A closed-loop temperature controller employing at least two sensors: a control temperature sensor and a safety sensor at the heat-transfer element. The heat-generating element is separated from the controlled mass/volume by a transport delay so that the mass or volume that is being heated or cooled is located in a vessel which is located remotely from the heat-transfer unit. Thermally conducting fluid flows through a conduit that connects the heat-transfer unit to the vessel. Upon fluid flow interruption or control sensor removal, the temperature controller quickly detects thermal runaway before the safety sensor has reached the critical temperature. In heated systems, the temperature controller will therefore minimize direct damage and/or overshoot damage caused by excessive heat. It will also maintain the heater's output at an elevated, but non-damaging level to enable a fast recovery to the original setpoint temperature after the nonlinearity subsides.

A cooling system includes a coolant source to cool down components of a processing chamber and a return line for the coolant coupled between the processing chamber and the coolant source. The return line has a valve, which includes a flow compartment having a first inlet and an outlet that support a default flow rate of the coolant, the flow compartment also having a second inlet. The valve has a plunger with a tip to variably open and close the second inlet to vary a flow rate of the coolant from the default flow rate. The valve has a shape memory alloy (SMA) spring positioned on the plunger between a side of the valve and the tip, the SMA spring attached to the tip to variably withdraw the tip from the second inlet in response to a rise in temperature of the coolant above a threshold temperature value.

A heat exchanger includes a pipe made of aluminum, a thermistor, and an attaching portion with which the thermistor is attached to the pipe. The pipe carries a flow of refrigerant. The thermistor detects a temperature of the refrigerant. The pipe includes a sacrificial layer provided on a part of a surface of the pipe. The sacrificial layer is lower in potential than the aluminum of the pipe. The attaching portion is higher in potential than the sacrificial layer. At least one part of the attaching portion is attached to the surface of the pipe where the sacrificial layer is not provided. The attaching portion includes a brazed portion that is higher in potential than the sacrificial layer. The thermistor is attached to the pipe with the brazed portion.

In a heat exchanger of the present invention, a release port for, in a case where a fluid flows into an internal space, releasing the fluid to an exterior is provided in a protection unit main body of each of protection units arranged on both outer sides of a heat exchange unit, and a protection unit fin plate of the protection unit has such strength that a coupling state between an outer surface of an outermost-layer partition plate and a bonding plate of the protection unit main body facing the outer surface is maintained even in a case where an inner pressure set as a design pressure for a part of the heat exchange unit constituting an outermost-layer flow passage adjacent to the protection unit is applied to the internal space of the protection unit main body of the protection unit.

In a heat exchanger of the present invention, a release port for, in a case where a fluid flows into an internal space, releasing the fluid to an exterior is provided in a protection unit main body of each of protection units arranged on both outer sides of a heat exchange unit, and a protection unit fin plate of the protection unit has such strength that a coupling state between an outer surface of an outermost-layer partition plate and a bonding plate of the protection unit main body facing the outer surface is maintained even in a case where an inner pressure set as a design pressure for a part of the heat exchange unit constituting an outermost-layer flow passage adjacent to the protection unit is applied to the internal space of the protection unit main body of the protection unit.

An additively manufactured heat exchanger configured to transfer heat between a first fluid and a second fluid includes a first channel with a first wall configured to port flow of a first fluid and a second channel with a second wall configured to port flow of a second fluid. The heat exchanger also includes a barrier channel containing unprocessed build powder provided by the additive manufacturing process and is located between the first wall and the second wall. The barrier channel is configured to prevent mixing of the first fluid and the second fluid when one of the first wall and the second wall ruptures.

An additively manufactured heat exchanger configured to transfer heat between a first fluid and a second fluid includes a first channel with a first wall configured to port flow of a first fluid and a second channel with a second wall configured to port flow of a second fluid. The heat exchanger also includes a barrier channel containing unprocessed build powder provided by the additive manufacturing process and is located between the first wall and the second wall. The barrier channel is configured to prevent mixing of the first fluid and the second fluid when one of the first wall and the second wall ruptures.

A tube leak detection device for detecting leak of at least one tube of a heat exchanger which increases a temperature of a liquid by heat exchange between the liquid flowing inside the at least one tube and a fluid flowing outside the at least one tube includes: an inlet opening-and-closing valve and an outlet opening-and-closing valve disposed at an inlet end and an outlet end of the at least one tube, respectively; and a pressure detection member for detecting a pressure inside the at least one tube between the inlet opening-and-closing valve and the outlet opening-and-closing valve.

A tube leak detection device for detecting leak of at least one tube of a heat exchanger which increases a temperature of a liquid by heat exchange between the liquid flowing inside the at least one tube and a fluid flowing outside the at least one tube includes: an inlet opening-and-closing valve and an outlet opening-and-closing valve disposed at an inlet end and an outlet end of the at least one tube, respectively; and a pressure detection member for detecting a pressure inside the at least one tube between the inlet opening-and-closing valve and the outlet opening-and-closing valve.

A pressure relief arrangement in refrigerant circuits with one high-pressure side and one low-pressure side, which is characterized in that the high-pressure side is fluidically connected with the low-pressure side of the refrigerant circuit via an overpressure relief device, wherein the overpressure relief device causes pressure reduction of the overpressure in the case of overpressure on the high-pressure side and fluid flows from the high-pressure side to the low-pressure side of the refrigerant circuit.