To provide a semiconductor device with excellent charge retention characteristics, an OS transistor is used as a transistor whose gate is connected to a node for retaining charge. Charge is stored in a first capacitor, and data at the node for retaining charge is read based on whether the stored charge is transferred to a second capacitor. Since a Si transistor, in which leakage current through a gate insulating film occurs, is not used as a transistor connected to the node for retaining charge, charge retention characteristics of the node are improved. In addition, the semiconductor device operates in data reading without requiring transistor performance equivalent to that of a Si transistor.

A FinFET comprises a hybrid substrate having a top wafer of (100) silicon, a handle wafer of (110) silicon, and a buried oxide layer between the top wafer and the handle wafer; a first set of fins disposed in the top wafer and oriented in a <110> direction of the (100) silicon; and a second set of fins disposed in the handle wafer and oriented in a <112> direction of the (110) silicon. The first set of fins and the second set of fins are aligned.

One illustrative method disclosed includes forming an isolation structure so as to define first and second active regions on the SOI substrate, forming a field effect transistor above the first active region and forming an opening in the second active region that exposes an upper surface of the bulk semiconductor layer in the second active region. In this example, the method further includes performing a common epitaxial growth process so as to form an epi semiconductor material region above each of the source/drain regions of the transistor and to form a unitary epi semiconductor structure above the second active region, wherein the unitary epi semiconductor structure is formed on and in contact with the exposed upper surface of the bulk semiconductor layer within the opening and on and in contact with an upper surface of the active layer in the second active region.

To provide a memory device which operates at high speed or a memory device in which the frequency of refresh operations is reduced. In a cell array, a potential is supplied from a driver circuit to a wiring connected to a memory cell. The cell array is provided over the driver circuit. Each of memory cells included in the cell array includes a switching element, and a capacitor in which supply, holding, and discharge of electric charge are controlled by the switching element. Further, a channel formation region of the transistor used as the switching element includes a semiconductor whose band gap is wider than that of silicon and whose intrinsic carrier density is lower than that of silicon.

A semiconductor-on-insulator (SOI) substrate is provided that includes a silicon or germanium handle substrate that is miscut from 2 degrees to 8 degrees towards the <111> crystallographic direction or the <100> crystallographic direction. The topmost semiconductor layer is removed from a portion of the SOI substrate, and then a trench having a high aspect ratio is formed within the insulator layer of the SOI substrate and along the <111> crystallographic direction or the <100> crystallographic direction. An III-V compound semiconductor pillar, which includes a lower portion that has a first defect density and an upper portion that has a second defect density that is less than the first defect density, is then formed in the trench.

The present disclosure provides, in accordance with some illustrative embodiments, a semiconductor device structure including a hybrid substrate comprising an SOI region and a bulk region, the SOI region comprising an active semiconductor layer, a substrate material, and a buried insulating material interposed between the active semiconductor layer and the substrate material, and the bulk region being provided by the substrate material, an insulating structure formed in the hybrid substrate, the insulating structure separating the bulk region and the SOI region, and a gate electrode formed in the bulk region, wherein the insulating structure is in contact with two opposing sidewalls of the gate electrode.

In a semiconductor device including a transistor using an oxide semiconductor film, stable electric characteristics can be provided and high reliability can be achieved. A structure of the semiconductor device, which achieves high-speed response and high-speed operation, is provided. In a semiconductor device including a transistor in which an oxide semiconductor film, a gate insulating film, and a gate electrode layer are stacked in order and a sidewall insulating layer is provided on the side surface of the gate electrode layer, the sidewall insulating layer has an oxygen-excess regions, which is formed in such a manner that a first insulating film is formed and then is subjected to oxygen doping treatment, a second insulating is formed over the first insulating film, and a stacked layer of the first insulating film and the second insulating film are etched.

To provide a semiconductor device with excellent electrical characteristics or a semiconductor device with stable electrical characteristics. A semiconductor device includes a first transistor, a second transistor, a first insulator, a second insulator, a first wiring, and a first plug. The first transistor includes silicon. The second transistor includes an oxide semiconductor. The first insulator is located over the first transistor. The second insulator is located over the first insulator. The second transistor is located over the second insulator. The first wiring is located over the second insulator and the first plug. The first transistor and the second transistor are electrically connected to each other through the first wiring and the first plug. The first wiring has low hydrogen permeability. The hydrogen permeability of the second insulator is lower than the hydrogen permeability of the first insulator.

A semiconductor device can be reduced in size. The semiconductor device has a first conductivity type p type well layer extending in the X direction of the main surface of a semiconductor substrate; a reference potential wire coupled with the p type well layer, and extending in the X direction; first and second active regions arranged on the opposite sides of the reference potential wire in the Y direction; and a gate electrode layer extending in the Y direction in such a manner as to cross with the first and second active regions. Then, the gate electrode layer has a first gate electrode of a second conductivity type at the crossing part with the first active region, a second gate electrode of the second conductivity type at the crossing part with the second active region, and a non-doped electrode between the first gate electrode and the second gate electrode.

To provide a semiconductor device which occupies a small area and is highly integrated. The semiconductor device includes an oxide semiconductor layer, an electrode layer, and a contact plug. The electrode layer includes one end portion in contact with the oxide semiconductor layer and the other end portion facing the one end portion. The other end portion includes a semicircle notch portion when seen from the above. The contact plug is in contact with the semicircle notch portion.