Methods and apparatus for reduction of non-linearity errors in automotive pressure sensors. A pressure sensor includes a pressure sensing element including a pair of parallel electrodes, a pair of ceramic plates, rigid glass seals and a connection between the pair of parallel electrodes and an integrated circuit (IC). The IC executes a linear mapping function of a 1/C.sub.X value after a C.sub.X value is captured from the pressure sensing element, C representing a capacitance, the linear mapping function reducing a non-linearity error to enable two point calibration of a relationship between pressure and capacitance.

A door assembly includes a structural wrapper defining an insulating cavity. The structural wrapper defines a sensor port. A sensor assembly is coupled to an outer surface of the structural wrapper proximate to the sensor port. The sensor assembly includes a connector having a base coupled to a housing. The base is coupled to the structural wrapper. The connector defines an interior in fluid communication with the insulating cavity. A pressure sensor is disposed within the housing. The pressure sensor is configured to sense a pressure within the insulating cavity. At least one plate is disposed at an open end of the housing. The pressure sensor includes sensor pins that extend through the at least one plate.

A door assembly includes a structural wrapper defining an insulating cavity. The structural wrapper defines a sensor port. A sensor assembly is coupled to an outer surface of the structural wrapper proximate to the sensor port. The sensor assembly includes a connector having a base coupled to a housing. The base is coupled to the structural wrapper. The connector defines an interior in fluid communication with the insulating cavity. A pressure sensor is disposed within the housing. The pressure sensor is configured to sense a pressure within the insulating cavity. At least one plate is disposed at an open end of the housing. The pressure sensor includes sensor pins that extend through the at least one plate.

Method for processing a measurement signal (x) from a pressure measurement cell in order to generate an output signal (y) with the aid of a filter unit (10), wherein the method involves generating the output signal (y) with the aid of the filter unit (10) by at least reducing, preferably eliminating, a noise signal contained in the measurement signal (x), continuously determining a difference between the measurement signal (x) and the output signal (y), and changing a characteristic of the filter unit (10) as soon as the difference becomes greater than a threshold value, wherein the changed characteristic of the filter unit (10) remains as long as the difference becomes smaller than the threshold value, and wherein the changing of the filter characteristic involves decreasing the reduction in the noise signal present in the measurement signal (x).

A portable vacuum pressure graphing gauge device enabling users of vacuum systems the ability to see trends of vacuum systems through real time plotting of a pressure vs. time curve on a hand held instrument, enabling them to understand what is going on in their system, or the like. A device may include several graphical modes designed to even more easily interpret vacuum data, and packaging that is rugged and versatile including a magnet, kickstand, wireless connectivity, visual and audible set points, automatic sensor fault detection, and several vacuum pressure measurement units to choose from, or the like.

A portable vacuum pressure graphing gauge device enabling users of vacuum systems the ability to see trends of vacuum systems through real time plotting of a pressure vs. time curve on a hand held instrument, enabling them to understand what is going on in their system, or the like. A device may include several graphical modes designed to even more easily interpret vacuum data, and packaging that is rugged and versatile including a magnet, kickstand, wireless connectivity, visual and audible set points, automatic sensor fault detection, and several vacuum pressure measurement units to choose from, or the like.

A sputtering apparatus includes a space defining member defining a sputtering space for forming a film on a substrate. The space defining member includes a concave portion, and an opening portion is provided in the bottom portion of the concave portion. The sputtering apparatus includes a shield member configured to shield the opening portion from the sputtering space. The opening portion is formed so that a pressure gauge capable of measuring the pressure in the sputtering space can be attached, and the shield member is arranged so that at least a part of the shield member is buried in the concave portion.

A sputtering apparatus includes a space defining member defining a sputtering space for forming a film on a substrate. The space defining member includes a concave portion, and an opening portion is provided in the bottom portion of the concave portion. The sputtering apparatus includes a shield member configured to shield the opening portion from the sputtering space. The opening portion is formed so that a pressure gauge capable of measuring the pressure in the sputtering space can be attached, and the shield member is arranged so that at least a part of the shield member is buried in the concave portion.

The discrimination ability of a chemical sensing cross-reactive arrays is enhanced by constructing sensing elements in two dimensions, first in the x-y plane of the substrate, second in the z dimension so that the sensors are vertically stacked on top of one another. Stacking sensing elements on top of one another adds to the discrimination ability by enabling the characteristic measurement of how fast target chemicals are passing through the stack of sensors. The new invention also allows the ability to discriminate components in a sample mixture by separating them using their innate difference in diffusional rates. Multi-sensor response patterns at each z level of sensors and time delay information from the sample passing from one level to the next are used to generate the response vector. The response vector is used to identify individual component samples and components in a mixture sample.

Methods and apparatus for substrate position calibration for substrate supports in substrate processing systems are provided herein. In some embodiments, a method for positioning a substrate on a substrate support includes: obtaining a plurality of backside pressure values corresponding to a plurality of different substrate positions on a substrate support by repeatedly placing a substrate in a position on the substrate support, and vacuum chucking the substrate to the substrate support and measuring a backside pressure; and analyzing the plurality of backside pressure values to determine a calibrated substrate position.