A line charge volume and methods for use in delivery of gas to a reactor for processing semiconductor wafers is provided. The line charge volume includes a chamber that extends between a first end and a second end, and the first end includes an inlet port and an outlet port. A pressure sensor is integrated with the chamber. The pressure sensor has a measurement side for measuring a deflection of a diaphragm. The diaphragm is directly exposed to an interior of the chamber so that pressure produced by a gas that is provided into the chamber via the inlet port produces a force upon the diaphragm. The measurement side includes electronics for measuring a capacitance value corresponding to the deflection of the diaphragm. The deflection is correlated to a pressure difference, and the pressure difference is equivalent to a pressure volume (Pv) of the chamber.

A prediction method for predicting freezing of a liquid flowing in a pipe of a liquid meter includes steps of: acquiring measurements of air temperature in the liquid meter; evaluating an air temperature prediction parameter and then, from the air temperature prediction parameter, evaluating a liquid temperature prediction parameter; using the liquid temperature prediction parameter to estimate a duration-to-freezing between a present instant and an instant at which the liquid risks freezing; and generating an alarm if the duration-to-freezing is less than a predetermined time threshold.

The embodiments disclosed herein relate to an apparatus for monitoring a fluid level in a returns tank in the oil and gas industry, the apparatus having a sensor configured to monitor the fluid level of the returns tank, wherein the sensor is located within the tank; and a communication device configured to transmit the fluid level from the sensor to a programmable logic controller

A flow meter device includes plural fluid passages which are provided between an inlet section into which a fluid flows and an outlet section from which the fluid flows out, and through which the fluid flows and flow value measuring units installed in the plural fluid passages, respectively. The flow value measuring units are configured to measure flow values of the fluid flowing through the fluid passages. The flow meter device further includes a control unit configured to determine whether or not to cause one or more of the flow value measuring units to stop a measuring operation of the flow value based on the flow values measured by the flow value measuring units. The control unit is further configured to determine whether or not to cause the one or more of the flow value measuring units to resume the measuring operation of the flow value, based on the flow value measured by the flow value measuring unit as a monitoring measuring unit which is other than the one or more of the flow value measuring units and is activated to perform the measuring operation of the flow value.

A flow meter device includes plural fluid passages which are provided between an inlet section into which a fluid flows and an outlet section from which the fluid flows out, and through which the fluid flows and flow value measuring units installed in the plural fluid passages, respectively. The flow value measuring units are configured to measure flow values of the fluid flowing through the fluid passages. The flow meter device further includes a control unit configured to determine whether or not to cause one or more of the flow value measuring units to stop a measuring operation of the flow value based on the flow values measured by the flow value measuring units. The control unit is further configured to determine whether or not to cause the one or more of the flow value measuring units to resume the measuring operation of the flow value, based on the flow value measured by the flow value measuring unit as a monitoring measuring unit which is other than the one or more of the flow value measuring units and is activated to perform the measuring operation of the flow value.

Provided is a cylinder intake air amount estimation apparatus for an internal combustion engine, which is capable of highly precisely calculating a cylinder intake air amount based on an AFS intake air amount in a control system for an engine including a supercharger. A cylinder intake air amount calculation part calculates the cylinder intake air amount based on an intake opening intake air amount by using a physical model of an intake system derived based on a volume efficiency acquired by considering an intake manifold as a reference, which is a volume efficiency of air entering a cylinder from the intake manifold, a virtual intake manifold volume, and a stroke volume per cylinder, the physical model being adapted to the control system for an engine including a supercharger.

A flow control valve assembly has at least one manifold having an inlet flow port, an outlet flow port, and a flow channel provided therebetween, the flow channel having an inlet chamber, a variable area chamber and an outlet chamber, with fluid flowing from the inlet flow port to the inlet chamber, the variable area chamber and the outlet chamber, in that order, before exiting the outlet flow port. The flow control valve assembly also includes a float assembly extending inside the flow channel, the float assembly having a float that is limited for its movement inside the variable area chamber, a measuring device which measures the displacement of the float, and a connecting rod which connects the float to the measuring device. A bracket assembly is secured to the inlet chamber inside the flow channel, with the measuring device retained by the bracket assembly.

A flow control valve assembly has at least one manifold having an inlet flow port, an outlet flow port, and a flow channel provided there between, the flow channel having an inlet chamber, a variable area chamber and an outlet chamber, with fluid flowing from the inlet flow port to the inlet chamber, the variable area chamber and the outlet chamber, in that order, before exiting the outlet flow port. The flow control valve assembly further includes a float assembly having a fitting, a float extending through the flow channel from the fitting and which is limited for its movement inside the variable area chamber, a measuring device that measures the displacement of the float and which is secured to the fitting and positioned outside the flow channel, and a connecting rod which connects the float to the measuring device and extends through the flow channel.

A system and method including a weighing scale configured to measure a starting weight at a start time of a vaporizer chamber with a vaporizable liquid, the weighing scale configured to measure an ending weight at an end time and a controller configured to determine a vapor flow rate out of the vaporizer chamber based on a difference between the start time and the end time.

A flow measurement device includes a first sensor device that responds to stimulus from fluid medium flowing through a measurement section by registering a measure representing a physical characteristic, a processor, and a data storage including a look-up table containing a first collection of values representing a first value of flow of a first fluid or a first value of flow of a second fluid, and a second look-up table containing a second collection of the values representing a second value of the flow of the first fluid or a second value of the flow of the second fluid, the processor receiving the measures registered during a measurement time interval and estimating a flow pattern of the fluid medium during the measurement interval where the flow pattern describes how the first and second fluids are distributed in the measurement section over the measurement time interval.