A sensor system and a method of operating a sensor system including a plurality of sensors tracking a moving object in an area having known bounding surfaces. The apparatus and method calculate a time-specific position of the object based on data and sensor parameters from at least two of the plurality of sensors and determine errors between the calculated time-specific positions calculated. The method and apparatus calculate a minimum system error attributable to the at least two sensors by constraining at least one dimension in the data of the sensor used in the calculated time-specific position of the object associated with the sensor, the constraining based on an object/surface interaction, the minimum system error calculated by solving for modified sensor parameters for each sensor.

Methods for an instrument including a light source of are provided. A method for an instrument including a light source includes providing light from the light source to a target location in a process chamber. The method includes receiving the light at a sensor. The method includes determining, using data from the sensor, a first position of the light at the target location. Moreover, the method includes determining whether to adjust the light to a second position at the target location. Related instruments are also provided.

Methods for an instrument including a light source of are provided. A method for an instrument including a light source includes providing light from the light source to a target location in a process chamber. The method includes receiving the light at a sensor. The method includes determining, using data from the sensor, a first position of the light at the target location. Moreover, the method includes determining whether to adjust the light to a second position at the target location. Related instruments are also provided.

A pattern matching apparatus includes a computer system configured to execute pattern matching processing between first pattern data based on design data 104 and second pattern data representing a captured image 102 of an electron microscope. The computer system acquires a first edge candidate group including one or more first edge candidates, acquires a selection-required number (the number of second edge candidates to be selected based on the second pattern data), acquires a second edge candidate group including the second edge candidates of the selection-required number, acquires an association evaluation value for each of different association combinations between the first edge candidate group and the second edge candidate group, selects one of the combinations based on the association evaluation value, and calculates a matching shift amount based on the selected combination.

In an industrial robot, an external high-precision metrology tracking system, such as a laser tracker system, is used to directly measure robot kinematic errors and corrections are implemented during processing so that the end effector of the robot may be accurately positioned so that a tool or other object carried by the robot effector can carry out a designated function, such as machining a workpiece or other operation requiring that the effector be accurately positioned with respect to a workpiece.

An inspection device is a device that inspects the position of an electrode plate in a multilayer body, which is obtained by bonding a separator and the electrode plate to each other by means of an adhesive, from the separator side. This inspection device is provided with: an infrared light irradiation unit that irradiates the multilayer body, from the separator side, with infrared light that has a peak wavelength within the range of from 6.5 μm to 9.6 μm; a camera that takes an image of the infrared light that transmits through the separator and is reflected by the electrode plate; and a detection unit that detects the position of the electrode plate.

The invention relates to a laser tracker-based surveying system having a measurement aid which comprises an inertial measurement unit (IMU). The surveying system is designed to determine coordinates of points of a surface which are sampled by means of the measurement aid.

An arrangement for increasing measurement accuracy in three-dimensional measurement of objects, and a method for three-dimensional measurement of objects. The arrangement has a base for placing thereon an object to be measured, a device for emitting light beams toward the object, a device for detecting light beams reflected by the object and the substrate, and a device for determining 3D data based on travel time measurements and/or triangulation of the emitted light beams and reflected light beams, and for determining dimensions of the outer shell of the object. A measurement inaccuracy range affected by interferences and forming on the substrate is bridged and spaced from the actual measurement position by a transparent plate with a predetermined thickness arranged between the at least one object and the substrate, so that the determination of dimensions of the outer shell of the object is only partially possible and becomes more precise.

An image processing method includes the steps of acquiring input data including a captured image and information about a state of an optical system that was used to capture the captured image, and estimating distance information about the captured image by inputting the input data into a machine learning model. The information about the state of the optical system includes at least one of a focal length, an F-number, and a focused object distance.

A classification apparatus includes: a specifying unit integrated with a neural network that has been trained to classify a state of a space using information indicating a light projection pattern and information indicating a light reception pattern; a light projection information acquisition unit configured to acquire information indicating a light projection pattern of light projected into a predetermined space, and output the acquired information to the specifying unit; and a light receiving unit configured to acquire information indicating a light reception pattern of light received from the predetermined space, and output the acquired information to the specifying unit, wherein the specifying unit outputs a classification result of classifying a state of the predetermined space, based on the information indicating the light projection pattern acquired by the light projection information acquisition unit and on the information indicating the light reception pattern of the light received by the light receiving unit.