Patent classifications
G01K15/00
TEMPERATURE CALIBRATION METHODS FOR SEMICONDUCTOR MACHINE
The present application provides a temperature calibration method for a semiconductor machine, including following steps: providing at least one temperature calibration sheet, the temperature calibration sheet comprising a transistor having a voltage-temperature characteristic curve corresponding to a set current; placing the temperature calibration sheet in a measurement region of the semiconductor machine; energizing the temperature calibration sheet at an energizing current being the same as the set current, and measuring a voltage of the transistor; and, obtaining a temperature of the transistor according to the voltage-temperature characteristic curve of the transistor by using the voltage as a known parameter, the temperature being a temperature of the measurement region of the semiconductor machine. The accuracy of temperature calibration is greatly improved, the performance of the semiconductor machine and the yield of the semiconductor manufacturing process are also improved.
TEMPERATURE CALIBRATION SHEETS AND APPLICATION METHODS THEREOF
A temperature calibration sheet includes a main body and a plurality of test keys arranged in the main body. The test keys have voltage-temperature characteristic curves corresponding to a set current. Temperatures of the test keys are obtained by detecting voltages of the test keys. The temperature calibration sheet can simulate a state of a wafer, sidewalls of the test keys are not exposed to the air, and the state of the temperature calibration sheet arranged on a semiconductor machine is the same as that of the wafer arranged on the semiconductor machine, such that the temperature of the temperature calibration sheet can truly reflect the temperature of the wafer when arranged on the semiconductor machine, and the temperature of the semiconductor machine can be calibrated accurately.
Temperature measurement system and method of calibration thereof
A temperature measurement system of a vehicle includes a controller, a first temperature sensor associated with a first location, and a second temperature sensor associated with a second location. The temperature measurement system is calibratable based upon a comparison of a temperature of the first location and a temperature of the second location, wherein the temperature of at least one of the first location and the second location is determined after a predetermined time from an end of operation of the vehicle.
Temperature Measurement Device and Temperature Measurement Method
An embodiment is a temperature measuring device including a sensor that measures the temperature of a skin surface of a living body and a heat flux on the skin surface, a time constant calculation unit that calculates a time constant of changes in the temperature over time on the basis of the measurement result of the temperature, a thermal resistance derivation unit that derives the thermal resistance of the living body on the basis of the time constant, and a temperature calculation unit that calculates the internal temperature of the living body on the basis of the temperature of the skin surface and the heat flux on the skin surface measured by the sensor and the thermal resistance derived by the thermal resistance derivation unit.
Method and apparatus for evaluation of temperature sensors
A service management system facilitates service on building management systems. A connected services system of a connected services system stores temperature information from temperature detectors of building management systems (including heat detectors of fire alarm systems and thermostats of building automation systems), which send sensor values to control panels, which, in turn, send the temperature information to the connected services system. A temperature detector evaluation module of the connected services system retrieves the temperature information from the connected services database, generates aggregate temperature information based on the temperature information and then determines which of the temperature detectors require service based on the aggregate temperature information, for example, by detecting outlier temperature information. Scheduled service tasks for the temperature detectors requiring service are then pushed to a service workflow module, which sends the scheduled service tasks to a mobile computing device operated by a technician performing the service.
Imaging device and calibration method
To obtain an imaging device that can improve temperature detection accuracy. An imaging device of the present disclosure includes a processing unit formed on a first semiconductor substrate and capable of performing predetermined image processing on the basis of image data obtained by an imaging unit, a temperature sensor formed on the first semiconductor substrate and capable of generating a detection signal according to a temperature, and a first pad electrode formed on the first semiconductor substrate and electrically insulated from a circuit formed on the first semiconductor substrate.
Method for calibrating at least one electronic temperature sensor
A method for calibrating an electronic temperature sensor connected to a mobile device. The device includes a microprocessor and memory linked to the microprocessor, to store an application coupled to a data entry interface. The temperature sensor is initially placed in a plurality of predetermined environments, where it provides an initial raw temperature value measured in each environment, and, for each of these environments, a predetermined initial temperature value corresponding to the actual temperature of this environment is entered beforehand directly into the application via the interface. The method includes in computing a calibration curve according to each predetermined initial temperature value entered from the application and according to each corresponding initial raw temperature value provided by the temperature sensor, storing in the device or in the sensor, calibration parameters determined from the calibration curve, and correcting by the calibration parameters each raw temperature value measured by the sensor.
Method for calibrating at least one electronic temperature sensor
A method for calibrating an electronic temperature sensor connected to a mobile device. The device includes a microprocessor and memory linked to the microprocessor, to store an application coupled to a data entry interface. The temperature sensor is initially placed in a plurality of predetermined environments, where it provides an initial raw temperature value measured in each environment, and, for each of these environments, a predetermined initial temperature value corresponding to the actual temperature of this environment is entered beforehand directly into the application via the interface. The method includes in computing a calibration curve according to each predetermined initial temperature value entered from the application and according to each corresponding initial raw temperature value provided by the temperature sensor, storing in the device or in the sensor, calibration parameters determined from the calibration curve, and correcting by the calibration parameters each raw temperature value measured by the sensor.
Fault Detection Apparatus
An object of the present invention is to enhance fault detection accuracy offered by a fault detection apparatus. A microcomputer reads a characteristic signal input thereto. The microcomputer compares a characteristic read from the characteristic signal with a previously established reference value. The previously established reference value represents a characteristic exhibited by a resistor that is connected with a temperature sensor circuit when the temperature sensor circuit operates normally. The microcomputer determines whether the characteristic exhibited by the resistor falls within a detection range. If it is determined that the characteristic falls with the detection range, the temperature sensor circuit is detected to be operational and information indicating that the temperature sensor circuit is operational is output to a host control apparatus. If it is determined that the detection range is exceeded, the temperature sensor circuit is detected to be faulty and information indicating that the temperature sensor circuit is faulty is output to the host control apparatus.
Devices and method for calibrating measured values
A device, which includes an input, configured to read in an analog signal, an analog/digital converter, configured to convert the analog signal into a digital value, and a processor, configured to determine a digital measured value. The processor is further configured to derive a calibrated digital value from the digital value with the aid of a linear calibration function and to derive the digital measured value from the calibrated digital value with the aid of a nonlinear measurement function. The processor modifies the linear calibration function in response to a calibration signal, based on an algorithm, which is based on the nonlinear measurement function, and a number of predefined comparison measured values.