C07D307/00

Salt, acid generator, resist composition and method for producing resist pattern

Disclosed are a salt represented by formula (I), an acid generator, and a resist composition comprising the same: ##STR00001##
wherein R.sup.1 and R.sup.2 each represent a hydroxy group, *OR.sup.10, *O-L.sup.10-COOR.sup.10; L.sup.10 represents an alkanediyl group; R.sup.10 represents an acid-labile group; R.sup.4, R.sup.5, R.sup.7 and R.sup.8 each represent a halogen atom, a haloalkyl group or a hydrocarbon group; A.sup.1 and A.sup.2 each represent a hydrocarbon group, the hydrocarbon group may have a substituent, and CH.sub.2 included in the hydrocarbon group may be replaced by O, CO, S or SO.sub.2; m1 represents an integer of 1 to 5, m2 and m8 represent an integer of 0 to 5, m4, m5 and m7 represent an integer of 0 to 4, 1m1+m75, 0m2+m85; and Al.sup. represents an organic anion.