or the outer door. The cryogenic tank may store the multiple racks in multiple groups of racks comprising a first group of racks located at a first radial distance and a second group of racks located at a second radial distance that is greater than the first radial distance. The robot apparatus may selectively open and close the inner or outer doors, and insert or withdraw the single rack into or out of the cryogenic tank through the inner door or the outer door.

A robotic arm comprising a first arm portion, a second arm portion, the second arm portion moveable between a first axial position, in which the first arm portion and the second arm portion are mutually spaced from each other along said axis, and a second axial position, in which a first end of first arm portion and a second end of the second arm portion are in contact to define a housing, a head rotatable with respect to the first arm portion and around said axis; and a robotic joint. The joint is configured for adopting an operative condition, to make the second arm portion integral with the head. The robotic arm is configured so that said operative condition corresponds to said second axial position and said second angular position and the robotic arm is configured so that, in said operative condition, the joint is located within said housing.

Devices, systems, and methods for autonomously sorting dirty laundry articles into batched loads for washing are described. For example, an autonomous sorting system includes an enclosed channel including a stationary floor extending between an inlet end and an outlet end of the channel, a plurality of arms disposed in series along the enclosed channel for selectively grasping at least one of the plurality of deformable articles in sequence. The system includes an outlet orifice adjacent the outlet end through which each separated deformable article exits the enclosed channel upon release by the terminal gripper of the one of the plurality of arms, and one or more conveyors disposed adjacent the outlet end configured for receiving thereon a plurality of bins for collecting for washing together two or more articles of the plurality of deformable articles released through the outlet orifice having a common sensor-detected one or more characteristics.

Devices, systems, and methods for autonomously sorting dirty laundry articles into batched loads for washing are described. For example, an autonomous sorting system includes an enclosed channel including a stationary floor extending between an inlet end and an outlet end of the channel, a plurality of arms disposed in series along the enclosed channel for selectively grasping at least one of the plurality of deformable articles in sequence. The system includes an outlet orifice adjacent the outlet end through which each separated deformable article exits the enclosed channel upon release by the terminal gripper of the one of the plurality of arms, and one or more conveyors disposed adjacent the outlet end configured for receiving thereon a plurality of bins for collecting for washing together two or more articles of the plurality of deformable articles released through the outlet orifice having a common sensor-detected one or more characteristics.

A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, wherein a link connecting member with blades is engaged at a front area of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes; and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms and subordinate link arms, and a common link arm that are connected to each other or to the transfer arm platform, wherein, the transfer link arms include at least some of drive shafts, interlocked with transfer driving motors or speed reducers, and output shafts interlocked with the drive shafts, and wherein the end effectors are positioned at different heights from each other through using a bracket.

A hermetically sealed multi-axis articulated arm apparatus for use within a sealable isolator chamber comprises a rotational shaft that passes through an opening in the chamber, a sealing member disposed within the chamber for sealing the shaft to an inner surface of the chamber, a plurality of interconnected hermetically sealed arm segments, operably attached to the linear motion shaft; an end effector operably attached to a terminal arm segment among the plurality of arm segments, and at least one fully enclosed drive system for driving and controlling the shaft and the plurality of arm segments. The linear motion shaft may have a sealing member in the form of a bellows. The materials for the parts of the apparatus exposed to the atmosphere of the chamber are compatible with an aseptic and cleanable environment and the surfaces of the arm segments are shaped to avoid pooling of contaminants.

A hermetically sealed multi-axis articulated arm apparatus for use within a sealable isolator chamber comprises a rotational shaft that passes through an opening in the chamber, a sealing member disposed within the chamber for sealing the shaft to an inner surface of the chamber, a plurality of interconnected hermetically sealed arm segments, operably attached to the linear motion shaft; an end effector operably attached to a terminal arm segment among the plurality of arm segments, and at least one fully enclosed drive system for driving and controlling the shaft and the plurality of arm segments. The linear motion shaft may have a sealing member in the form of a bellows. The materials for the parts of the apparatus exposed to the atmosphere of the chamber are compatible with an aseptic and cleanable environment and the surfaces of the arm segments are shaped to avoid pooling of contaminants.

An autoteach system includes an autoteach pin that is a scannable feature having a fixed position within the autoteach system. The autoteach pin enables an autoteach operation of a robot arm of the wafer processing system. The autoteach operation is an operation to automatically teach the fixed position within the autoteach system to the robot arm of the wafer processing system. The autoteach pin includes a first portion including a cylindrical sidewall. The robot arm is to use the first portion to locate the fixed position within the autoteach system. The autoteach portion further includes a second portion including planar sidewalls that are configured to enable calibration of robot arm error.

A working device has a configuration with seven degrees of freedom, and is configured to perform work using an end effector. The working device includes: a linear motion unit having three degrees of freedom; a rotary unit having three degrees of freedom; and a rotary drive mechanism having one degree of freedom. The rotary drive mechanism is configured to rotate the rotary unit relative to the linear motion unit. The linear motion unit is mounted on a mount such that a base portion thereof is fixed to the mount. The rotary drive mechanism is mounted on an output portion of the linear motion unit. The rotary unit is mounted on an output portion of the rotary drive mechanism. The end effector is mounted on an output portion of the rotary unit.