A module is operable to monitor at least a pressure within a tire of a wheel, the module being operatively mounted to said wheel, the module including (a) a pressure sensor for measuring the pressure (P) and generating a corresponding pressure signal; and b1) an associated data memory including a data field containing data relevant to the functional status of the tire.

The present invention relates to a MEMS deposition trap (10) comprising: a manifold layer having manifold inlet channels and manifold outlet channels, a microchannel layer (20) having microchannels (33), wherein the manifold layer and the microchannel layer are bonded together so as to form a fluid path, wherein a fluid is forced to pass through the microchannels (33) when flowing from the manifold inlet channels to the manifold outlet channels. Furthermore, it relates to a vacuum sensor having such a deposition trap as and to a process chamber of a manufacturing equipment, preferably used for thin-film deposition or etching processes, comprising such a vacuum sensor.

The present invention relates to a MEMS deposition trap (10) comprising: a manifold layer having manifold inlet channels and manifold outlet channels, a microchannel layer (20) having microchannels (33), wherein the manifold layer and the microchannel layer are bonded together so as to form a fluid path, wherein a fluid is forced to pass through the microchannels (33) when flowing from the manifold inlet channels to the manifold outlet channels. Furthermore, it relates to a vacuum sensor having such a deposition trap as and to a process chamber of a manufacturing equipment, preferably used for thin-film deposition or etching processes, comprising such a vacuum sensor.

The mass spectrometry device includes: a sample container for containing a sample; a heater for heating the sample container; an ion source for ionizing the sample vaporized in the sample container by being heated by the heater; an introduction unit that includes a valve, and that introduces the vaporized sample in the sample container into the ion source; a mass spectrometry unit that includes a vacuum chamber, and to which ions generated in the ion source are introduced; a vacuometer for measuring a degree of vacuum of the vacuum chamber; and a controller that controls the valve to intermittently introduce the vaporized sample in the sample container into the ion source. The controller controls an open time of the valve according to the degree of vacuum of the vacuum chamber that varies as a result of the ions being intermittently introduced into the mass spectrometry unit.

Vacuum pressure of a gas in a compartment (1) is measured. The vacuum pressure is established by a pump arrangement (3,5) with a pulsating pumping effect (g(t)). The shape of the resulting pulsation of the pressure (p(t)) in compartment (1) is exploited (15) as an indication of the operation status of the pump arrangement (3,5).

Vacuum pressure of a gas in a compartment (1) is measured. The vacuum pressure is established by a pump arrangement (3,5) with a pulsating pumping effect (g(t)). The shape of the resulting pulsation of the pressure (p(t)) in compartment (1) is exploited (15) as an indication of the operation status of the pump arrangement (3,5).

A component monitoring apparatus [100] including an input [110] to receive sensor data from a sensor arrangement [S1-S4]. The sensor data representative of a use of a respective component [105] during a monitoring interval. A memory [118] provided to store received sensor data and a life parameter associated with the component [105], an interface [126] provided to communicate with a remote device and a power cell [128] provided to power the apparatus [100]. The apparatus [100] arranged to: store in the memory [118] received sensor data, in response to a trigger, read the sensor data from the data memory [118] and transfer the sensor data to the remote device, and, in response to receipt of a data packet containing a life parameter associated with the usage of the component [100], store the life parameter to the memory [122].

An audio signal decoding apparatus is provided that includes a receiver that receives an encoded information, a memory, and a processor that demultiplexes low-band encoding parameters, index information, and scale factor information from the encoded information. The processor also decodes the low-band encoding parameters to obtain a synthesized low frequency spectrum, replicates a high frequency subband spectrum based on the index information using the synthesized low frequency spectrum, and adjusts an amplitude of the replicated high frequency subband spectrum using the scale factor information. The processor further estimates a frequency of a harmonic component in the synthesized low frequency spectrum, adjusts a frequency of a harmonic component in the high frequency subband spectrum using the estimated harmonic frequency spectrum, and generates an output signal using the synthesized low frequency spectrum and the high frequency subband spectrum.

A system and method detect the presence of an unacceptable quantity of gas molecules in the reference vacuum cavity of a capacitance diaphragm gauge (CDG). An independent pressure transducer has an active portion exposed to the reference vacuum cavity. The transducer includes a ring anode, a cylindrical inner wall surface that forms at least one cathode, and a magnet positioned with respect to the ring anode such that the magnetic flux of the magnet is generally aligned with the central axis of the ring anode. A high voltage source applies a voltage between the ring anode and the cathode. A current sensor senses a magnitude of any current flowing between the ring anode and the cathode via ionized gas molecules. A monitoring unit monitors the magnitude of the current sensed by the current sensor and activates an alarm when the magnitude of the current exceeds an acceptable magnitude.

A system and method detect the presence of an unacceptable quantity of gas molecules in the reference vacuum cavity of a capacitance diaphragm gauge (CDG). An independent pressure transducer has an active portion exposed to the reference vacuum cavity. The transducer includes a ring anode, a cylindrical inner wall surface that forms at least one cathode, and a magnet positioned with respect to the ring anode such that the magnetic flux of the magnet is generally aligned with the central axis of the ring anode. A high voltage source applies a voltage between the ring anode and the cathode. A current sensor senses a magnitude of any current flowing between the ring anode and the cathode via ionized gas molecules. A monitoring unit monitors the magnitude of the current sensed by the current sensor and activates an alarm when the magnitude of the current exceeds an acceptable magnitude.