A reactive heat treatment apparatus is provided to treat a thin-film device. The reactive heat treatment apparatus includes a furnace pipe. The furnace pipe extends in a direction and has a first end and a second end. The furnace pipe further includes a high-temperature portion, a low-temperature portion, and a furnace door. The high-temperature portion is disposed close to the second end and configured to receive the thin-film device. The low-temperature portion is disposed close to the first end and provided with an airtight configuration. The furnace door is disposed close to the first end. An inner side wall of the low-temperature portion has a sunken portion. A height differential is formed between the sunken portion and an inner side wall of the high-temperature portion.

Provided is a high pressure heat treatment apparatus including: an internal chamber accommodating an object to be heat-treated; an external chamber including a high-temperature zone accommodating the internal chamber and a low-temperature zone having a lower temperature than the high-temperature zone; a gas supply module including a process gas line for supplying a process gas for the heat treatment to the internal chamber at a first pressure higher than that of the atmosphere and a protective gas line for supplying a protective gas to the external chamber at a second pressure set in relation to the first pressure; a switch module configured to switch the high-temperature zone and the low-temperature zone into a communication state; and a purge module configured to purge the protective gas in the high-temperature zone to the low-temperature zone in the communication state.

Disclosed is a magnetic annealing apparatus including a processing container that performs a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a substrate holder that holds the plurality of substrates substantially horizontally in the processing container; a division heater including a plurality of sub-division heaters and covering a substantially entire circumferential surface of an outer periphery of a predetermined region of the processing container along a longitudinal direction; a magnet installed to cover an outside of the division heater; and a controller configured to feedback-control a temperature of a predetermined control target heater among the plurality of sub-division heaters, and to control temperatures of the plurality of sub-division heaters other than the predetermined control target heater based on a control output obtained by multiplying a control output of the predetermined control target heater and a predetermined ratio.

A batch processing oven comprising a processing chamber and a rack configured to be positioned in the processing chamber. The rack is configured to support a plurality of substrates and a plurality of panels in a stacked manner such that one or more substrates of the plurality of substrates are positioned between at least one pair of adjacent panels of the plurality panels. Vertical gaps separate each substrate of the one or more substrates from an adjacent substrate or panel on either side of the substrate.

A vacuum heat treatment apparatus according to the embodiment comprises a chamber; a thermal insulator in the chamber; a reaction container in the thermal insulator; a heating member between the reaction container and the the thermal insulator for heating the reaction container; and a temperature measuring member in or on a surface of the reaction container, wherein the temperature measuring member comprises a thermocouple and a protective tube surrounding the thermocouple, and the protective tube comprises tungsten (W), tantalum (Ta), or silicon carbide (SiC).

The invention relates to a melting unit and method in which: a melting chamber is heated by means of combustion, the combustion fumes are used to heat the air used as a heat-transfer gas, the heated air is used to pre-heat the combustion oxygen and/or the gaseous fuel, the tempered air resulting from the pre-heating is compressed, the compressed tempered air is heated by means of heat exchange with the combustion fumes, and the mechanical and/or electrical energy is generated by expansion of the heated compressed air.

The invention relates to a melting unit and method in which: a melting chamber is heated by means of combustion, the combustion fumes are used to heat the air used as a heat-transfer gas, the heated air is used to pre-heat the combustion oxygen and/or the gaseous fuel, the tempered air resulting from the pre-heating is compressed, the compressed tempered air is heated by means of heat exchange with the combustion fumes, and the mechanical and/or electrical energy is generated by expansion of the heated compressed air.

Provided is a heat treatment apparatus, which includes: a cylindrical quartz reaction tube having a furnace opening and a bottom flange at a lower portion thereof; a flange holding part configured to hold the bottom flange of the reaction tube; and a lid including a metal lid and a quartz lid supported by the metal lid, the quartz lid being configured to close the furnace opening of the reaction tube. The quartz lid is fixed onto the metal lid by a support ring. The support ring is brought into contact with a bottom surface of the flange holding part so that a gap is defined between the quartz lid and the bottom flange. A sealing member is arranged outward from the gap in a radial direction.

The subject innovation relates to a furnace and a method for treatment of at least one workpiece in the furnace, wherein the workpiece is heated up in a chamber of the furnace by at least two heating units which are each associated with a workpiece having a first side and a second side, and whereby a first heating unit heats up the first side of the workpiece and a second heating unit heats up the second side of the workpiece. Further, each heating unit comprises at least two pressure pistons with heatable contact surfaces that are arranged next to each other and with the same orientation. Contact is made between the first side of the workpiece and the contact surfaces of the first heating unit, and in that contact is likewise made between the second side of the workpiece and the contact surfaces of the second heating unit.

The subject innovation relates to a furnace and a method for treatment of at least one workpiece in the furnace, wherein the workpiece is heated up in a chamber of the furnace by at least two heating units which are each associated with a workpiece having a first side and a second side, and whereby a first heating unit heats up the first side of the workpiece and a second heating unit heats up the second side of the workpiece. Further, each heating unit comprises at least two pressure pistons with heatable contact surfaces that are arranged next to each other and with the same orientation. Contact is made between the first side of the workpiece and the contact surfaces of the first heating unit, and in that contact is likewise made between the second side of the workpiece and the contact surfaces of the second heating unit.