Patent classifications
G01J9/00
SYSTEM AND METHOD FOR DIGITAL OPTICAL ABERRATION CORRECTION AND SPECTRAL IMAGING
There are provided systems and methods for digital optical aberration correction and spectral imaging. An optical system may comprise an optical imaging unit, to form an optical image near an image plane of the optical system; a wavefront imaging sensor unit located near the image plane, to provide raw digital data on an optical field and image output near the image plane; and a control unit for processing the raw digital data and the image output to provide deblurred image output, wherein the control unit comprises a storage unit that stores instructions and a processing unit to execute the instructions to receive the image input and the raw digital data of the optical field impinging on the wavefront imaging sensor and generate a deblurred image based on an analysis of the optical mutual coherence function at the imaging plane.
SYSTEM AND METHOD FOR DIGITAL OPTICAL ABERRATION CORRECTION AND SPECTRAL IMAGING
There are provided systems and methods for digital optical aberration correction and spectral imaging. An optical system may comprise an optical imaging unit, to form an optical image near an image plane of the optical system; a wavefront imaging sensor unit located near the image plane, to provide raw digital data on an optical field and image output near the image plane; and a control unit for processing the raw digital data and the image output to provide deblurred image output, wherein the control unit comprises a storage unit that stores instructions and a processing unit to execute the instructions to receive the image input and the raw digital data of the optical field impinging on the wavefront imaging sensor and generate a deblurred image based on an analysis of the optical mutual coherence function at the imaging plane.
Wavelength detection device and confocal measurement device
The present invention provides a wavelength detection device (10) provided with: a plurality of optical filters (12a, 12b); a splitting unit (11) which splits light and allows the split light to pass through each of the plurality of optical filters (12a, 12b); a plurality of light receiving elements (13a, 13b) which detect the intensities of different beams of light which have passed through the optical filters, respectively; and a calculation unit (16) which calculates, from the outputs of the plurality of light receiving elements, physical quantities related to the transmittances of the plurality of optical filters, and calculates the wavelengths of the beams of light which have passed through the plurality of optical filters, on the basis of the transmittance characteristics, wherein the transmittance characteristics of the plurality of optical filters have an inclination section in different wavelength ranges of the wavelength range of the object to be measured.
Conformal imaging vibrometer using adaptive optics with scene-based wave-front sensing
Conformal imaging vibrometer using adaptive optics with scene-based wave front sensing. An extended object is located at the first end of a link, and a reference-free, adaptive optical, conformal imaging vibrometer using scene-based wave front sensing is located at the second end of the link. An aberrated, free space or guided-wave path exists between the ends of the link. The adaptive optical system compensates for path distortions. Using a single interrogation beam, whole-body vibrations of opaque and reflective objects can be probed, as well as transparent and translucent objects, the latter pair employing a Zernike heterodyne interferometer.
Deformable mirror for efficient correction of large aberrations
The present invention relates to a deformable mirror, specifically a gimbaled deformable mirror for use with wavefront sensors, which mirror separates the tilt correction from the higher order modes (e.g. defocus, spherical, astigmatism, and coma at higher order aberrations, up to the limits of a particular mirror design) in order to use all of the available mirror deformation stroke for correcting the higher order modes. The separation is done by placing the deformable mirror in a gimbaled structure, so that the deformable mirror can be tilted in two independent, orthogonal axes.
Deformable mirror for efficient correction of large aberrations
The present invention relates to a deformable mirror, specifically a gimbaled deformable mirror for use with wavefront sensors, which mirror separates the tilt correction from the higher order modes (e.g. defocus, spherical, astigmatism, and coma at higher order aberrations, up to the limits of a particular mirror design) in order to use all of the available mirror deformation stroke for correcting the higher order modes. The separation is done by placing the deformable mirror in a gimbaled structure, so that the deformable mirror can be tilted in two independent, orthogonal axes.
COMPUTATIONAL IMAGING WITH UNCALIBRATED PUPIL PHASE
Systems and methods are disclosed for improving image quality by modifying received radiation wavefronts with one or more uncalibrated variable phase plates at the pupil plane of the optical system, to produce an atmospheric-like blurred image on the focal plane with an effective increase in the sampling parameter Q. Real-time image restoration algorithms may then be applied to data sets sampled from the blurred image formed on the detector array. Numerous phase plate embodiments are provided for modifying the wavefront.
Metrology system and method having a plurality of sensors for estimating a spectral feature of a pulsed light beam
A metrology system includes an optical frequency separation apparatus in the path of the pulsed light beam and configured to interact with the pulsed light beam and output a plurality of spatial components that correspond to the spectral components of the pulsed light beam; a plurality of sensing regions that receive and sense the output spatial components; and a control system connected to an output of each sensing region. The control system is configured to: measure, for each sensing region output, a property of the output spatial components from the optical frequency separation apparatus for one or more pulses; analyze the measured properties including averaging the measured properties to calculate an estimate of the spectral feature of the pulsed light beam; and determine whether the estimated spectral feature of the pulsed light beam is within an acceptable range of values of spectral features.
Metrology system and method having a plurality of sensors for estimating a spectral feature of a pulsed light beam
A metrology system includes an optical frequency separation apparatus in the path of the pulsed light beam and configured to interact with the pulsed light beam and output a plurality of spatial components that correspond to the spectral components of the pulsed light beam; a plurality of sensing regions that receive and sense the output spatial components; and a control system connected to an output of each sensing region. The control system is configured to: measure, for each sensing region output, a property of the output spatial components from the optical frequency separation apparatus for one or more pulses; analyze the measured properties including averaging the measured properties to calculate an estimate of the spectral feature of the pulsed light beam; and determine whether the estimated spectral feature of the pulsed light beam is within an acceptable range of values of spectral features.
PHOTOELECTRIC CONVERSION ELEMENT AND WAVELENGTH SENSOR
A photoelectric conversion element is realized in which the movement direction of electrons in the element changes according to the wavelength of light to be converted. A photoelectric conversion unit includes an active layer on which light to be converted is incident, an intermediate layer that is arranged on the active layer on a side opposite to the side on which the light to be converted is incident, and a reflection layer that is arranged so as to oppose the active layer with the intermediate layer interposed therebetween. The active layer includes a plasmonic material, which is a material in which plasmon resonance occurs due to a reciprocal action with the light to be converted. The intermediate layer has both a semiconductor property and transparency with respect to the light to be converted. The reflection layer has reflectivity with respect to the light to be converted.