A collection system of a semiconductor metrology tool includes a chuck to support a target from which an optical beam is reflected and a spectrometer to receive the reflected optical beam. The collection system also includes a plurality of aperture masks arranged in a rotatable sequence about an axis parallel to an optical axis. Each aperture mask of the plurality of aperture masks is rotatable into and out of the reflected optical beam between the chuck and the spectrometer to selectively mask the reflected optical beam.

A polarimeter includes a Polarization Maintaining (PM) coupler with an input configured to receive input light and split the input light to a first output and a second output; a first PM fiber coupled to the first output; a second PM fiber coupled to the second output; a first polarization device coupled to the first PM fiber; a second polarization device coupled to the second PM fiber; and a plurality of detectors coupled to the first polarization device and the second polarization device, wherein outputs i.sub.1, i.sub.2, i.sub.3, i.sub.4 are determined based on outputs of the plurality of detectors, the outputs i.sub.1, i.sub.2, i.sub.3, i.sub.4 are linear projections of corresponding Stokes Parameters of the input light.

A polarimeter includes a Polarization Maintaining (PM) coupler with an input configured to receive input light and split the input light to a first output and a second output; a first PM fiber coupled to the first output; a second PM fiber coupled to the second output; a first polarization device coupled to the first PM fiber; a second polarization device coupled to the second PM fiber; and a plurality of detectors coupled to the first polarization device and the second polarization device, wherein outputs i.sub.1, i.sub.2, i.sub.3, i.sub.4 are determined based on outputs of the plurality of detectors, the outputs i.sub.1, i.sub.2, i.sub.3, i.sub.4 are linear projections of corresponding Stokes Parameters of the input light.

Embodiments provide an integrated miniature polarimeter and spectrograph (IMPS) and associated methods for using an IMPS to determine Stokes parameters to describe a source beam. In one embodiment an IMPs is provided comprising a spectropolarimeter module. The spectropolarimeter module comprises a miniature optical bench; a slit component; a birefringent wedge; a dichroic prism; a spectral disperser; and a focal plane array. The slit component, birefringent wedge, dichroic prism, spectral disperser, and focal plane array are mounted to the miniature optical bench such that a beam incident on the slit component will be incident on (1) the birefringent wedge, (2) the dichroic prism, (3) the spectral disperser, and (4) the focal plane array, in that order.

Embodiments provide an integrated miniature polarimeter and spectrograph (IMPS) and associated methods for using an IMPS to determine Stokes parameters to describe a source beam. In one embodiment an IMPs is provided comprising a spectropolarimeter module. The spectropolarimeter module comprises a miniature optical bench; a slit component; a birefringent wedge; a dichroic prism; a spectral disperser; and a focal plane array. The slit component, birefringent wedge, dichroic prism, spectral disperser, and focal plane array are mounted to the miniature optical bench such that a beam incident on the slit component will be incident on (1) the birefringent wedge, (2) the dichroic prism, (3) the spectral disperser, and (4) the focal plane array, in that order.

The disclosure discloses a method of measuring optical parameters of a polarizer and a measuring device. The polarizer includes a compensation film and a PVA layer. The measuring method includes the following steps. In the first state, providing an incident linearly polarized light sequentially to pass through the compensation film and the PVA layer, acquiring a first measurement parameter and a second measurement parameter when the brightness of the light emitted from the polarizer is lowest and is highest. In the second state, providing the incident linearly polarized light sequentially to pass through the PVA layer and the compensation film, acquiring a third measurement parameter and a fourth measurement parameter when the brightness of the light emitted from the polarizer is lowest and is highest; and acquiring optical parameters of the compensation film and/or the PVA layer in the polarizer according to one or more of the above measurement parameters.

Majorana photons are transmitted through a biological tissue sample to image the tissue. The Majorana photons have a circular polarization, a radial polarization or an azimuthal polarization. The transmitted photons are processed to produce a digital image of the biological tissue sample.

Exemplary thin-film optical devices have first and second layer groups disposed as a layer stack on a substrate. The first layer group comprises a first PPN layer, a first LCP layer, and a first barrier layer all superposed. The second layer group is superposed relative to the first layer group, and includes a second PPN layer, a second LCP layer, and a second barrier layer all superposed. The first and second layer groups cooperate to polarize multiple wavelengths of an incident light flux in a broadband and/or wide-angle manner Each of the layer groups has an alignment layer, a respective liquid-crystal polymer layer, and a barrier layer.

There is provided an imaging device including: an imaging section including pixels that generate pixel signals on the basis of incident light, the pixels including a polarization pixel having a predetermined polarization direction and a non-polarization pixel; and a polarization rotating section provided on an incidence plane side of the imaging section, and configured to rotate a polarization direction of the incident light.

There is provided an imaging device including: an imaging section including pixels that generate pixel signals on the basis of incident light, the pixels including a polarization pixel having a predetermined polarization direction and a non-polarization pixel; and a polarization rotating section provided on an incidence plane side of the imaging section, and configured to rotate a polarization direction of the incident light.