Disclosed herein are devices systems and methods for removing moisture from a material via radio frequency electromagnetic wave exposure. A moisture-removal system can include having spaced apart a first and a second electrical conductor extending along a same first direction, each of the first and second electrical conductor comprising opposing broad top and bottom sides, the broad bottom side of the first electrical conductor facing the broad top side of the second electrical conductor. The system includes a material containing moisture at least partially filling the space between the first and the second electrical conductor. The system further includes at least one first wire attached to a first radio frequency generator and to the first end of the first electrical conductor. The system also includes at least one second wire attached to the electrical ground of the first radio frequency generator to the first end of the second electrical conductor.

Disclosed herein are devices systems and methods for removing moisture from a material via radio frequency electromagnetic wave exposure. A moisture-removal system can include having spaced apart a first and a second electrical conductor extending along a same first direction, each of the first and second electrical conductor comprising opposing broad top and bottom sides, the broad bottom side of the first electrical conductor facing the broad top side of the second electrical conductor. The system includes a material containing moisture at least partially filling the space between the first and the second electrical conductor. The system further includes at least one first wire attached to a first radio frequency generator and to the first end of the first electrical conductor. The system also includes at least one second wire attached to the electrical ground of the first radio frequency generator to the first end of the second electrical conductor.

Clamping an axially extending workpiece along a center axis and cleaning a shaft portion and an end to clean and dry the workpiece in a short period of time. A cleaning apparatus for cleaning the workpiece, including a cleaning chamber having a first side wall and a second side wall, a cleaning station including a cleaning axis, a cleaning nozzle, a first clamping device arranged on the first side wall, a second clamping device arranged on the second side wall, and a drying station including a drying axis, a drying nozzle, a second clamping device arranged on the second side wall, and a turn table having two regions arranged in a 180 degree rotational symmetry. The turn table arranges one of the two regions is arranged in the cleaning station, and the other in the drying station.

Clamping an axially extending workpiece along a center axis and cleaning a shaft portion and an end to clean and dry the workpiece in a short period of time. A cleaning apparatus for cleaning the workpiece, including a cleaning chamber having a first side wall and a second side wall, a cleaning station including a cleaning axis, a cleaning nozzle, a first clamping device arranged on the first side wall, a second clamping device arranged on the second side wall, and a drying station including a drying axis, a drying nozzle, a second clamping device arranged on the second side wall, and a turn table having two regions arranged in a 180 degree rotational symmetry. The turn table arranges one of the two regions is arranged in the cleaning station, and the other in the drying station.

A spray drum system includes a drum drying device and a spray device. The spray device is configured to spray solid particles on the drum drying device. The spray device includes a feeding hopper, a vibrator, a pneumatic conveyor and a high-pressure air source. The feeding hopper is configured to accommodate the solid particles. The vibrator is connected with an output port of the feeding hopper and configured to vibrate the feeding hopper and output the solid particles and control an output rate of the solid particles. The pneumatic conveyor is configured to receive the solid particles output from the vibrator and spray over the drum drying device. The high-pressure air source is connected with the pneumatic conveyor and configured to supply a gas driving force required to transport and spray the solid particles.

A spray drum system includes a drum drying device and a spray device. The spray device is configured to spray solid particles on the drum drying device. The spray device includes a feeding hopper, a vibrator, a pneumatic conveyor and a high-pressure air source. The feeding hopper is configured to accommodate the solid particles. The vibrator is connected with an output port of the feeding hopper and configured to vibrate the feeding hopper and output the solid particles and control an output rate of the solid particles. The pneumatic conveyor is configured to receive the solid particles output from the vibrator and spray over the drum drying device. The high-pressure air source is connected with the pneumatic conveyor and configured to supply a gas driving force required to transport and spray the solid particles.

A method for drying a wafer at room temperature includes a cleaning step, a reacting step and a pressure releasing step. The cleaning step includes putting a processing workpiece into a cleaning solvent. The reacting step includes putting the processing workpiece along with the cleaning solvent into a reaction chamber, implanting a supercritical fluid into the reaction chamber, and increasing a pressure of the reaction chamber to dissolve the cleaning solvent in the supercritical fluid. A critical temperature of the supercritical fluid is below room temperature. The pressure releasing step includes releasing the pressure of the reaction chamber and discharging the supercritical fluid together with the cleaning solvent out of the reaction chamber, after completely dissolving the cleaning solvent in the supercritical fluid.

A substrate processing method includes: a preparing process of preparing a substrate in which a zirconium oxide film as a mask has been formed on a laminated film and dry-etched into a given shape; after the preparing process, a mask removing process of removing the zirconium oxide film by supplying a mask removing liquid containing sulfuric acid as a main component to the substrate; and after the mask removing process, a drying process of drying a surface of the substrate that is wet with a rinsing liquid.

The inventive concept provides a method for treating a substrate. The method for treating a substrate comprises: a pressurization step for increasing a pressure of an inner space of a chamber by supplying a treating fluid to the inner space, after taking the substrate into the inner space; a flow step for generating a flow of the treating fluid by combination of supplying and discharging the treating fluid to and from the inner space; and a depressurization step of decreasing the pressure of the inner space by discharging the treating fluid from the inner space, and wherein the pressurization step comprises: a bottom side supply process for increasing the pressure of the inner space by supplying the treating fluid to a backside of the substrate taken into the inner space;

and a top side supply process of increasing the pressure of the inner space by supplying the treating fluid to a top side of the substrate taken into the inner space.

A plurality of modular units are connected together on a slightly sloped drainage field with a perforated header pipe at the lower side conveying water away from the drainage system. An impermeable flexible liner cushioned on both sides is located below the modular units. The modular units are each made up of rigid boxes that have connecting cross slots at the bottom thereof and vertical perforations there through. The rigid boxes are lined with a drainage fabric that is site specific and have an expanded geosynthetic material therein, which is held in place when filled with porous granular material. High flexural strength mats are connected together over the tops of the modular units. An air inlet pipe connects air to the cross slots, down the sloped drainage field, to the header pipe to drain water from the bulk granular material resting on the high flexural strength mats. Some of the modular units have a pneumatic vibrator connected to a source of pressurized air. The entire system may be quickly disassembled, moved to a different location, and reassembled with the number of modular units being changed according to the circumstances.