A fluid vapor distillation apparatus. The apparatus includes a source fluid input, and an evaporator condenser apparatus. The evaporator condenser apparatus includes a substantially cylindrical housing and a plurality of tubes in the housing. The source fluid input is fluidly connected to the evaporator condenser and the evaporator condenser transforms source fluid into steam and transforms compressed steam into product fluid. Also included in the fluid vapor distillation apparatus is a heat exchanger fluidly connected to the source fluid input and a product fluid output. The heat exchanger includes an outer tube and at least one inner tube. Also included in the fluid vapor distillation apparatus is a regenerative blower fluidly connected to the evaporator condenser. The regenerative blower compresses steam, and the compressed steam flows to the evaporative condenser where compressed steam is transformed into product fluid.

A water-ring vacuum pump including a built-in hogging flow path. The water-ring vacuum pump includes a first-stage body, a second-stage body, and an impeller. The first-stage body includes a gas inlet port through which gas is suctioned and a seal water supply port through which seal water is supplied. The second-stage body includes a mixed fluid outlet port through which a mixed fluid of the gas and the seal water is discharged. The first-stage body has a fluid-mixing space provided therein, the fluid-mixing space having a mixed flow of the gas and the seal water therein. The second-stage body has a fluid guide space and an internal hogging flow path provided therein, the internal hogging flow path communicating with the fluid guide space.

A system comprising: a suction line; a liquid ring pump coupled to the suction line, the liquid ring pump comprising a chamber and an impeller mounted within the chamber; a non-return valve arranged to permit fluid to flow into the chamber via the suction line and to prevent or oppose fluid flow out of the chamber to the suction line; a gas line coupled to the liquid ring pump such that a gas may flow into the liquid ring pump via the gas line, the gas line coupled to the liquid ring pump between the non-return valve and the chamber; a valve disposed on the gas line; and a controller configured to control the valve.

A system comprising: a suction line; a liquid ring pump coupled to the suction line, the liquid ring pump comprising a chamber and an impeller mounted within the chamber; a non-return valve arranged to permit fluid to flow into the chamber via the suction line and to prevent or oppose fluid flow out of the chamber to the suction line; a gas line coupled to the liquid ring pump such that a gas may flow into the liquid ring pump via the gas line, the gas line coupled to the liquid ring pump between the non-return valve and the chamber; a valve disposed on the gas line; and a controller configured to control the valve.

A pumping line arrangement includes a chamber connecting line which is fluidly connectable to a process chamber that forms part of a semiconductor fabrication tool. The pumping line arrangement also includes a valve module which is fluidly connected to the chamber connecting line. The valve module splits the chamber connecting line into respective first and second pumping lines. The first pumping line is intended to carry a first process flow and the second pumping line is intended to carry a second process flow which is incompatible with the first process flow. At least one of the first pumping line or the second pumping line includes fluidly connected therewithin a pre-abatement module that is configured to remove one or more incompatible constituents from the process flow intended to be carried by the other pumping line.

The invention is based on pump system (10), in particular a self-suction pump system, with a liquid conveying unit (12) for conveying a liquid (56) and with a vacuum pump unit (14) which is, at least in an initial operation state, configured to supply the liquid conveying unit (12) with the liquid (56).

In order to improve a construction, it is proposed that at least in the initial operation state, the vacuum pump unit (14) is configured to transport a gas along the liquid conveying unit (12).

A fluid vapor distillation apparatus. The apparatus includes a source fluid input, and an evaporator condenser apparatus. The evaporator condenser apparatus includes a substantially cylindrical housing and a plurality of tubes in the housing. The source fluid input is fluidly connected to the evaporator condenser and the evaporator condenser transforms source fluid into steam and transforms compressed steam into product fluid. Also included in the fluid vapor distillation apparatus is a heat exchanger fluidly connected to the source fluid input and a product fluid output. The heat exchanger includes an outer tube and at least one inner tube. Also included in the fluid vapor distillation apparatus is a regenerative blower fluidly connected to the evaporator condenser. The regenerative blower compresses steam, and the compressed steam flows to the evaporative condenser where compressed steam is transformed into product fluid.

The present invention relates to a two-stage liquid ring vacuum pump in which two-stage impellers are attached to an axial end portion of a main shaft (rotating shaft) of a motor. The two-stage liquid ring vacuum pump includes a first-stage impeller (4) provided in a first-stage pump chamber (1), a second-stage impeller (5) provided in a second-stage pump chamber (2), a single rotating shaft (7) to which the first-stage impeller (4) and the second-stage impeller (5) are fixed, and an exhaust port (Pd) of the first-stage pump chamber (1) and an intake port (Ps) of the second-stage pump chamber (2) which communicate with each other. An outer diameter of the first-stage impeller (4) is larger than an outer diameter of the second-stage impeller (5).

The present invention relates to a two-stage liquid ring vacuum pump in which two-stage impellers are attached to an axial end portion of a main shaft (rotating shaft) of a motor. The two-stage liquid ring vacuum pump includes a first-stage impeller (4) provided in a first-stage pump chamber (1), a second-stage impeller (5) provided in a second-stage pump chamber (2), a single rotating shaft (7) to which the first-stage impeller (4) and the second-stage impeller (5) are fixed, and an exhaust port (Pd) of the first-stage pump chamber (1) and an intake port (Ps) of the second-stage pump chamber (2) which communicate with each other. An outer diameter of the first-stage impeller (4) is larger than an outer diameter of the second-stage impeller (5).

Embodiments of the invention are directed toward a novel pressurized vapor cycle for distilling liquids. In some embodiments of the invention, a liquid purification system is revealed, including the elements of an input for receiving untreated liquid, a vaporizer coupled to the input for transforming the liquid to vapor, a head chamber for collecting the vapor, a vapor pump with an internal drive shaft and an eccentric rotor with a rotatable housing for compressing vapor, and a condenser in communication with the vapor pump for transforming the compressed vapor into a distilled product. Other embodiments of the invention are directed toward heat management, and other process enhancements for making the system especially efficient.