A reticle thermal expansion calibration method includes exposing a group of wafers and generating a sub-recipe, performing data mining and data parsing to generate a plurality of overlay parameters, extracting a plurality of predetermined parameters from the plurality of overlay parameters, performing a linear regression on each of the predetermined parameters, and generating a coefficient of determination for each of the predetermined parameters.

An abnormality determination apparatus includes a data acquisition part that acquires position data indicating a plurality of positions to be measured of a standard gage used in a coordinate measuring apparatus, in association with apparatus identification information for identifying the coordinate measuring apparatus, a generation part that generates distance data indicating a distance to be measured that is a distance between the plurality of positions to be measured indicated by the position data, a storage that stores an appropriate range in which the distance data is determined to be appropriate, and a determination part that determines whether there is an abnormality in the coordinate measuring apparatus on the basis of whether or not the distance to be measured indicated by the distance data is included in the appropriate range, and outputs a determination result in association with the apparatus identification information.

The present disclosure provides an assembly, adapter device, and method that utilize a standard displacement gauge or the like, well known to those of ordinary skill in the art, to measure the height of a flange, such as a flange formed via bending a planar vehicle component with a given thickness and, thus, including a radius at the bottom interior of the flange. This assembly, adapter device, and method provide consistent measurements across components, operators, education and experience levels, etc. The adapter device is designed to engage the flange being measured in such a way that consistent engagement of the adapter device with the radius, and, thus, consistent engagement of the assembly with the flange, is provided for measurement.

A length measuring device includes a carrier with a scale which extends longitudinally in a measuring direction. A scanning carriage for scanning a measuring graduation of the scale is longitudinally guided in the measuring direction, and, via a coupling, is rigidly coupled to a driver in the measuring direction and transversely thereto coupled to it in a flexible manner. The coupling includes a coupling element arranged between a first coupling point on the scanning carriage and a second coupling point on the driver. At the second coupling point, the coupling element is attached via a solid-body joint that is designed to carry the coupling element so as to be freely rotatable in relation to the driver about an axis of rotation which runs perpendicularly to a plane of the measuring graduation. The coupling element has a lower density than steel and/or a higher modulus of elasticity than steel.

A coordinate measuring machine and a method for operating a coordinate measuring machine, and a rotary table module for a coordinate measuring machine with a rotary table for receiving a workpiece and a rotary table block are provided. The rotary table is supported on a rotary table side rotatably about a rotary table axis. The rotary table block has, opposite the rotary table side of the rotary table block, a bottom side with which the rotary table module can be supported on a measurement table of the coordinate measuring machine. The rotary table block has a further supporting side with which the rotary table block is supportable on the measurement table of the coordinate measuring machine and which differs from the bottom side in its alignment. The rotary table module includes a pose capturing device for the determination of whether the rotary table block is supported on the bottom side.

A ground-fixing system for a tire characteristics sensor housing (10) comprises: a fixing plate (1) comprising a plurality of recesses (2) of a given profile distributed over the surface of the fixing plate; and a plurality of fixing pins (3) of substantially corresponding profile, similarly distributed on a fixing face of said sensor housing (10), the shapes and dimensions of the recesses (2) and of the pins (3) for fixing being provided so as to allow, on the one hand, in a position of insertion of the pins, engagement of the latter in said recesses and, on the other hand, in a locking position of the pins, fixing of the sensor housing (10) on the fixing plate (1).

According to one implementation, a feeding device of a hole inspection device having a probe includes an attaching jig, a movement mechanism, and a positioning jig. The probe is inserted into a hole to be inspected of an object in a central axis direction of the hole, for inspecting the hole. The attaching jig attaches the hole inspection device to the feeding device. The movement mechanism linearly reciprocates the hole inspection device together with the attaching jig. The positioning jig positions the movement mechanism to the object. A moving direction of the attaching jig and the hole inspection device is made parallel to the central axis direction of the hole by positioning the movement mechanism.

An apparatus for measuring a dimension of a freight item. The apparatus includes an elongate gauge member having a sequence of machine-readable codes visible along its length. Each of the machine-readable codes represents a length value corresponding to a position along the gauge member. The apparatus also includes a marker device, movable along the gauge member, for designating a selected position. The marker device includes a machine-readable reference symbol on an external surface thereof, with the reference symbol being located on the marker device such that in use the reference symbol on the marker device and a subset of the machine-readable codes on the gauge member are simultaneously visible. In a preferred embodiment the elongate gauge member includes a coilable tape and the marker device includes a housing within which the coilable tape is enclosed. A system including the measuring apparatus together with a mobile computing device is also disclosed.

A system for inspecting each workpiece of a plurality of non-identical workpieces, each workpiece having a distinct workholding specification. The system includes a workholder configured to autonomously execute a plurality of workholding operations pursuant to parameters of a specified pre-defined workholding mode specified from a plurality of distinct, pre-defined workholding modes. Each pre-defined workholding mode specifies a plurality of holding parameters corresponding to the holding specification of a corresponding workpiece.

A coordinate positioning machine includes a drive frame and a metrology frame. The drive frame includes a drive arrangement for moving a structure around a working volume of the machine. The metrology frame includes a metrology arrangement for measuring the position of the structure within the working volume. The metrology arrangement is a hexapod metrology arrangement and the drive arrangement is a non-hexapod drive arrangement. The metrology frame has a coefficient of thermal expansion that is lower than that of the drive frame. The drive frame is coupled to the metrology frame via a coupling arrangement which prevents at least some distortion associated with any extra thermal expansion and contraction of the drive frame from being transferred to the metrology frame. The drive arrangement moves the structure around the working volume, and the metrology arrangement measures the position of the structure within the working volume.