Patent classifications
C23C26/00
Coating and method for forming the same
A coating is formed on a surface of a base material of a furnace, and includes a base layer and a sliding material layer that is formed on a surface of the base layer and contains an oxide ceramic and a compound having a layered crystal structure. The sliding material layer causes the collided ashes to be slipped and facilitates the drop off of the adhered ashes. The base material forms a heat transfer tube or a wall surface of the furnace. The coating is also applied to a coal gasification furnace, a pulverized coal fired boiler, a combustion apparatus, or a reaction apparatus containing a furnace.
Chemistry compatible coating material for advanced device on-wafer particle performance
A chamber component comprises a body and a plasma sprayed ceramic coating on the body. The plasma sprayed ceramic coating is applied using a method that includes feeding powder comprising a yttrium oxide containing solid solution into a plasma spraying system, wherein the powder comprises a majority of donut-shaped particles, each of the donut-shaped particles having a spherical body with indentations on opposite sides of the spherical body. The method further includes plasma spray coating the body to apply a ceramic coating onto the body, wherein the ceramic coating comprises the yttrium oxide containing solid solution, wherein the donut-shaped particles cause the ceramic coating to have an improved morphology and a decreased porosity as compared to powder particles of other shapes, wherein the improved surface morphology comprises a reduced amount of surface nodules.
Chemistry compatible coating material for advanced device on-wafer particle performance
A chamber component comprises a body and a plasma sprayed ceramic coating on the body. The plasma sprayed ceramic coating is applied using a method that includes feeding powder comprising a yttrium oxide containing solid solution into a plasma spraying system, wherein the powder comprises a majority of donut-shaped particles, each of the donut-shaped particles having a spherical body with indentations on opposite sides of the spherical body. The method further includes plasma spray coating the body to apply a ceramic coating onto the body, wherein the ceramic coating comprises the yttrium oxide containing solid solution, wherein the donut-shaped particles cause the ceramic coating to have an improved morphology and a decreased porosity as compared to powder particles of other shapes, wherein the improved surface morphology comprises a reduced amount of surface nodules.
Liquid low temperature oxide
In some embodiments, a method of forming a structure includes: forming a liquid oxide material at a low temperature by dissolving fumed nanoparticles in a liquid hydrate of a silicate or an aluminate; applying the liquid oxide material on a substrate; and at a low temperature, curing the liquid oxide material to evolve gaseous water, leaving structural silicate glass.
EQUIPMENT AND METHOD FOR DEPOSITING PARTICLES USING LASER SHOCKWAVES
Equipment for selectively depositing, by shockwave-induced spraying, at least one particle on a deposition surface of a receiver substrate. The equipment including at least one laser source that emits a laser beam, a substrate carrier to which the substrate is fastened, a shockwave-generating layer having a first surface oriented toward the laser beam and a second surface oriented toward the deposition surface of the substrate, an optical system for directing and focusing the laser beam toward a focal region of the first surface. The second surface including a plurality of cavities, each cavity housing at least one particle. The laser beam generates a plasma in the focal region on the first surface and a shockwave that propagates within the generating layer from the first surface to the second surface in order to spray at least one particle in the direction of the deposition surface of the substrate.
COMPOSITION AND COMPOSITE MOLDED ARTICLE CONTAINING SAME
A composition having a carbon material and a redox substance with a redox potential of −0.2 (V vs. SHE) or higher and 1.5 (V vs. SHE) or lower. A composition having a carbon material that is a carbon fiber. A composition where the carbon fiber is in a form of a chopped strand, roving, textile, non-woven fabric, or unidirectional material.
Hydrophobic, conductive organic materials for metallic surfaces
A process of forming a hydrophobic, conductive barrier on a metallic surface includes coating the metallic surface with an organic, conductive material. The organic, conductive material includes a conductive group having two or more alkyne groups and a dithiocarbamate group to bind the organic, conductive material to the metallic surface.
Hydrophobic, conductive organic materials for metallic surfaces
A process of forming a hydrophobic, conductive barrier on a metallic surface includes coating the metallic surface with an organic, conductive material. The organic, conductive material includes a conductive group having two or more alkyne groups and a dithiocarbamate group to bind the organic, conductive material to the metallic surface.
ENVIRONMENTAL BARRIER COATING FOR ENHANCED RESISTANCE TO ATTACK BY MOLTEN SILICATE DEPOSITS
An environmental barrier coating, comprising a substrate containing silicon; an environmental barrier layer applied to said substrate; said environmental barrier layer comprising a rare earth composition.
Aluminum nitride film, method of manufacturing aluminum nitride film, and high withstand voltage component
An aluminum nitride film includes a polycrystalline aluminum nitride. A withstand voltage of the aluminum nitride film is 100 kV/mm or more.