A pressure sensor device for internal pressure monitoring in a hose, preferably an infusion hose, that is used for fluid transmission and that rests directly or indirectly on a pressure sensor housing. The hose is elastically deformable and connected via a contact side to a pressure transmission element located in the pressure sensor housing. The pressure transmission element transmits internal pressure changes absorbed via the contact side to a compressive force sensor for measurement. The contact side can have an elliptical shape, and the pressure transmission element can have a funnel-shaped extension, to make the pressure sensor device as robust as possible in terms of measurement accuracy, and independent of fluctuations in temperature and associated changes in material states.

A pipeline pressure monitoring device includes a housing, a vent nozzle, a first circuit board, a pressure sensor, a sliding sleeve, an elastic member sleeved on the vent nozzle and sandwiched between the first stop block and the sliding sleeve, a magnetic block on the sliding sleeve, a second circuit board connected to the first circuit board, and a position sensor on the second circuit board and cooperating with the magnetic block. A first stop block is arranged on the vent nozzle. One end of the vent nozzle protrudes from the housing through a mounting hole of the housing. The pressure sensor is installed at the other end of the vent nozzle and on the first circuit board. The pressure sensor blocks the other end of the vent nozzle. The sliding sleeve is installed in the mounting hole in a sliding manner and sleeved on the vent nozzle.

A measurement system is configured to determine a pressure of a liquid of interest having compressibility k.sub.m flowing in a channel of radius r.sub.int, which are selected such that the product k.sub.mr.sub.int is less than or equal to 12.510.sup.11 mm/Pa. The system includes a flow actuator for flowing the liquid of interest in the channel at a Mach number less than or equal to 0.3, a thermal measurement device for measuring a temperature of the liquid of interest flowing in the channel, and a processing unit configured to determine the pressure from the temperature measured and a predetermined calibration function.

Provided is a sensor device disposed in a semiconductor manufacturing apparatus, the sensor device including a sensor array configured to be in a flow path of a gas supplied to the semiconductor manufacturing apparatus, the sensor array including a first calorimeter and a second calorimeter, and a controller configured to identify a pressure of the gas based on a temperature of the first calorimeter, an ambient temperature, and a first amount of heat transfer in the first calorimeter, and identify a flow velocity of the gas based on a temperature of the second calorimeter, the ambient temperature, a second amount of heat transfer in the second calorimeter, and the pressure.