Systems and methods for gas flow in a thermal processing system are provided. In some example implementations a gas flow pattern inside the process chamber of a millisecond anneal system can be improved by implementing one or more of the following: (1) altering the direction, size, position, shape and arrangement of the gas injection inlet nozzles, or a combination hereof; (2) use of gas channels in a wafer plane plate connecting the upper chamber with the lower chamber of a millisecond anneal system; and/or (3) decreasing the effective volume of the processing chamber using a liner plate disposed above the semiconductor substrate.

The invention discloses a method for producing silicon carbide from waste circuit board cracking residue, belongs to the field of comprehensive utilization of waste circuit board cracking products, and particularly relates to a method for high-valued utilization of non-metal components in waste circuit board cracking residue. The method mainly comprises the following steps: rolling and crushing, vibration sorting, ultrafine pulverization and electro-separation, quantitative batching, microwave sintering and discharging and grading. Compared with the prior art, rolling crushing is adopted to replace traditional shearing crushing, microwave sintering is adopted to replace a traditional Acheson smelting furnace, the effects of being easy to operate, saving energy and reducing consumption are achieved, the production efficiency is greatly improved, and the production cost is reduced. A brand-new method for obtaining high-purity silicon carbide by partially replacing anthracite and quartz sand with cracked coke and silicon dioxide in waste circuit board light plates or epoxy resin cracking residues is adopted, and high-value utilization of waste resources is achieved. The method has the characteristics of simple and feasible process, low manufacturing cost and wide adaptability, and is beneficial to improving the economic benefit and social benefit of enterprise production.

There is provided an apparatus and process for manufacturing a brick or paver with a high content of coal ash (ranging from 60% to 100% coal ash or fly ash) so that a waste product (coal ash, and more particularly Class F coal ash) from a coal-fired power plant is incorporated into a building product (high content fly ash brick or paver). Also provided is a variable firing tray to support the dried, high content coal ash bricks/pavers as the dried products are sent through a tunnel kiln, to improve circulation around the individual bricks/pavers and thereby result in reduced firing time in the kiln.

The invention provides a shuttle kiln that can fire ceramic porous bodies containing organic binders in a shorter period of time than in conventional methods without occurring breaks due to a temperature difference between the inside and the outside. The shuttle kiln of the invention is suited for firing of ceramic porous bodies containing organic binders. It includes a gas suction path 4 that suctions in-furnace gas and discharges it via an afterburner 5 and a circulation path 7 that suctions the in-furnace gas to the furnace outside to burn organic binder gas and then returns it into the furnace.

Provide a converging mirror-based furnace for heating a target by way of reflecting from a reflecting mirror unit the light emitted from a light source and then irradiating a target with the reflected light, wherein said target-heating converging-light furnace is such that: the reflecting mirror unit comprises a primary reflecting mirror and secondary reflecting mirror; the light emitted from the light source is reflected sequentially by the primary reflecting mirror and secondary reflecting mirror and then irradiated onto the target; and the light reflected by the secondary reflecting mirror and irradiated onto the target surface is not perpendicular to the target surface. Based on the above, a system that uses converged infrared light to provide heating can be made smaller while keeping its heating performance intact, even when the system uses a revolving ellipsoid.

A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.

A control unit can select a large-number control zone model in which the number of control zones, which are independently controlled, is large, and a small-number control zone model in which the number of control zones, which are independently controlled, is small. When a temperature is increased or decreased, the control unit can select the small-number control zone model so as to control, based on signals from temperature sensors of the respective control zones C1 . . . C5 whose number is small, heaters located on the respective control zones C1 . . . C5. When a temperature is stabilized, the control unit can select the large-number control zone model so as to control, based on signals signals from the temperature sensors of the respective control zones C1 . . . C10 whose number is large, the heaters located on the respective control zones C1 . . . C10.

Each of substrates which are sequentially loaded into an apparatus is transferred to one of empty (available) cooling units, and the cooling unit is reserved as a unit to be used for performing a cooling treatment after a post-exposure bake process for the substrate and the reservation information is stored. After one of the cooling units is reserved in advance before the post-exposure bake process, the substrate is transferred from the cooling unit to one of heating units without being subjected to a cooling treatment and is subjected to a post-exposure bake process therein. After the post-exposure bake process, the substrate is transferred from the heating unit to the reserved cooling unit which is reserved in advance and subjected to a cooling treatment therein.

A carbon-fiber-precursor acrylic fiber bundle which can smoothly pass through a flame-resistance impartation step and a carbonization step. The carbon-fiber-precursor acrylic fiber bundle has a high-density part as a portion thereof, wherein the high-density part satisfies the following requirements (A) and (B). Requirement A: The high-density part has a maximum fiber density ρ.sub.max of 1.33 g/cm.sup.3 or higher. Requirement B: The portion extending between an intermediate-density point and a maximum-density-region arrival point has an increase in fiber density of 1.3×10.sup.−2 g/cm.sup.3 or less per 10 mm of the fiber bundle length.

An auxiliary heat exchanger that is used in conjunction with thermoplastic melter kettles. The auxiliary heat exchanger receives molten thermoplastic material from the bottom of a melter kettle, transports the molten thermoplastic material though the auxiliary heat exchanger and feeds the molten thermoplastic material into the top of the melter kettle thereby mixing hotter molten thermoplastic material from the bottom of the melter kettle into cooler thermoplastic material near the top of the melter kettle. The auxiliary heat exchanger includes an oil bath chamber and parallel heat transfer tubes that are arranged in a serpentine configuration and include motor drive augers to transport molten thermoplastic material through the auxiliary heat exchanger.